JPH0413440B2 - - Google Patents
Info
- Publication number
- JPH0413440B2 JPH0413440B2 JP18725388A JP18725388A JPH0413440B2 JP H0413440 B2 JPH0413440 B2 JP H0413440B2 JP 18725388 A JP18725388 A JP 18725388A JP 18725388 A JP18725388 A JP 18725388A JP H0413440 B2 JPH0413440 B2 JP H0413440B2
- Authority
- JP
- Japan
- Prior art keywords
- value
- plating
- voltage
- current
- tank
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000007747 plating Methods 0.000 claims description 65
- 238000001514 detection method Methods 0.000 claims description 27
- 238000000034 method Methods 0.000 claims description 11
- 239000007788 liquid Substances 0.000 claims description 5
- 238000009713 electroplating Methods 0.000 claims description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 7
- 229910052799 carbon Inorganic materials 0.000 description 7
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 6
- 229910052802 copper Inorganic materials 0.000 description 6
- 239000010949 copper Substances 0.000 description 6
- 230000000694 effects Effects 0.000 description 5
- 230000004913 activation Effects 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 230000000873 masking effect Effects 0.000 description 2
- 229910000679 solder Chemical group 0.000 description 2
- 238000011179 visual inspection Methods 0.000 description 2
- 239000000654 additive Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000007772 electroless plating Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Electroplating Methods And Accessories (AREA)
Description
産業上の利用分野
本発明は、適切な電流・電圧の制御下に電気メ
ツキを行なうための制御方法に関する。
従来の技術及びその問題点
電気メツキにおいては、被メツキ物の表面積に
応じた電流・電圧の制御が、メツキ槽の特性及び
メツキ膜厚精度の上で重要である。このため従来
は、被メツキ物の表面積を目視により概略的に判
断するか、あるいは被メツキ物の表面の展開図か
らその表面積を算出する方法が取られていた。し
かしながら、目視による場合は精度の点で劣り、
展開図による場合はその製作が面倒である上、こ
れによつても充分な精度は得難かつた。
特に、プリント基板のスルーホールを含む回路
パターンのメツキのように多種の形態のメツキ領
域についてその面積を逐一求めるのは大きな手間
を要していた。
また、プリント基板のメツキにおいては無電解
メツキにより形成された一次銅に対し所定領域の
マスキングをした後、活性化槽にプリント基板を
浸漬し、その後二次銅としての銅メツキ及び半田
メツキが施されるのであるが、これ等の二次銅及
び半田メツキを施す段階は、製造工程の約80%以
上を経過した段階であるので、これ等のメツキに
おける不良は製造コストの上で大きな無駄を生じ
ることとなる。従つて、プリント基板において
は、被メツキ領域の表面積を精度良く求め、これ
に基づき適切な電流・電圧制御を行なうことにつ
いての要請が特に強い。
また、メツキ電流・電圧のより適切な制御のた
めには、被メツキ物だけでなく、該被メツキ物と
ともにメツキ液に浸漬される支持具に及ぶメツキ
の領域についての面積を求める必要があり、これ
等被メツキ領域の正確な把握をさらに困難にして
いた。
本発明は、これ等従来技術の問題点を解決し、
被メツキ領域の面積を精度良く求め、これに基づ
き適切なメツキ電流・電圧を付与することができ
る電気メツキにおける電流・電圧の制御方法を提
供することを目的とする。
課題を解決するための手段
本発明の前記目的は、メツキ工程におけるメツ
キ槽と別個に、該メツキ槽と同じ処理液を収容し
た検出用槽を設け、該検出用槽に所定面積の正負
電極板を挿入して通電し、設定値の電流又は電圧
下での電圧値又は電流値を参照値とし、メツキ槽
内の被メツキ物と、陽極との間に、前記設定値及
び参照値の両値の一方に対応する電流又は電圧を
生ぜしめ、このときの電圧値又は電流値と前記両
値の他方との比較に基づき前記被メツキ物の被メ
ツキ領域の面積の値又は該面積に対応する値を求
め、該値に応じたメツキ電流・電圧を付与するこ
とを特徴とする電気メツキにおける電流・電圧の
制御方法により達成される。
実施例
以下、本発明の実施例につき添付図面を参照し
つつ説明する。
図は、プリント基板のメツキ処理装置の一部を
上方から見た状態で概略的に示している。10は
メツキ槽であり、該メツキ槽内の両側に並べられ
た陽極用カーボン板11は、ブスバー(金属製導
帯)12により支持され電気的に接続され、該ブ
スバーは整流器40の陽極に接続されている。無
電解銅メツキと所定パターンのためのマスキング
及び被マスキング表面の活性化処理を経た多数の
プリント基板は支持具13に平面的に配列され支
持されてメツキ槽の中央部に浸漬される。各プリ
ント基板は支持具13及び該支持具を吊り下げる
ブスバー14を経て整流器40の陰極に接続され
ている。20は検出用槽であり、該検出用槽内の
両側には陽極としてのカーボン板21がブスバー
22により吊り下げられ、該ブスバーを通じて検
出用槽のための整流器50の陽極に接続されてい
る。検出用槽の中央部には導電性を有する所定面
積の標準板23が浸漬され、これを支持するブス
バー24通じて整流器50の陰極に接続されてい
る。標準板23は、5〜20dm2程度の程度の小形
のもので良く、この例ではプリント基板の被メツ
キ領域と同じ銅製とされている。検出用槽内のカ
ーボン板21は標準板23と同一かあるいはより
大きい面積を有するようにするのが望ましい。こ
の例では、検出用槽内のカーボン板21と標準板
23とは、相互に向き合う表面間の距離が、メツ
キ槽内のカーボン板11表面とプリント基板表面
との距離と同じとなるように位置決めされてい
る。整流器40及び50は各々制御部60に接続
されている。更に、この例ではメツキ槽10と検
出用槽20とがパイプ70で連通され、該パイプ
にはポンプ71及びフイルター(図示せず)が設
けられ2つの槽10,20の間でメツキ液を循環
