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JPH0426403B2 - - Google Patents
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JPH0426403B2 - - Google Patents

Info

Publication number
JPH0426403B2
JPH0426403B2 JP21480084A JP21480084A JPH0426403B2 JP H0426403 B2 JPH0426403 B2 JP H0426403B2 JP 21480084 A JP21480084 A JP 21480084A JP 21480084 A JP21480084 A JP 21480084A JP H0426403 B2 JPH0426403 B2 JP H0426403B2
Authority
JP
Japan
Prior art keywords
angle
bevel
light
inclined surface
speed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP21480084A
Other languages
Japanese (ja)
Other versions
JPS6191507A (en
Inventor
Kenichi Matsui
Kyohiko Kawaguchi
Mitsuhito Kamei
Toshiro Nakajima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Nippon Steel Corp
Original Assignee
Mitsubishi Electric Corp
Sumitomo Metal Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp, Sumitomo Metal Industries Ltd filed Critical Mitsubishi Electric Corp
Priority to JP21480084A priority Critical patent/JPS6191507A/en
Publication of JPS6191507A publication Critical patent/JPS6191507A/en
Publication of JPH0426403B2 publication Critical patent/JPH0426403B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/26Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は油井管端部のベベル角等、所定の基準
面に対する傾斜面の傾斜角を光学的に測定する装
置に関する。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an apparatus for optically measuring the inclination angle of an inclined surface with respect to a predetermined reference plane, such as the bevel angle of an oil country tubular end.

〔従来技術〕[Prior art]

油井用鋼管は原油、天然ガスの採取・生産に用
いられ、採取の場合通常、地球の表面に垂直或は
垂直に近い角度にて地下数千メートルに達するよ
うに多数本を接続して使用される。
Steel pipes for oil wells are used for the extraction and production of crude oil and natural gas, and in the case of extraction, they are usually connected in large numbers to reach several thousand meters underground at angles that are perpendicular or close to perpendicular to the earth's surface. Ru.

その接続には各種の方式があるが、一般に、第
3図にその端部断面を示す油井用鋼管を、軸心を
一致させて対向させ、その外周にカツプルリング
と称さる雌ネジを油井用鋼管の端部1に形成せし
めた雄ネジ部16に螺着させて継ぎ合せて行つて
いる。
There are various methods of connection, but in general oil well steel pipes, the end cross section of which is shown in Figure 3, are placed facing each other with their axes aligned, and a female screw called a couple ring is attached to the outer periphery of the oil well steel pipe. This is done by screwing onto a male threaded portion 16 formed on the end 1 of the steel pipe.

このように使用される油井用鋼管はAPI(米国
石油協会)規格により耐力、引張強さ、伸び、各
部の寸法が規定されており、油井用鋼管の端部の
ベベル角はその規定項目の1つとなつている。
The yield strength, tensile strength, elongation, and dimensions of each part of oil well steel pipes used in this way are specified by API (American Petroleum Institute) standards, and the bevel angle of the end of oil well steel pipes is one of the specified items. It's becoming one.

ベベル角とは雄ネジ部16の端部から端縁まで
の間に形成された傾斜面と管軸心に垂直な面との
なす角をいい、換言すればこの傾斜面、即ちベベ
ル部1aでの母線と半径方向とのなす角度を指
す。
The bevel angle refers to the angle between the inclined surface formed between the end of the male threaded portion 16 and the end edge and the plane perpendicular to the tube axis. In other words, this inclined surface, that is, the beveled portion 1a It refers to the angle between the generatrix of and the radial direction.

ベベル角の検査は、従来公差内の最大角の基準
ゲージと、公差内の最小角の基準ゲージとをベベ
ル部1aに押し当てて、ベベル角が2つのゲージ
角度内に入つているか否かを確かめるか、又は分
度器タイプの角度ゲージにて行つていた。
Conventionally, the bevel angle is inspected by pressing a reference gauge with the largest angle within the tolerance and a reference gauge with the smallest angle within the tolerance against the bevel portion 1a, and checking whether the bevel angle is within the two gauge angles. Either check or use a protractor type angle gauge.

