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JPH0420773B2 - - Google Patents
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JPH0420773B2 - - Google Patents

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Publication number
JPH0420773B2
JPH0420773B2 JP63033384A JP3338488A JPH0420773B2 JP H0420773 B2 JPH0420773 B2 JP H0420773B2 JP 63033384 A JP63033384 A JP 63033384A JP 3338488 A JP3338488 A JP 3338488A JP H0420773 B2 JPH0420773 B2 JP H0420773B2
Authority
JP
Japan
Prior art keywords
inner cylinder
polyethylene
container
outer cylinder
cylinder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP63033384A
Other languages
Japanese (ja)
Other versions
JPH01208115A (en
Inventor
Fumio Nishimura
Nobuyuki Shimizu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Chemical Corp
Original Assignee
Mitsubishi Chemical Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Chemical Industries Ltd filed Critical Mitsubishi Chemical Industries Ltd
Priority to JP63033384A priority Critical patent/JPH01208115A/en
Publication of JPH01208115A publication Critical patent/JPH01208115A/en
Publication of JPH0420773B2 publication Critical patent/JPH0420773B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Containers Having Bodies Formed In One Piece (AREA)
  • Rigid Containers With Two Or More Constituent Elements (AREA)
  • Blow-Moulding Or Thermoforming Of Plastics Or The Like (AREA)
  • Compositions Of Macromolecular Compounds (AREA)

Description

【発明の詳細な説明】 <産業上の利用分野> 本発明は高純度薬品用の大型容器に関するもの
である。詳しくは半導体等の電子部品の加工に用
いる塩酸、硫酸や硝酸等のような高純度の薬品を
収容して運搬するために用いる大型容器に関する
ものである。
DETAILED DESCRIPTION OF THE INVENTION <Industrial Field of Application> The present invention relates to a large container for high purity chemicals. Specifically, it relates to a large container used to store and transport high-purity chemicals such as hydrochloric acid, sulfuric acid, and nitric acid used in processing electronic components such as semiconductors.

<従来の技術> 半導体の電子部品の加工には、極めて高純度の
薬品が要求されており、その製造は厳重な品質管
理の下になされている。従つて製造過程での不純
物やダストの混入は殆んど完全に防止されるよう
になつたが、これに伴い出荷の際に用いる容器か
らの不純物やダストの混入を防止することが益々
重要視されるようになつてきている。
<Prior Art> The processing of semiconductor electronic components requires chemicals of extremely high purity, and their manufacture is carried out under strict quality control. Therefore, the contamination of impurities and dust during the manufacturing process has become almost completely prevented, but as a result, it has become increasingly important to prevent contamination of impurities and dust from containers used during shipping. This is becoming more and more common.

特開昭62−39444号には、ポリエチレンの吹込
成形により形成した多層構造のボトルであつて、
最内層以外の層に遮光剤を含有させたものが高純
度薬品用の容器として提案されている。
JP-A No. 62-39444 discloses a bottle with a multilayer structure formed by blow molding polyethylene,
Containers for high-purity chemicals have been proposed in which layers other than the innermost layer contain a light-shielding agent.

<発明が解決しようとする課題> 高純度薬品の価格に占める出荷費用(容器代、
運搬費、容器充填費等)を考慮すると、大型で且
つ反復使用の可能な通い容器を用いることが望ま
しい。しかしながら上述の特開昭62−39444号に
記載のボトルは、小型容器としては極めてすぐれ
たものであるが、大型容器には適していない。何
故ならば反復使用に耐えるだけの強度を有する多
層構造の大型容器を吹込成形で成形することは困
難であるし、かつ一般に大型容器の吹込成形に用
いるポリエチレンは、高純度薬品中のダストや不
純物を増加させる傾向があるからである。
<Problems to be solved by the invention> Shipping costs (container costs,
Considering transportation costs, container filling costs, etc., it is desirable to use returnable containers that are large and can be used repeatedly. However, although the bottle described in the above-mentioned Japanese Patent Application Laid-open No. 62-39444 is extremely excellent as a small container, it is not suitable for a large container. This is because it is difficult to blow mold large containers with a multilayer structure that is strong enough to withstand repeated use, and the polyethylene typically used for blow molding large containers is free from dust and impurities in high-purity chemicals. This is because there is a tendency to increase

従つて本発明は、高純度薬品中にダストや不純
物が混入することが少なく、かつ通い容器として
反復使用に耐える大型容器を提供することを目的
とするものである。
Therefore, an object of the present invention is to provide a large-sized container that is less likely to be contaminated with dust or impurities in high-purity chemicals and can withstand repeated use as a returnable container.