させ実質上同一の状態に保つようにされている。
このようにセツトした状態で、検出用槽20内
の両電極に整流器50から設定値(Va)の一定
電圧を印加し、そのときの電流値を制御部60に
参照値(Ib)として記憶させる。この電流値は1d
m2当り1A程度でよい。次にこの電圧値と同じ電
圧(基準値、Vc)で整流器40によりメツキ槽
10内の両電極に電力を供給し、このときの電流
値を検出値(Id)として制御部60に入力する。
但し、ここでいうメツキ槽への印加電圧値は、両
電極間に電流が流れるまでの抵抗電圧値を越えて
印加される電圧値である。制御部60では入力さ
れた参照値(Ib)と検出値(Id)とを対比し、そ
の比率と標準板23の面積(So)とからメツキ
槽内の被メツキ領域の面積(Sa)を算出する。
この算出は、基本的には次の式に基づいて行なわ
れる。
Sa=So×(Ib/Id)
制御部60は次にこの算出値に基づき、整流器
40に対し被メツキ領域の面積に応じた適性電圧
を発生させるように整流器40に制御信号を出力
する。これにより、メツキ槽10内のプリント基
板は適性電圧でメツキされることとなる。
以上は電圧制御をする場合の説明であるが、本
発明方法を電流制御に基づき行なうことも勿論可
能であり、検出用槽内の両電極に所定電流を生ぜ
しめてその時の電圧を参照値とし、該参照値と同
じ値の電圧を基準値としてメツキ槽内の両電極に
印加したときの電流値を検出値として制御部60
に各々入力することもできる。さらに、検出槽内
の電流・電圧の設定値、参照値と、メツキ槽内の
電流・電圧の基準値、検出値との関係を適宜組み
合わせることもでき、これらをまとめると、次の
表のようになる。
INDUSTRIAL APPLICATION FIELD The present invention relates to a control method for performing electroplating under appropriate current and voltage control. Prior art and its problems In electroplating, controlling current and voltage according to the surface area of the object to be plated is important for the characteristics of the plating bath and the accuracy of the plating film thickness. For this reason, in the past, the surface area of the object to be plated was roughly determined by visual inspection, or the surface area was calculated from a developed view of the surface of the object to be plated. However, visual inspection is less accurate;
In the case of using exploded drawings, the production is troublesome, and even with this method, it is difficult to obtain sufficient accuracy. In particular, it takes a great deal of effort to determine the areas of various types of plating regions, such as plating of circuit patterns including through-holes on printed circuit boards. In addition, when plating printed circuit boards, after masking a predetermined area of primary copper formed by electroless plating, the printed circuit board is immersed in an activation bath, and then copper plating as secondary copper and solder plating are performed. However, since the stage where these secondary copper and solder platings are applied is approximately 80% or more of the manufacturing process, defects in these platings result in a large amount of waste in terms of manufacturing costs. This will occur. Therefore, in printed circuit boards, there is a particularly strong need to accurately determine the surface area of the region to be plated and to perform appropriate current and voltage control based on this. In addition, in order to more appropriately control the plating current and voltage, it is necessary to determine the area of the plating area that extends not only to the object to be plated but also to the support that is immersed in the plating solution together with the object to be plated. This makes it even more difficult to accurately grasp the area to be plated. The present invention solves these problems of the prior art,
It is an object of the present invention to provide a method for controlling current and voltage in electroplating, which can accurately determine the area of a region to be plated and apply appropriate plating current and voltage based on this. Means for Solving the Problems The object of the present invention is to provide a detection tank containing the same treatment liquid as the plating tank separately from the plating tank in the plating process, and to install a positive and negative electrode plate of a predetermined area in the