JPH0419918B2 - - Google Patents

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a cleaning device suitable for cleaning a disk-shaped workpiece having a center hole, such as a magnetic disk substrate or an optical disk substrate. It is.

[Prior Art] In recent years, with the development of computers and audio equipment, the demand for magnetic disks and optical disks has rapidly increased, and with this, there has been a demand for a stable supply of high-quality magnetic disk and optical disk substrates. I started to do that.

For example, after synthetic resin substrates for optical disks are manufactured by injection molding, they are cleaned to remove dirt such as oil and chips, but because of their large storage capacity, even the slightest dirt can be removed. This has a significant negative effect on performance and makes the product unsuitable. Therefore, when cleaning, it is necessary to improve the cleaning accuracy and maintain a higher level of cleanliness, and for this purpose, it is necessary to uniformly clean both sides of the substrate to eliminate cleaning unevenness. Of course, it is also very important to quickly and reliably dry the product after washing. In other words, if drying is not carried out quickly and reliably, the areas where the cleaning liquid has adhered or flowed for a long time tend to remain as stains, and these stains not only reduce the performance of the disk but also deteriorate its appearance. This will significantly reduce the product value.

[Problems to be Solved by the Invention] An object of the present invention is to provide a cleaning device that can quickly and reliably dry a workpiece that has been cleaned.

[Means for Solving the Problems] In order to solve the above problems, a cleaning device according to the present invention includes a cleaning section that cleans a disk-shaped workpiece, and a drying section that dries the cleaned workpiece. A wiping mechanism is provided between the cleaning section and the drying section for wiping off moisture adhering to the vicinity of the center of the workpiece after cleaning, and
The drying section is characterized by providing a support rotating shaft for rotating the workpiece at high speed to drain and dry the workpiece.

[Function] After cleaning, the workpiece is wiped off by the wiping mechanism to remove moisture from the cleaning liquid that has adhered to the vicinity of its center, and is then rotated at high speed by the support rotating shaft in the drying section to blow off the adhered moisture. dried by

At this time, since the moisture near the center has been wiped off in advance, this moisture does not travel along the surface of the workpiece due to rotation and scatter outward, making it more likely that stains will occur than when wiping is not performed. is very small. Moreover, since the workpiece is rotated at high speed for draining and drying, the drying is much faster and more reliable than drying by heating.

[Example] Hereinafter, an example of the present invention will be described in detail based on the drawings.

The cleaning apparatus shown in FIGS. 1 and 2 is an example of a case in which it is configured as a unit that can increase or decrease the number of processes and rearrange the parts. A first and second cleaning unit 3, 4 that cleans the workpiece 1 with a brush, a drying unit 5 that performs final cleaning and drying of the workpiece 1 after brush cleaning, and a take-out unit that takes out and stores the workpiece 1 after drying. 6
Each of these units 2 to 6 consists of
They are arranged in a horizontal line and separably connected so that the distance a between their process centers is equal.

The supply unit 2 has a center hole 1a of a workpiece 1 which is vertically housed in a container 10 which is carried to a loading position by a transport means (not shown).
A lifting arm 11 that is vertically movable to lift the workpieces 1 one by one, and a lifting arm 11 that is attached to a base 15 that can be freely moved back and forth along a guide 14 so as to be openable and closable from each other. A pair of upper and lower supply arms 12, 12 equipped with two grooved roller-shaped clamping pieces 13, 13 that clamp the outer peripheral surface of the workpiece 1 lifted by the
A conveying body 16 is provided in front of the supply arm 12 and receives the workpiece 1 from the supply arms 12 and conveys it to the adjacent first cleaning unit 3, and a rail member 17 guides the movement of the conveying body 16. There is.

