Deprecated: The each() function is deprecated. This message will be suppressed on further calls in /home/zhenxiangba/zhenxiangba.com/public_html/phproxy-improved-master/index.php on line 456
JPH0377272B2 - - Google Patents
[go: Go Back, main page]

JPH0377272B2 - - Google Patents

Info

Publication number
JPH0377272B2
JPH0377272B2 JP15785385A JP15785385A JPH0377272B2 JP H0377272 B2 JPH0377272 B2 JP H0377272B2 JP 15785385 A JP15785385 A JP 15785385A JP 15785385 A JP15785385 A JP 15785385A JP H0377272 B2 JPH0377272 B2 JP H0377272B2
Authority
JP
Japan
Prior art keywords
coating
temperature
coating layer
substrate
titanium
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP15785385A
Other languages
Japanese (ja)
Other versions
JPS6220863A (en
Inventor
Munenori Kato
Takeshi Abe
Yoshihisa Ikoma
Masato Matsui
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Materials Corp
Original Assignee
Mitsubishi Materials Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Materials Corp filed Critical Mitsubishi Materials Corp
Priority to JP15785385A priority Critical patent/JPS6220863A/en
Publication of JPS6220863A publication Critical patent/JPS6220863A/en
Publication of JPH0377272B2 publication Critical patent/JPH0377272B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)

Description

【発明の詳細な説明】[Detailed description of the invention]

