JPH0376108B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION (Industrial Field of Application of the Invention) The present invention relates to a linear motor having a position and propulsion speed detection mechanism.

(Prior Art and its Problems) Conventionally, many linear pulse motors have been known as linear motors used in X-Y plotters and the like. This is because positioning is easy.

However, in the case of this linear pulse motor, in addition to poor speed and response, it requires extremely high mechanical precision and has the disadvantage that finer precision cannot be expected. Furthermore, it has many disadvantages, such as being heavy and generating a lot of noise when the slider moves.

In order to eliminate the drawbacks of such linear pulse motors, it is more effective to use a DC linear motor.

For this reason, the present applicant previously filed numerous applications for semiconductor DC linear motors.

In order to stop the semiconductor DC linear motor at the target position, a position and propulsion speed detection mechanism is required.

When an optical linear encoder is used as the position and propulsion speed detection mechanism, the power cord for the light source and light receiving element must also be moved together with the moving element. This has the disadvantage that when the semiconductor DC linear motor is of a moving coil type, the power cord for energizing the armature must be moved at the same time, making the structure extremely complicated. Furthermore, since the power cord must be moved together with the movable element, there is a drawback that the travel range of the movable element must be shortened. In other words, when a light-transmissive linear encoder is used in a linear motor, it is not a good idea to move the long linear encoder's linear scale together with the linear motor's mover, so the linear scale is installed on the fixed side. Usually, an optical wavelength generator (simply referred to as a light source) and an optical wavelength receiver (hereinafter referred to as a light receiving element) that receives the optical wavelength from this light source (hereinafter referred to as irradiated light) are moved together with a moving element. be.

In such a case, conventionally, the movable element has to run along the power cords of the light source and the light receiving element, which causes various inconveniences.

In any case, regardless of the type of linear motor,
A linear encoder is required when performing complete closed-loop control such as highly accurate positioning and speed control. When using this linear encoder, as mentioned above, the power cord must run together with the mover, which not only complicates the configuration, but also causes various inconveniences such as the power cord getting tangled with other things or breaking. It had its drawbacks.

(Purpose of the Invention) Therefore, in the present invention, in order to eliminate this inconvenience, the light source and the light receiving element are also arranged on the fixed side, so that the movable element does not run with the light source, the light receiving element, and the power cord pulled together. This was done as a challenge.

(Means for Achieving the Objects of the Invention) The object of the present invention is to provide a first inclined reflecting surface on a moving element of a linear motor, and to provide a light wavelength of a laser, an infrared ray, a lamp, etc. on the first inclined reflecting surface. A light wavelength generator for dispensing is provided on the fixed side, and a main scale such as a shutter plate is provided on the fixed side of the linear motor, in which transparent parts and opaque parts are alternately formed at minute intervals along the longitudinal direction of the linear motor. , the first inclined reflection surface is formed as an inclined surface that guides the light wavelength generated from the light wavelength generation device to the main scale, and the first inclined reflection surface generated from the light wavelength generation device A second inclined reflection surface is provided on the movable element side facing the main scale for reflecting the light wavelength generated from the light wavelength generator that reaches the main scale via the main scale to the stationary side, and the second tilted reflection surface This can be achieved by providing a linear motor equipped with a position and propulsion speed detection mechanism in which an optical wavelength generator that receives the optical wavelength that has arrived at the reflective surface and is reflected is provided on the fixed side. Means for achieving other objects of the present invention will be clarified in the following examples.

(Embodiments) The present invention has been made based on the above circumstances, and the embodiments of the present invention will be described below with reference to the drawings.

(First Embodiment) A first embodiment of the present invention will be described with reference to FIGS. 1 to 5.

FIG. 1 is a tilted view of a moving field magnet type semiconductor DC linear motor having a position and propulsion speed detection mechanism according to the present invention, FIG. 2 is a longitudinal cross-sectional view of the motor in FIG. 3 is a diagram explaining the principle of the position and propulsion speed detection mechanism, FIG. 4 is a perspective view of the field magnet, and FIG. 5 is a developed view of the field magnet and armature coil group.

A first embodiment of the present invention will be described mainly with reference to FIGS. 1 and 2.

