JPH038691B2 - - Google Patents
Info
- Publication number
- JPH038691B2 JPH038691B2 JP5568983A JP5568983A JPH038691B2 JP H038691 B2 JPH038691 B2 JP H038691B2 JP 5568983 A JP5568983 A JP 5568983A JP 5568983 A JP5568983 A JP 5568983A JP H038691 B2 JPH038691 B2 JP H038691B2
- Authority
- JP
- Japan
- Prior art keywords
- light
- projector
- detected
- dichroic mirror
- receiving
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000003287 optical effect Effects 0.000 claims description 19
- 238000000034 method Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
- 238000007796 conventional method Methods 0.000 description 3
- 238000001514 detection method Methods 0.000 description 3
- 238000005452 bending Methods 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000003384 imaging method Methods 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Measurement Of Optical Distance (AREA)
Description
【発明の詳細な説明】
〔技術分野〕
本発明は光学式の距離センサに関するものであ
る。DETAILED DESCRIPTION OF THE INVENTION [Technical Field] The present invention relates to an optical distance sensor.
従来より投光軸に対して斜めに配置された受光
系によつて被検出物体上の光スポツトを一次元受
光素子上に結像させ、光スポツト像の変位を検出
することにより被検出物体の投光軸に沿つた変位
を検出する、いわゆる光切断型の距離センサが例
えば特開昭57−67815号などにより公知である。
Conventionally, a light spot on an object to be detected is imaged onto a one-dimensional light receiving element by a light receiving system arranged obliquely to the light emitting axis, and the displacement of the light spot image is detected to detect the object to be detected. A so-called light cutting type distance sensor that detects displacement along a light projection axis is known, for example, from Japanese Patent Laid-Open No. 57-67815.
この種の距離センサにあつては、一次元イメー
ジセンサ、フオトダイオードアレイ等の一次元受
光素子の検出感度が測定精度に重大な影響を与え
るので、光スポツト以外から入射する外乱光の除
去がきわめて重要である。そのために従来は、光
源に特定の波長域の光を用い、受光系に光源波長
のみを透過する光学フイルタを設けて外乱光を除
去する方法がとられていた。しかし性能の良い光
学フイルタは構成が複雑で高価であり、しかも光
透過率もせいぜい50%までで光の損失が大きいと
いう問題があつた。 For this type of distance sensor, the detection sensitivity of the one-dimensional light-receiving element such as one-dimensional image sensor or photodiode array has a significant effect on measurement accuracy, so it is extremely important to remove ambient light that enters from sources other than the light spot. is important. To this end, a conventional method has been to use light in a specific wavelength range as a light source and provide an optical filter in the light receiving system that transmits only the wavelength of the light source to remove ambient light. However, a high-performance optical filter has a complicated structure and is expensive, and has a problem in that it has a light transmittance of at most 50% and a large loss of light.
また検出精度を高くするには受光光学系の倍率
を大きくする必要があり、そのために受光レンズ
と受光素子間の距離が大きくなつてセンサ全体が
大型化するという問題があつた。 Furthermore, in order to improve detection accuracy, it is necessary to increase the magnification of the light receiving optical system, which causes the problem that the distance between the light receiving lens and the light receiving element increases, making the entire sensor larger.
本発明は、上述のような外乱光を除去するため
の光の損失を少くすると共に、センサ全体の外形
をできるだけ小さくすることを目的とするもので
ある。
An object of the present invention is to reduce the loss of light for removing the above-mentioned disturbance light, and to make the overall size of the sensor as small as possible.
第1図は本発明距離センサの概略構成図であ
る。同図において、投光器は光源1および投光用
レンズ2で構成され、受光光学系は受光用レンズ
3およびダイクロイツクミラー4で構成される。
5は一次元受光素子で、その出力である電気信号
は信号処理部6で処理される。7は遮光板であ
る。
FIG. 1 is a schematic diagram of the distance sensor of the present invention. In the figure, a light projector is comprised of a light source 1 and a light projecting lens 2, and a light receiving optical system is comprised of a light receiving lens 3 and a dichroic mirror 4.
Reference numeral 5 denotes a one-dimensional light-receiving element, and its output, an electrical signal, is processed by a signal processing section 6. 7 is a light shielding plate.
第1図において、ビーム投光器によつて被検出
物体面8に投射された光スポツトPは、ダイクロ
イツクミラー4がなければP1点に結像される。
受光光学系の光軸X2は投光器の光軸X1に対して
傾斜し、両光軸X1X2はほぼ物体検出予定地点P
で交わつている。物体8が光軸X1に沿つて前後
に移動した場合、結像点P1は直線A1に沿つて移
動し、この直線A1はちようど投光軸X1上の点Q
で受光用レンズ3を含む面と交わることが知られ
ている。したがつてダイクロイツクミラー4で反
射された光束の結像点P2はダイクロイツクミラ
ー4を含む面に関して直線A1と対称な直線A2上
を移動する。この直線A2上に一次元受光素子5
の受光面を設けておく。 In FIG. 1, if the dichroic mirror 4 were not present, a light spot P projected onto the object surface 8 to be detected by the beam projector would be imaged at a point P1 .