〔産業上の利用分野〕 この発明は、表面に硬質の被覆層が形成されて
いる切削工具用表面被覆高速度鋼部材の製造方法
に関し、特に、表面の硬質のチタン化合物被覆層
が形成されている、耐久性に優れた切削工具用表
面被覆高速度鋼部材を、反応性の物理蒸着法を利
用して製造する方法に関するものである。 〔従来の技術〕 従来、高速度鋼(以下、ハイスという)は、高
速切削に耐える高い硬さと優れた靭性を有するの
で、切削工具の素材として広く使用されている
が、このハイス表面に炭化チタンや窒化チタンの
ようなチタン化合物からなる硬質被覆層を設ける
と、それによつて耐溶着性と対焼付性および耐摩
耗性が向上し、工具寿命が飛躍的に延びるところ
から、最近ではこのような被覆層をハイス表面に
設けることも工業的に盛んに利用されており、例
えば反応性の物理蒸着法を利用してスローアウエ
イチツプ表面に2μm程度の炭化チタンや窒化チ
タン層を被覆したコーテイングチツプが普及して
いる。 このような炭化チタンまたは窒化チタンの表面
被覆層を有する切削工具用ハイス部材は、反応性
の物理蒸着法により、まずハイス基体を圧力:
10-5〜10-3Torrの真空雰囲気中で温度:400〜
450℃に加熱してから、圧力:10-4〜10-2Torrに
おいてアルゴンによるイオンエツチングを随意に
この基体に施した後、引続きこの温度と圧力を維
持しながら、炭化チタンまたは窒化チタンによる
被覆反応を起こすこと、すなわち電子ビームなど
によつて蒸発させた金属チタンおよび被覆炉中に
供給されたアセチレンまたは窒素ガスをそれぞれ
イオン化してTi+およびC+またはN+とし、これ
らのイオンを負に帯電させた基体上に電気的に引
寄せてそれぞれ炭化チタンまたは窒化チタンから
なる被膜を基体表面に形成させること、によつて
製造されている。 〔発明が解決しようとする問題点〕 しかしながら、上記のように400〜450℃におい
て炭化チタンまたは窒化チタンのようなチタン化
合物をハイス基体にコーテイングすると、これら
のチタン化合物によつて形成される被覆層とハイ
ス基体との直接的な結合および被覆層の基体に対
する拡散が殆ど生じないため、その被覆層は密着
性に乏しく、このようにして得られた表面被覆ハ
イス切削工具は切削時に剥離を生じ易く、したが
つて工具寿命が短いという欠点があつた。 〔研究に基づく知見事項〕 そこで、本発明者等は、このような問題を解決
するために種々研究を重ねた結果、 (1) 炭化チタン、窒化チタン、炭窒化チタン、炭
窒酸化チタンおよび炭酸化チタン(以下、これ
らをそれぞれTiC、TiN、TiCN、TiCNOおよ
びTiCOで表わし、また便宜上これらを総称し
てチタンの炭・窒・酸化物という)を、反応性
の物理蒸着法によつてハイス基体にコーテイン
グする場合、基体の温度をハイスの焼戻し温度
よりも高くすると、ハイスの変態に伴う被覆層
と基体との直接的な反応および被覆層の基体へ
の拡散が増進して、両者の間の密着性が向上す
ること、 (2) ハイスの焼戻し温度は一般に530〜650℃と低
いため、前記の基体温度を極端に上昇させた
り、あるいはその上昇させた温度を長時間保持
すると、ハイスがなまつて軟化するので、その
温度は560〜650℃で、コーテイング時間は2〜
10分間が適していること、 (3) 前記コーテイングでは十分な厚さの被覆層が
得られないが、これを予備的なコーテイングと
し、その後本コーテイングによつて、この予備
コーテイングによつて形成された予備被覆層の
上に全体で厚さ0.5〜10μmとなる本被覆層を形
成させれば、全体として密着性の優れた被覆層
が得られ、その結果工具寿命が飛躍的に延びた
切削工具用表面被覆ハイス部材が得られるこ
と、 (4) 予備コーテイングの後に施す本コーテイング
時の基体温度を従来より若干高めてもハイスに
対して悪影響を及ぼすことなく、前記予備被覆
層となじみのよい本被覆層が得られ、本コーテ
イング温度としては450〜500℃が適しているこ
と、 (5) 前記予備コーテイング終了後、予備コーテイ
ングの温度により降温しながら本コーテイング
を開始した場合でも前述のとおり密着性に優れ
た被覆層が得られること、 を見出した。 〔問題点を解決するための手段〕 この発明は、上記知見に基づいて発明されたも
ので、 反応性の物理蒸着法を利用して、チタンの炭・
窒・酸化物のうちから選ばれたいずれか1種の被
覆成分を切削工具用高速度鋼基体にコーテイング
することによつて、前記被覆成分からなる被覆層
が表面に形成されている切削工具用表面被覆高速
度鋼部材を製造する方法において、前記基体を真
空中で温度:560〜650℃に昇温した後、直ちにこ
の温度において前記被覆成分を前記基体に2〜10
分間予備コーテイングして、前記基体表面に前記
被覆成分からなる予備被覆層を形成させ、ついで
このように予備コーテイングされた前記基体を温
度:450〜500℃まで降温した後、またはその降温
途中および前記降温後において、前記予備被覆層
を形成させるために使用した被覆成分と同じ被覆
成分を前記予備被覆層の上に本コーテイングし
て、前記予備被覆層表面に前記被覆成分からなる
本被覆層を形成させ、それによつて、前記予備被
覆層と本被覆層とからなる、全体で厚さ:0.5〜
10μmの被覆層を前記基体にコーテイングするこ
とを特徴とする、前記切削工具用表面被覆高速度
鋼部材の製造方法 を提供するものである。 ついで、この発明において、予備コーテイング
温度、予備コーテイング時間、本コーテイング温
度および被覆層の厚さをそれぞれ上記のとおりに
限定した理由を述べる。 (a) 予備コーテイング温度 予備コーテイング温度が560℃未満では予備
被覆層と基体との直接的な反応およびその被覆
層の基体への拡散が十分に達成されないために
両者の間で所望の密着性が得られず、一方それ
が650℃を越えると2〜10分間の予備コーテイ
ング中にナイスがなまつて軟化してしまうこと
ころから、その予備コーテイング温度を560〜
650℃と定めた。 (b) 予備コーテイング時間 予備コーテイング時間が2分未満であると、
基体を前記の予備コーテイング温度まで上昇さ
せても、予備被覆層と基体との直接席な反応お
よびその被覆層の基体への拡散が十分に進行し
ないために両者の間で所望の密着性が得られ
ず、一方それが10分を越すと、基体を上記温度
に保つてもハイスがなまつて軟化してしまうと
こから、前記時間を2〜10分間と定めた。 (c) 本コーテイング温度 一般に、本コーテイング時の基体温度と予備
コーテイング時とのそれとの差が小さい方が予
備被覆層と本被覆層とのなじみがよくなつて耐
久性に富んだ被覆層が得られるとともに、従来
よりもコーテイングの温度を若干、すなわち50
℃上昇させてもハイスに悪影響が現われないと
ころから、従来の400〜450℃というコーテイン
グ温度の代りに、この発明においては本コーテ
イングの温度を450〜500℃と定めた。 (d) 被覆層の厚さ 被覆層全体の厚さが0.5μm未満では優れた切
削性能を示す切削工具用表面被覆ハイス部材が
得られず、一方それが10μmを越えても切削性
能の上で格別の向上効果が得られないことか
ら、その厚さを0.5〜10μmと定めた。 この発明は、従来、チタンの炭・窒・酸化物被
膜をハイス基体表面に付着させるのに一般に利用
されている反応性の物理蒸着法によつて遂行さ
れ、それには、アセチレン、窒素または一酸化炭
素のようなガスが導入されて、10-4〜10-2Torr
の圧力に保たれている被覆炉中で金属チタンを電
子ビームなどによつて蒸発させるとともにこれら
の反応成分を放電現象を利用してイオン化して
Ti+、N+、C+、O+等のイオンを生成させ、そし
てこれらの陽イオンをマイナス・チヤージに負荷
されているハイス基体上に電気的吸引力によつて
付着させ、それによつて基体表面上にチタンの
炭・窒・酸化物の被膜を形成させる。 この発明は種々の切削工具用表面被覆ハイス部
材の製造に適用できるが、特にスローアウエイチ
ツプに特有なコーテイングチツプの製造に対して
好都合に利用することができる。 〔実施例〕 ついで、この発明を実施例により比較例と対比
しながら説明する。 鋼種:SKH2のハイスを焼戻し温度:560〜580
℃において焼戻すことによつて得られた、硬さ:
HRC(ロツクウエル硬さCスケール)64を有する
ハイスから形状:TPP322のスローアウエイチツ
プを多数製作し、これらのチツプを基体として、
10-5Torrの真空度に保持した被覆炉中でこの基
体を560〜600℃の間の温度に昇温させた後、直ち
にこの温度においてチタンの炭・窒・酸化物のう
ちのいずれか1種を前記基体表面に5〜10分間予
備コーテイングし、ついで基体を450〜500℃まで
降温した後、予備コーテイングにおいて使用した
被覆成分と同じ被覆成分を本コーテイングするこ
とによつて本発明コーテイングチツプ1〜8を製
造するとともに、本発明方法の別法として、前記
製造法において基体温度を480℃まで降温する間
に本コーテイングを開始する点、および前記製造
法において予備コーテイングする前に、基体温
度:600℃において10〜20分間アルゴンによるエ
ツチングを施す点だけがそれぞれ前記製造法と異
つている方法によつて、それぞれ本発明コーテイ
ングチツプ9および10を製造した。 さらに比較のため、前記本発明コーテイングチ
ツプ1〜8を製造する方法において、その製造条
件をこの発明の範囲から外れた条件とし、かつ温
度:450〜500℃において10〜20分間エツチングを
