JPH0429991B2 - - Google Patents
Info
- Publication number
- JPH0429991B2 JPH0429991B2 JP57140312A JP14031282A JPH0429991B2 JP H0429991 B2 JPH0429991 B2 JP H0429991B2 JP 57140312 A JP57140312 A JP 57140312A JP 14031282 A JP14031282 A JP 14031282A JP H0429991 B2 JPH0429991 B2 JP H0429991B2
- Authority
- JP
- Japan
- Prior art keywords
- signal
- tester
- memory
- input
- clock signal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000015654 memory Effects 0.000 claims description 37
- 238000012360 testing method Methods 0.000 claims description 28
- 230000003111 delayed effect Effects 0.000 claims description 11
- 230000010355 oscillation Effects 0.000 claims description 6
- 230000006870 function Effects 0.000 description 4
- 238000010998 test method Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 230000007257 malfunction Effects 0.000 description 3
- 230000007547 defect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000002950 deficient Effects 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C29/00—Checking stores for correct operation ; Subsequent repair; Testing stores during standby or offline operation
- G11C29/04—Detection or location of defective memory elements, e.g. cell constructio details, timing of test signals
- G11C29/50—Marginal testing, e.g. race, voltage or current testing
- G11C29/50012—Marginal testing, e.g. race, voltage or current testing of timing
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/317—Testing of digital circuits
- G01R31/3181—Functional testing
- G01R31/319—Tester hardware, i.e. output processing circuits
- G01R31/3193—Tester hardware, i.e. output processing circuits with comparison between actual response and known fault free response
- G01R31/31937—Timing aspects, e.g. measuring propagation delay
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C29/00—Checking stores for correct operation ; Subsequent repair; Testing stores during standby or offline operation
- G11C29/04—Detection or location of defective memory elements, e.g. cell constructio details, timing of test signals
- G11C29/50—Marginal testing, e.g. race, voltage or current testing
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C29/00—Checking stores for correct operation ; Subsequent repair; Testing stores during standby or offline operation
- G11C29/56—External testing equipment for static stores, e.g. automatic test equipment [ATE]; Interfaces therefor
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Tests Of Electronic Circuits (AREA)
- For Increasing The Reliability Of Semiconductor Memories (AREA)
Description
【発明の詳細な説明】
(a) 発明の技術分野
本発明は半導体集積回路(IC)によつて構成
されるICメモリ素子の動作機能試験に係り、特
にスタテツク形RAMICメモリの書込み読出し試
験装置の改良に関する。[Detailed Description of the Invention] (a) Technical Field of the Invention The present invention relates to an operational function test of an IC memory element constituted by a semiconductor integrated circuit (IC), and in particular to a test device for writing/reading a static RAMIC memory. Regarding improvements.
(b) 技術の背景
ICメモリは半導体技術とくに集積化技術の発
達に伴いICメモリの大容量化が進んでいる。そ
のためICメモリの動作機能試験に要する工数が
増大するので出来る限り効率の高い試験方法が必
要である。(b) Technology background As for IC memory, the capacity of IC memory is increasing with the development of semiconductor technology, especially integration technology. As a result, the number of man-hours required to test the operation and functionality of IC memory increases, so a test method that is as efficient as possible is required.
(c) 従来技術と問題点
従来のICメモリにおける動作機能試験はICメ
モリの仕様動作範囲における正常動作機能を保証
するために行うがその1つである書込み/読出し
試験装置について第1図のブロツク図および第2
図のタイムチヤートを参照しつゝ説明する。第図
において1は試験器、2は被試験体となるICメ
モリ素子、3はアドレスAφ〜n、チツプセレク
ト、ライトイネーブル、アウトイネーブル
OEおよびデータ入出力I/O1〜p等よりなる入
出力信号線である。(c) Prior art and problems Conventional operational function tests on IC memories are performed to ensure normal operation within the specified operating range of the IC memory. Figure and second
This will be explained with reference to the time chart shown in the figure. In the figure, 1 is the tester, 2 is the IC memory element to be tested, and 3 is the address Aφ~n, chip select, write enable, out enable.
This is an input/output signal line consisting of OE and data input/output I/O1 to p.