The moving field magnet type semiconductor DC linear motor 1 has the following configuration. Support legs 2a are formed by vertically extending and bending both sides of a long plate-shaped magnetic material yoke (stator yoke) 2 such as an iron plate. A printed circuit board 3 is attached to the upper surface of the magnetic yoke 2. As shown in FIG. 2, the printed circuit board 3 is attached to the upper surface of the magnetic yoke 2, excluding both sides of the magnetic yoke 2.
A side surface of the printed circuit board 3 forms a guide rail for the guide roller 4. In reality, a very sturdy linear guide rail (not shown) is attached. On the upper surface of the printed circuit board 3, air-core armature coils 5 are wound in a rectangular frame shape along the longitudinal direction of the printed circuit board 3, and a suitable number of air-core armature coils 5 are arranged at appropriate intervals so as not to overlap each other along the running direction of the slider. A coreless stator armature is formed by arranging these pieces to form a coreless stator armature. Although only two armature coils 5 are shown in FIG. 1 for convenience of drawing, in reality, a large number of armature coils 5 are fixedly mounted on the printed circuit board 3 to form the above-mentioned armature. Further, in this first embodiment, as shown in FIG. 5, the armature coils 5 are arranged at equal intervals.
The armature coil 5 is wound to have an opening angle width that is an odd number multiple of the width of one magnetic pole of a field magnet 6, which will be described later. In addition, in this first embodiment,
The armature coil 5 is wound to have a width equal to the width of one magnetic pole of the field magnet 6. A magneto-electric conversion element 7 such as a Hall element or a Hall IC used as a position detection element is disposed on the printed circuit board 3 in the cavity within the frame of the armature coil 5. The reason why the magnetoelectric transducer 7 is arranged at such a position will be described later.

The main body of the stator of the moving field magnet type semiconductor DC linear motor 1 of the present invention has the above-mentioned structure.

The mover 9 is configured to perform relative linear motion to the armature of the stator 8, which is made up of 5 groups of armature coils. The mover 9 has a shaft 1 attached to a side surface of a magnetic yoke 10 having a U-shaped cross section when viewed from the running direction.
1, a guide roller 4 is rotatably attached to the magnetic yoke 10, and a field magnet 6 as shown in FIG. It is set up. The field magnet 6 has N and S magnetic poles arranged so that adjacent magnetic poles have different polarities along the direction of movement of the slider.
(P is an integer greater than or equal to 2, and includes both N and S magnetic poles). A three-pole device is used, which is formed by arranging three N-pole and S-pole magnetic poles as shown in FIG. 4, for example. A support 13 for supporting the main scale 12 is fixed to the side surface of the support leg 2a of the magnetic yoke 2. Thereby, the main scale 12 can be supported horizontally with the magnetic yoke 2. As shown in Fig. 1, the main scale 11 is made of a slit plate, etc., in which transparent and opaque parts are formed with fine pitches alternately and evenly spaced. A slit hole may be formed. However, since there are various other methods of forming the main scale 12, it is not limited to the above method. For example, the opaque portion may be formed on a transparent or transparent film or glass by coating or the like so that the opaque portion is formed at fine, evenly spaced pitches from the transparent portion. On the side surface of the magnetic yoke 10, there is a prism and an index (vernier scale) 1 to be described later.
A support body 15 for supporting 4 is fixedly provided. The index 14 is the same as shown in FIG. 1 and described above, and similarly to the main scale 12, it is provided with a transparent portion and an opaque portion in the form of a slit in the longitudinal direction. Further, the index 14 is fixed to the side surface of the magnetic yoke 10 so as to face the main scale 12. Main scale 1 above
Two triangular prisms 16 and 17 are disposed opposite to each other on the support 15 with the prism 2 and the index 14 interposed therebetween. The triangular prisms 16 and 17 are made of a transparent body, and first and second inclined reflective surfaces 16a and 17a are formed on each inclined surface by coating or the like. The first inclined reflection surface 16a is connected to an optical wavelength generating element 19 constituting the optical wavelength generating device.
It is formed into an inclined surface that guides the wavelength generated from the main scale 12 to the main scale 12. Further, the second inclined reflecting surface 17a reflects the wavelength generated from the optical wavelength generating element 19, which is generated from the optical wavelength generating element 19 and reaches the main scale 12 via the first inclined reflecting surface 16a. It is formed on an inclined surface so as to reflect the light toward the optical wavelength generating element 18 forming the optical wavelength generating element provided on the fixed side. The first inclined reflective surface 16a and the second inclined reflective surface 17a are symmetrically arranged on the support 1.
It is fixed at 5. That is, the first inclined reflective surface 16a and the second inclined reflective surface 17a are arranged so that the wavelength directions are opposite to each other. Triangular prisms 16 and 17 are fixed so that surfaces 16c and 17c are parallel to each other, and surface 16b
is directed toward the optical wavelength receiving element 18, and the surface 17b is directed toward the optical wavelength generating element 19. That is,
The first tilted reflective surface 16a and the second tilted reflective surface 17a are such that the wavelength that reaches the first tilted reflective surface 16a and the wavelength reflected by the second tilted reflective surface 17a are parallel to each other. It is arranged like this. Optical wavelength generating element 19 consisting of infrared rays, laser, lamp, ultrasonic wave, etc. and optical wavelength generating element 1 such as phototransistor
8 is arranged substantially parallel to the fixed end side of the linear motor 1 and housed in the package 20. Element 1
Condenser lenses 21 and 22 are provided on the entire surfaces of lenses 8 and 19, respectively.