施すことにより(外れた条件を※印で示す)比較
コーテイングチツプ1および2を製造するととも
に、10-5Torrの真空度に保持した被覆炉中で前
記基体を450℃に昇温させた後、同温度において
アルゴンによるエツチングを基体に施し、引続き
その温度においてチタンの炭・窒・酸化物をコー
テイングする従来方法によつて、従来コーテイン
グチツプ1〜5を製造した。 以上の各方法においては、いずれもエツチング
時では基体電圧:−1.5KV、Ar圧力:10-2Torr
であり、コーテイング時では基体電圧:−0.8KV
であつた。 各チタン化合物の被覆層を形成させるための反
応ガスとコーテイング時の炉内圧力は次の第1表
のとおりであつた。
[Industrial Application Field] The present invention relates to a method for manufacturing a surface-coated high-speed steel member for a cutting tool, which has a hard coating layer formed on the surface, and particularly relates to a method for manufacturing a surface-coated high-speed steel member for a cutting tool, which has a hard coating layer formed on the surface. The present invention relates to a method for manufacturing surface-coated high-speed steel members for cutting tools with excellent durability using a reactive physical vapor deposition method. [Prior Art] Conventionally, high-speed steel (hereinafter referred to as high-speed steel) has been widely used as a material for cutting tools because it has high hardness and excellent toughness that can withstand high-speed cutting. Providing a hard coating layer made of a titanium compound such as titanium or titanium nitride improves welding resistance, seizure resistance, and wear resistance, and dramatically extends tool life. Providing a coating layer on the surface of high speed steel is also widely used industrially. For example, coating chips are coated with a titanium carbide or titanium nitride layer of approximately 2 μm on the surface of throwaway chips using reactive physical vapor deposition. It is widespread. HSS members for cutting tools having such a surface coating layer of titanium carbide or titanium nitride are manufactured by first applying pressure to the HSS base using a reactive physical vapor deposition method.
Temperature: 400 to 10 -5 to 10 -3 Torr vacuum atmosphere
After heating to 450°C, the substrate is optionally ion-etched with argon at a pressure of 10 -4 to 10 -2 Torr, followed by coating with titanium carbide or titanium nitride while maintaining this temperature and pressure. In other words, the metal titanium vaporized by an electron beam or the like and the acetylene or nitrogen gas supplied into the coating furnace are ionized into Ti + and C + or N + , respectively, and these ions are made negative. It is manufactured by electrically attracting titanium carbide or titanium nitride onto a charged substrate to form a coating on the surface of the substrate. [Problems to be Solved by the Invention] However, when a titanium compound such as titanium carbide or titanium nitride is coated on a high speed steel substrate at 400 to 450°C as described above, the coating layer formed by these titanium compounds Since there is almost no direct bonding between the HSS and the HSS substrate and there is almost no diffusion of the coating layer into the substrate, the coating layer has poor adhesion, and the surface-coated HSS cutting tool obtained in this way is likely to peel off during cutting. , so there was a drawback that the tool life was short. [Findings based on research] Therefore, the inventors of the present invention have conducted various studies to solve these problems, and as a result, (1) titanium carbide, titanium nitride, titanium carbonitride, titanium carbonitride, and titanium carbonate. Titanium oxide (hereinafter referred to as TiC, TiN, TiCN, TiCNO, and TiCO, respectively; for convenience, they are collectively referred to as titanium carbon, nitride, and oxide) is deposited on a high-speed steel substrate by a reactive physical vapor deposition method. When coating a steel, if the temperature of the substrate is higher than the tempering temperature of the high speed steel, the direct reaction between the coating layer and the substrate due to the transformation of the high speed steel and the diffusion of the coating layer into the substrate will be promoted, and the relationship between the two will increase. (2) Since the tempering temperature of high speed steel is generally as low as 530 to 650°C, if the temperature of the substrate is extremely increased or the increased temperature is maintained for a long period of time, the tempering temperature of high speed steel will be reduced. The temperature is 560~650℃, and the coating time is 2~650℃.