The optical axis X 2 of the receiving optical system is inclined with respect to the optical axis X 1 of the projector, and both optical axes X 1 X 2 are approximately at the point P where object detection is planned.
are intersecting. When the object 8 moves back and forth along the optical axis
It is known that the plane intersects with the plane including the light-receiving lens 3. Therefore, the imaging point P2 of the light beam reflected by the dichroic mirror 4 moves on a straight line A2 that is symmetrical to the straight line A1 with respect to the plane containing the dichroic mirror 4 . One-dimensional light receiving element 5 is placed on this straight line A2 .
A light-receiving surface is provided.
第2図は第1図における信号処理部6の回路図
を示したもので、一次元受光素子5として浜松テ
レビ(株)製のPSD素子を使用している。PSD素子
5の両電流出力はそれぞれ増幅器11,12によ
つて電圧V1およびV2に変換され、加算回路13、
減算回路14および割算回路15で処理されて、
割算結果VP=(V1−V2)/(V1+V2)が得られ
る。この電圧VPがPSD素子5上の光スポツト像
の位置を表わしている。コンパレータ16,17
はウインドウ型コンパレータを構成しており、そ
れぞれポデンシヨメータ18,19によつて上限
値および下限値を設定できるようになつている。
ウインドウ型コンパレータの出力はデジタル処理
部20およびトランジスタ出力部21を経て、遠
端子(FAR)、近端子(NEAR)、適正端子
(GO)に出力される。 FIG. 2 shows a circuit diagram of the signal processing section 6 in FIG. 1, in which a PSD element manufactured by Hamamatsu Television Co., Ltd. is used as the one-dimensional light receiving element 5. Both current outputs of the PSD element 5 are converted into voltages V 1 and V 2 by amplifiers 11 and 12, respectively, and an adder circuit 13,
Processed by the subtraction circuit 14 and the division circuit 15,
The division result V P =(V 1 −V 2 )/(V 1 +V 2 ) is obtained. This voltage V P represents the position of the light spot image on the PSD element 5. Comparators 16, 17
constitutes a window type comparator, and an upper limit value and a lower limit value can be set by podensiometers 18 and 19, respectively.
The output of the window type comparator passes through the digital processing section 20 and the transistor output section 21, and is output to the far terminal (FAR), the near terminal (NEAR), and the appropriate terminal (GO).
本発明は上述のように、受光光学系の光路内に
ダイクロイツクミラーを挿入して、ダイクロイツ
クミラーで反射される波長域を投光器の光源に使
用したので、光源の波長以外の光を除去できる上
に、利用される光束は透過光でなく反射光である
から光の損失を数%以下に抑えることができ、従
来方式に比し著しく感度を向上し得るという利点
がある。
As described above, the present invention inserts a dichroic mirror into the optical path of the light-receiving optical system and uses the wavelength range reflected by the dichroic mirror as the light source of the projector, making it possible to remove light other than the wavelength of the light source. Moreover, since the light beam used is reflected light rather than transmitted light, the loss of light can be suppressed to a few percent or less, and there is an advantage that the sensitivity can be significantly improved compared to the conventional method.
またダイクロイツクミラーによつて受光光学系
の光路を折曲する際に、第1図のように受光軸
X2を投光軸X1に近ずける方向に折曲すれば、セ
ンサ本体の外形を長さ、幅ともに短縮でき、した
がつて従来に比し本体の大型化を伴わずに倍率を
向上し得るという利点がある。 Also, when bending the optical path of the light-receiving optical system using a dichroic mirror, the light-receiving axis
By bending X 2 in a direction that brings it closer to the projection axis X 1 , the outer shape of the sensor body can be shortened in both length and width, thus increasing the magnification without increasing the size of the main body compared to conventional methods. It has the advantage of being possible.