FIG. 5 is a developed view of a coreless stator armature consisting of five groups of armature coils and a field magnet 6. Both terminals of each armature coil 5 are connected to a semiconductor rectifier 23 , and the output terminal of the magnetoelectric conversion element 7 is also connected to the semiconductor rectifier 23 . 2
4-1 is a positive power terminal, and 24-2 is a negative power terminal. Referring to FIG. 5, the magnetoelectric transducer 7 for each armature coil 5 is a conductor portion 5a (or 5b) that contributes to the generation of thrust of the armature coil 5.
Although it is preferable to place the magnetoelectric transducer 7 in such a position, the magnetic air length between the field magnet 6 and the magnetic yoke 2 will be increased by the thickness of the element 7. , it has the disadvantage that a correspondingly large thrust cannot be obtained. For this reason,
For example, taking the armature coil 5-1 as an example, the conductor portion 5a that contributes to the generation of thrust of the armature coil 5-1
The magnetoelectric conversion element 7-1 to be placed above currently corresponds to the left end of the N pole of the field magnet 6, so it is in the same position as this and the magnetoelectric conversion element 7-1.
1 selects the position facing the in-frame cavity of the armature coil 5, the dotted line surrounding part 25 at the in-frame cavity position of the armature coil 5-2 corresponds to the position. Therefore, the magnetoelectric conversion element 7-1 for the armature coil 5-1 is
If it is arranged at the point encircling part 25 position of the hollow part in the frame of the armature coil 5-2, the magnetoelectric transducer 7-1 can be stored and arranged in the hollow part in the frame of the armature coil 5-2. can. As a result, the magnetoelectric conversion element 7-1
There is no need to dispose it on the conductor portion 5a (or 5b) that contributes to the generation of thrust of the armature coil 5-1. The magnetoelectric transducer 7 for the other armature coil 5 can be changed by taking the above considerations into account.
can always be stored and arranged in the cavity within the frame of the armature coil 5.

(Second Embodiment) Referring to FIG. 6, the second embodiment of the present invention will be described. In the first embodiment, the main scale 12 and the index 14 are arranged horizontally with the stator 8 or the slider 9. In this second embodiment,
An example is shown in which the main scale 12 is supported and fixed perpendicularly to the stator 8 by a support 13, and the index 14 is also fixed perpendicularly to the slider 9 by a support 15 so as to face the main scale 12.

(Third Embodiment) To explain a movable armature type semiconductor DC linear motor which is a third embodiment of the present invention, although not shown in this embodiment, the armature side consisting of 5 groups of armature coils is used as a mover, The field magnet 6 side serves as a stator. The configuration is completely opposite to that of the first and second embodiments.

Therefore, the developed view of the coreless armature consisting of the armature coil 5 and the field magnet 6 in FIG. 7 is completely reversed to that in FIG. 5.

(Operation) Since the present invention has the above configuration, when the magnetoelectric transducer 7 detects the N pole or the S pole of the field magnet 6, the magnetoelectric transducer 7 detects the magnetic pole of the armature coil 5 in a predetermined direction, for example, the fifth Since the semiconductor flow rectifier 23 operates to pass the current in the direction shown in FIGS. 7 and 7, the armature coil 5
is energized. By this, according to Fleming's left-hand rule, the field magnet 6 (in the case of the first and second embodiments) or the armature consisting of the armature coil 5 (in the case of the third embodiment), for example, A thrust force in the F direction is obtained, and the mover moves in the arrow F direction. Further, if the power supply polarity is changed by a signal from a control circuit (not shown), the mover can move in the opposite direction of the arrow F from now on.

When the mover moves, the index 14 and triangular prints 16, 17 also move at the same time. Therefore, as shown in FIG. 3, the light wavelength from the light wavelength generating element 19 is converted into parallel light by the condenser lens 22, and reflected by the inclined reflecting surface 17a via the surface 17b of the triangular prism 17. It is generated from the surface 17c. After that, main scale 12 and index 1
The wavelength of the light that passed through the light transmitting part 4 is the triangular prism 1.
The light is incident on the surface 16c of No. 6, is reflected on the inclined reflecting surface 16a, becomes a light wavelength parallel to the light wavelength generation path on the surface 16b, and reaches the light wavelength receiving element 18 via the condenser lens 21. Optical wavelength generating element 1
Reference numeral 8 wavelength-shapes the optical wavelength light reception signal that arrives intermittently by the main scale 12 and the index 14, inputs this light reception signal to a counter circuit, and detects the position using the signal from the counter circuit. The signal is converted into a propulsion speed voltage signal by an F-V converter, and this is inputted to the semiconductor rectifier 23 to correctly control the propulsion speed of the mover.