10 minutes is suitable; (3) If the above coating does not provide a sufficiently thick coating layer, use this as a preliminary coating, and then apply the main coating to the coating layer formed by this preliminary coating. By forming the main coating layer with a total thickness of 0.5 to 10 μm on the pre-coating layer, a coating layer with excellent adhesion as a whole can be obtained, resulting in a cutting tool with dramatically extended tool life. (4) Even if the substrate temperature during the main coating applied after the preliminary coating is slightly higher than before, there is no adverse effect on the high speed steel, and the material is compatible with the preliminary coating layer. A coating layer is obtained, and a suitable temperature for the main coating is 450 to 500°C. (5) Even if the main coating is started after the preliminary coating is completed and the temperature is lowered depending on the temperature of the preliminary coating, the adhesion is maintained as described above. We have discovered that an excellent coating layer can be obtained. [Means for solving the problem] This invention was invented based on the above knowledge, and uses reactive physical vapor deposition to deposit titanium with charcoal.
A cutting tool for which a coating layer made of the coating component is formed on the surface by coating a high-speed steel substrate for a cutting tool with any one coating component selected from nitrates and oxides. In a method for manufacturing a surface-coated high-speed steel member, the temperature of the substrate is raised to 560 to 650°C in vacuum, and then the coating component is immediately applied to the substrate at this temperature for 2 to 10 minutes.
Preliminary coating is carried out for a few minutes to form a precoating layer made of the coating component on the surface of the substrate, and then after the precoated substrate is cooled down to a temperature of 450 to 500°C, or during the cooling and the After cooling, the same coating component as that used to form the preliminary coating layer is main coated on the preliminary coating layer to form a main coating layer made of the coating component on the surface of the preliminary coating layer. Thus, the total thickness of the preliminary coating layer and the main coating layer is 0.5 to 0.5.
The present invention provides a method for manufacturing the surface-coated high-speed steel member for a cutting tool, characterized in that the substrate is coated with a coating layer of 10 μm. Next, the reason why the preliminary coating temperature, preliminary coating time, main coating temperature, and coating layer thickness are each limited as described above in this invention will be described. (a) Pre-coating temperature If the pre-coating temperature is lower than 560°C, the direct reaction between the pre-coating layer and the substrate and the diffusion of the coating layer into the substrate will not be achieved sufficiently, so that the desired adhesion between the two will not be achieved. On the other hand, if the temperature exceeds 650°C, the nice material will become dull and soft during the 2 to 10 minutes of pre-coating, so the pre-coating temperature should be set at 560°C to 560°C.
The temperature was set at 650℃. (b) Pre-coating time If the pre-coating time is less than 2 minutes,
Even if the substrate is heated to the above pre-coating temperature, the direct reaction between the pre-coating layer and the substrate and the diffusion of the coating layer into the substrate do not proceed sufficiently, so that the desired adhesion between the two cannot be achieved. On the other hand, if the heating time exceeds 10 minutes, the high speed steel will become dull and soft even if the substrate is kept at the above temperature. (c) Main coating temperature Generally, the smaller the difference between the substrate temperature during main coating and that during pre-coating, the better the pre-coating layer and main coating layer will fit together, resulting in a highly durable coating layer. At the same time, the coating temperature was slightly lower than before, i.e. 50°C.
