JPH0378591B2 - - Google Patents
Info
- Publication number
- JPH0378591B2 JPH0378591B2 JP57215075A JP21507582A JPH0378591B2 JP H0378591 B2 JPH0378591 B2 JP H0378591B2 JP 57215075 A JP57215075 A JP 57215075A JP 21507582 A JP21507582 A JP 21507582A JP H0378591 B2 JPH0378591 B2 JP H0378591B2
- Authority
- JP
- Japan
- Prior art keywords
- sample
- present
- cavity resonator
- electromagnetic
- horn
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000005291 magnetic effect Effects 0.000 claims description 18
- 238000005259 measurement Methods 0.000 claims description 10
- 230000005293 ferrimagnetic effect Effects 0.000 claims description 4
- 230000005294 ferromagnetic effect Effects 0.000 claims description 4
- 238000000034 method Methods 0.000 description 9
- 238000010586 diagram Methods 0.000 description 7
- 230000035945 sensitivity Effects 0.000 description 5
- 239000000126 substance Substances 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 239000010453 quartz Substances 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 239000004809 Teflon Substances 0.000 description 2
- 229920006362 Teflon® Polymers 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000005553 drilling Methods 0.000 description 2
- 230000005350 ferromagnetic resonance Effects 0.000 description 2
- 230000005298 paramagnetic effect Effects 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 239000004793 Polystyrene Substances 0.000 description 1
- 244000309464 bull Species 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 239000002902 ferrimagnetic material Substances 0.000 description 1
- 239000003302 ferromagnetic material Substances 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 239000002223 garnet Substances 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 239000012188 paraffin wax Substances 0.000 description 1
- 229920002223 polystyrene Polymers 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000004611 spectroscopical analysis Methods 0.000 description 1
- 238000010561 standard procedure Methods 0.000 description 1
- 239000013076 target substance Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N24/00—Investigating or analyzing materials by the use of nuclear magnetic resonance, electron paramagnetic resonance or other spin effects
- G01N24/008—Investigating or analyzing materials by the use of nuclear magnetic resonance, electron paramagnetic resonance or other spin effects by using resonance effects in zero field, e.g. in microwave, submillimetric region
Landscapes
- Physics & Mathematics (AREA)
- High Energy & Nuclear Physics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Magnetic Resonance Imaging Apparatus (AREA)
- Control Of Motors That Do Not Use Commutators (AREA)
Description
【発明の詳細な説明】
本発明はマイクロ波を用いる電子スピン磁気共
鳴もしくは強磁性共鳴装置に関し、さらに詳しく
は、空胴共振器の代りに一対の電磁ホーンを用い
た磁気共鳴測定装置に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an electron spin magnetic resonance or ferromagnetic resonance apparatus using microwaves, and more particularly to a magnetic resonance measurement apparatus using a pair of electromagnetic horns instead of a cavity resonator.
電子スピン磁気共鳴装置（以下ESR装置と称
する）は、対象とする測定物質が、強磁性体、又
はフエリ磁性体である場合、強磁性共鳴装置
（FMR装置と称する）とも呼ばれるが、本装置は
常磁性イオン、常磁性物質、ラジカル、強磁性
体、フエリ磁性体（例えば、磁気バブル素子用ガ
ーネツト薄膜）などの磁気的性質を調べるための
分光学的手法として広く用いられ、現在では市販
の装置を入手することが可能である。 An electron spin magnetic resonance apparatus (hereinafter referred to as an ESR apparatus) is also called a ferromagnetic resonance apparatus (hereinafter referred to as an FMR apparatus) when the target substance to be measured is a ferromagnetic substance or a ferrimagnetic substance. It is widely used as a spectroscopic method to investigate the magnetic properties of paramagnetic ions, paramagnetic substances, radicals, ferromagnetic substances, ferrimagnetic substances (for example, garnet thin films for magnetic bubble devices), and commercially available equipment is currently available. It is possible to obtain.