しかしながら上記基準ゲージ、角度ゲージによ
り検査する場合は、人の手作業によるため個人差
による測定ミスを避けることができず、自動化が
望まれていた。
However, when inspecting using the reference gauge and angle gauge, measurement errors due to individual differences cannot be avoided because the inspection is done manually, and automation has been desired.

この自動化は既知の光切断方式を適用した装置
により測定することにより一応可能である。この
装置は油井用鋼管の軸長方向に長いスリツト光を
油井用鋼管の軸心に直交する方向からベベル部に
照射してその照射線を、例えばその45゜の角度か
らTVカメラ等にて撮影し、撮影した照射線の傾
き及びTVカメラ等の受光角度、光学倍率等に基
づきベベル角を測定するものであり、照射線像の
ベベル部での折れ曲り角度がベベル角に依存する
ことを利用する。
This automation is possible by measuring with a device using a known optical cutting method. This device irradiates the bevel part with a long slit light in the axial direction of the oil well steel pipe from a direction perpendicular to the axis of the oil well steel pipe, and then photographs the irradiated beam with a TV camera, etc. from an angle of 45 degrees. The bevel angle is measured based on the inclination of the photographed irradiation ray, the receiving angle of the TV camera, etc., optical magnification, etc., and it takes advantage of the fact that the bending angle at the bevel part of the irradiation image depends on the bevel angle. do.

しかしながらこの装置による場合は、2次元画
像情報に基づいて測定するため高速処理が難し
く、また装置が相当大掛りなものとなる欠点があ
る。
However, this device has the drawback that high-speed processing is difficult because it measures based on two-dimensional image information, and the device is quite large.

〔目的〕〔the purpose〕

本発明は斯かる事情に鑑みてなされたものであ
り、その目的とするところは高速処理が可能であ
りしかも簡潔な傾斜角測定装置を提供するにあ
る。
The present invention has been made in view of the above circumstances, and its purpose is to provide a simple inclination angle measuring device that is capable of high-speed processing.

〔発明の構成〕[Structure of the invention]

本発明に係る傾斜角測定装置は、被測定材の傾
斜面に一定の走査速度、一定の入射角度にてスポ
ット光を傾斜面の傾斜方向に走査する光走査装置
と、傾斜面の走査域に向けて設置してあり、傾斜
面からの反射光を結像させて得たスポット光の位
置を検出する位置検出器と、位置検出器にて検出
されたスポット光の移動速度を算出する速度算出
回路と、算出された移動速度及び前記走査速度、
入射角度に基づき傾斜面の所定基準に対する傾斜
角を算出する演算回路とを具備することを特徴と
する。
The inclination angle measuring device according to the present invention includes an optical scanning device that scans a spot light in the inclination direction of the inclined surface at a constant scanning speed and a fixed incident angle on the inclined surface of a material to be measured; A position detector that detects the position of the spot light obtained by imaging the reflected light from the inclined surface, and a speed calculator that calculates the moving speed of the spot light detected by the position detector. a circuit, a calculated moving speed and the scanning speed;
The present invention is characterized by comprising an arithmetic circuit that calculates the inclination angle of the inclined surface with respect to a predetermined reference based on the incident angle.

〔実施例〕〔Example〕

以下本発明を図面に基づき具体的に説明する。
第1図は本発明の実施例を示す模式的平面図であ
り、図中1は油井用鋼管の一方の端部を示す。端
部1は先端部に先端側が中央側よりも縮径してテ
ーパー状となつた傾斜部、つまりベベル部1aが
形成されており、ベベル部1aより管中央側には
ベベル部1a側が縮径したテーパーネジが切られ
ている。
The present invention will be specifically explained below based on the drawings.
FIG. 1 is a schematic plan view showing an embodiment of the present invention, and 1 in the figure indicates one end of a steel pipe for oil wells. The end portion 1 has a tapered sloped portion where the tip side is smaller in diameter than the center side, that is, a bevel portion 1a. A tapered thread is cut.