In this invention, the coating temperature is set at 450-500°C, instead of the conventional coating temperature of 400-450°C, since there is no adverse effect on the HSS even if the temperature is increased. (d) Thickness of the coating layer If the total thickness of the coating layer is less than 0.5 μm, it will not be possible to obtain a surface-coated HSS member for a cutting tool that exhibits excellent cutting performance, while if it exceeds 10 μm, the cutting performance will be poor. Since no particular improvement effect could be obtained, the thickness was determined to be 0.5 to 10 μm. This invention is accomplished by a reactive physical vapor deposition process conventionally commonly used to deposit titanium carbon-nitrogen-oxide coatings on the surface of high-speed steel substrates, including acetylene, nitrogen or monoxide. A gas such as carbon is introduced and the temperature is 10 -4 to 10 -2 Torr
Metallic titanium is evaporated using an electron beam in a coating furnace maintained at a pressure of
Ions such as Ti + , N + , C + , O + are generated, and these cations are deposited on a high-speed steel substrate loaded with negative charge by electrical attraction, thereby causing the substrate to A film of carbon, nitride, and oxide of titanium is formed on the surface. The present invention can be applied to the production of surface-coated high speed steel members for various cutting tools, and can be particularly advantageously used for the production of coating chips specific to throw-away chips. [Example] Next, the present invention will be explained by using Examples and comparing with Comparative Examples. Steel type: SKH2 high speed tempering temperature: 560~580
Hardness obtained by tempering at °C:
We manufactured a large number of throw-away chips with a shape of TPP322 from high speed steel with HRC (Rockwell hardness C scale) 64, and using these chips as the base,
After raising the temperature of this substrate to a temperature between 560 and 600°C in a coating furnace maintained at a vacuum level of 10 -5 Torr, immediately at this temperature any one of carbon, nitride, and oxide of titanium is coated. Coating chip 1 of the present invention is prepared by pre-coating seeds on the surface of the substrate for 5 to 10 minutes, then cooling the substrate to 450-500°C, and then main-coating with the same coating components as those used in the preliminary coating. - 8, and as an alternative method of the present invention, the main coating is started while the substrate temperature is lowered to 480 ° C. in the above production method, and before preliminary coating in the above production method, the substrate temperature: Coating chips 9 and 10 of the present invention were respectively manufactured by a method that differed from the above manufacturing method only in that etching with argon was carried out at 600 DEG C. for 10 to 20 minutes. Furthermore, for comparison, in the method for manufacturing coating chips 1 to 8 of the present invention, the manufacturing conditions were outside the scope of the present invention, and etching was performed at a temperature of 450 to 500°C for 10 to 20 minutes. In addition to manufacturing comparative coating chips 1 and 2 (deviating conditions are indicated with *), the substrate was heated to 450°C in a coating furnace maintained at a vacuum level of 10 -5 Torr, and then at the same temperature. Conventional coating chips 1-5 were prepared by the conventional method of etching the substrate with argon, followed by coating with carbon-nitrogen-oxide of titanium at that temperature. In each of the above methods, during etching, the substrate voltage: -1.5KV, Ar pressure: 10 -2 Torr
When coating, the base voltage is -0.8KV.
It was hot. The reaction gas for forming the coating layer of each titanium compound and the furnace pressure during coating were as shown in Table 1 below.

