JPH0418373B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an apparatus for manufacturing a perpendicular magnetic recording medium having a perpendicular magnetization film in which two phases of metal and metal oxide are mixed.

A conventional manufacturing device of this type, as shown in the first diagram,
The base material a is moved in the direction of the arrow, and an electron beam c is swept and applied from an electron beam generator to an evaporation source b provided below and facing the base material a, and the evaporation source b is heated, melted, and evaporated. The material is deposited almost perpendicularly onto the traveling substrate a through the vertical deposition opening e of the deposition prevention plate d which prevents oblique incidence deposition between the substrate a and the evaporation source b. Generally, the evaporation source b
The length l ₀ of the base material in the running direction is smaller than the length l of the base material of the opening e in the running direction. Therefore, in particular the opening e in which the running substrate a begins to appear
At the upstream end of , the evaporated material tends to enter the base material a obliquely, as shown by the arrow in the figure.

However, in general, in the precipitation growth of the evaporated atoms, the evaporated atoms that are first deposited on the surface of the substrate serve as a nucleus, and they grow in the direction of the nucleus. Since the atoms attach obliquely to the surface of the substrate and serve as nuclei, they tend to grow obliquely in accordance with the direction of the nucleus, which has the disadvantage that a good perpendicular magnetization film cannot be obtained.

The object of the present invention is to eliminate this drawback and provide a manufacturing apparatus for a perpendicular magnetic recording medium that can form a perpendicularly magnetized film with excellent perpendicular magnetic properties on the surface of a substrate. an evaporation source provided below and facing the base material; an electron beam that sweeps the evaporation surface of the evaporation source in the running direction of the base material; In a manufacturing apparatus for a perpendicular magnetic recording body, the device is equipped with an opening for vertical deposition of a deposition prevention plate that prevents obliquely incident deposition near the material, and an oxygen introduction pipe that blows out oxygen gas toward the opening for vertical deposition. The evaporation source includes an upstream evaporation surface extending across the opening edge of the vertical deposition opening on the upstream side of the traveling substrate and an opening edge of the vertical deposition opening on the downstream side of the traveling substrate. It is characterized by being provided with a downstream side evaporation surface that extends across the air.

Embodiments of the present invention will be described based on the principle diagrams shown in FIGS. 2 and 3. In the figure, reference numeral 1 indicates a base material running in the direction of the arrow, 2 indicates an evaporation source provided below the base material, and 3 indicates a base member interposed between the base material 1 and the evaporation source 2 and located below the base material 1. A deposition prevention plate 4 is provided nearby to prevent obliquely incident deposition, and reference numeral 4 indicates an opening for vertical deposition provided in the deposition prevention plate 3 .

Such a configuration is also provided in the conventional device, and the conventional device is also provided with the oxygen introduction pipe 9 for spouting oxygen gas toward the opening 4. However, in the present invention, the evaporation source 2 In addition, an upstream evaporation surface 2a is provided that extends upstream across the upstream opening edge 4a of the opening 4 where the base material 1 begins to appear in the vertical deposition opening 4, and a downstream opening edge 4b is provided. Downstream evaporation surface 2 that extends downstream across the
b. In the drawing, L ₀ is the length of the base material of the evaporation source 2 in the running direction, and that length is the length of the base material of the evaporation source 2.
It is larger than the length L of the base material in the running direction. When the electron beam B from the electron beam generator is swept and applied to the upstream evaporation surface 2a of the evaporation source 2, it evaporates vertically near the upstream opening edge 4a, as shown by the arrow. At the same time, the evaporated matter that evaporated obliquely from both sides merges with the evaporated matter that is vertical, and as a result, the evaporation that is obliquely inclined to one side tends to disappear, and the evaporation is almost vertical,
The evaporated matter that enters from the opening 4 during the subsequent movement of the base material 1 adheres to this nucleus and grows vertically. By providing the evaporation source 2 with a downstream evaporation surface 2b that extends further downstream across the downstream opening edge 4b, oblique growth is further suppressed, and a perpendicularly magnetized film grown in the vertical direction is obtained. It will be done.

In FIG. 3, reference numeral 5 denotes a sealed container that is evacuated, 6 a transfer device consisting of a delivery roll 6a and a take-up roll 6b for transferring the tape-like base material 1 to one side, and 7 a transfer device for transferring the tape-like base material 1 to one side. A cooling can for providing movement and cooling, 8 an electron beam generator, and 10 a crucible containing an evaporation source 2.