As can be seen from FIG. 4, the carrier 16 is
On a base plate 18 movably mounted on the rail member 17, a pair of left and right clamping arms 21, 21 are erected so as to be rotatable in the approaching and separating directions with their base ends as fulcrums, and these clamping arms 21, 2 each on 21
Two grooved roller-shaped clamping pieces 22, 22 are attached, and by rotating the clamping arms 21, 21, the outer periphery of the workpiece 1 can be clamped between these clamping pieces 22, 22. ing. When the clamping arms 21, 21 receive the workpiece 1 from the supply arms 12, 12, as shown in FIG. Arm 12,1
Since the clamping pieces 13 and 13 in 2 clamp the workpiece 1 from above and below, respectively, their clamping positions do not compete with each other.

Further, the rail member 17 is connected to the supply unit 2
It extends to the end on the first cleaning unit 3 side, and can be interconnected with the rail member 36 when the first cleaning unit 3 is connected.

A first unit provided adjacent to the supply unit 2
The cleaning unit 3 cleans the workpiece 1 using detergent, and as specifically shown in FIG.
Washing room 30 equipped with a door 30a that opens and closes automatically in the front
In the cleaning chamber 30, there are provided a support rotating shaft 31 for vertically supporting and rotating the workpiece 1, a brush mechanism 32 for cleaning the workpiece 1, and a cleaning liquid supply nozzle 33 for supplying cleaning liquid to the cleaning area. 33 (6th
In addition, in front of the cleaning chamber 30, a transport body 35 for transporting the work 1 and a transport body 35 for transporting the work 1 are provided in front of the cleaning chamber 30. A rail member 36 for guiding the movement of the body 35 is provided.

The support rotation shaft 31 is connected to the rear wall 30 of the cleaning chamber 30.
b is horizontally supported by a bearing member 37, and the rear end of the support rotating shaft 31 projects into a drive chamber 38 defined behind the cleaning chamber 30, and is connected to a motor 40 by a belt 39. has been done. Further, as is clear from FIG. 6, a chuck portion 41 having a plurality of claws 41a that can be expanded and contracted in the radial direction of the rotary shaft 31 is formed at the tip of the support rotary shaft 31. The workpiece 1 is supported by being inserted into the center hole 1a of the workpiece 1 and expanded.

On the other hand, as is clear from FIG. 3, the brush mechanism 32 has a support arm 45 provided in the cleaning chamber 30 so as to be rotatable about a pivot 44 between a cleaning position and a standby position. Tip support shaft 4
7, the pair of brush arms 48, 48 are attached to the support shaft 4.
The pair of brush arms 48 and 48 have disk-shaped brushes 50 and 50 rotatably attached to these brush arms 48 and 48, respectively. ，
The swinging and movement of the brush 5 in the approaching and separating directions are performed by a drive means (not shown) attached to the support arm 45.
The drive rotation of 0 and 50 is performed by a drive shaft 51 passing through the support shaft 47 via gears 52a to 52c.

Therefore, the brush arms 48, 48 are moved to sandwich the workpiece 1 between the two brushes 50, 50, and the rotation of the brushes 50, 50 and the swinging of the brush arms 48, 48 about the support shaft 47 are performed. By causing this, the workpiece 1 is cleaned.

As shown in FIG. 7, the brushes 50, 50 are constructed by attaching a large number of wiping pieces 50b made of a sponge-like member or a fibrous member to opposing surfaces of a substrate 50a.

Further, as shown in FIG. 6, two of the nozzles 33, 33 are disposed diagonally above the work surface within the work surface 1 supported by the support rotation shaft 31, and the detergent is sprayed from one of the nozzles 33, 33. Pure water is supplied from the other side.

Furthermore, the delivery arms 34, 34 are
As is clear from the figure and Fig. 3, the support rotation shaft 3
A support member 56 is movably attached to a guide rod 55 provided parallel to the axis of the support member 56.
The transfer arms 34, 34 each have a workpiece 1 attached to the tip thereof so as to be movable up and down.
Two grooved roller-shaped clamping pieces 58, 58 are provided to clamp the outer periphery of the workpiece 1, respectively, so that the workpiece 1 can be clamped from above and below in the same way as the supply arms 12, 12 described above.