【表】 このようにして得られた各チツプについて、そ
の製造法種別、予備コーテイングの温度および時
間、本コーテイング温度、および被覆層の成分と
厚さを第2表に示した。 ついで、これらのチツプおよび無コートチツプ
のロツクウエル硬さCスケール(HRC)を測定
するとともに、これらの工具寿命を評価するため
下記の条件による切削試験を実施し、VB摩耗が
0.3mmに達するまでの切削時間を測定して、これ
を工具寿命とした。 切削条件
[Table] Table 2 shows the manufacturing method type, pre-coating temperature and time, main coating temperature, and coating layer components and thickness for each chip thus obtained. Next, we measured the Rockwell hardness C scale (HRC) of these chips and uncoated chips, and conducted a cutting test under the following conditions to evaluate the tool life .
The cutting time until reaching 0.3 mm was measured and this was taken as the tool life. Cutting conditions

【表】【table】

〔発明の効果〕〔Effect of the invention〕

第2表に示される結果から、従来コーテイング
チツプは工具寿命が15〜30分であつて、その2、
4および5は切削中に被覆層が剥離したのに対
し、本発明コーテイングチツプはいずれも切削中
に被覆層が剥離することなく、その工具寿命が
120〜170分と飛躍的に増大し、また予備コーテイ
ング時間が長すぎるかまたはその温度が高すぎる
方法によつて製造された比較コーテイングチツプ
1および2においては、切削中にハイスがなまつ
て軟化したために工具寿命は極めて短かかつた。 以上述べた説明から明らかなように、この発明
によると、極めて耐摩耗性にすぐれ、したがつて
著しく工具寿命の長い切削工具用表面被覆ハイス
部材が得られるという産業上有用な効果を得るこ
とができる。
From the results shown in Table 2, the tool life of conventional coating chips is 15 to 30 minutes;
In contrast to chips 4 and 5, where the coating layer peeled off during cutting, the coating layer did not peel off during cutting with the coating chips of the present invention, and the tool life was extended.
In comparative coating chips 1 and 2, which were manufactured by a method in which the pre-coating time was too long or the temperature was too high, the HSS became dull and softened during cutting. As a result, tool life was extremely short. As is clear from the above description, according to the present invention, it is possible to obtain an industrially useful effect of obtaining a surface-coated HSS member for a cutting tool that has extremely excellent wear resistance and therefore has an extremely long tool life. can.

Claims (1)

