JPH0413095B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a polishing jig, more specifically, a jig that clamps and holds a plurality of polished materials such as wafer chips when polishing the end face of the polished materials. Regarding.

(Prior Art) FIGS. 7 to 9 show a conventional right-angle polishing jig for semiconductor wafer chips, in which 20 is a rectangular jig body, and 21 and 22 are side plates that are placed on the left and right sides of the jig body 20. , 23 are bolts for tightening and fixing the three members.

Chips a, a... are temporarily fixed to the lower ends of both left and right sides of the jig main body 20 at regular intervals, respectively, and then the side plates 21, 22 are tightened with bolts 23 to sandwich the chips a, a... For the temporary fixing, as shown in FIG. 9, a chip a is glued to the jig main body 20 via glue 24, a tape 25 is affixed to the chip a, and then glue is applied to it again. Chip a is adhered via 24', and tape 25' is further applied. Thereafter, the side plates 21 and 22 are placed on the jig main body 20 to sandwich the chip a.

The above-mentioned jig is manually held and slid onto a surface plate covered with abrasive grains to polish the lower end surfaces of the chips a, a, . . . and measure the depth of impurities.

Note that 26 in the figure is a concave groove through which abrasive grains flow.

(Problem to be solved by the invention) However, according to the above-mentioned conventional jig, chips a, a
It takes a lot of effort to attach and detach...and the workability is poor.

In other words, gluing and taping operations were required to temporarily fix the chips a, and since a large number of chips were to be handled, the work before and after polishing required time.

In addition, since there is no member to cover the outside of the exposed part of the chip, the chip may be damaged, or it is difficult to apply uniform force to the entire large number of chips because it is done manually, and the desired squareness (polishing accuracy) There were problems such as not being able to obtain

Therefore, the technical problem of the present invention is to solve the above-mentioned conventional problems, simplify the operation of attaching and detaching the tip, improve workability, and prevent chip breakage.
An object of the present invention is to provide a polishing jig that can improve polishing accuracy.

(Technical Means for Solving the Problems) The polishing jig of the first invention of the present application includes a holding cylinder having a hollow portion with a diameter-expanding tapered opening at its lower end, and A disc-shaped core body that fits vertically and slidably into a perfectly circular part, has engagement grooves extending in the radial direction formed at regular intervals on the lower peripheral surface, and has a small-diameter core shaft protruding from the center of the lower part, and a core body. It consists of a handle that engages to move the core body up and down within the cavity, and a chuck part attached to the outer periphery of the core shaft. It is composed of split blocks that can be divided at an angle, and a mounting groove is formed between adjacent blocks, and an engagement edge is provided on the top surface of each block so that it can be slidably suspended in the engagement groove of the core body. It is characterized in that the outer peripheral surface of each block is formed in a tapered shape to be joined to the tapered opening surface of the holding cylinder.

Further, in addition to the first invention, the polishing jig of the second invention includes an outer cylinder into which the holding cylinder is freely rotatably fitted, and in which grooves are formed at regular intervals on the lower edge of the outer cylinder. Features.

(Operation) According to the first invention, when the core body is moved downward in the cavity by operating the handle, each block of the chuck portion moves downward along the tapered opening surface of the holding cylinder, in other words, the blocks of the chuck portion move downward along the tapered opening surface of the holding cylinder. The mounting grooves between the blocks are widened by moving outward in the direction. Therefore, it is possible to insert and remove a material to be polished, such as a chip, into each of the mounting grooves.

After inserting the material to be polished, when the core body is moved upward within the cavity by operating the handle, each block of the chuck part is guided by the tapered opening surface and moves radially inward to complete the mounting groove. The width of each block is narrowed so that each workpiece to be polished is held between each block.

Further, according to the second invention, the holding cylinder holding the material to be polished as described above is fitted into the outer cylinder, grips the outer cylinder, and slides and rotates on the surface plate. Each material to be polished is brought into sliding contact with the upper surface of the surface plate while rotating freely within the outer cylinder and applying a constant force to the material by its own weight.

(Embodiment) An embodiment of the present invention will be described with reference to the drawings in the case of a jig for right-angle polishing of wafer chips.
2 and 2 show the first invention, and FIGS. 3 to 6 show the second invention, but since both inventions have the same configuration except for the presence or absence of an outer cylinder, for convenience of explanation,
Identical members are designated by the same reference numerals and have the same description.