Furthermore, since the conveying body 35 has substantially the same configuration as the conveying body 16 in the supply unit 2, the same parts are given the same reference numerals and the explanation thereof will be omitted.

On the other hand, in order to enable the rail member 36 to be connected to the rail members 17 and 36 of the supply unit 2 and the second cleaning unit 4 located on both sides thereof,
It is formed to have approximately the same width as the cleaning unit 3.

Further, the second cleaning unit 4 cleans the workpiece 1 using only pure water, and the first cleaning unit 3 has a mechanism 61 for wiping off the cleaning liquid attached to the workpiece 1 by the carrier 60. and 2
The difference is that, as shown in FIG. 8, two cleaning liquid supply nozzles 33, 33 are arranged diagonally above the workpiece 1 in its axial direction, and pure water is supplied from both of them. However, the other basic configurations are substantially the same. Therefore, regarding the basic configuration, the same parts are given the same reference numerals and the explanation thereof will be omitted.

The wiping mechanism 61 is for wiping off the cleaning liquid adhering to the part of the work 1 near the center hole 1a while the work 1 that has been cleaned is transported to the next drying unit 5, as shown in FIGS. 9 and 10. As specifically shown in the figure, it consists of a first tape unit 61a and a second tape unit 61b arranged on both sides of the workpiece 1, and these tape units 61a,
61b is the plate 6 mounted on the base plate 18;
2a, 62b, winding rollers 64a, 6 are placed at both ends.
4b and supply rollers 65a, 65b, and the intermediate position is wrapped around a plurality of guide rollers 66a, 65b.
Wiping tape 63a, 63 wrapped around 66b
b, and the wiping tapes 63a, 6
3b onto the workpiece 1
The first tape unit 61a is fixed on the base plate 18, and the second tape unit 61b is driven by a driving means such as a cylinder (not shown). , the wiping tape 6 as shown in FIG.
3b is rotatably attached to a wiping position where it faces the other wiping tape 63a and a standby position where the wiping tape 63b stands up as shown in FIG. Normally, it is rotatably held at this standby position. In addition, in FIG. 2, the second tape unit 61 is shown for the sake of clarity.
Although the second tape unit 61b is shown rotated to the wiping position, in reality, in this state, the second tape unit 61b is in the above-mentioned standby position.

Note that the pressing surfaces of the pressing elements 67a and 67b are as follows:
The center hole 1a and groove 1b (Fig. 5) of the workpiece 1, etc.
It can also be formed into a shape that matches the uneven shape of the surface.

Providing such a wiping mechanism 61 on the transport body 60 not only saves space compared to providing a dedicated wiping mechanism installation space, but also makes it possible to wipe the workpiece 1 while it is being transported. By doing so, it will also lead to a reduction in work time. In addition, by wiping off the cleaning liquid that has adhered to the part of the workpiece 1 near the center hole 1a, in the next drying process, the cleaning liquid that has adhered to the part of the workpiece 1 near the center hole 1a can be transferred along the surface of the workpiece due to rotation of the workpiece. scattered around,
The formation of stains is prevented.

As shown in FIGS. 1 and 2, the drying unit 5 disposed adjacent to the second cleaning unit 4 has a drying chamber 70 separated from the others. A support rotation shaft 71 that vertically supports and rotates the workpiece 1, supply nozzles 72, 72 for supplying warm pure water and cold pure water for cleaning to both sides of the rotating workpiece 1, and preventing water from scattering. A cover 73 and a transfer arm 74 for the workpiece 1 are provided, and a transport body 75 and a rail member 76 are provided in front of the drying chamber 70.

The support rotation shaft 71 is connected to the cleaning unit 3,
Since it has the same structure as the support rotating shaft 31 in cleaning units 3 and 4, corresponding parts are given the same reference numerals as those in cleaning units 3 and 4, and a description thereof will be omitted.