【特許請求の範囲】[Claims] 1 反応性の物理蒸着法を利用して、炭化チタ
ン、窒化チタン、炭窒化チタン、炭窒酸化チタン
および炭酸化チタンのうちから選ばれたいずれか
1種の被覆成分を切削工具用高速度鋼基体にコー
テイングすることによつて、前記被覆成分からな
る被覆層が表面に形成されている切削工具用表面
被覆高速度鋼部材を製造する方法において、前記
基体を真空中で温度:560〜650℃に昇温した後、
直ちにこの温度において前記被覆成分を前記基体
に2〜10分間予備コーテイングして、前記基体表
面に前記被覆成分からなる予備被覆層を形成さ
せ、ついでこのように予備コーテイングされた前
記基体を温度:450〜500℃まで降温した後、また
はその降温途中および前記降温後において、前記
予備被覆層を形成させるために使用した被覆成分
と同じ被覆成分を前記予備被覆層の上に本コーテ
イングして、前記予備被覆層表面に前記被覆成分
からなる本被覆層を形成させ、それによつて、前
記予備被覆層と本被覆層とからなる、全体で厚
さ:0.5〜10μmの被覆層を前記基体にコーテイン
グすることを特徴とする、前記切削工具用表面被
覆高速度鋼部材の製造方法。
1 Using a reactive physical vapor deposition method, any one coating component selected from titanium carbide, titanium nitride, titanium carbonitride, titanium carbonitride, and titanium carbonate is applied to high-speed steel for cutting tools. In a method for manufacturing a surface-coated high-speed steel member for a cutting tool, in which a coating layer made of the coating component is formed on the surface by coating the substrate, the substrate is heated in a vacuum at a temperature of 560 to 650°C. After raising the temperature to
Immediately, the coating component is precoated on the substrate at this temperature for 2 to 10 minutes to form a precoating layer of the coating component on the surface of the substrate, and then the precoated substrate is heated at a temperature of 450. After the temperature has been lowered to ~500°C, or during and after the temperature decrease, the same coating component as that used to form the preliminary coating layer is main-coated on the preliminary coating layer to form the preliminary coating layer. Forming a main coating layer made of the coating component on the surface of the coating layer, thereby coating the substrate with a coating layer consisting of the preliminary coating layer and the main coating layer and having a total thickness of 0.5 to 10 μm. A method for producing the surface-coated high-speed steel member for a cutting tool, characterized in that:
JP15785385A 1985-07-17 1985-07-17 Production of surface coated high speed steel member for cutting tool Granted JPS6220863A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15785385A JPS6220863A (en) 1985-07-17 1985-07-17 Production of surface coated high speed steel member for cutting tool

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15785385A JPS6220863A (en) 1985-07-17 1985-07-17 Production of surface coated high speed steel member for cutting tool

Publications (2)

Publication Number Publication Date
JPS6220863A JPS6220863A (en) 1987-01-29
JPH0377272B2 true JPH0377272B2 (en) 1991-12-10

Family

ID=15658799

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15785385A Granted JPS6220863A (en) 1985-07-17 1985-07-17 Production of surface coated high speed steel member for cutting tool

Country Status (1)

Country Link
JP (1) JPS6220863A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3333560B2 (en) * 1992-10-23 2002-10-15 リコーエレメックス株式会社 Silicon substrate etching method

Also Published As

Publication number Publication date
JPS6220863A (en) 1987-01-29

Similar Documents

Publication Publication Date Title
US4450205A (en) Surface-coated blade member of super hard alloy for cutting tools and process for producing same
US4337300A (en) Surface-coated blade member for cutting tools and process for producing same
JPH0588310B2 (en)
JPH0453642B2 (en)
JP3161088B2 (en) Surface coated WC based cemented carbide cutting tool
JP4155641B2 (en) Abrasion resistant coating, method for producing the same, and abrasion resistant member
JPH08118106A (en) Hard layer coated cutting tool
JPS5864377A (en) Surface coated tool and its production
JP3572728B2 (en) Hard layer coated cutting tool
JPH08267306A (en) Hard layer coated cutting tool and method of manufacturing the same
JPH0377272B2 (en)
JPH04297568A (en) Surface coated member excellent in wear resistance and formation of film
JPS6242995B2 (en)
JP3478355B2 (en) Surface coated WC based cemented carbide cutting tool
JP3572732B2 (en) Hard layer coated cutting tool
JPS60224778A (en) Ceramic coated hard parts
JPH06248420A (en) Hard film coated member
JP2590349B2 (en) Wear-resistant coating method
JPH0377271B2 (en)
JP3109272B2 (en) Surface coated titanium carbonitride based cermet cutting tool with excellent fracture and wear resistance
CN115029676B (en) Super-thick nitrogen-containing chromium coating and preparation method thereof
JPH07150337A (en) Production of nitride film
JP2545144B2 (en) Method for producing surface-coated cemented carbide and method for producing surface-coated steel
JPS60174876A (en) Manufacture of coated cutting tool
JPH0588307B2 (en)