第2図においてaはクロツク信号、bはアドレ
ス信号、cは信号、dは信号、eは入力デ
ータ、fは信号およびgは出力データである。 In FIG. 2, a is a clock signal, b is an address signal, c is a signal, d is a signal, e is input data, f is a signal, and g is output data.
図中のtoは1サイクルを示し一例として250ns
である。 In the figure, to indicates one cycle, and as an example, 250ns.
It is.
従来の試験方法においては試験器1より接続線
3を介してICメモリ素子2の各Aφ〜nにアクセ
スし、,およびの制御各信号とI/O1
〜pにより一定のデータパターンを書込み次サイ
クルで読出す。書込み、読出し試験(W−Rテス
ト)では接続線3を介してI/O1〜pより試験
器1に送出し、試験器1ではICメモリ素子2に
書込んだ原入力データを読出し信号による出力デ
ータと照合して両データの一致を得ることにより
正常動作としていた。しかしICメモリ素子2に
はこれを構成する図示省略したがメモリセルに稀
な欠陥があつてメモリセルを構成するトランジス
タ素子のバランスが悪く、何れかに偏つて保持し
易いため、データの保持能力が悪い部分やアドレ
ス誤動作となる場合が存在する。このように記憶
保持能力の弱いメモリセルを内部に有するICメ
モリ素子は従来のW−Rテストによる試験方法で
発見し難い欠陥となり、通常の試験方法では良品
として通過し、装置内に組込まれた後で間欠エラ
ーとなる欠点を有していた。これはICメモリ素
子を搭載したプリント配線板や装置ではICメモ
リ素子へ印加される入力信号系の遅延時間差(論
理回路段数の差)又は、その取付、実装位置によ
つて各入力信号にそれぞれ微妙な遅延時間の差を
伴うので各入力信号に各種のスキユーが生じる。
しかし従来のICメモリ試験装置では一定のタイ
ミングで与えられ各入力信号は出来るだけスキユ
ーを少くするように試験器1が調整されているた
め各入力信号間のスキユーに起因する誤動作を発
見することが困難であつたがICメモリの高密度
化および高速度化に伴い、ICメモリがスキユー
によつて誤りを発生する傾向を示しており、IC
メモリのスキユーについての試験方法を強化する
ことが望ましい。 In the conventional test method, each Aφ to n of the IC memory element 2 is accessed from the tester 1 via the connection line 3, and each control signal of and I/O1 is accessed from the tester 1 through the connection line 3.
~p writes a certain data pattern and reads it out in the next cycle. In the write/read test (WR test), the tester 1 sends the original input data written to the IC memory element 2 to the tester 1 via the connection line 3 from I/O1 to p, and outputs the original input data written to the IC memory element 2 as a read signal. Normal operation was determined by checking the data and finding a match between the two data. However, the IC memory element 2 has a rare defect in the memory cell (not shown) that makes up the memory cell, and the transistor elements that make up the memory cell are unbalanced, making it easy for data to be retained in one direction. There are cases where there is a bad part or an address malfunction. In this way, IC memory elements that have internal memory cells with weak memory retention capacity have defects that are difficult to detect using the conventional WR test method, but they pass as non-defective products using the normal test method and cannot be incorporated into equipment. This had the drawback of causing intermittent errors later on. In printed wiring boards and devices equipped with IC memory elements, this may vary slightly depending on the delay time difference (difference in the number of logic circuit stages) of the input signal system applied to the IC memory element, or the mounting and mounting position of each input signal. Since there is a large difference in delay time, various skews occur in each input signal.
However, in conventional IC memory testing equipment, each input signal is applied at a fixed timing, and the tester 1 is adjusted to minimize skew as much as possible, making it difficult to detect malfunctions caused by skew between input signals. It was difficult, but as IC memory becomes denser and faster, IC memory tends to cause errors due to skew, and IC
It is desirable to strengthen testing methods for memory skew.
(d) 発明の目的
本発明の目的は上記の欠点を除去するため、従
来の試験サイクルと同じサイクルに前記被試験体
のICメモリにおける試験器よりの入力信号相互
間にすべての組合せを含んだ任意の同期形スキユ
ーを印加する事を可能としたICメモリの試験装
置を提供しようとするものである。(d) Object of the invention In order to eliminate the above-mentioned drawbacks, the object of the present invention is to include all combinations of input signals from the tester in the IC memory of the device under test in the same cycle as the conventional test cycle. The present invention aims to provide an IC memory testing device that is capable of applying arbitrary synchronous skew.