<課題を解決するための手段> 本発明に係る高純度薬品用の大型容器は、補強
用の外筒とこれに内挿されているポリエチレン製
の内筒とから成り、該内筒は400mm以上の直径及
び深さの筒状部を有しており、且つメルトインデ
ツクス0.01〜0.04g/10分、密度0.953〜0.957
g/cm3のポリエチレンであつて金属成分を含有す
る添加剤を実質的に含まないものの吹込成形によ
り成形されたものであることを特徴とするもので
ある。
<Means for Solving the Problems> A large container for high-purity chemicals according to the present invention consists of a reinforcing outer cylinder and an inner cylinder made of polyethylene inserted into the outer cylinder, and the inner cylinder has a diameter of 400 mm or more. It has a cylindrical part with a diameter and depth of
g/cm 3 polyethylene substantially free of additives containing metal components, and is molded by blow molding.

本発明について更に詳細に説明すれば、本発明
は容器としての機械的強度を確保し、かつ外部か
らの衝撃を緩和する補強用の外筒と、高純度薬品
を汚染せずに収容する役割を果すポリエチレン製
の内筒とから成つている。内筒は外筒にゆるい嵌
合状態で内挿されており、外筒を傷めずに内筒の
交換も行なうことができる。内筒は内部に収容す
る薬品の荷重、及び薬物の抜出しを内筒への圧力
気体の導入により行なう場合には該気体の圧力に
耐える強度を有すればよく、通常5〜6mmの壁厚
を有している。内筒と外筒との間隙は空容器の状
態で通常1〜2mmであればよい。
To explain the present invention in more detail, the present invention includes a reinforcing outer cylinder that ensures mechanical strength as a container and cushions external impact, and a reinforcing outer cylinder that serves to accommodate high-purity chemicals without contaminating them. It consists of an inner cylinder made of polyethylene. The inner cylinder is inserted into the outer cylinder in a loosely fitted state, and the inner cylinder can be replaced without damaging the outer cylinder. If the inner cylinder is to withstand the load of the medicine contained therein and the pressure of the gas when the medicine is extracted by introducing pressure gas into the inner cylinder, the inner cylinder usually has a wall thickness of 5 to 6 mm. have. The gap between the inner cylinder and the outer cylinder may normally be 1 to 2 mm when the container is empty.

内筒はポリエチレンの吹込成形により成形す
る。内筒は400mm以上の直径(内筒の主体部は通
常は円筒であるが、円筒でない場合は同一横断面
積の円筒として算出する)及び深さの筒状部を有
する大型成形品であるが、はだ荒れを起さないよ
うに成形することが重要である。吹込成形に際し
ての成形性、並びに使用に際しての耐久性及び非
汚染性等の諸条件を同時に満足するには、使用す
るポリエチレンの選択が重要である。
The inner cylinder is formed by blow molding polyethylene. The inner cylinder is a large molded product with a diameter of 400 mm or more (the main body of the inner cylinder is usually a cylinder, but if it is not a cylinder, it is calculated as a cylinder with the same cross-sectional area) and a depth of 400 mm. It is important to mold the material so that it does not cause roughness. In order to simultaneously satisfy conditions such as moldability during blow molding, durability and non-staining property during use, it is important to select the polyethylene to be used.