油井用鋼管の端面から軸長方向に少し離隔した
位置には所要の口径のF−θレンズ4がその光軸
方向を軸長方向に一致させ、また光軸をベベル部
1a母線の中央点近傍に位置させて配設されてい
る。F−θレンズ4のベベル部1aと反対方向に
はその焦点距離だけ離隔した位置に反射面を有
し、反射点を中心として一定角速度で往復回動す
る光スキヤナー3が設けられている。光スキヤナ
ー3は適宜面積の鏡面体とこれを回動駆動する装
置とからなり鋼管端部1の肉厚方向又はその半径
方向に往復回動するようにその枢軸を設置してあ
る。
An F-theta lens 4 of a required diameter is located at a position a little apart in the axial direction from the end face of the oil well steel pipe, and the optical axis direction is aligned with the axial direction, and the optical axis is set near the center point of the generatrix of the bevel portion 1a. It is located and arranged. In the direction opposite to the bevel portion 1a of the F-θ lens 4, an optical scanner 3 is provided which has a reflective surface at a position separated by the focal length thereof and rotates back and forth at a constant angular velocity about the reflective point. The optical scanner 3 is composed of a specular body of a suitable area and a device for rotationally driving the mirror, and its pivot is installed so that it can reciprocate in the thickness direction of the steel pipe end 1 or in the radial direction thereof.

F−θレンズ4の光軸と直交し、光スキヤナー
3から適長離れた位置にはレーザ発生器2が配設
されていて、レーザ発生器2にて発生せしめたス
ポツト光は光スキヤナー3へ照射されるようにな
つており、照射された光は光スキヤナー3にて反
射され、反射光は光スキヤナー3の回動角度に応
じて反射方向が変化せしめられてF−θレンズ4
へ入り、F−θレンズ4にてその入射角度に拘ら
ずその光軸に平行なスポツト光となつてベベル部
1aに照射され、ここに光スポツトPoが形成さ
れる。
A laser generator 2 is disposed at a position perpendicular to the optical axis of the F-θ lens 4 and a suitable distance away from the optical scanner 3, and the spot light generated by the laser generator 2 is directed to the optical scanner 3. The irradiated light is reflected by the optical scanner 3, and the direction of reflection of the reflected light is changed according to the rotation angle of the optical scanner 3, and the reflected light is reflected by the F-θ lens 4.
The beam enters the bevel portion 1a, becomes a spot light parallel to the optical axis by the F-θ lens 4 regardless of the incident angle, and is irradiated onto the bevel portion 1a, forming a light spot Po there.

光スキヤナー3の回動の角速度は一定であるか
らスポツト光の移動速度又はベベル部1aでの光
スポツトPoの移動(走査)速度は一定である。
Since the angular velocity of rotation of the optical scanner 3 is constant, the moving speed of the spot light or the moving (scanning) speed of the light spot Po on the bevel portion 1a is constant.

なお光ビームの走査域の鋼管の半径方向寸法
は、ベベル部1aでの(最大径−最小径)/2よ
り大きくして、光スキヤナー3の往復回動の反転
時の減速による影響を排除せんとしている。
The radial dimension of the steel pipe in the scanning area of the light beam is set to be larger than (maximum diameter - minimum diameter)/2 at the bevel portion 1a to eliminate the influence of deceleration during reversal of the reciprocating rotation of the optical scanner 3. It is said that

ベベル部1aの中央点に立てた垂線とその光軸
を一致させて凸レンズ5が配設されており、凸レ
ンズ5に対してベベル部1aと反対側には、その
光軸上に中央点を合わせて1次元の光スポツト位
置検出器(例えば浜松ホトニクス製、S−1352)
6がその長手方向をベベル部1aの光スポツト
Poの走査域と平行にして又はベベル部1aの母
線方向にして配設されている。
A convex lens 5 is arranged with its optical axis aligned with a perpendicular line erected at the center point of the bevel portion 1a, and a center point is aligned on the optical axis on the opposite side of the convex lens 5 from the bevel portion 1a. One-dimensional optical spot position detector (for example, Hamamatsu Photonics, S-1352)
6 points its longitudinal direction to the light spot of the beveled portion 1a.
It is arranged parallel to the scanning area of Po or in the direction of the generatrix of the bevel portion 1a.