さらにこの種の距離センサでは、結像点の軌跡
を近似的に直線とみなし得る適正距離範囲があ
り、その範囲から外れると誤差が無視できなくな
る。したがつて第2図の実施例のように、あらか
じめ適正範囲の上限値および下限値を設定できる
ようにしておけばきわめて高速の判定ができると
いう利点がある。また同様の理由により受光光学
系の光路の微調整が不可欠であり、従来は受光レ
ンズや一次元受光素子の位置、方向の調整をして
いたので機構や調整作業が複雑になつていたので
あるが、本発明によればダイクロイツクミラーの
位置および角度の微調整ができるようにしておく
ことによつて、受光レンズや一次元受光素子を固
定しておくことができ、機構を著しく簡単化する
ことができるという利点がある。 Furthermore, in this type of distance sensor, there is an appropriate distance range in which the locus of the imaging point can be regarded as approximately a straight line, and if the distance is outside of this range, the error cannot be ignored. Therefore, as in the embodiment shown in FIG. 2, if the upper and lower limits of the appropriate range can be set in advance, there is an advantage that extremely high-speed determination can be made. Also, for the same reason, it is essential to fine-tune the optical path of the light-receiving optical system, and in the past, the position and direction of the light-receiving lens and one-dimensional light-receiving element had to be adjusted, making the mechanism and adjustment work complicated. However, according to the present invention, by allowing the position and angle of the dichroic mirror to be finely adjusted, the light-receiving lens and the one-dimensional light-receiving element can be fixed, which significantly simplifies the mechanism. It has the advantage of being able to
第1図は本発明の一実施例の概略構成図、第2
図は同上の要部回路図である。
1は光源、2は投光用レンズ、3は受光用レン
ズ、4はダイクロイツクミラー、5は一次元受光
素子、6は信号処理部、7は遮光板、8は被検出
物体面、11,12は増幅器、13は加算回路、
14は減算回路、15は割算回路、16,17は
コンパレータ、18,19はポテンシヨメータ、
20はデジタル処理部、21はトランジスタ出力
部。
FIG. 1 is a schematic configuration diagram of an embodiment of the present invention, and FIG.
The figure is a circuit diagram of the main parts same as above. 1 is a light source, 2 is a light projecting lens, 3 is a light receiving lens, 4 is a dichroic mirror, 5 is a one-dimensional light receiving element, 6 is a signal processing section, 7 is a light shielding plate, 8 is a detected object surface, 11, 12 is an amplifier, 13 is an adder circuit,
14 is a subtraction circuit, 15 is a division circuit, 16 and 17 are comparators, 18 and 19 are potentiometers,
20 is a digital processing section, and 21 is a transistor output section.
Claims (1)
投光器と、上記光スポツト像をフオトダイオード
アレイのような一次元受光素子上に結像させる受
光光学系と、一次元受光素子の出力信号を処理し
て投光器から被検出物体面までの距離を検出する
信号処理部とを備えた構成において、上記受光光
学系の光路内にダイクロイツクミラーを設けると
共に該ダイクロイツクミラーで反射される波長域
の光源を上記投光器に使用して成ることを特徴と
する距離センサ。 2 上記信号処理部に上限値および下限値の設定
変更可能なウインドウ型コンパレータを設けて、
投光器から被検出物体までの距離が設定範囲内に
入つたことを検出するようにして成ることを特徴
とする特許請求の範囲第1項記載の距離センサ。[Scope of Claims] 1. A beam projector that projects a light spot onto the surface of an object to be detected, a light-receiving optical system that forms an image of the light spot on a one-dimensional light-receiving element such as a photodiode array, and a one-dimensional light-receiving element. and a signal processing unit that processes the output signal of the light emitter and detects the distance from the light projector to the object surface to be detected, in which a dichroic mirror is provided in the optical path of the light receiving optical system, and the light reflected by the dichroic mirror is A distance sensor characterized by using a light source in a wavelength range as described above for the projector. 2. A window type comparator is provided in the signal processing section, the upper limit value and the lower limit value of which can be changed.
2. The distance sensor according to claim 1, wherein the distance sensor detects when the distance from the projector to the object to be detected falls within a set range.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5568983A JPS59180406A (en) | 1983-03-31 | 1983-03-31 | Distance sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5568983A JPS59180406A (en) | 1983-03-31 | 1983-03-31 | Distance sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59180406A JPS59180406A (en) | 1984-10-13 |
| JPH038691B2 true JPH038691B2 (en) | 1991-02-06 |
Family
ID=13005865
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5568983A Granted JPS59180406A (en) | 1983-03-31 | 1983-03-31 | Distance sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59180406A (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3627850A1 (en) * | 1986-08-16 | 1988-03-03 | Leybold Heraeus Gmbh & Co Kg | CIRCUIT ARRANGEMENT FOR A POSITION-SENSITIVE RADIATION DETECTOR |
| JPS63103903A (en) * | 1986-10-21 | 1988-05-09 | Koyo Denshi Kogyo Kk | Straight line recognizing device |
| JPS63106510A (en) * | 1986-10-24 | 1988-05-11 | Yasunaga Tekkosho:Kk | Optical flaw and displacement measuring apparatus |
| JPS63223506A (en) * | 1987-03-13 | 1988-09-19 | Matsushita Electric Ind Co Ltd | position detection device |
| JPH0416309U (en) * | 1990-05-31 | 1992-02-10 |
-
1983
- 1983-03-31 JP JP5568983A patent/JPS59180406A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59180406A (en) | 1984-10-13 |
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