JPH0416648B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a device, a so-called fluid logic device, which uses fluid pressure that changes in a pulsed manner to greatly control another fluid pressure.

It is used in areas where it is difficult to use electronic circuits and devices, such as in locations that require explosion protection or in adverse environments such as radiation and high temperatures. Elements that perform digital logic control operations have been developed and come into use.

Diaphragm-type elements are known as these elements, which control the output pressure by deflecting a bellows or diaphragm depending on the input fluid pressure, thereby blocking the passage of another fluid. It is being This element is superior to other elements in that it can generate a larger control pressure and directly operate operating equipment with its output. A typical example of such a device announced is GJJanu: Utilization of Miniature.
Diaphragm Leakport Deices in Fluidic
Applications, ASME paper 72−WA/Flcs−
10 (1972) GWADummer and J.Mackenzie
Robertson: Fluidic Component and
Equipment, Pergamon Press (1969), and published applications include Utility Model Publication No. 48-25993 and Publication Utility Model No. 48-25994. All of these systems are based on the method of directly or indirectly opening and closing fluid passages using elastic partitions such as diaphragms or bellows, and the combination of these methods performs logical operations such as AND, OR, and NOT. However, this element has the disadvantage that it cannot perform a memory operation as it is, because the principle of this element is that when the input pressure disappears, the output pressure returns to its original state. Therefore, if you try to perform a flip-flop operation, which is a fundamentally important operation of a logic circuit, even if you use a complexly deformed element such as a combination of multiple diaphragms, it will not work as a combination of multiple elements. The problem is that it has to be done.

As one method for solving these problems, Japanese Patent Application Laid-Open No. 119204/1983 has been published. this is,
The input fluid pressure introduced from the outside is received by the closed first elastic partition wall like a bellows and converted into a displacement of its movable end; The fluid pressure is converted into fluid pressure by a standard air micrometer circuit formed by an intermediate chamber with an opening facing the movable end and communicating with the outside air; this intermediate chamber is used as a second elastic partition. Utilizing the positive feedback effect produced by providing the opening at the movable end of the second elastic partition, the pressure in the intermediate chamber is kept between high pressure (pressure at the supply port) and low pressure (pressure at the outside air). It is a sudden change. The effects obtained by the invention can be summarized as follows: (1) When the input fluid pressure introduced into the first elastic partition chamber is a positive pulse, the output pressure generated in the intermediate chamber is high pressure (positive). If the input fluid pressure introduced into the first elastic partition chamber is a negative pulse, the output pressure generated in the intermediate chamber is a low pressure (negative). (2) The input fluid pressure introduced into the first elastic bulkhead continuously forms a square wave with a blunted shape or a periodic wave with a collapsed shape. In the case of a pressure fluctuation that varies, a pressure fluctuation of the same phase is generated in the intermediate chamber in the form of a precise square wave.

In contrast to the effects obtained by the above-mentioned invention, depending on the application, there may be an effect that can be said to be exactly the opposite in terms of sign, that is, by introducing a pulse of positive pressure, the output is lower than the high voltage (positive). Flip-flop operation such as switching to a low pressure (negative) or periodically changing input fluid pressure causes the output fluid pressure to have the opposite sign to the input fluid pressure, and the output fluid pressure has an accurate square wave shape. There are many cases where such an effect (inverter with Schmitt trigger) is required.

In order to realize something with this behavior, since it is impossible to use the element according to the invention alone, an inverter (NOT) element such as another diaphragm element that inverts the input signal is added in front of the element according to the invention. It is necessary to do so.

However, unlike in the case of electronic circuits, actual devices constructed in this manner tend to be quite complex, as there are problems such as pressure level and impedance matching between the elements to be combined. Therefore, an element with a relatively simple structure that has the above two effects would be extremely effective in practice, and its realization is strongly desired.

The present invention has been made to solve the above-mentioned problems of such elements, and its purpose is to eliminate the above-mentioned problems and to change the sign of the input pulse signal while also having the operational functions of conventional diaphragm elements. It is an object of the present invention to provide a fluidic element capable of performing a logical memory operation such as switching the output pressure level in the opposite direction. Additionally, it is an object of the present invention to provide an element that performs an operation of converting a distorted pressure waveform into an accurate square wave pressure waveform having an opposite phase relationship.