従来の装置では、空胴共振器を用いることが一
般的であつた。すなわち、石英管、石英棒、テフ
ロン管、テフロン棒など、マイクロ波に対する誘
電損失の比較的少ない材質から成る試料ホルダー
に測定試料を装着して空胴共振器内にESR又は
FMRを測定している。この方法では、(1)空胴内
に試料を挿入するため、試料の大きさが制約され
る。(2)試料による誘電損失で空胴共振器のＱ値を
著しく低下させる場合があり、このためからも試
料体積（薄膜試料のときは面積）が制約される。
(3)大面積のウエハーから破壊して小サンプル片を
準備しなければならないなどの問題点や欠点を有
していた。又、同じく空胴共振器を用いる方法で
も空胴共振器の一箇所乃至数箇所に直径数mm程度
の穴を開け、空胴共振器より洩れ出てくるマイク
ロ波を利用してESR，FMRを測定する方法が例
えば、マテリアルズ・リサーチ・ビユレテイン
（Mater.Res.Bull.）第12巻53ページ（1977年）ア
ブライド・フイジツクス（Appl.Phys.）第12巻
261ページ（1977年），或いは、第21回ESR討論
会講演要旨集（1982年10月）134ページなどに記
載されている。これら空胴共振器に穴を開けて磁
気共鳴を測定する方法は利用するマイクロ波のご
く一部分のパワーしか用いないため感度が悪く、
また、ボールピース（磁極）間〓内の空胴共振器
の外側とポールピース面の間の狭い空間に試料ホ
ルダーを設けなければならないため、やはり治具
設計の困難さが伴うなどの制約がある。このよう
に空胴共振器内に試料を挿入する方法でも、ま
た、空胴共振器に開けられた穴に試料を押しつけ
る方法でも、いずれも、試料に応力を加えたりす
る機工部を設けるには、スペースの制約が大きい
欠点となつていた。空胴共振器は、一般にＱ値が
高く高感度であるが故に、マイクロ波の位相・周
波数調整に時間がかかることも欠点のひとつとな
つていた。又、空胴共振器は固有振動数（fo）を
もつ共振回路であるため、観測周波数は、このfo
に固定される。従つて、試料の周波数依存性を自
由に測定できないことも大きな欠点となつてい
る。 In conventional devices, it has been common to use cavity resonators. That is, the measurement sample is mounted on a sample holder made of a material with relatively low dielectric loss against microwaves, such as a quartz tube, quartz rod, Teflon tube, or Teflon rod, and then ESR or
Measuring FMR. In this method, (1) the sample is inserted into a cavity, so the size of the sample is restricted; (2) Dielectric loss caused by the sample may significantly reduce the Q value of the cavity resonator, and this also limits the sample volume (area in the case of a thin film sample).
(3) There are problems and drawbacks, such as the need to prepare small sample pieces by breaking a large-area wafer. Similarly, with the method of using a cavity resonator, a hole with a diameter of several mm is made in one or several places in the cavity resonator, and the microwaves leaking from the cavity resonator are used to generate ESR and FMR. Examples of measurement methods include Materials Research Bull., Vol. 12, page 53 (1977); Appl. Phys., Vol. 12.
It is described on page 261 (1977) or on page 134 of the 21st ESR Symposium Abstracts (October 1982). The method of measuring magnetic resonance by drilling a hole in these cavity resonators uses only a fraction of the power of the microwaves used, so it has poor sensitivity.
In addition, the sample holder must be installed in a narrow space between the outside of the cavity resonator and the pole piece surface between the ball pieces (magnetic poles), which also poses limitations such as difficulty in jig design. . In either method, such as inserting the sample into a cavity resonator or pressing the sample into a hole drilled in the cavity, it is difficult to provide a mechanical part that applies stress to the sample. However, space constraints were a major drawback. Since cavity resonators generally have a high Q value and high sensitivity, one of their drawbacks is that it takes time to adjust the phase and frequency of the microwave. Also, since the cavity resonator is a resonant circuit with a natural frequency (fo), the observed frequency is
Fixed. Therefore, the inability to freely measure the frequency dependence of the sample is also a major drawback.
本発明は空胴共振器を用いるESR，FMR装置
のかかる欠点を克服するためになされたものであ
り、空胴共振器を用いないESR，FMRの測定装
置を提供することを目的とする。 The present invention was made in order to overcome these drawbacks of ESR and FMR devices that use a cavity resonator, and an object of the present invention is to provide an ESR and FMR measurement device that does not use a cavity resonator.