本発明では、メルトインデツクス0.01〜0.04
g/10分、密度0.953〜0.957g/cm3のポリエチレ
ンであつて金属成分を含有する添加物を実質的に
含まないものを使用する。ポリエチレンは通常、
種々の添加剤を含む組成物として成形に供される
が、添加剤は一般に容器に収容する高純度薬品を
汚染する危険があるので、汚染防止の点からは添
加剤を全く含まないポリエチレンを用いるのが好
ましい。特に、通常用いられているステアリン酸
カルシウムをはじめ金属成分を含有する添加剤
は、硝酸等の高純度薬品を汚染しやすいので用い
てはならない。しかしヒンダードフエノール系の
酸化防止剤は高純度薬品を汚染することが少な
く、かつピンチオフ部の強度を確保するのに有効
なので用いるのが好ましい。
In the present invention, the melt index is 0.01 to 0.04.
Polyethylene having a density of 0.953 to 0.957 g/cm 3 and substantially free of additives containing metal components is used. Polyethylene is usually
It is molded as a composition containing various additives, but additives generally have the risk of contaminating the high-purity chemicals stored in the container, so polyethylene, which does not contain any additives, is used to prevent contamination. is preferable. In particular, commonly used additives containing metal components such as calcium stearate should not be used because they tend to contaminate high purity chemicals such as nitric acid. However, it is preferable to use hindered phenol-based antioxidants because they are less likely to contaminate high-purity chemicals and are effective in ensuring the strength of the pinch-off portion.

ヒンダードフエノール系の酸化防止剤とは、4
−ヒドロキシ−3,5−ジ第三ブチルフエニル基
を有する化合物であり、例えば一般式 (式中、t−Buは第三ブチル基、Yは炭素数
1〜30のb価の炭化水素残基または複素環残基、
aは1〜4の数、bは1以上の数を示す。) で表わされる化合物があげられる。具体的には、
メチル−β−(4−ヒドロキシ−3,5−ジ第三
ブチルフエニル)プロピオネート、エチル−β−
(4−ヒドロキシ−3,5−ジ第三ブチルフエニ
ル)プロピオネート、オクチル−β−(4−ヒド
ロキシ−3,5−ジ第三ブチルフエニル)プロヒ
オネート、ラウリル−β−(4−ヒドロキシ−3,
5−ジ第三ブチルフエニル)プロピオネート、オ
クタデシル−β−(4−ヒドロキシ−3,5−ジ
第三ブチルフエニル)プロピオネート、プロピル
−1,1,1−トリス−〔メチレン−3′−(4″−ヒ
ドロキシ−3″,5″−ジ第三ブチルフエニル)プロ
ピオネート〕、エチル−1,1,1−トリス−
〔〔メチレン−3′−(4″−ヒドロキシ−3″,5″−ジ
第三ブチルフエニル)プロピオネート〕、ペンタ
エリスリチルテトラキス〔3,4′−ヒドロキシ−
3′,5′−ジ第三ブチルフエニル)プロピオネー
ト〕、トリス〔(4−ヒドロキシ−3,5−ジ第三
ブチルフエニル)プロピオニルオキシエチル〕イ
ソシアヌレート、オクタデシル−α−(4−ヒド
ロキシ−3,5−ジ第三ブチルフエニル)アセテ
ート、オクタデシル−γ−(4−ヒドロキシ−3,
5−ジ第三ブチルフエニル)ブチレートなどがあ
げられる。
What are hindered phenol antioxidants?4
-Hydroxy-3,5-di-tert-butylphenyl group, for example, the general formula (In the formula, t-Bu is a tertiary butyl group, Y is a b-valent hydrocarbon residue or heterocyclic residue having 1 to 30 carbon atoms,
a represents a number from 1 to 4, and b represents a number of 1 or more. ). in particular,
Methyl-β-(4-hydroxy-3,5-di-tert-butylphenyl)propionate, ethyl-β-
(4-hydroxy-3,5-di-tert-butylphenyl) propionate, octyl-β-(4-hydroxy-3,5-di-tert-butylphenyl) propionate, lauryl-β-(4-hydroxy-3,
5-di-tert-butylphenyl) propionate, octadecyl-β-(4-hydroxy-3,5-di-tert-butylphenyl) propionate, propyl-1,1,1-tris-[methylene-3′-(4″-hydroxy) -3″,5″-di-tert-butylphenyl)propionate], ethyl-1,1,1-tris-
[[Methylene-3′-(4″-hydroxy-3″,5″-di-tert-butylphenyl)propionate], pentaerythrityltetrakis [3,4′-hydroxy-
3',5'-di-tert-butylphenyl) propionate], tris[(4-hydroxy-3,5-di-tert-butylphenyl) propionyloxyethyl] isocyanurate, octadecyl-α-(4-hydroxy-3,5- di-tert-butylphenyl) acetate, octadecyl-γ-(4-hydroxy-3,
Examples include 5-di-tert-butylphenyl)butyrate.