(e) 発明の構成
この目的は試験器のクロツク信号繰返し周期よ
り早い周波数を有する非同期の発振器、複数のフ
リツプフロツプを継続接続し該クロツク信号に同
期して該発振周波数を1サイクルおよび/または
複数サイクル刻みの遅延時間を有する複数の遅延
信号発生手段、該クロツク信号により歩進するn
組のmビツト計数器によるm×nビツトの出力信
号を任意に組合せて得るp組qビツトの変数列生
成手段、該遅延信号をqビツトの変数列に従つて
選択するp個の選択器手段および該選択器の出力
信号に従つて試験器より被試験体のICメモリへ
送出するアドレス、データ入力およびチツプセレ
クト等各入力信号の切換動作を行う複数のフリツ
プフロツプを備えてなり、試験器のクロツク信号
毎に変数列生成手段の出力信号における組合せに
従つて該遅延信号を選択し、試験器より該被試験
体のICメモリへの前記各入力信号に異なるスキ
ユーを印加することを特徴とするICメモリ試験
装置を提供することによつて達成することが出来
る。(e) Structure of the invention The object is to continuously connect an asynchronous oscillator having a frequency faster than the repetition period of a clock signal of a tester, and a plurality of flip-flops, and to synchronize the oscillation frequency with the clock signal for one cycle and/or multiple cycles. a plurality of delay signal generating means having delay times in increments;
means for generating p sets of q-bit variable strings obtained by arbitrarily combining m×n-bit output signals from sets of m-bit counters; p selector means for selecting the delayed signals according to the q-bit variable strings; and a plurality of flip-flops for switching input signals such as address, data input, and chip select to be sent from the tester to the IC memory of the test device according to the output signal of the selector. An IC characterized in that the delayed signal is selected for each signal according to the combination of output signals of the variable sequence generating means, and a different skew is applied to each input signal from the tester to the IC memory of the device under test. This can be achieved by providing a memory testing device.
(f) 発明の実施例
以下本発明の一実施例について図面を参照し
つゝ説明する。(f) Embodiment of the invention An embodiment of the invention will be described below with reference to the drawings.
第3図は本発明の一実施例におけるICメモリ
試験装置によるブロツク図、第4図はそのタイム
チヤートである。 FIG. 3 is a block diagram of an IC memory testing apparatus according to an embodiment of the present invention, and FIG. 4 is a time chart thereof.
図において1は試験器、3aはクロツク信号、
3bはアドレス入力信号Aφ〜7、41〜8はDタイ
プフリツプフロツプ(FF)、5は発振器(OSC)、
6は4ビツト計数器、7は8入力1出力の選択器
および8はDタイプフリツプフロツプ(FF)で
ある。 In the figure, 1 is a tester, 3a is a clock signal,
3b is an address input signal Aφ~7, 41~8 are D type flip-flops (FF), 5 is an oscillator (OSC),
6 is a 4-bit counter, 7 is an 8-input, 1-output selector, and 8 is a D-type flip-flop (FF).
試験器1は第3図においては1サイクルto毎に
クロツク信号3a、アドレス情報Aφ〜7につい
て表示したがこの他直接被試験体の入力端子に図
示省略した従来同様のチツプセレクト、ライ
トイネーブル、アウトイネーブルおよび
データ出力I/O1〜pを送出、またはデータ入
力I/O1〜pを受信して被試験体を書込み/読
取りの動作機能試験を行うものとする。 In Fig. 3, the tester 1 displays the clock signal 3a and address information Aφ to 7 every cycle to, but in addition to this, the tester 1 also displays the chip select, write enable, and output signals (not shown) directly at the input terminals of the device under test. It is assumed that a write/read operational function test is performed on the device under test by sending enable and data output I/O1-p or receiving data input I/O1-p.