Further, as shown in FIG. 11, the supply nozzles 72, 72 are arranged in a radial direction of the workpiece 1 at a position outside the area wiped by the wiping mechanism 61, that is, at a position on the signal surface. It is disposed movably and performs final cleaning by first supplying hot pure water and then cold pure water to the signal surface. In this case, separate supply nozzles may be provided for warm pure water and cold pure water.

Further, the cover 73 is disposed to be movable in the axial direction of the support rotating shaft 71, and moves forward to cover the workpiece 1 when finishing cleaning and drying it. As is clear from FIG. 11, a large number of inclined shielding plates 78 are provided circumferentially at regular intervals, and the cleaning liquid that scatters from the workpiece 1 and collides with the cover 73 bounces back and adheres to the workpiece 1. It prevents

In addition, the delivery arm 74 and the transport body 75,
The rail member 76 has substantially the same construction as that of the first cleaning unit 3.

The take-out unit 6 disposed adjacent to the drying unit 5 sequentially stores the dried workpieces 1 into the container 10 set at the unloading position, and takes out the supply arms 12 and 12 of the supply unit 2. Receiving arms 81, 81 and storage arm 82 having the same configuration as the lifting arm 11
A rail member 83 is disposed in front of the receiving arms 81, 81.

Each of the units 2 to 6 is configured such that the distance a between their process centers is equal, and the transport bodies 16, 35, 6 in each unit are
0,75 is the connecting member 2 provided between them
3 at the same interval as the distance a between the process centers. A drive source 84 (FIG. 1) such as a cylinder for driving these conveyance bodies is provided in the supply unit 2 and is connected to the conveyance body 16 of the supply unit 2. The bodies 16, 35, 60, and 75 are synchronously reciprocated by the distance a between the process centers, and the workpieces 1 are successively conveyed to adjacent units. That is, the connecting member 23 and the driving source 84 constitute a driving means for driving the conveying bodies 16, 35, 60, and 75 synchronously at regular intervals.

As the drive means for the above-mentioned conveyance bodies, it is also possible to use a type that drives them while electrically synchronizing them.

In addition, 79 in the figure indicates the cleaning chamber 30 and the drying chamber 70.
This is a clean unit installed in each room to remove dust from each room and maintain them in a highly clean state. Such a clean unit can be similarly provided in the take-out unit 6.

Next, the operation of the cleaning device having the above configuration will be explained.

First, the number, type, arrangement order, etc. of each unit are determined according to the type of workpiece 1 to be cleaned, the cleaning method, etc., and the units are connected in a horizontal line. With this connection, the rail members 17, 3 of each unit 2-6
6, 36, 76, 83 are integrally connected to constitute one rail, and each transport body 16, 35, 6
0 and 75 are also integrally connected by the connecting member 23 at a constant interval a.

In the supply unit 2, when the unwashed workpiece 1 lifted from the container 10 by the lifting arm 11 is transferred to the carrier 16 by the supply arms 12, 12, the workpiece 1 is transferred to the first carrier 16 by the carrier 16. It is transported to the cleaning unit 3 and transferred to the delivery arm 3.
4 to the support rotating shaft 31. At this time, the door 30a of the cleaning chamber 30 is open. After the door 30a is closed, the workpiece 1 held on the support rotating shaft 31 is held between the pair of brushes 50, 50 in the brush mechanism 32 while being rotated at high speed, and is then transferred to the cleaning liquid supply nozzle 33.
Cleaned with detergent supplied by At this time, each carrier has returned to its original position.

The workpiece 1 that has been cleaned is carried out by the transfer arm 34 from the cleaning chamber 30 with the door 30a open and transferred to the conveyor 35, and then sent to the next second cleaning unit 4 by the conveyor 35. , Cleaning with pure water is performed in the same manner.