ポリエチレンのメルトインデツクス及び密度
は、上記の範囲から選択する必要がある。密度が
上記の範囲よりも小さくなると高純度薬品中のダ
ストが増加する。また密度が上記の範囲よりも大
きくなると長期間の使用にあたり破損しやすくな
る。またメルトインデツクスは成形性を確保する
ために上記の範囲にあることが必要である。
The melt index and density of the polyethylene must be selected from the above ranges. When the density is lower than the above range, dust in the high purity chemical increases. Furthermore, if the density is greater than the above range, it will be more likely to be damaged during long-term use. Further, the melt index must be within the above range to ensure moldability.

外筒は繊維強化プラスチツク(FRP)等で製
作するのが有利である。外筒は容器の機械的強度
を確保し、外部からの衝撃に対して内筒を保護す
るためのものであり、FRPの厚さは6mm程度で
十分である。
It is advantageous for the outer cylinder to be made of fiber reinforced plastic (FRP) or the like. The outer cylinder ensures the mechanical strength of the container and protects the inner cylinder from external impacts, and a thickness of about 6 mm of FRP is sufficient.

本発明を図面に基づいて更に具体的に説明する
と、第1図は本発明に係る容器の1例の一部縦断
面図である。図中1はFRP製の外筒であり、上
面と側面が一体に形成されている。底板2は取外
し可能となつており、ボルトで外筒の本体に固定
するようになつている。底面の中央部(最抵部)
には通気及び上面の開口部から侵入するかもしれ
ない水を排出するための小孔9が設けられてい
る。上面3には、内筒4の上部に突起状に設けた
液出入口5、ガス入口6、および洗浄口開口部が
設けられている。
To explain the present invention more specifically based on the drawings, FIG. 1 is a partial vertical sectional view of an example of a container according to the present invention. In the figure, 1 is an outer cylinder made of FRP, and the top surface and side surfaces are integrally formed. The bottom plate 2 is removable and is fixed to the main body of the outer cylinder with bolts. Center part of the bottom (most resistance part)
is provided with small holes 9 for ventilation and drainage of water that may enter through the openings in the top surface. The upper surface 3 is provided with a liquid inlet/outlet 5, a gas inlet 6, and a cleaning port opening provided in a protruding manner at the upper part of the inner cylinder 4.

液出入口5、ガス入口6には高純度薬品の充
填、抜出しのためのワンタツチカプラー8が取付
けられている。洗浄口7は容器内部を洗浄すると
きの洗浄液の出入のためのものであり、高純度薬
品用容器として用いる際は蓋で閉鎖されている。
10は液出入口5、ガス入口6を保護するための
カバーである。11は高純度薬品の抜出導管であ
る。
A one-touch coupler 8 is attached to the liquid inlet/outlet 5 and the gas inlet 6 for filling and extracting high purity chemicals. The cleaning port 7 is for the entry and exit of cleaning liquid when cleaning the inside of the container, and is closed with a lid when used as a container for high-purity chemicals.
10 is a cover for protecting the liquid inlet/outlet 5 and the gas inlet 6. 11 is a high purity chemical extraction conduit.

<実施例> 密度0.955g/cm3、メルトインデツクス0.03
g/10分で、添加剤としてヒンダードフエノール
系酸化防止剤を0.1%含有するポリエチレンを用
いて、吹込成形により、第1図に示す如き形状で
直径約500mm、深さ約620mm、壁の厚さ約5mmで内
容積約100の内筒を製作した。これを第1図の
如き形状の厚さ6mmのFRP製の外筒に下から挿
入し、底板を取付て内筒を底板上に支持した。内
筒と外筒との間隙は約1mmである。容器を十分に
洗浄し、かつ高純度塩酸を入れて放置して容器か
ら生ずる汚染物を予じめ除去したのち、これに高
純度塩酸を充填して約620Km、トラツク輸送した。
高純度薬品中の0.5μ以上のダスト数(個/ml)は
充填時13個/ml、輸送後16個/mlで殆んど変化し
なかつた。
<Example> Density 0.955g/cm 3 , Melt index 0.03
g/10 minutes, using polyethylene containing 0.1% hindered phenol antioxidant as an additive, the shape shown in Figure 1 was made into a mold with a diameter of approximately 500 mm, a depth of approximately 620 mm, and a wall thickness. An inner cylinder with a diameter of approximately 5 mm and an internal volume of approximately 100 mm was manufactured. This was inserted from below into an FRP outer cylinder with a thickness of 6 mm as shown in Fig. 1, a bottom plate was attached, and the inner cylinder was supported on the bottom plate. The gap between the inner cylinder and the outer cylinder is about 1 mm. The container was thoroughly washed, high-purity hydrochloric acid was added, and the container was left to stand to remove any contaminants from the container.The container was then filled with high-purity hydrochloric acid and transported approximately 620 km by truck.
The number of dust particles of 0.5μ or more (pieces/ml) in the high-purity drug was 13 pieces/ml at the time of filling and 16 pieces/ml after transportation, with almost no change.