detection tank. is inserted and energized, the voltage or current value under the set value of current or voltage is used as the reference value, and both the set value and reference value are placed between the object to be plated in the plating tank and the anode. A value of the area of the region to be plated of the object to be plated or a value corresponding to the area based on a comparison of the voltage value or current value at this time and the other of the two values. This is achieved by a method of controlling current and voltage in electric plating, which is characterized by determining the value and applying plating current and voltage according to the value. Embodiments Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. The figure schematically shows a part of the printed circuit board plating processing apparatus as viewed from above. Reference numeral 10 denotes a plating tank, and anode carbon plates 11 arranged on both sides of the plating tank are supported and electrically connected to a bus bar (metal conductive band) 12, and the bus bar is connected to the anode of a rectifier 40. has been done. A large number of printed circuit boards that have been subjected to electroless copper plating, masking for a predetermined pattern, and activation of the surface to be masked are arranged and supported in a plane on a support 13, and immersed in the center of the plating bath. Each printed circuit board is connected to the cathode of a rectifier 40 via a support 13 and a busbar 14 suspending the support. Reference numeral 20 denotes a detection tank, and carbon plates 21 as anodes are suspended from busbars 22 on both sides of the detection tank, and are connected to the anode of a rectifier 50 for the detection tank through the busbars. A conductive standard plate 23 of a predetermined area is immersed in the center of the detection tank, and is connected to the cathode of a rectifier 50 through a bus bar 24 that supports it. The standard plate 23 may be as small as about 5 to 20 dm 2 , and in this example, it is made of copper, which is the same as the area to be plated on the printed circuit board. It is desirable that the carbon plate 21 in the detection tank has the same or larger area than the standard plate 23. In this example, the carbon plate 21 and the standard plate 23 in the detection tank are positioned so that the distance between their facing surfaces is the same as the distance between the surface of the carbon plate 11 in the plating tank and the surface of the printed circuit board. has been done. The rectifiers 40 and 50 are each connected to a control section 60. Further, in this example, the plating tank 10 and the detection tank 20 are connected through a pipe 70, and the pipe is provided with a pump 71 and a filter (not shown) to circulate the plating liquid between the two tanks 10 and 20. and are kept in substantially the same condition. In this set state, a constant voltage of a set value (Va) is applied from the rectifier 50 to both electrodes in the detection tank 20, and the current value at that time is stored in the control unit 60 as a reference value (Ib). . This current value is 1d
Approximately 1A per m2 is sufficient. Next, the rectifier 40 supplies power to both electrodes in the plating tank 10 with the same voltage (reference value, Vc) as this voltage value, and the current value at this time is input to the control unit 60 as a detected value (Id).
