JPH041289B2 - - Google Patents
Info
- Publication number
- JPH041289B2 JPH041289B2 JP57230009A JP23000982A JPH041289B2 JP H041289 B2 JPH041289 B2 JP H041289B2 JP 57230009 A JP57230009 A JP 57230009A JP 23000982 A JP23000982 A JP 23000982A JP H041289 B2 JPH041289 B2 JP H041289B2
- Authority
- JP
- Japan
- Prior art keywords
- gas
- chamber
- spectrometer
- sample
- sample chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N21/15—Preventing contamination of the components of the optical system or obstruction of the light path
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Spectrometry And Color Measurement (AREA)
Description
【発明の詳細な説明】
本発明は分光光度計内から測定に支障のあるガ
スを排除するためのガスパージ機構に関するもの
である。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a gas purge mechanism for eliminating gases that interfere with measurement from within a spectrophotometer.
分光光度計を用いて気体試料などのスペクトル
を測定する場合に、測定波長範囲において吸収線
を持たないガスで分光器室内および試料室内のガ
スをパージする必要がある。一般に赤外領域の分
光分析では大気中の炭酸ガスや水蒸気がスペクト
ルの測定に悪影響を及ぼすので乾燥空気、窒素ガ
ス、希ガスなどの気体を用いて分光分析装置内の
大気のパージを行つている。従来は試料室および
分光器室のガスパージを行うのに約1時間を費や
していたので、多数の試料を連続して効率的に測
定することができないという欠点があつた。すな
わち第1図に示すように試料室1と分光器室2と
の隔壁3には光束通過窓4が透設されているの
で、試料を変更する際に試料室1ばかりでなく分
光器室2にも大気が入り込み、この分光器室2の
大気のパージに長時間を要するためである。そこ
でこの対策として、試料交換時に光束通過窓4を
遮蔽する機構を設けることが考えられるが、この
方法では試料室内に光学素子を挿入する必要があ
る場合に調整のための光を通すことができないの
で光学調整ができないという欠点がある。なお図
中、7は光源室である。 When measuring the spectrum of a gas sample using a spectrophotometer, it is necessary to purge the gas in the spectrometer chamber and the sample chamber with a gas that does not have an absorption line in the measurement wavelength range. Generally, in spectroscopic analysis in the infrared region, carbon dioxide and water vapor in the atmosphere have a negative effect on spectrum measurements, so gases such as dry air, nitrogen gas, and rare gases are used to purge the atmosphere inside the spectrometer. . Conventionally, it took about one hour to gas purge the sample chamber and spectrometer chamber, which had the disadvantage that it was not possible to continuously and efficiently measure a large number of samples. That is, as shown in FIG. 1, a light flux passing window 4 is provided in the partition wall 3 between the sample chamber 1 and the spectrometer chamber 2, so that when changing the sample, not only the sample chamber 1 but also the spectrometer chamber 2 This is because the atmosphere enters the spectrometer chamber 2, and it takes a long time to purge the atmosphere in the spectrometer chamber 2. As a countermeasure against this problem, it may be possible to provide a mechanism to shield the light flux passing window 4 when replacing the sample, but this method does not allow light to pass through for adjustment when it is necessary to insert an optical element into the sample chamber. Therefore, it has the disadvantage that optical adjustment is not possible. In addition, in the figure, 7 is a light source chamber.
本発明は上記の問題点に鑑み、光束通過窓4を
開いたまま試料室1と分光器室2との気体の流通
を遮断してパージ所要時間を短縮することを目的
とするものである。 In view of the above-mentioned problems, the present invention aims to shorten the time required for purging by blocking the flow of gas between the sample chamber 1 and the spectrometer chamber 2 while leaving the light beam passage window 4 open.