The first invention is composed of a holding cylinder 1, a core body 2, a handle 3, and a chuck part 4.

The holding cylinder 1 has a hollow part 10 that is open at the lower end in the lower half of the cylindrical body, and has a hollow part 10 on the center line.
It passes through the shaft hole 11 leading to the hollow part 10.
The core body 2 is fitted and accommodated in the shaft hole 11, and the handle 3 is inserted into the shaft hole 11.
Insert.

The cavity 10 has a circular cross section, and its lower end is tapered to have an enlarged diameter to provide an opening surface 10a.

The core body 2 has a disc shape that fits vertically and slidably into the perfect circular portion of the hollow portion 10, and has a small-diameter core shaft 2a integrally protruding downward from the center of its lower surface.
The chuck part 4 is attached to the outer periphery of the chuck part 4.

The core body 2 has a screw hole 1 coaxially with the shaft hole 11.
2, and dovetail-shaped engagement grooves 13, 13, . . . are formed at regular intervals on the lower peripheral surface, and each groove 13 extends in the radial direction.

The handle 3 has a flange 3b integrally formed on the upper end of the rotating shaft 3a, and the rotating shaft 3a is inserted into the shaft hole 11 of the holding cylinder 1, and the lower end of the shaft is inserted into the screw hole 1 of the core body 2.
2, and the lower surface of the flange 3b is rotatably engaged with the upper surface of the holding cylinder 1.

Therefore, by rotating the handle 3, the core body 2 is screwed along the rotation axis 3a, and the hollow portion 10 is rotated.
Move up and down within.

The chuck portion 4 as a whole is composed of split blocks 4a, 4a, which divide the ring body that fits onto the core shaft 2a at equal angles in a radial plane, and there is a gap between the adjacent blocks 4a, 4a. A corresponding mounting groove 14 is formed.

In the drawings of the embodiment, a case is shown in which eight mounting grooves 14 are formed by a block divided into eight parts.

Each block 4a is provided with an engagement edge 15 on its upper surface that fits into the engagement groove 13 of the core body 2, and the engagement edge is inserted into the engagement groove 13 from the outside and suspended from the core body 2, It is arranged on the outer periphery of the core shaft 2a.

Further, each block 4a has its outer circumferential surface tapered to be joined to the tapered opening surface 10a of the cavity 10.

Therefore, each block 4a is attached to the core body 2 and can freely move up and down within the cavity 10 together with the core body 2.
and is movable in the radial direction with respect to the core body 2,
It is possible to move outward in the downward movement state, that is, the mounting groove 14 is widened (double-dot chain line in Figs. 2 and 4), and in the upward movement, it is guided by the tapered opening surface 10a and moves inward. The width of the mounting groove 14 is narrowed (solid line in the figure).

Therefore, the first invention having the above structure (Fig. 1, Fig. 2)
To explain how to use it, turn the handle 3 to move the core body 2 down and widen the mounting grooves 14, 14 (in actual work, hold the mounting groove 14 on the top side). (grasp the cylinder and rotate the handle).

In this state, after inserting one or more wafer chips a into each mounting groove 14, rotate the handle 3 in the opposite direction to narrow the mounting grooves 14, 14... ...blocks 4a, 4a
It is held in between.

In addition, the amount of protrusion of chips a, a, etc. should be kept constant by using a block with a depth suitable for mounting according to the size of the chips, or by inserting a spacer into the mounting groove. .

Then, the holding cylinder 1 is placed on a surface plate (not shown) covered with abrasive grains so that the chips a, a, etc. are in contact with the holding cylinder 1, and the operator grips the holding cylinder 1 and removes the chips while reciprocating and rotating it. Polish it by sliding it into contact with the surface plate.

Note that mechanical polishing may be used instead of manual polishing by an operator, and in that case, the holding cylinder 1 may be attached to a movable part of a polishing machine.

Next, the second invention is shown in FIGS. 3 to 6, and the chuck structure for attaching and detaching chips a, a, etc.
This is the same as the invention, and the outer cylinder 5 is used during polishing work.

The outer cylinder 5 is a cylindrical body having an inner diameter slightly larger than the outer diameter of the holding cylinder 1, and its lower end surface is formed into a tooth shape and provided with grooves 16, 16, . . . spaced at regular intervals.