However, the voltage value applied to the plating tank here is the voltage value applied exceeding the resistance voltage value until current flows between both electrodes. The control unit 60 compares the input reference value (Ib) and detected value (Id), and calculates the area (Sa) of the area to be plated in the plating tank from the ratio and the area (So) of the standard plate 23. do.
This calculation is basically performed based on the following formula. Sa=So×(Ib/Id) Next, based on this calculated value, the control unit 60 outputs a control signal to the rectifier 40 so that the rectifier 40 generates an appropriate voltage according to the area of the region to be plated. As a result, the printed circuit board in the plating tank 10 is plated at an appropriate voltage. The above is an explanation of the case of voltage control, but it is of course possible to perform the method of the present invention based on current control, in which a predetermined current is generated in both electrodes in the detection tank and the voltage at that time is used as a reference value. The control unit 60 uses a voltage having the same value as the reference value as a reference value, and uses the current value when applied to both electrodes in the plating tank as a detected value.
You can also enter each. Furthermore, the relationship between the set value and reference value of the current/voltage in the detection tank and the reference value and detected value of the current/voltage in the plating tank can be combined as appropriate. become.
【表】
これらの中で、及びの場合は、検出用槽内
の電極板の面積とメツキ槽内の被メツキ領域の面
積との比が比較的小さい場合(例えば1:1〜
5)に、より正確に被メツキ領域の面積を求める
ことができるのに対し、及びの場合は、これ
らの比が比較的大きい場合(例えば1:6〜30)
にも使用でき、その結果検出槽の容積を小さくす
ることができ経済的である。これは、次の理由に
よると思われる。前述の電圧値と電流値との関係
は、メツキ時の電圧がメツキそのものに必要な電
圧以外に水の分解電圧としても使用されること、
メツキの進行と共に陽極が不導体化すること、ま
たメツキ液の添加剤濃度が変化すること等の諸作
用から、必ずしも正確な対応関係が保障されると
は限らない。及びの場合は、基準値として印
加されるメツキ槽の電圧を、両電極間に電流が流
れるまでの抵抗電圧値を越えて印加される電圧値
として把握することにより、前記諸作用の影響は
ある程度解消できるので、該諸作用の大きい比較
的大きなメツキ槽にも適用し得る。これに対し
及びの場合は、検出値として測定される電圧値
は前記諸要因の影響を含んでいるためこれを考慮
して取り扱う必要がある。この場合、補正すべき
値は、検出槽内の電極面積とメツキ槽内の被メツ
キ領域の面積との差が小さいほど、その把握が容
易である。したがつて、両面積の比を小さくして
補正値を考慮に入れることにより、目的とする面
積値を正確に求めることができる。
メツキ槽は、非通電状態において、被メツキ物
のための活性槽を兼ねるようにすることもでき、
この場合は該槽と同じ状態にある検出用槽で得ら
れる参照値から活性化槽の処理液の濃度変化を把
持することができ、その濃度の調整及び濃度に応
じたメツキ電流・電圧の調整を行なうことができ
る。
検出用槽の大きさは、一度に処理される被メツ
キ物の全体の大きさによりその適性な値が異なる
が、通常は、被メツキ物の約1/10から1/20の被メ
ツキ領域に通電できる大きさのものであればよ
い。
メツキ槽と検出用槽とは、各々のメツキ液が一
定の状態を保持するように管理されるのであれ
ば、特に相互に連通させる必要はない。検出用槽
内の両電極板間の距離は、実施例におけるように
メツキ槽内の両電極間の距離と等しくすることに
より、被メツキ領域の面積の算出が容易となる
が、これ等2つの電極間距離が異なる場合でも、
各々の電極間距離に基づき、検出用槽内の電流・
電圧値を基準とし、異なる被メツキ物につきメツ
キ槽内の電流・電圧値の相対的な対応関係が把握
でき、これに基づき電流・電圧制御が行われる場
合には、必ずしもこれ等2つの電極間距離を同一
とする必要はない。この場合は、被メツキ領域の
実際の面積を求めることなく、諸面積に対応する
相対値に基づいて制御が行なわれることとなる。
また、このようにメツキ槽内の種々の被メツキ
物間の相対的な面積比率に基づいて制御が行われ
る場合には、検出用槽内の標準板の材質と、メツ
キ槽内の被メツキ領の材質とは必ずしも同じでな
くてもよい。さらに、このような相対的な制御の
場合は、前述の設定値又は参照値に対して、基準
値を同じ値に取る必要はなく、例えば基準電流値
を参照電流値の1/2とするなど、ある比率を乗じ
た値とすることも可能である。
発明の効果
本発明によれば、メツキ槽内の被メツキ領域の
面積又は該面積に対応する値は、メツキ槽と別個
に設けた検出用槽内電極間の電流・電圧及び該電
流・電圧に基づきメツキ槽内電極間に付与される
電流・電圧を通じて求められるので、被メツキ物
の展開図を作製するような手間をようすることな
く精度よく求めることができ、プリント基板のよ
うな多種の形態の被メツキ物であつてもまた被メ
ツキ物の支持具の被メツキ領域をも考慮する必要
がある場合であつても、正確な被メツキ領域の面
積の把握に基づき、適性な電流・電圧の制御をす
ることができる。[Table] In the case of and, the ratio of the area of the electrode plate in the detection tank to the area of the plating area in the plating tank is relatively small (for example, 1:1 to
In 5), the area of the plating area can be determined more accurately, whereas in the case of and, the ratio of these is relatively large (for example, 1:6 to 30).
As a result, the volume of the detection tank can be reduced, which is economical. This seems to be due to the following reasons. The relationship between the voltage value and current value mentioned above is that the voltage during plating is used not only as the voltage required for plating itself but also as the water decomposition voltage.