すなわち、本発明は電子スピン磁気共鳴装置又
は強磁性（フエリ磁性を含む）磁気共鳴装置にお
いて、発信用電磁ホーンと受信用電磁ホーンとこ
れら２つの電磁ホーンの間に試料を保持する試料
保持部とを有することを特徴とする磁気共鳴装置
である。 That is, the present invention provides an electron spin magnetic resonance apparatus or a ferromagnetic (including ferrimagnetic) magnetic resonance apparatus, which includes a transmitting electromagnetic horn, a receiving electromagnetic horn, and a sample holding section that holds a sample between these two electromagnetic horns. This is a magnetic resonance apparatus characterized by having:
以下に本発明の構成を、さらに具体的に説明す
る。第１図は、本発明を構成する具体例の一例で
ある。１１は、マイクロ波搬送用同軸ケーブルで
あり、マイクロ波発振器からマイクロ波ユニツト
と総称される回路系から特定の周波数をもつマイ
クロ波として供給される。１２は同軸導波管変換
器１３は発振用ホーンである。１４と１５は一対
の電磁レンズであり、パラフインやポリスチレン
などから成るが、これを用いる場合と用いない場
合がある。１６が試料ホルダーであり、この上に
測定試料１７が保持される。試料は固体の場合、
セル中に入れられた液体の場合、セル中に入れら
れた気体の場合などである。１８は受信用ホーン
であり同軸導波管変換器１９を経て同軸ケーブル
２０に送られ、マイクロ波検出系で、試料１７に
よるマイクロ波の吸収が検出される。発信用及び
受信用の電磁ホーンは、いずれもレール２１の上
に載つており、ホーン間隔を調節することができ
る。２２が電磁石、２３はポールピースである。
同軸ケーブル１１，同軸導波管１２を用いる代り
に導波管を直接ホーンに接続することもできる。
電磁レンズを用いると試料内の励起場所を変える
ことができるので、分布測定ができる。 The configuration of the present invention will be explained in more detail below. FIG. 1 is an example of a specific example constituting the present invention. Reference numeral 11 denotes a microwave carrier coaxial cable, which is supplied from a microwave oscillator as a microwave having a specific frequency from a circuit system collectively called a microwave unit. 12 is a coaxial waveguide converter 13 is an oscillation horn. A pair of electromagnetic lenses 14 and 15 are made of paraffin, polystyrene, etc., and may or may not be used. 16 is a sample holder, on which a measurement sample 17 is held. If the sample is solid,
This includes the case of a liquid contained in a cell, the case of a gas contained in a cell, etc. Reference numeral 18 denotes a receiving horn, which is sent to a coaxial cable 20 via a coaxial waveguide converter 19, and a microwave detection system detects absorption of the microwave by the sample 17. The electromagnetic horns for transmitting and receiving are both mounted on the rail 21, and the distance between the horns can be adjusted. 22 is an electromagnet, and 23 is a pole piece.
Instead of using the coaxial cable 11 and the coaxial waveguide 12, the waveguide can also be directly connected to the horn.
By using an electromagnetic lens, the excitation location within the sample can be changed, making it possible to measure the distribution.
第２図は、本発明の実施例に用いた電磁ホーン
の立体図である。ホーン開口部の内寸は20mm×50
mm程度とすることが、本発明の特徴のひとつであ
り、通常のＸ−バンドESR装置のポールピース
間隙（市販の装置で60mm程度が標準）内に余裕を
もつて設置することができる。 FIG. 2 is a three-dimensional diagram of an electromagnetic horn used in an embodiment of the present invention. The inner dimensions of the horn opening are 20mm x 50
One of the features of the present invention is that the diameter is approximately 1.5 mm, and it can be installed with plenty of room within the pole piece gap of a normal X-band ESR device (about 60 mm is standard for commercially available devices).
本発明に用いたマイクロ波回路系のブロツクダ
イヤグラムを第３図に示す。参考図である第４図
は空胴共振器４８を用いる通常の装置の場合であ
り第３図の本発明においては、空胴共振器を除去
して発信用・受信用の電磁ホーン１３，１８を１
対設置し、サーキユレータ３９を経由して供給さ
せるマイクロ波を発信用ホーン１３から出力し、
受信用ホーン１８で受け、マジツクＴ回路４１に
送り、マイクロ波吸収を検知した。 A block diagram of the microwave circuit system used in the present invention is shown in FIG. FIG. 4, which is a reference diagram, shows the case of a normal device using a cavity resonator 48. In the present invention shown in FIG. 3, the cavity resonator is removed and the electromagnetic horns 13, 18 for transmitting and receiving 1
and output microwaves from the transmitting horn 13 to be supplied via the circulator 39,
It was received by the receiving horn 18 and sent to the magic T circuit 41, and microwave absorption was detected.
次に本発明の効果を説明する。 Next, the effects of the present invention will be explained.