図に示すFF41〜8こゝでは8種類の遅延パルス
を発生するためクロツク信号3aにより並列同時
にリセツトする。初段の出力端子Qは次段のD入
力端子に接続し、更に次段の出力端子Qは次々段
のD入力端子へ…と順に縦続接続されており、且
各FF41〜8のクロツク端子CLKにOSC5より並列
に発振周波数を入力されるので前段よりD入力端
子に高レベルが与えられたFF4は次のタイミン
グによる該発振周波数の高レベルが入力されると
出力端子Qが低レベルから高レベルに転位し、第
4図c〜jに示すように順に8種類の遅延信号を
送出する。尚初段のFF4−1は、クロツク信号3
aが与えられたときに最終段FF4-8の出力端子
Qに発生する立上りによる高レベルをD入力端子
に与えてセツトする。従つてFF41〜8による複数
の遅延信号こゝでは8個の遅延信号はクロツク信
号によつてリセツトされた後OSC5の発振周波
数によつて順に1サイクルまたは複数サイクル遅
れの遅延信号群となり、8個よりなる遅延信号群
はMPX7にそれぞれ並列に送出される。一方6
個の計数器6はリセツト動作を伴わないので不定
の置数状態よりクロツク信号3aを受信する毎に
歩進して各4ビツトの計数結果を出力する。 In the FFs 41 to 8 shown in the figure, in order to generate eight types of delay pulses, they are reset in parallel and simultaneously by the clock signal 3a. The output terminal Q of the first stage is connected to the D input terminal of the next stage, and the output terminal Q of the next stage is connected in cascade to the D input terminal of the next stage, and so on, and the clock terminal CLK of each FF4 1 to 8 is connected in series. Since the oscillation frequency is input in parallel from OSC5, FF4, which has been given a high level to the D input terminal from the previous stage, changes its output terminal Q from low level to high level when the high level of the oscillation frequency is input at the next timing. and sequentially send out eight types of delayed signals as shown in FIG. 4 c to j. The first stage FF4-1 receives clock signal 3.
When a is applied, the high level generated at the output terminal Q of the final stage FF4-8 is applied to the D input terminal to set it. Therefore, the plurality of delayed signals from FF4 1 to 8 are reset by the clock signal and then become a group of delayed signals delayed by one cycle or multiple cycles depending on the oscillation frequency of OSC5, The delayed signal groups are each sent to the MPX 7 in parallel. On the other hand 6
Since each counter 6 does not involve a reset operation, it increments each time it receives the clock signal 3a from an undefined numbered state and outputs each 4-bit counting result.
この合計24ビツトを任意の組合せ3ビツトより
なる8組の数字列を構成すれば8組の数字列は1
クロツク信号3a毎に内容の異なる変数が得られ
て簡易な乱数列となる。この3ビツト8組の数字
列はMPX7の選択信号として送出する。 If this total of 24 bits is arbitrarily combined to form 8 sets of number strings consisting of 3 bits, the 8 sets of number strings are 1
Variables with different contents are obtained for each clock signal 3a, resulting in a simple random number sequence. This 3-bit 8-set number string is sent as a selection signal for the MPX7.
図示省略したが計数器6は更に他の出力端子例
えばキヤリイ出力を他の計数器に入力して複数ク
ロツク毎に別の歩進を行わせても良い。 Although not shown in the drawings, the counter 6 may further have another output terminal, such as a carry output, inputted to another counter to perform another increment every plural clocks.
また3ビツト×8組を24ビツトより得たがこの
組合せは本発明を制約するものではなく、より多
くの例えば32ビツトより得てもあるいは一部を重
複して組合せてもよい。 Also, although 8 sets of 3 bits were obtained from 24 bits, this combination does not limit the present invention, and more, for example, 32 bits may be obtained, or some of them may be overlapped.
1クロツク信号3a毎に3ビツトの変数列を入
力される8個のMPX7はFF41〜8より受信する
遅延信号群の中から変数列に従つてその1遅延信
号を対応するFF8のクロツク端子に入力すれば
試験器1よりアドレス情報がクロツク信号3aに
同期して各D端子にセツトされているのでその内
容を出力端子Qに出力し、次のクロツク信号3a
によるアドレス情報をD端子に与えられて待機
し、再びクロツク端子CLKに入力される次サイ
クルの遅延信号による切換動作まで出力内容を保
持する。 The eight MPX7s, which receive a 3-bit variable string for each clock signal 3a, send one delayed signal to the clock terminal of the corresponding FF8 according to the variable string from among the group of delayed signals received from FF4 1 to 8 . When input, the address information from the tester 1 is set to each D terminal in synchronization with the clock signal 3a, so its contents are output to the output terminal Q, and the next clock signal 3a is output.
address information is applied to the D terminal and waits, and the output contents are held until switching operation by the next cycle delay signal input again to the clock terminal CLK.