The gist of the invention is to provide a chamber having a stretchable elastic partition in a closed fixed wall chamber, the closed movable end of the elastic partition being spaced apart from an opening provided in the fixed wall of the fixed wall chamber. The facing movable ends are provided so as to face each other, and the distal end surfaces of the opposing movable ends are formed into surfaces that can seal the opening when the elastic partition wall is extended and the opening is closed, and The fluid logic element is characterized in that a fluid inlet/outlet is provided on the opposite rear end side of the fluid logic element, and a fluid discharge outlet communicating with the outside air is provided in the sealed fixed wall chamber. There are:
A fluid passage formed by a throttle opening provided in the wall of the fixed wall chamber, an opening provided in the fixed wall, and a movable end surface of the elastic partition facing the opening; This operation is generated by combining a feedback mechanism formed by being provided at the end.
What is important here is that, first, an ordinary air micrometer circuit passes through a throttle port and enters a chamber that receives fluid from a fluid supply port, facing an end face that is a displacement input, and injects outside air from between this and the end face. In contrast, in the fluid circuit, the fluid from the supply port is connected to the small port and The arrangement of the small opening with respect to the throttle opening and its opposing surface, in which the air enters the chamber through the gap between the opposing end face and the opposite end face that receives displacement input, and the outside air flows out through the throttle opening is different from that of the ordinary air micrometer circuit described above. It is exactly the opposite (inverted air micrometer circuit). Second, the elastic partition wall has the role of converting the input fluid pressure applied to the element into a displacement of the end face for input to the fluid circuit, and also provides a feedback effect to the fluid circuit. It is fulfilling its role.
This feedback mechanism has a positive feedback effect, as opposed to the usual negative feedback.

That is, the fluid passage consisting of the small port through which fluid is supplied from the outside through the fluid inlet/outlet, the opposing end surface thereof, and the throttle port is the same type of circuit as that normally called an air micrometer or nozzle flapper system. For example, if an elastic partition having a face facing the opening is a fixed wall chamber, a fluid pressure corresponding to the size of the gap between the opening and the opposite end surface will be generated in the chamber between the opening and the throttle opening. . Therefore, when the facing surface facing the fore edge is displaced, the gap is also displaced, and a corresponding fluid pressure change occurs between the fore edge and the aperture. A conversion action can be performed to change the pressure change in the chamber between the mouth and the mouth.

In the present invention, an inner chamber formed of an elastic partition is provided inside the chamber between the small opening and the throttle opening formed of a sealed fixed wall, and input fluid pressure is introduced into this inner chamber, and the input fluid pressure is introduced into the inner chamber. The movable end of the elastic partition is formed with an end face facing the operative mouth.
By doing so, in the portion where the mouth is provided, the elastic partition wall provided with the opposite end face of the mouth is caused to change the displacement of the opposite end face in response to the input fluid pressure introduced into the inner chamber. and a positive feedback effect on the fluid circuit. Specifically, as the end face facing the mouth approaches the mouth, the pressure in the chamber between the mouth and the aperture decreases. As a result, the elastic partition having an end face facing the mouth is expanded, this facing end face is displaced in the direction of the mouth, and the pressure in the chamber between the mouth and the aperture is further reduced. When the opposing end faces are farther away from the edge, the opposite effect occurs.

In order to perform this kind of operation effectively, it is necessary to increase the pressure-displacement conversion rate of the elastic partition whose end face faces the end face with the small hole (the rate of pressure-displacement conversion of the movable end face with respect to the pressure change introduced into the elastic partition). percentage of displacement)
may be selected to be a value greater than a certain value in accordance with the conversion characteristics of the fluid circuit formed by the mouth and the aperture when the fixed wall is an elastic partition having opposing end faces of the mouth. With this configuration, the positive feedback effect becomes effective, and the gap between the small hole and its opposing end surface rapidly changes from a predetermined constant value to a value between another constant value. Accordingly, the pressure in the chamber between the mouth and the throttle opening is maintained at a constant high pressure value or a constant low pressure value equal to the pressure of the outside air. In this case, which pressure value to take is determined by the set value of the gap between the edge and its opposing end surface in a state where no external pressure is supplied to the element, and the clearance of the opposing end surface of the edge. It depends on how the opposing end surfaces are displaced after air is supplied to the element. In addition, in order to change the pressure in the chamber between the mouth and the aperture from one of the two pressure values to the other pressure value, the end face facing the mouth must be It is only necessary to displace it by a certain value or more, and the magnitude depends on the predetermined method of creating the gap. In this case, in order to move from a state where a high pressure value is held to a state where a low pressure value is held, the opposing end face should be moved to the edge side.
In the opposite case, the facing end surface may be displaced away from the edge. In order to displace the end face facing the mouth, it is sufficient to create a pressure difference between the inside and outside of the elastic partition having the end face facing the mouth, and this introduces fluid pressure through the fluid inlet/outlet leading to the inside of this elastic partition. This can be achieved by:

The fluid logic device of the present invention will be explained below based on the drawings.

FIG. 1 is a sectional view showing one embodiment of the present invention;
2 and 3 are cross-sectional views showing changes in relative positions of main movable parts to explain the operating state of the fluid logic element shown in FIG. 1, and FIG. It is a sectional view showing other embodiments of the present invention.

In FIG. 1, the inside of a fixed wall chamber surrounded by a fixed wall 1 is divided into two chambers 7 and 8 by a bellows-like elastic partition 2 which can be expanded and contracted. One end of the elastic partition 2 is fixed at 9, and the other end of the elastic partition 2 is closed at the end face 4. The shape of the end face 4 is such that when the end face 6 and the end face 4 are brought into close contact with each other due to the expansion of the elastic partition wall 2, the end face 4 seals the mouth 3, and although it is shown as a plane in FIG. Other shapes are also possible.

The chamber 7 has a fluid supply port 12 from the outside through the small opening 3.
It is connected to The chambers 7, 8 each have a fluid inlet/outlet 10 for connecting them to an external fluid circuit.
11 is attached. The chamber 7 is provided with a separate throttle opening 5 that communicates with the outside air.

When using this element, fluid at a constant pressure is supplied through the supply port 12, and the inlet/outlet 11 is connected to a device that generates fluid pressure to drive the element. Furthermore, the inlet/outlet 10 is connected to a fluid-operated device to be driven by this element.

A major structural feature of this element is that an elastic partition 2 is provided in a fixed wall chamber 7 into which fluid at a constant pressure is supplied through the gap between the opening 3 and its opposing end surface. The end face 6 faces the end face 4 which moves as the elastic partition wall 2 expands and contracts. By having such a structure, the elastic partition wall 2
When input fluid pressure is applied to the chamber 8 formed inside thereof through the inlet/outlet 11, it converts this fluid pressure into a displacement of the end face 4, which is the input of the fluid pressure circuit, and at the same time surrounds the elastic partition wall 2. This achieves a double action of moving the end face 4 by means of pressure changes received from the outer chamber 7. Specifically, when a pressure change occurs in the chamber 8, the resulting change in the end face 4 changes the gap between the end faces 4 and 6, so the fluid resistance in that area changes, causing the pressure change in the chamber 7 to change. This acts on the elastic partition wall 2 and the end face 4
is displaced in the same direction as the displacement direction of the end face 4 due to the pressure change occurring in the chamber 8.

That is, for example, if the end surface 4 is displaced to the left in FIG. 1 due to an increase in the pressure of the fluid introduced into the chamber 8, the gap between the edge 3 and the end surface 4 will become smaller, so that the gap between the edge 3 and the end surfaces 4 and 6 will be smaller. The outflow resistance of the fluid flowing through the gap increases and the pressure in the chamber 7 decreases. The decrease in the pressure in the chamber 7 acts on the elastic partition wall 2 to displace the end face 4 to the left, further narrowing the gap and further decreasing the pressure in the chamber 7. This effect is greater as the elastic partition wall 2 is more flexible, but it also depends on how the dimensions of the small opening and the aperture opening 5 are selected. This action continues until the resulting force moving the end face 4 balances the elastic resistance of the elastic partition 2, until the end face 4 moves into the chamber 8.
The increase in pressure causes it to be displaced further to the left than it should have been.

As generally stated above, this effect is caused by the characteristics of the fluid circuit formed by the small hole 3, the end face 4, and the orifice 5 in addition to the positive feedback effect of the elastic partition wall 2. However, since the conversion characteristics of the fluid circuit depend on the size of the gap between the end face 6 and the end face 4 of the mouth 3, it is not constant, and tends to be larger as the gap becomes smaller.