Due to various effects such as the anode becoming nonconductive as plating progresses and the additive concentration of the plating solution changing, an accurate correspondence is not always guaranteed. In the case of and, by understanding the voltage applied to the plating tank as a reference value as the voltage applied beyond the resistance voltage value until current flows between both electrodes, the effects of the above-mentioned effects can be reduced to some extent. Since the problem can be solved, it can also be applied to a relatively large plating tank in which the various effects are large. On the other hand, in the case of and, since the voltage value measured as the detected value includes the influence of the above-mentioned factors, it is necessary to take this into consideration when handling the voltage value. In this case, the smaller the difference between the electrode area in the detection tank and the area of the plating area in the plating tank, the easier it is to understand the value to be corrected. Therefore, by reducing the ratio of both areas and taking the correction value into consideration, the target area value can be accurately determined. The plating tank can also serve as an activation tank for the objects to be plated in the non-energized state,
In this case, it is possible to grasp the concentration change of the processing liquid in the activation tank from the reference value obtained from the detection tank in the same state as the tank, and adjust the concentration and adjust the plating current and voltage according to the concentration. can be done. The appropriate size of the detection tank varies depending on the overall size of the object to be plated at one time, but it is usually suitable for the area to be plated that is about 1/10 to 1/20 of the object to be plated. It only needs to be large enough to conduct electricity. The plating tank and the detection tank do not need to communicate with each other as long as each plating solution is managed to maintain a constant state. By making the distance between both electrode plates in the detection tank equal to the distance between both electrodes in the plating tank as in the example, it becomes easy to calculate the area of the plating area. Even if the distance between the electrodes is different,
Based on the distance between each electrode, the current in the detection tank
Using the voltage value as a reference, it is possible to grasp the relative correspondence between the current and voltage values in the plating tank for different objects to be plated, and when current and voltage control is performed based on this, it is not always possible to determine the relationship between these two electrodes. It is not necessary that the distances be the same. In this case, control is performed based on relative values corresponding to various areas without determining the actual area of the area to be plated. In addition, when control is performed based on the relative area ratio between various objects to be plated in the plating tank, the material of the standard plate in the detection tank and the area to be plated in the plating tank are The material does not necessarily have to be the same as the material. Furthermore, in the case of such relative control, it is not necessary to set the reference value to the same value as the set value or reference value described above; for example, the reference current value may be set to 1/2 of the reference current value. , it is also possible to use a value multiplied by a certain ratio. Effects of the Invention According to the present invention, the area of the region to be plated in the plating tank or the value corresponding to the area is determined by the current/voltage between the plating tank and the electrode in the detection tank provided separately, and the current/voltage. Since it is determined through the current and voltage applied between the electrodes in the plating tank, it can be determined accurately without the hassle of creating a development diagram of the object to be plated. Even if it is necessary to consider the plating area of the support for the plated object, it is necessary to determine the appropriate current and voltage based on the accurate understanding of the area of the plated area. can be controlled.