(1) 測定試料が板状や単結晶試料の場合、サンプ
ルホルダー上に設置された試料を適当な軸のま
わりに回転することにより共鳴磁場の角度変化
が測定でき、これによりｇ値の異方性や、強度
性物質の場合、異方性磁界を知ることができ
る。ポールピース間隙が有効に利用できるた
め、かなり大きな寸法の材料でも測定が可能で
ある。特に空胴共振器内に試料を挿入するに
は、試料寸法の制限が重要であつた。標準的に
は３mmφの石英管内におさめるとか、５mm角程
度の板状試料を石英棒に貼りつけるなどの方法
がとられていた。しかるに本発明では、試料形
状によらず、例えば直径50mmのウエハーのまま
で、被破壊測定が、可能であるという特徴を有
する。(1) When the measurement sample is a plate-shaped or single-crystal sample, the angular change in the resonant magnetic field can be measured by rotating the sample placed on the sample holder around an appropriate axis. In the case of magnetic or strong materials, the anisotropic magnetic field can be determined. Since the pole piece gap can be used effectively, it is possible to measure even materials with fairly large dimensions. In particular, when inserting a sample into a cavity resonator, limiting the sample size was important. Standard methods include placing the sample in a quartz tube with a diameter of 3 mm, or attaching a plate-shaped sample about 5 mm square to a quartz rod. However, the present invention is characterized in that it is possible to measure the damage caused by a wafer with a diameter of 50 mm, for example, regardless of the shape of the sample.
また、本発明の特徴は測定試料の着脱が容易
なことであり、第５図の如き試料送り機構をも
たせると、多数の試料を短時間に効率よく測定
することができる。この点は空胴共振器内に挿
入する方法、或いは空胴共振器に開けられた穴
に向けてホルダーに収められた試料を押しつけ
る方法に比べはるかに有利である。従つて、本
発明のESR，FMR装置を用いれば、コンピユ
ータとつなげた製品管理が容易で、検査コスト
を低減させることができる。 Further, a feature of the present invention is that the measurement sample can be easily attached and detached, and by providing a sample feeding mechanism as shown in FIG. 5, it is possible to efficiently measure a large number of samples in a short time. This point is far more advantageous than the method of inserting the sample into a cavity resonator or the method of pressing a sample housed in a holder toward a hole drilled in the cavity. Therefore, by using the ESR/FMR device of the present invention, product management connected to a computer is easy, and inspection costs can be reduced.
また、ポールピース間隙を有効に使えるた
め、試料に応力を加えるなどして共鳴磁場のシ
フトを検出することにより、例えば磁歪定数を
決定するなど、試料の磁気弾性効果に対する知
見を得るための治具の設計への余裕度が大き
い。 In addition, since the pole piece gap can be used effectively, it is a jig that can be used to obtain knowledge about the magnetoelastic effect of a sample, such as determining the magnetostriction constant, by applying stress to the sample and detecting the shift of the resonant magnetic field. There is a lot of leeway in the design.
(2) 空胴共振器に穴を開ける方法では洩れ、マイ
クロ波との結合を利用するため試料のセツテイ
ングの方法や外部擾乱の影響を受けやすいが、
本発明による方法の方が、これらの影響は少な
い。(2) The method of drilling a hole in the cavity resonator causes leakage, and since it uses coupling with microwaves, it is susceptible to the influence of sample setting methods and external disturbances.
The method according to the present invention has fewer of these effects.
(3) 本装置を使用すれば、周波特性が容易に測定
できる。通常、ホーンは１オクターブの周波数
帯域幅をもつ。従つて、発振器の周波数が、自
由に選べるならば、ウエハのFMRの周波数特
性を調べることにより、強磁性体やフエリ磁性
体においては、飽和磁束密度（4πMs）を測定
することができる。(3) Using this device, frequency characteristics can be easily measured. Typically, a horn has a frequency bandwidth of one octave. Therefore, if the oscillator frequency can be freely selected, the saturation magnetic flux density (4πMs) of ferromagnetic materials and ferrimagnetic materials can be measured by examining the frequency characteristics of the wafer's FMR.
(4) 本発明による測定装置においては、集中定数
回路を用いていないため、空胴共振器を用いる
場合に比べ、感度の点では優れていないが、こ
のことは、かえつてFMR測定としては好都合
である。感度が不足する点については、(イ)に述
べた理由で試料量を増加させることが解決でき
る。さらに電磁レンズを用いることで、感度の
向上が、はかれるとともに試料の特性の分布を
評価することができる。(4) Since the measurement device according to the present invention does not use a lumped constant circuit, it is not superior in sensitivity compared to the case where a cavity resonator is used, but this is actually advantageous for FMR measurement. It is. The lack of sensitivity can be solved by increasing the amount of sample for the reason stated in (a). Furthermore, by using an electromagnetic lens, sensitivity can be improved and the distribution of sample characteristics can be evaluated.