The arrangement and elastic properties of the elastic partition 2 in the fixed wall chamber, the size of the mouth 3 and the aperture 5,
The fluid pressure from the supply port and the like are selected in consideration so that the element has the two stable states generally described above. If various conditions such as the arrangement of the elastic partition wall of this element, the elastic properties, and the sizes of the edge 3 and the aperture opening are selected so that the feedback effect acts effectively, the two stable states can be achieved. Correspondingly, the situation near the movable part of the element is as shown in FIGS. 2 and 3.

The operation of this element differs depending on the distance between the end face 6 of the mouth and its opposite end face 4 in a state where no fluid pressure is supplied to the element from the outside.

If the gap between end faces 4 and 6 is set large,
On a regular basis, the pressure in the chamber 7 is maintained at a correspondingly high pressure. In such a case, assuming that a high pressure is introduced into the chamber 8 from the fluid inlet/outlet 11 so as to gradually increase, this pressure reaches a constant value and the end face 4 reaches a first constant distance from the end face 6. At the point when they approach each other, the positive feedback effect becomes stronger, and the end surface 4 rapidly approaches and adheres to the end surface 6, and the chamber 7
The pressure drops rapidly and becomes equal to the outside air. Thereafter, as long as the pressure introduced into the chamber 8 from the inlet/outlet port 11 is above a certain pressure, the pressure in the chamber 7 is maintained at a decreased level. Assuming that the pressure in the chamber 8 from the fluid inlet/outlet 11 begins to fall, the end face 4 will become the end face 6 when the pressure in the chamber 8 reaches a different constant value.
They separate more rapidly to a second fixed interval. At the same time, the pressure in the chamber 7 rises rapidly to the original high pressure, and even if the pressure from the inlet/outlet 11 decreases thereafter, the pressure in the chamber 7 remains at the same high pressure. When the pressure is removed, the end face 4 returns to its original position, and the pressure in the chamber 7 returns to its original high pressure.

Next, contrary to the above, if the end surface 4 is set to be in close contact with the end surface 6, the elastic partition wall 2 is contracted, and the end surface 4 is pushing against the end surface 6, then the end surface 4 and the end surface 6 are the entrance/exit door. 11 is in close contact with each other in a steady state in which no pressure is introduced, and the pressure in chamber 7 is equilibrated at a state equal to atmospheric pressure, that is, at a low pressure. In this state, when a large negative pressure that gradually decreases is introduced into the inlet/outlet, the end face 4 rapidly separates from the end face 6 due to the feedback effect when the pressure in the chamber 8 reaches a constant pressure. , the pressure in chamber 7 rises rapidly to a pressure approximately equal to the supply pressure. Thereafter, if the pressure introduced into the inlet/outlet 11 exceeds a certain negative value, the pressure in the chamber 7 is maintained at a high pressure. Entrance/exit 1
Assuming that the pressure introduced into chamber 1 starts to increase, the pressure in chamber 8 increases and when the distance between end surfaces 4 and 6 becomes equal to the first constant distance, end surfaces 4 and 6 are brought into close contact with each other again. The pressure in chamber 7 then returns to its original low pressure.

Next, it is assumed that the gap between the end surfaces 4 and 6 in a state where no fluid is supplied is selected within a value range between the first constant interval and the second constant interval in the above two cases. When set under such conditions, this element will, as long as no fluctuating pressure is introduced from the inlet/outlet 11,
It has two stable states. One of these is a case where the distance between the end face 4 and the end face 6 is large, and the pressure in the chamber 7 is balanced at a high pressure that is not much different from the pressure of the fluid supplied from the supply port 12. 10
high pressure is generated. The other case, as shown in FIG. This constant low pressure will occur. In both these states, chamber 7
The pressure of each of these is a constant pressure value determined by the external fluid circuit connected thereto.