図は本発明方法に使用するメツキ装置の一部を
概略的に示す平面図である。
10……メツキ槽、11……カーボン板(陽極
板)、13……支持具、20……検出用槽、21
……カーボン板(陽極板)、23……標準板、4
0,50……整流器、60……制御部、70……
パイプ、71……ポンプ。
The figure is a plan view schematically showing a part of the plating device used in the method of the present invention. 10... plating tank, 11... carbon plate (anode plate), 13... support, 20... detection tank, 21
...Carbon plate (anode plate), 23...Standard plate, 4
0, 50... Rectifier, 60... Control unit, 70...
Pipe, 71...pump.
Claims (1)
ツキ槽と同じ処理液を収容した検出用槽を設け、
該検出用槽に所定面積の正負電極板を挿入して通
電し、設定値の電流又は電圧下での電圧値又は電
流値を参照値とし、メツキ槽内の被メツキ物と、
陽極との間に、前記設定値及び参照値の両値の一
方に対応する電流又は電圧を生ぜしめ、このとき
の電圧値又は電流値と前記両値の他方との比較に
基づき前記被メツキ物の被メツキ領域の面積の値
又は該面積に対応する値を求め、該値に応じたメ
ツキ電流・電圧を付与することを特徴とする電気
メツキにおける電流・電圧の制御方法。 2 前記被メツキ物がプリント基板であり、前記
検出用槽に挿入される正負電極表面間の距離と、
前記プリント基板表面から前記陽極表面までの距
離とが、実質上等しくされていることを特徴とす
る請求項1に記載の制御方法。 3 前記検出用槽と前記メツキ槽とが処理液の状
態を実質上同一とするために連通路により連通さ
れていることを特徴とする請求項1又は2に記載
の制御方法。[Claims] 1. A detection tank containing the same treatment liquid as the plating tank is provided separately from the plating tank in the plating process,
Insert a positive and negative electrode plate of a predetermined area into the detection tank and energize it, and use the voltage or current value under the set value of current or voltage as a reference value, and the object to be plated in the plating tank.
A current or voltage corresponding to one of the set value and the reference value is generated between the anode and the object to be plated based on a comparison between the voltage value or current value at this time and the other of the two values. 1. A method of controlling current and voltage in electroplating, characterized in that a value of the area of a region to be plated or a value corresponding to the area is determined, and a plating current and voltage are applied according to the value. 2. The object to be plated is a printed circuit board, and the distance between the positive and negative electrode surfaces inserted into the detection tank;
2. The control method according to claim 1, wherein the distances from the printed circuit board surface to the anode surface are substantially equal. 3. The control method according to claim 1 or 2, wherein the detection tank and the plating tank are communicated with each other by a communication path so that the state of the processing liquid is substantially the same.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18725388A JPH02175899A (en) | 1988-07-26 | 1988-07-26 | Method for controlling current and voltage in electroplating |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18725388A JPH02175899A (en) | 1988-07-26 | 1988-07-26 | Method for controlling current and voltage in electroplating |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02175899A JPH02175899A (en) | 1990-07-09 |
| JPH0413440B2 true JPH0413440B2 (en) | 1992-03-09 |
Family
ID=16202732
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18725388A Granted JPH02175899A (en) | 1988-07-26 | 1988-07-26 | Method for controlling current and voltage in electroplating |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02175899A (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2014066313A1 (en) * | 2012-10-23 | 2014-05-01 | Moses Lake Industries, Inc. | Improvements in plating bath metrology |
-
1988
- 1988-07-26 JP JP18725388A patent/JPH02175899A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH02175899A (en) | 1990-07-09 |
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