また、第５図に示すように試料送り機構５１
を有する構造にすることにより、さらに能率的
に測定が可能となる。 In addition, as shown in FIG. 5, the sample feeding mechanism 51
By adopting a structure having , even more efficient measurement becomes possible.
以上述べたように本発明は数多くの特徴を有
しその工業的効果は大きい。 As described above, the present invention has many features and has great industrial effects.
第１図は、本発明の構成の要素を示す図。
１１，２０……マイクロ波同軸ケーブル、１
２，１９……同軸等波管変換器、１３，１８……
電磁ホーン、１４，１５……電磁レンズ、１６…
…試料ホルダー、１７……試料、２１……レー
ル、２２……電磁石、２３……ポールピース。
第２図は電磁ミーンの詳細立体図。
第３図は、本発明に用いるマイクロ波回路系ブ
ロツクダイヤグラム。
第４図は空胴共振器を用いる通常のESR，
FMR装置でのマイクロ波回路系ブロツクダイヤ
グラム。
３１……ガン電源、３２……ガン発振器、３３
……単向管、３４……方向性結合器、３５……シ
ヤツター、３６……位相器、３７……遅延ライ
ン、３８……回転型減衰器、３９……サーキユレ
ータ、４０……クリスタル検出器、４１……マジ
ツクＴ、４２……入力トランス、４３……前置増
幅器、４４……増幅器、４５……変調回路、４６
……発振器、４７……位相器、４８……空胴共振
器、
第５図は、本発明の応用を示す、試料送り機構
を有する多数試料測定装置の構成図。
FIG. 1 is a diagram showing elements of the configuration of the present invention. 11,20...Microwave coaxial cable, 1
2, 19... Coaxial equal wave tube converter, 13, 18...
Electromagnetic horn, 14, 15... Electromagnetic lens, 16...
...sample holder, 17...sample, 21...rail, 22...electromagnet, 23...pole piece. Figure 2 is a detailed three-dimensional diagram of the electromagnetic mean. FIG. 3 is a block diagram of the microwave circuit system used in the present invention. Figure 4 shows normal ESR using a cavity resonator.
Microwave circuit block diagram of FMR device. 31...Gun power supply, 32...Gun oscillator, 33
...unidirectional tube, 34 ... directional coupler, 35 ... shutter, 36 ... phase shifter, 37 ... delay line, 38 ... rotary attenuator, 39 ... circulator, 40 ... crystal detector , 41...Magic T, 42...Input transformer, 43...Preamplifier, 44...Amplifier, 45...Modulation circuit, 46
. . . Oscillator, 47 . . . Phase shifter, 48 .
Claims (1)
磁性を含む）磁気共鳴装置において発信用電磁ホ
ーンと受信用電磁ホーンとこれら２つの電磁ホー
ンの間に試料を保持する試料保持部とを有するこ
とを特徴とする磁気共鳴測定装置。1. An electron spin magnetic resonance apparatus or a ferromagnetic (including ferrimagnetic) magnetic resonance apparatus, characterized by having a transmitting electromagnetic horn, a receiving electromagnetic horn, and a sample holding part that holds a sample between these two electromagnetic horns. A magnetic resonance measurement device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57215075A JPS59105551A (en) | 1982-12-08 | 1982-12-08 | Apparatus for measuring magnetic resonance |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57215075A JPS59105551A (en) | 1982-12-08 | 1982-12-08 | Apparatus for measuring magnetic resonance |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59105551A JPS59105551A (en) | 1984-06-18 |
| JPH0378591B2 true JPH0378591B2 (en) | 1991-12-16 |
Family
ID=16666334
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57215075A Granted JPS59105551A (en) | 1982-12-08 | 1982-12-08 | Apparatus for measuring magnetic resonance |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59105551A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012008095A (en) * | 2010-06-28 | 2012-01-12 | Oita Univ | Electromagnetic horn type electron spin resonance (esr) device |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5279786B2 (en) * | 2010-09-24 | 2013-09-04 | 株式会社東芝 | Magnetic resonance measuring device |
| JP5665914B2 (en) * | 2013-05-13 | 2015-02-04 | 株式会社東芝 | Magnetic resonance measuring device |
-
1982
- 1982-12-08 JP JP57215075A patent/JPS59105551A/en active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012008095A (en) * | 2010-06-28 | 2012-01-12 | Oita Univ | Electromagnetic horn type electron spin resonance (esr) device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59105551A (en) | 1984-06-18 |
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