The workpiece 1 that has been cleaned with pure water is transferred to the conveyor 60 by the transfer arm 34 and sent to the drying unit 5. During the conveyance, the workpiece 1
Moisture adhering to the area near a is wiped off by the wiping tapes 63a and 63b of the two tape units 61a and 61b in the wiping mechanism 61. That is, during the above-mentioned conveyance, the second tape unit 61b, which was in the standby position shown in FIG. 10, is rotated to the wiping position shown in FIG.
a, 68b actuate to move the pushers 67a, 67b forward, so that the wiping tapes 63a, 63b are brought into pressure contact with the workpiece 1 to perform wiping.

When the workpiece 1 is transferred to the support rotation shaft 71 by the transfer arm 74 and held, the cover 73 moves forward and covers the workpiece 1, and the supply nozzle 72 supplies cold pure water to both sides of the rotating workpiece 1. Water is supplied over time to perform final cleaning, and at the same time, high-speed rotation blows away moisture to dry it. The above warm pure water and cold pure water are
As shown in FIG. 11, the nozzle 72 is supplied to the area outside the area where wiping has been performed while moving the nozzle 72 in the radial direction from the inside to the outside of the workpiece 1, and thereby the signal surface is Remaining surfactants and the like are removed.

In the drying process mentioned above, since the moisture near the center of the workpiece 1 is wiped off in advance, it does not travel along the disk surface due to rotation and scatter outward, causing stains and other problems compared to the case where wiping is not performed. The probability of this occurring is very small. Moreover, work 1
Since the water is rotated at high speed for draining and drying, the drying is much faster and more reliable than drying by heating.

Workpiece 1 has been finished with final cleaning and drying.
is sent to the take-out unit 6 by the carrier 75,
Storage arm 82 by receiving arms 81, 81
After being delivered to the container 10, they are sequentially stored in the container 10.

Note that the series of operations described above is automatically controlled by a microcomputer.

[Effects of the Invention] According to the present invention having the above-mentioned configuration, since the workpiece that has been cleaned is rotated at high speed to drain water and dry it, it is possible to reliably dry the workpiece in a very short time. Moreover, since the moisture adhering to the center area is wiped off before drying, the moisture in that area does not flow outward along the surface of the workpiece due to rotation, and the occurrence of stains due to moisture is suppressed. It will be done.

[Brief explanation of drawings]

FIG. 1 is a partially cutaway front view showing one embodiment of the present invention, FIG. 2 is a plan sectional view thereof, FIG. 3 is a partially enlarged view of FIG. 2, FIG. 4 is a side view of the carrier, and FIG. The figure is a front view for explaining the delivery state of the workpiece.
8 are explanatory diagrams of the arrangement of the cleaning liquid supply nozzle, FIG. 7 is a side view of the brush, FIGS. 9 and 10 are plan views and front views of the wiping mechanism in different usage states, and FIG. The figure is a partially enlarged front view of the drying chamber. 1... Workpiece, 3, 4... Cleaning unit, 5...
...Drying unit, 60...Transporter, 61...Wiping mechanism, 61a, 61b...Wiping unit, 6
3a, 63b...wiping tape, 71...support rotating shaft.

Claims (1)

[Scope of Claims] 1. In a cleaning device equipped with a cleaning section that cleans a disk-shaped workpiece and a drying section that dries the cleaned workpiece, the workpiece that has been cleaned is placed between the cleaning section and the drying section. A cleaning device characterized by being provided with a wiping mechanism for wiping off water adhering to the vicinity of the center of the workpiece, and a support rotating shaft provided in the drying section for rotating the workpiece at high speed to drain and dry the workpiece. 2. The cleaning device according to claim 1, wherein the wiping mechanism is provided on a conveyor that conveys the workpiece from the cleaning section to the drying section. 3. The wiping mechanism is comprised of two wiping units each having a wiping tape that can be wound up, and one of the wiping units is rotatable between a wiping position and a standby position. A cleaning device according to claim 1, page 1.