ベベル部1aに照射されたレーザ光はここで反
射され、その反射光は凸レンズ5にて集光されて
位置検出器6に結像される。
The laser beam irradiated onto the bevel portion 1 a is reflected here, and the reflected light is focused by a convex lens 5 and imaged on a position detector 6 .

さてF−θレンズ4を透過したスポツト光の走
査速度をV1とすると、ベベル部1aへ照射され
た光のベベル部1a表面上の移動速度V2は、V1
の移動方向と角度がベベル角θだけ異なるので下
記(1)式にて表される。
Now, if the scanning speed of the spot light transmitted through the F-θ lens 4 is V1 , then the moving speed V2 of the light irradiated onto the bevel portion 1a on the surface of the bevel portion 1a is V1.
Since the moving direction and angle of are different by the bevel angle θ, it is expressed by the following equation (1).

V1=V1/cosθ …(1) 従つてV1,V2がわかればcosθが定まり、これ
によりベベル角θがわかる。
V 1 =V 1 /cosθ (1) Therefore, if V 1 and V 2 are known, cosθ is determined, and from this, the bevel angle θ can be determined.

V2はベベル部1a表面にて反射された光が凸
レンズ5にて集光されて位置検出器6に結像した
光スポツトの速度V3によりもとめられる。V2
V3に光学系の倍率を掛けた下記(2)式にて表され
る。
V 2 is determined from the velocity V 3 of the light spot where the light reflected from the surface of the bevel portion 1a is focused by the convex lens 5 and imaged on the position detector 6. V 2 is
It is expressed by the following equation (2), which is V 3 multiplied by the magnification of the optical system.

V2=(a/b)・V3 …(2) 但し、 a:ベベル部1aのレーザ光照射位置〜凸レンズ
5間距離 b:凸レンズ5〜位置検出器6間距離 従つてV2の替わりにV3を測定することにより
ベベル角θを測定できる。
V 2 = (a/b)・V 3 ...(2) However, a: Distance between the laser beam irradiation position of the bevel portion 1a and the convex lens 5 b: Distance between the convex lens 5 and the position detector 6 Therefore, instead of V 2 By measuring V 3 , the bevel angle θ can be measured.

即ち、(1)、(2)式より(3)式が得られ、 V3=(b・V1)/(a・cosθ) …(3) これをベベル角θについて表すと下記(4)式が得
られる。
That is, formula (3) is obtained from formulas (1) and (2), and V 3 = (b・V 1 )/(a・cosθ) …(3) Expressing this in terms of bevel angle θ, the following (4) The formula is obtained.

θ=cos-1(a・V3/b・V1) …(4) 従つてベベル角は実質的にa、b、V1、V3
より求められる。a、b、V1はベベル角測定前
の光学系調節時に予め測定しておくことにより得
られ、V3は位置検出器6出力から次のようにし
て求められる。
θ=cos −1 (a·V 3 /b·V 1 ) (4) Therefore, the bevel angle is substantially determined by a, b, V 1 , and V 3 . a, b, and V 1 are obtained by measuring in advance when adjusting the optical system before measuring the bevel angle, and V 3 is obtained from the output of the position detector 6 as follows.

位置検出器6の光電変換部はベベル部1aの母
線方向に長い受光面を有しており、第2図に示す
如く両端夫々の電極A、Bと背面の共通電極Cと
の間から光電流IA、IBが取り出せるものである。
この光電流IA、IBは端の電極A、Bからスポツ
ト位置Dまでの距離に反比例し、また入射された
光の強さに略比例する値である。
The photoelectric conversion section of the position detector 6 has a light receiving surface that is long in the direction of the generatrix of the bevel section 1a, and as shown in FIG. IA and IB can be extracted.
The photocurrents IA and IB are inversely proportional to the distance from the end electrodes A and B to the spot position D, and are approximately proportional to the intensity of the incident light.