When this element is in a state where the chamber 7 is under high pressure,
The end face 4 and the end face 6 are spaced apart by an intermediate distance between the first constant interval and the second constant interval, and the constant pressure fluid supplied from the supply port 12 flows from the small opening 3 to the chamber 7. and further flows into the aperture 5.
It flows out into the outside air through the air. In this state, entrance 11
When a positive pulse-like pressure change is introduced with respect to the steady pressure value of the chamber 8, the elastic partition wall 4 expands and the end face 4 approaches the end face 6. As the end surfaces 6 and 4 approach each other, the outflow resistance from the small hole 3 increases and the pressure in the chamber 7 decreases, and these act to stretch the elastic partition 2 and bring the end surfaces 6 and 4 closer together. As a result, the pressure in the chamber 7 is lowered until the end faces 4 and 6 are in close contact with each other as shown in FIG. Next, when the pressure change introduced from the inlet/outlet 11 disappears, the elongated elastic partition wall 2 tries to return to its original length and shrinks, but this shrinkage causes the end face 4 to move in the opposite direction to the end face 6. However, even if the end face 4 does not separate from the end face 6, the mouth 3 remains sealed, and the pressure in the chamber 7 remains unchanged at a low pressure equal to the atmospheric pressure (memory effect). , the element will equilibrate with chamber 7 at low pressure.

When the element is in a state where the chamber 7 is under low pressure, the end faces 4 and 6 are in close contact. Here, entrance 1
When a negative pulse-like pressure change is introduced from 1 to the steady pressure value of the chamber 8, the elastic partition wall 2 contracts due to the pressure difference between the inside and outside of the elastic partition wall 2, so that the end face 4 and 6 are separated, the opening 3 is opened, and the pressure in the chamber 7 increases greatly. When the pressure introduced from the entrance/exit port 11 disappears, the elastic partition wall 2 expands, but since the amount of contraction of the elastic partition wall 2 due to the pressure increase in the chamber 7 is greater than the amount of expansion, the end face 4
The distance between and the end face 6 continues to be kept large, and the pressure in the chamber 7 is kept high.

In this way, switching between the two stable states is effected by introducing a positive pulsed fluid pressure into the inlet/outlet 11 and also by introducing a negative pulsed fluid pressure into the inlet/outlet 11. .

The end surface 6 of the small opening 3 and its opposing end surface 4 in a state where no fluid pressure is supplied to the element from the outside.
Considering the function of this element as a logic element based on the above three ways of selecting the setting interval between and, the following will be obtained.

First, when the distance between the end faces 4 and 6 is selected to be large, the pressure in the chamber 7, which is the output of the element, is constantly high when there is no pressure at the fluid inlet/outlet 11, and the positive high pressure at the inlet/outlet 11 is constant. During the period in which the end face 4 and the end face 6 are introduced, when the distance between the end faces 4 and 6 becomes the first constant interval and the second constant interval, the chamber 7 suddenly switches, and the output is only in that section.
pressure will be lower. That is, the relationship between the pressure introduced into the fluid inlet/outlet 11 which is the input of the element and the pressure generated at the fluid inlet/outlet 10 which is the output is opposite in terms of sign and negative, and it functions as a NOT element (inverter).

Next, when the end face 4 is set so as to come into close contact with 6 and push against it when no fluid pressure is supplied to the element, the pressure in the chamber 7 is low in a steady state, and a large negative pressure is applied to the fluid. During the period in which the fluid is introduced into the inlet/outlet 11, a high pressure is generated at the inlet/outlet 10 during the period. In this case as well, if the level of pressure introduced into the fluid inlet/outlet 11 is based on negative pressure, and a pressure greater than that is considered high pressure, the relationship between the pressure levels of the fluid inlet/outlet 11 and 10 will be reversed, and the NOT element (Inverter)
The function will be performed as follows.

When the position of the end face 4 with respect to the end face 6 is set so that this element has two stable states as shown in the third table, the element This device can function as a flip-flop device that can freely switch the level of pressure generated at the fluid inlet/outlet 10 from high pressure to low pressure and from low pressure to high pressure.

Next, in FIG. 1, if a pressure that continuously fluctuates over time in positive and negative directions is applied to the steady pressure value of the chamber 8 from the inlet/outlet 11, then the value of this fluctuating pressure is A constant low pressure is generated at the inlet/outlet 10 at a point where the pressure exceeds the pressure value necessary for the chamber 7 to switch from the high pressure state to the low pressure state, and the fluctuating pressure value is A constant high pressure is generated at the input/output port 10 at a point where the pressure in the chamber 7 falls below a value necessary for switching from a low pressure state to a high pressure state in the chamber 7 . As a result, a square wave-like pressure change having the same period as the fluctuation period of the fluctuating pressure and having the opposite polarity, that is, the phase, occurs at the entrance/exit port 10. For example, when the fluctuating pressure is originally In cases where the square wave shape is disordered and changed, this element can achieve the same effect as adjusting it to a square wave shape. This type of operation is generally known as a Schmitt trigger inverter, and it is a functional device often used in electronic circuits.