以下図面に基づいて本発明を詳述する。第2図
は本発明の一実施例を示したもので、同図aの3
は第1図における試料室1と分光器室2との間の
隔壁3を示している。この隔壁3に透設された光
束通過窓4の周縁に沿つてリング状のガス供給パ
イプ5が設けられ、このガス供給パイプ5のリン
グ内側面に多数個の細孔6が列設されている。各
細孔6から噴出するパージ用ガスは第2図bに示
すように、光束通過窓4の光軸に向かつて求心状
に吹き寄せられ、中心部の厚みの大きい円板状の
ガスカーテンを形成して、試料室1から分光器室
2への空気の進入を防止する。また細孔6の向き
を第2図aに示すように若干試料室1の方向へ向
けておけば一層効果があるが、通常分光器室2の
気圧が大気圧よりも高くなるので、必ずしも細孔
6の向きを試料室1側へ向ける必要はない。 The present invention will be explained in detail below based on the drawings. Figure 2 shows an embodiment of the present invention, and 3 in Figure 2a shows an embodiment of the present invention.
1 shows the partition wall 3 between the sample chamber 1 and the spectrometer chamber 2 in FIG. A ring-shaped gas supply pipe 5 is provided along the periphery of the light flux passing window 4 provided through the partition wall 3, and a large number of pores 6 are arranged in a row on the inner surface of the ring of the gas supply pipe 5. . As shown in Fig. 2b, the purge gas ejected from each pore 6 is blown centripetally toward the optical axis of the light flux passing window 4, forming a disk-shaped gas curtain with a large thickness at the center. This prevents air from entering the spectrometer chamber 2 from the sample chamber 1. Further, it is more effective to orient the pore 6 slightly toward the sample chamber 1 as shown in Figure 2a, but since the pressure in the spectrometer chamber 2 is usually higher than the atmospheric pressure, it is not always necessary to It is not necessary to orient the hole 6 toward the sample chamber 1 side.
上記のように構成された分光光度計のパージ機
構を使用する際には、試料交換のために試料室1
を開放する前にガス供給パイプ5へのパージ用ガ
スの供給を開始し、内部の圧力が大気圧より若干
高くなつた時点で試料室1を大気中に開放する。
このとき試料室1内には炭酸ガスや水蒸気を含ん
だ大気が進入するが、分光器室2はガス供給パイ
プ5の細孔6から噴出するパージ用ガスで形成さ
れたガスカーテンによつて大気と遮断され、分光
器室2内には大気圧よりも若干高い圧力のパージ
用ガスが充満している。この状態で試料および試
料と共に挿入された光学素子の光軸調整を行つた
のち試料室1の扉を閉じさらに数分間ガス供給パ
イプ5にパージ用ガスの供給を続けていると、供
給されたパージ用ガスに見合う量の試料室内ガス
が試料室の隙間から押し出され試料室1内の大気
のパージが行われるのでその後ガスの供給を停止
しスペクトルの測定を開始する。なお分光器室2
内のパージ用としてガス供給手段を上記リング状
ガス供給パイプ5とは別個に設けてもよく、その
場合にもパージ用ガスは同種のものを用いる。ま
た走査鏡の摺動用にガスベアリングを用いる型の
赤外フーリエ分光光度計においては、ガスベアリ
ングに用いるガスをガスカーテンにも使用する。 When using the purge mechanism of the spectrophotometer configured as described above, the sample chamber must be
Before opening the sample chamber 1, supply of purge gas to the gas supply pipe 5 is started, and when the internal pressure becomes slightly higher than atmospheric pressure, the sample chamber 1 is opened to the atmosphere.
At this time, the atmosphere containing carbon dioxide gas and water vapor enters the sample chamber 1, but the spectrometer chamber 2 is closed to the atmosphere by a gas curtain formed by the purge gas ejected from the pores 6 of the gas supply pipe 5. The spectrometer chamber 2 is filled with purge gas at a pressure slightly higher than atmospheric pressure. In this state, after adjusting the optical axis of the sample and the optical elements inserted together with the sample, the door of the sample chamber 1 is closed and purge gas is continued to be supplied to the gas supply pipe 5 for several more minutes. The gas in the sample chamber in an amount corresponding to the amount of gas used is pushed out through the gap in the sample chamber, and the atmosphere in the sample chamber 1 is purged, after which the gas supply is stopped and spectrum measurement is started. In addition, spectrometer room 2
A gas supply means for purging the inside may be provided separately from the ring-shaped gas supply pipe 5, and in that case, the same type of purge gas is used. Furthermore, in an infrared Fourier spectrophotometer that uses a gas bearing for sliding the scanning mirror, the gas used for the gas bearing is also used for the gas curtain.