As described above, the holding cylinder 1 holding the chips a, a, etc. in the chuck part 4 is inserted into the outer cylinder 5 so as to be freely rotatable, and the outer cylinder 5 and the holding cylinder 1 are inserted into the third
The outer cylinder 5 is placed on the surface plate in the state shown in the figure, and the operator
Grinding the chip, it slides and polishes the chip while reciprocating and rotating it on the surface plate.

The abrasive grains on the surface plate flow into the outer cylinder 5 through the grooves 16, 16, . . . and are supplied to the chips a, a, .

(Effect) According to the first invention of the present application, the mounting groove of the chuck portion is widened or narrowed by operating the handle, and the material to be polished is attached to and removed from the groove in the widened state, and the material to be polished is inserted in the narrowed state. The material can be held tightly together, eliminating the need for labor-intensive temporary fixing operations such as gluing and taping the material to be polished, which was required in the past, making it extremely easy to attach and remove the material to be polished, improving work efficiency. be able to.

Furthermore, since the materials to be polished are arranged radially, even in manual polishing, it is possible to reduce the load applied to each material to be polished and variations around the abrasive grains, thereby increasing polishing accuracy.

According to the second invention of the present application, since the outer periphery of the material to be polished is covered and protected by the outer cylinder, chip loss can be prevented, and when polishing is done manually, the operator can grip the outer cylinder and polish the material. Since the operator does not apply force directly to the holding cylinder during the operation, a uniform load is applied to the entire chip, further improving polishing accuracy.

[Brief explanation of drawings]

Fig. 1 is a sectional view of the jig of the first invention of the present application, Fig. 2 is a bottom view thereof, Fig. 3 is a partially cutaway sectional view of the jig of the second invention, Fig. 4 is a plan view thereof, and Fig. 5. is a sectional view taken along line ()-(), FIG. 6 is an isolated sectional view, FIG. 7 is a side view of the conventional jig, and FIG. 8 is its ()--
9 is an enlarged view of part A thereof. In the figure, 1 is a holding cylinder, 2 is a core body, 2a is a core shaft, 3
is the handle, 4 is the chuck, 4a is the block,
5 is an outer cylinder, 10 is a cavity, 10a is a tapered opening, 14 is a mounting groove, 16 is a groove, and a is a wafer chip.

Claims (1)

[Scope of Claims] 1. A holding cylinder having a hollow portion with a diameter-expanding tapered opening at the lower end, and a holding cylinder that is vertically slidably fitted into the perfect circular portion of the hollow portion, and has a radial direction on the lower circumferential surface. a disc-shaped core body formed with engagement grooves extending at regular intervals and from which a small-diameter core shaft can be projected from the center of the lower part; a handle that engages with the core body and moves the core body up and down within the cavity; It consists of a chuck part attached to the outer periphery of the core shaft, and the chuck part as a whole is composed of split blocks that can divide the ring body that fits into the core shaft at equal angles in a plane radial shape, and the chuck part is composed of a split block that can be divided at equal angles in a radial plane. Attachment grooves are formed between the blocks, and an engagement edge is provided on the upper surface of each block so that the block is slidably suspended in the engagement groove of the core body, and the outer circumferential surface of each block is formed in the tapered shape of the holding cylinder. A polishing jig formed into a tapered shape that connects to the opening surface. 2. A holding cylinder having a hollow portion with a diameter-expanding tapered opening at the lower end, and a holding cylinder that fits into the circular portion of the hollow portion so as to be vertically slidable, and has an engagement groove extending in the radial direction on the lower circumferential surface. A disc-shaped core body formed at regular intervals and from which a small-diameter core shaft can protrude from the center of the lower part, a handle that engages with the core body and moves the core body up and down within the cavity, and a handle on the outer periphery of the core shaft. It consists of an attached chuck part and an outer cylinder into which the holding cylinder is freely rotatably fitted and which has grooves formed at regular intervals on its lower edge, and the chuck part as a whole fits into the core shaft. It is composed of split blocks that divide the ring body at equal angles in a radial plane, and a mounting groove is formed between the adjacent blocks, and an engagement edge is provided on the top surface of each block to allow engagement of the core body. A polishing jig that is slidably suspended in a groove and formed in a tapered shape so that the outer peripheral surface of each block is joined to the tapered opening surface of the holding cylinder.