即ちAB間距離をL、AD間距離をxとすると、
夫々の光電流値IA、IBは、 IA=IL−x/L …(5) IB=Ix/L …(6) となる。ここにIはIAとIBとの和である。
That is, if the distance between AB is L and the distance between AD is x,
The respective photocurrent values IA and IB are as follows: IA=IL-x/L (5) IB=Ix/L (6). Here I is the sum of IA and IB.

位置検出器6はこの光電流値IA、IBを入射光
位置演算回路7へ与え、ここで光スポツト位置D
を表すxの値を x=LIB/IA/1+(IB/IA) …(7) として求める。
The position detector 6 supplies the photocurrent values IA and IB to the incident light position calculation circuit 7, which calculates the light spot position D.
Find the value of x representing x=LIB/IA/1+(IB/IA)...(7).

入射光位置演算回路7は算出したxの信号を微
分回路8へ入力する。
The incident light position calculation circuit 7 inputs the calculated x signal to the differentiation circuit 8.

微分回路8は刻々と連続的に変化するxを時間
にて微分し、移動量の微分値、即ち速度V3を求
める。
The differentiating circuit 8 differentiates x, which changes continuously from moment to moment, with respect to time, and obtains the differential value of the amount of movement, that is, the speed V3 .

このようにして求めたV3は角度演算回路9に
入力される。角度演算回路9は前記a、b、V1
を設定し、前記(4)式に基づきベベル角θを算出出
力できるようにしたアナログ回路であり、その算
出値を表示器10に表示させる。
V 3 obtained in this way is input to the angle calculation circuit 9. The angle calculation circuit 9 uses the a, b, V 1
This is an analog circuit that can calculate and output the bevel angle θ based on the above equation (4), and display the calculated value on the display 10.

この表示値をオペレータが監視し、表示値が許
容角度以内であれば油井用鋼管を良品とし、それ
を外れる場合には不良品として判定できる。
The operator monitors this displayed value, and if the displayed value is within the allowable angle, the oil well steel pipe is determined to be a good product, and if it is outside of this range, it is determined to be a defective product.

なお本発明はレーザ光の照射方向を、油井間の
軸長方向に限らず、他の方向から照射しても測定
できることは勿論である。この場合はレーザ光の
ベベル部1aの照射角度に応じてV1とV2との関
係式(1)式の角度を補正する必要がある。
In addition, in the present invention, the irradiation direction of the laser beam is not limited to the axial length direction between the oil wells, but it goes without saying that measurement can be performed even when the laser beam is irradiated from other directions. In this case, it is necessary to correct the angle in relational expression (1) between V 1 and V 2 according to the irradiation angle of the bevel portion 1a of the laser beam.

また、上記説明では測定にレーザ光に使用して
いるが、本発明はこれに限らず他の光を使用して
もよい。
Further, in the above description, laser light is used for measurement, but the present invention is not limited to this, and other light may be used.

そして、また本発明は光スキヤナーを往復動さ
せることに限らず、一定角速度にて回転するよう
にしてもよい。
Furthermore, the present invention is not limited to reciprocating the optical scanner, but may also rotate at a constant angular velocity.

更に本発明はF−θレンズに替えて通常の凸レ
ンズを用いてその凸レンズの光軸に直交する方向
に一定の速度でスポツト光を移動するようにして
もよいことは勿論である。
Furthermore, in the present invention, it goes without saying that an ordinary convex lens may be used in place of the F-.theta. lens, and the spot light may be moved at a constant speed in a direction perpendicular to the optical axis of the convex lens.

そして、更に本発明は油井用鋼管のベベル角測
定に限らず、所定の基準に対する傾斜角の測定一
般に適用できる。
Furthermore, the present invention is applicable not only to the measurement of bevel angles of steel pipes for oil wells, but also to the measurement of inclination angles in general with respect to predetermined standards.

なお位置検出器6、入射光位置演算回路7、微
分回路8、角度演算回路9の一部又は全部をデジ
タル回路、素子にて構成することが可能である。
Note that a part or all of the position detector 6, the incident light position calculation circuit 7, the differentiation circuit 8, and the angle calculation circuit 9 can be configured with digital circuits and elements.