これに対し密度0.951g/cm3、メルトインデツ
クス0.03g/10分のポリエチレンを用いて製作し
た内筒を用いると950個/mlとダストが50倍以上
にも増加する。
On the other hand, if an inner cylinder made of polyethylene with a density of 0.951 g/cm 3 and a melt index of 0.03 g/10 minutes is used, the amount of dust increases more than 50 times to 950 particles/ml.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明に係る高純度薬品用の大型容器
の1例である。 1……外筒、2……外筒の底板、3……外筒の
上面、4……内筒、5……液出入口、6……ガス
入口、7……洗浄口、8……ワンタツチカプラ
ー、9……小孔、10……保護カバー、11……
抜出用導管。
FIG. 1 is an example of a large container for high-purity chemicals according to the present invention. 1...Outer cylinder, 2...Bottom plate of the outer cylinder, 3...Top surface of the outer cylinder, 4...Inner cylinder, 5...Liquid inlet/outlet, 6...Gas inlet, 7...Washing port, 8...One Tatsuchi coupler, 9...small hole, 10...protective cover, 11...
Extraction conduit.

Claims (1)

【特許請求の範囲】 1 補強用の外筒と、これに内挿されているポリ
エチレン製の内筒とから成り、該内筒は400mm以
上の直径及び深さの筒状部を有しており、且つメ
ルトインデツクス0.01〜0.04g/10分、密度0.953
〜0.957g/cm3のポリエチレンであつて金属成分
を含有する添加剤を実質的に含まないものの吹込
成形により成形されたものであることを特徴とす
る高純度薬品用の大型容器。 2 添加剤としてヒンダードフエノール系の酸化
防止剤のみを含んでいるポリエチレンで内筒が形
成されていることを特徴とする請求項1記載の高
純度薬品用の大型容器。
[Claims] 1. Consisting of a reinforcing outer cylinder and an inner cylinder made of polyethylene inserted into the outer cylinder, the inner cylinder has a cylindrical part with a diameter and depth of 400 mm or more. , and melt index 0.01-0.04g/10min, density 0.953
A large container for high-purity drugs, characterized in that it is made of polyethylene of ~0.957 g/cm 3 and substantially free of additives containing metal components, and is molded by blow molding. 2. The large container for high purity chemicals according to claim 1, wherein the inner cylinder is formed of polyethylene containing only a hindered phenol antioxidant as an additive.
JP63033384A 1988-02-16 1988-02-16 Large-sized vessel for high-purity chemical Granted JPH01208115A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP63033384A JPH01208115A (en) 1988-02-16 1988-02-16 Large-sized vessel for high-purity chemical

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63033384A JPH01208115A (en) 1988-02-16 1988-02-16 Large-sized vessel for high-purity chemical

Publications (2)

Publication Number Publication Date
JPH01208115A JPH01208115A (en) 1989-08-22
JPH0420773B2 true JPH0420773B2 (en) 1992-04-06

Family

ID=12385100

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63033384A Granted JPH01208115A (en) 1988-02-16 1988-02-16 Large-sized vessel for high-purity chemical

Country Status (1)

Country Link
JP (1) JPH01208115A (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2288141A (en) * 1994-04-08 1995-10-11 Wiva Bv Chemical vessels made from carbon-pigmented HPDE
DE19628643A1 (en) * 1996-07-16 1998-01-22 Merck Patent Gmbh Materials for the manufacture of transport containers
DE19905765A1 (en) 1999-02-11 2000-08-31 Riedel De Haen Gmbh Multi-layer device for storing and transporting chemicals

Also Published As

Publication number Publication date
JPH01208115A (en) 1989-08-22

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