Metals such as Fe, Co, Ni, and their alloys are placed in the evaporation source 2, and at the same time as the evaporation from the evaporation source 2 toward the base material 1 occurs, oxygen gas is ejected from the oxygen introduction tube 9 toward the opening 4. Then, as described above, a part of the vapor deposited that is perpendicularly incident on the substrate 1 from the upstream evaporation surface 2a is oxidized, resulting in Co-O, Co containing two phases of metal and metal oxide mixed in a predetermined ratio. −Ni−O, Fe−Co−Ni
A perpendicular magnetization film such as -O is formed on the tape base material surface, and a perpendicular magnetic recording body in which two phases of metal and metal oxide are grown perpendicularly is manufactured. This perpendicularly magnetized film has a two-phase structure of ferromagnetic columnar grains and non-ferromagnetic oxide, which reduces saturation magnetization and increases perpendicular magnetic anisotropy due to shape magnetic anisotropy and magnetocrystalline anisotropy. , a film with excellent perpendicular magnetic properties can be obtained.

FIG. 4 shows, in place of the cooling can 7 shown in FIG. 3,
The tape-shaped base material 1 is made to run by a pair of cooling rollers 12, 12 on which an endless metal belt 11 is stretched. In this example, the oxygen introduction pipes 9 are arranged symmetrically.

In the case of Figures 3 and 4, the length of the evaporation source 2
L ₀ is made significantly longer than the length L of the opening 4 of the deposition-preventing plate 3, and the evaporation surfaces 2a, 2b on both sides thereof extend by equal lengths from the opening edges 4a, 4b, respectively. When a perpendicularly magnetized film is formed by blowing out oxygen gas toward the opening 4 using the device shown in Figure 3, if the ratio of L ₀ /L exceeds 1, Hc⊥Hc
While a perpendicularly magnetized film having L 0 /L of 2 or more and Br⊥/Br of 1.5 or more can be obtained, when the ratio of L ₀ /L is 0.5,
Hc⊥/Hc was about 1.2, and Br⊥/Br was only about 1.

As described above, according to the present invention, the deposition prevention plate is provided with a vertical deposition opening in the vicinity of the base material traveling in one direction, and is also provided with an oxygen introduction pipe for spouting oxygen gas toward the vertical deposition opening. In an apparatus for manufacturing a perpendicular magnetic recording body in which the evaporation surface of the evaporation source is swept in the running direction of the substrate by an electron beam, the evaporation source includes:
An upstream evaporation surface that extends across the opening edge of the vertical deposition opening on the upstream side of the traveling base material, and a downstream that extends across the opening edge of the vertical deposition opening on the downstream side of the traveling base material. Since a side evaporation surface is provided, it is possible to evaporate a vertical evaporation material that is a mixture of metal and metal oxide and serves as a nucleus for growth in the vertical direction on the surface of the traveling substrate. , since diagonal growth is suppressed, the growth of evaporates that adhere after the substrate travels is made perpendicular, and a magnetic film with a perpendicular magnetization film containing a mixture of metal and metal oxide with excellent perpendicular magnetic properties is obtained. There are effects such as being able to manufacture recording bodies.

[Brief explanation of drawings]

Fig. 1 is a side view of a conventional device, Fig. 2 is a side view of essential parts of the present invention, Fig. 3 is an overall side view of an embodiment of the present invention, and Fig. 4 is a side view of a modification of the present invention. It is. DESCRIPTION OF SYMBOLS 1... Base material, 2... Evaporation source, 2a... Upstream evaporation surface, 3... Deposition prevention plate, 4... Vertical evaporation opening,
4a...Upstream opening edge, 9...Oxygen introduction pipe.

Claims (1)

[Claims] 1. A base material traveling in one direction, an evaporation source provided below and facing the base material, an electron beam that sweeps the evaporation surface of the evaporation source in the traveling direction of the base material, and an evaporation source provided below the base material to face it; Perpendicular magnetic recording comprising an opening for vertical evaporation of a deposition prevention plate to prevent obliquely incident evaporation in the vicinity of the substrate between the source and the substrate, and an oxygen introduction pipe for spouting oxygen gas toward the opening for vertical evaporation. In the evaporation source, an upstream evaporation surface extending across the opening edge of the vertical evaporation opening on the upstream side of the traveling substrate and the vertical evaporation surface on the downstream side of the traveling substrate. 1. An apparatus for manufacturing a perpendicular magnetic recording medium, characterized in that an aperture has a downstream evaporation surface extending across the edge of the aperture.