〔効果〕〔effect〕

以上詳述した如く本発明はスポツト光の一次元
的位置移動量を求めることにより傾斜角を算出す
るように構成しているので高速測定が可能であ
り、また装置を簡略化できる等優れた効果を奏す
る。
As described in detail above, the present invention is configured to calculate the inclination angle by determining the one-dimensional positional movement of the spot light, so high-speed measurement is possible, and the apparatus has excellent effects such as being able to be simplified. play.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の実施例を示す模式図、第2図
は位置検出器の測定原理説明図、第3図は油井用
鋼管の端部を示す縦断面図である。 1……油井用鋼管端部、1a……ベベル部、2
……レーザ発生器、3……光スキヤナー、4……
F−θレンズ、5……凸レンズ、6……位置検出
器、7……入射光位置演算回路、8……微分回
路、9……角度演算回路。
FIG. 1 is a schematic diagram showing an embodiment of the present invention, FIG. 2 is a diagram illustrating the measurement principle of a position detector, and FIG. 3 is a longitudinal cross-sectional view showing an end of a steel pipe for oil wells. 1... Oil well steel pipe end, 1a... Beveled part, 2
...Laser generator, 3...Optical scanner, 4...
F-θ lens, 5... Convex lens, 6... Position detector, 7... Incident light position calculation circuit, 8... Differentiation circuit, 9... Angle calculation circuit.

Claims (1)

【特許請求の範囲】 1 被測定材の傾斜面に一定の走査速度、一定の
入射角度にてスポット光を傾斜面の傾斜方向に走
査する光走査装置と、 傾斜面の走査域に向けて設置してあり、傾斜面
からの反射光を結像させて得たスポット光の位置
を検出する位置検出器と、 位置検出器にて検出されたスポット光の移動速
度を算出する速度算出回路と、 算出された移動速度及び前記走査速度、入射角
度に基づき傾斜面の所定基準に対する傾斜角を算
出する演算回路と を具備することを特徴とする傾斜角測定装置。
[Scope of Claims] 1. An optical scanning device that scans a spot light in the direction of inclination of the inclined surface of a material to be measured at a constant scanning speed and at a constant angle of incidence, and installed toward the scanning area of the inclined surface. a position detector that detects the position of the spot light obtained by imaging the reflected light from the inclined surface; a speed calculation circuit that calculates the moving speed of the spot light detected by the position detector; An inclination angle measuring device comprising: an arithmetic circuit that calculates an inclination angle of an inclined surface with respect to a predetermined reference based on the calculated moving speed, the scanning speed, and the incident angle.
JP21480084A 1984-10-12 1984-10-12 Apparatus for measuring angle of inclination Granted JPS6191507A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21480084A JPS6191507A (en) 1984-10-12 1984-10-12 Apparatus for measuring angle of inclination

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21480084A JPS6191507A (en) 1984-10-12 1984-10-12 Apparatus for measuring angle of inclination

Publications (2)

Publication Number Publication Date
JPS6191507A JPS6191507A (en) 1986-05-09
JPH0426403B2 true JPH0426403B2 (en) 1992-05-07

Family

ID=16661730

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21480084A Granted JPS6191507A (en) 1984-10-12 1984-10-12 Apparatus for measuring angle of inclination

Country Status (1)

Country Link
JP (1) JPS6191507A (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04148817A (en) * 1990-10-11 1992-05-21 Mitsubishi Kasei Corp Surface inspecting apparatus
DE502005001342D1 (en) * 2004-04-01 2007-10-11 Bosch Gmbh Robert Device for the metered filling of bulk material
EP2530457B1 (en) * 2010-01-29 2021-03-17 Nippon Steel Corporation Defect inspection device
CN113358030B (en) * 2021-07-15 2022-09-30 中国科学院长春光学精密机械与物理研究所 Dispersive confocal measurement system and its error correction method

Also Published As

Publication number Publication date
JPS6191507A (en) 1986-05-09

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