Various modifications of the element shown in FIG. 1 can be made by suitable modifications. For example, the first
In the figure, a bellows is used as the elastic partition wall 2, but it may be replaced with an elastic membrane made of rubber or metal alloy, etc., which can be made smaller and realize a smaller device that operates at high speed. There are advantages. FIG. 4 is a cross-sectional view of another embodiment of the present invention using a single elastic thin film as the elastic partition;
Since the element body is made flat, it is particularly suitable for integration. Note that each part of the element shown in FIG. 4 has a different shape but has the same function as each part in FIG. 1, and is designated by the same number corresponding to that in FIG. 1.

The fluid logic element of the present invention can achieve flip-flop operation, which was impossible to achieve with conventional diaphragm type fluid logic elements unless they were used in plurality or combined with other circuit elements. It can be easily performed with a single element, and also has the features of the diaphragm type fluidic logic element, such as high input resistance and high amplification, so that it can directly drive operating equipment. Therefore, when manufacturing a fluid actuation control device using a flip-flop circuit, it becomes possible to construct the device with fewer circuit elements than before, and an improvement in response speed and reliability can be expected accordingly.

In addition, this element has a logic operation function similar to that performed by conventional diaphragm type fluid logic elements.
Since it can perform NOT operation (inverter), it can also be used in place of the conventional element. Moreover, when used in this way, the so-called Schmitt trigger effect occurs, in which the output pressure is switched more rapidly than in the operation of the conventional element, so it is more reliable and produces less noise than the conventional element. We can expect strong performance. moreover,
As mentioned above, it can also be used as a waveform shaping element, and has a wide range of applications as a circuit element.

Example: In an element having the structure shown in Fig. 1, the dimensions of the solid wall are
It has a cylindrical shape of 21 mm and a length of 40 mm, and uses one bellow as the elastic partition wall 2 with a compliance of 40.5 μm/N and a pressure receiving area of 2.0 cm ² , the small opening 3 is a circular hole with an inner diameter of 2.5 mm, and the aperture opening is a diameter of 0.83 mm. using the orifice of
When we conducted an experiment by supplying air at a constant pressure of 10 kPa from the supply pipe 12, we introduced positive and negative air pressure pulses with a peak value of 4.8 kPa and a width of 0.1 s into the inlet/outlet 11, and the output of the part of this element connected to the outlet/inlet 10 was measured. Pressure 8.5kPa
could be controlled by the amplitude of

In addition, an element with the structure shown in Figure 4, with a diameter of 15 mm,
Using a 2 mm thick rubber diaphragm and an orifice with the same dimensions as above, a constant pressure of 5 kPa is applied to the supply port, and a rectangular control pressure signal of 4.5 kPa is applied to the inlet/outlet port 11 to produce an amplitude of 5.0 kPa. It was possible to obtain an output pressure signal at the entrance/exit 10 in which the positive/negative relationship was the opposite of that of this control signal.

[Brief explanation of drawings]

FIG. 1 is a cross-sectional view of a fluid logic element according to an embodiment of the present invention. 2 and 3 are cross-sectional views showing changes in relative positions of main movable parts for explaining the operating state of the element shown in FIG. 1. FIG. FIG. 4 is a cross-sectional view of a fluid logic device according to another embodiment of the present invention. 1: fixed wall, 2: elastic partition, 3: small mouth, 4 and 6: end face, 5: throttle opening, 7 and 8: chamber, 9: fixed end of elastic partition, 10, 11 and 12: entrance/exit.

Claims (1)

[Claims] 1 A chamber having one expandable elastic partition is provided in a sealed fixed wall chamber at intervals such that the closed movable end of the elastic partition faces an opening provided in the fixed wall of the fixed wall chamber. Further, the distal end surface of the opposing movable end is formed into a surface that can seal the opening when approaching the opening due to the extension of the elastic partition, and further, the opposing rear end side of the chamber having the elastic partition is formed. A fluid logic device characterized in that a fluid inlet/outlet is provided on the outside of the small opening with respect to the fixed wall chamber, and a fluid outlet is provided in the sealed fixed wall chamber for discharging fluid that communicates with the outside air. element.