本発明は上述のように試料変更の際にパージを
必要とする容積が小さくて済むのでパージ所要時
間を大巾に短縮することができ、測定を効率よく
行うことができるとう利点がある。 As described above, the present invention has the advantage that the volume that needs to be purged when changing samples is small, so the time required for purging can be greatly shortened, and measurements can be carried out efficiently.
第1図は従来例を示す斜視図、第2図は本発明
の一実施例を示すもので、aは要部側面図、bは
要部正面図である。
1は試料室、2は分光器室、3は隔壁、4は光
束通過窓、5はガス供給パイプ、6は細孔、7は
光源室。
FIG. 1 is a perspective view showing a conventional example, and FIG. 2 shows an embodiment of the present invention, in which a is a side view of the main part and b is a front view of the main part. 1 is a sample chamber, 2 is a spectrometer chamber, 3 is a partition wall, 4 is a light flux passing window, 5 is a gas supply pipe, 6 is a pore, and 7 is a light source chamber.
Claims (1)
窓を透設し、光束通過窓の周縁に沿つて分光器室
側に設けられたガス供給パイプ相互対向側面に多
数個の細孔を列設し、試料交換時に分光器室内の
ガス圧力を大気圧より少し高くして、上記細孔よ
りパージ用ガスを対向的に噴出させてエヤカーテ
ンを形成せしめるようにしたことを特徴とする分
光光度計のガスパージ機構。1. A light flux passing window is installed in the partition wall that partitions the sample chamber and the spectrometer room, and a large number of pores are lined up along the periphery of the light flux passing window on opposite sides of the gas supply pipe provided on the spectrometer room side. A spectrophotometer characterized in that the gas pressure in the spectrometer chamber is made slightly higher than atmospheric pressure when a sample is exchanged, and purge gas is ejected from the pores in opposite directions to form an air curtain. gas purge mechanism.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP23000982A JPS59120825A (en) | 1982-12-27 | 1982-12-27 | Gas purge mechanism of spectrophotometer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP23000982A JPS59120825A (en) | 1982-12-27 | 1982-12-27 | Gas purge mechanism of spectrophotometer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59120825A JPS59120825A (en) | 1984-07-12 |
| JPH041289B2 true JPH041289B2 (en) | 1992-01-10 |
Family
ID=16901161
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP23000982A Granted JPS59120825A (en) | 1982-12-27 | 1982-12-27 | Gas purge mechanism of spectrophotometer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59120825A (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6192836U (en) * | 1984-11-21 | 1986-06-16 | ||
| JPH02120038U (en) * | 1989-03-15 | 1990-09-27 | ||
| US6421127B1 (en) * | 1999-07-19 | 2002-07-16 | American Air Liquide, Inc. | Method and system for preventing deposition on an optical component in a spectroscopic sensor |
| JP5678408B2 (en) * | 2009-03-10 | 2015-03-04 | ウシオ電機株式会社 | Illuminance measuring device for excimer lamp |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5512050Y2 (en) * | 1975-10-15 | 1980-03-15 | ||
| JPS53122988U (en) * | 1977-03-07 | 1978-09-30 | ||
| JPS616429Y2 (en) * | 1979-02-13 | 1986-02-26 | ||
| JPS55164521U (en) * | 1979-05-11 | 1980-11-26 | ||
| JPS6017732Y2 (en) * | 1980-03-24 | 1985-05-30 | 富士通株式会社 | Wind structure of infrared defect inspection equipment |
-
1982
- 1982-12-27 JP JP23000982A patent/JPS59120825A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59120825A (en) | 1984-07-12 |
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