(Effects) According to the linear motor having the position and propulsion speed detection mechanism of the present invention, there is no need to move the optical wavelength generating element and the optical wavelength receiving element together with the movable element, so there is no need for a power cord or the like for this purpose. Therefore, it is extremely effective when the movable element moves over a long distance.

This is particularly effective for moving field magnet type semiconductor DC linear motors that do not require power cords, but also for moving armature coil type semiconductor DC linear motors, which only require a power cord for energizing the armature. It has the advantage of having it.

[Brief explanation of drawings]

FIG. 1 is a perspective view showing the first embodiment of the present invention, FIG. 2 is a vertical cross-sectional view of the one shown in FIG. Fig. 4 is a perspective view of the field magnet, Fig. 5 is a developed view of the coreless stator armature consisting of the armature coil group and the field magnet, and Fig. 6 corresponds to Fig. 2. FIG. 7 is a longitudinal cross-sectional view of a second embodiment of the present invention, and FIG. 7 is a developed view of a coreless armature and a field magnet comprising an armature coil group as a third embodiment of the present invention, which corresponds to FIG. be. 1...Movable field magnet type semiconductor DC linear motor, 2...Magnetic yoke, 2a...Support leg,
3...Printed circuit board, 4...Guide roller, 5...
...Armature coil, 6...Field magnet, 7...
Magnetoelectric conversion element (position detection element), 8... stator,
9...Mover, 10...Magnetic yoke, 11...
Axis, 12...Main scale, 13...Support, 14...Index (vernier scale), 15...Support, 16,1
7... Triangular prism, 16a, 17a... Inclined reflecting surface, 18... Light wavelength receiving element, 19... Light wavelength generating element, 20... Package, 21, 22...
Condenser lens, 23... semiconductor rectifier,
24-1...Positive power terminal, 24-2...Minus power terminal.

Claims (1)

[Scope of Claims] 1. A linear motor having a position and propulsion speed detection mechanism, characterized by comprising the following components. A first inclined reflective surface is provided on the linear motor mover. A light wavelength generating device such as a laser, an infrared ray, or a lamp is provided on the first inclined reflection surface. A main scale, such as a shutter plate, is provided on the fixed side of the linear motor, in which transparent parts and opaque parts are alternately formed at minute intervals along its longitudinal direction. The first inclined reflection surface is formed into an inclined surface that guides the wavelength generated from the optical wavelength generator to the main scale. A second inclined reflecting surface for reflecting the wavelength generated from the optical wavelength generating device to the fixed side, which is generated from the optical wavelength generating device and reaches the main measuring surface via the first inclined reflecting surface, is connected to the main measuring surface. Provided on the side of the mover facing the A light wavelength receiver is provided on the fixed side to receive the wavelength that reaches and is reflected by the second inclined reflecting surface. 2. A linear motor having a position and propulsion speed detection mechanism according to claim 1, wherein the first and second inclined reflecting surfaces are formed on inclined surfaces of a triangular prism. 3. Claim 1, characterized in that the first tilted reflective surface and the second tilted reflective surface are arranged such that their wavelength directions are opposite to each other.
A linear motor having a position and propulsion speed detection mechanism according to item 1 or 2. 4 The first tilted reflective surface and the second tilted reflective surface are such that the direction of the wavelength that reaches the first tilted reflective surface and the direction of the wavelength that is reflected by the second tilted reflective surface are parallel to each other. A linear motor having a position and propulsion speed detection mechanism according to claim 1 or 3, wherein the linear motor is arranged so that the position and propulsion speed detection mechanism is arranged as follows. 5. The position according to claim 1, wherein the mover side is provided with a vernier scale in which transparent parts and opaque parts are alternately formed at minute intervals at a position facing the main scale. A linear motor with a propulsion speed detection mechanism. 6 The linear motor described above has magnetic poles of N and S poles set to P (P is an integer of 2 or more, and both N and S poles are A field magnet comprising a field magnet (number of magnetic poles including the number of magnetic poles), and an armature disposed at a position facing the field magnet, one of which is used as a mover that moves relatively, and the other is used as a stator. A linear motor having a position and propulsion speed detection mechanism according to any one of claims 1 to 5, which is a semiconductor DC linear motor.