従つて各FF8は1サイクル毎に対応するMPX
7の選択する遅延信号に従うタイミングで次サイ
クルのアドレス情報と切換わる従来のそれと比較
してスキユーが印加された新アドレス情報Aφ〜
7を送出する。以上のように新アドレス情報にス
キユーを印加して被試験体のメモリ素子に送出す
れば1サイクルto毎にOSC5の発振周波数に同期
した1サイクルおよび/または複数サイクル刻み
8種の中よりすべての組合せを書込み、、読取り
動作において順不定に与える結果となる。 Therefore, each FF8 has a corresponding MPX for each cycle.
The new address information Aφ~ has a skew applied compared to the conventional address information that switches to the next cycle address information at the timing according to the delay signal selected by No. 7.
Sends 7. As described above, by applying skew to the new address information and sending it to the memory element of the test object, all of the This results in the combinations being presented out of order in write and read operations.
またOSC5の発振周波数を調整すればスキユ
ーの幅を任意に変更する事が出来る。以上はアド
レス情報を例に説明したが他のあるいはデー
タ入力I/O1〜pにも適用して同様の効果が得
られることはいう迄もない。 Also, by adjusting the oscillation frequency of OSC5, the width of the skew can be changed arbitrarily. Although the above description has been made using address information as an example, it goes without saying that the same effect can be obtained by applying it to other data input I/Os 1 to 1-p.
(g) 発明の効果
以上説明したように本発明によれば従来ICメ
モリの試験において適用出来なかつた被試験体へ
の各入力信号について変化のある複数のスキユー
を従来の動作機能試験と同一サイクルで印加する
ことが出来るので試験工数を増大することなくス
キユーに起因する誤動作を容易に発見出来るよう
になるので有用である。(g) Effects of the Invention As explained above, according to the present invention, multiple skews with changes in each input signal to the device under test, which could not be applied in conventional IC memory tests, can be solved in the same cycle as in conventional operational function tests. This is useful because malfunctions caused by skew can be easily detected without increasing the number of testing steps.
第1図は従来におけるICメモリの試験装置に
よるブロツク図、第2図はそのタイムチヤート、
第3図は本発明の一実施例におけるICメモリの
試験装置によるブロツク図および第4図はそのタ
イムチヤートを示す。
図において1は試験器、4および8はDタイプ
フリツプフロツプ、5は発振器、6は計数器およ
び7は選択器である。
Figure 1 is a block diagram of a conventional IC memory test equipment, Figure 2 is its time chart,
FIG. 3 is a block diagram of an IC memory testing apparatus according to an embodiment of the present invention, and FIG. 4 is a time chart thereof. In the figure, 1 is a tester, 4 and 8 are D-type flip-flops, 5 is an oscillator, 6 is a counter, and 7 is a selector.
Claims (1)
波数を有する非同期の発振器、複数のフリツプフ
ロツプを継続接続し該クロツク信号に同期して該
発振周波数を1サイクルおよび/または複数サイ
クル刻みの遅延時間を有する複数の遅延信号発生
手段、該クロツク信号により歩進するn組のmビ
ツト計数器によるm×nビツトの出力信号を任意
に組合せて得るp組qビツトの変数列生成手段、
該遅延信号をqビツトの変数列に従つて選択する
p個の選択器手段および該選択器の出力信号に従
つて試験器より被試験体のICメモリへ送出する
アドレス、データ入力およびチツプセレクト等各
入力信号の切換動作を行う複数のフリツプフロツ
プを備えてなり、試験器のクロツク信号毎に変数
列生成手段の出力信号における組合せに従つて該
遅延信号を選択し、試験器より該被試験体ICメ
モリへの前記各入力信号に異なるスキユーを印加
することを特徴とするICメモリ試験装置。1. An asynchronous oscillator with a frequency faster than the repetition period of the clock signal of the tester, a plurality of flip-flops connected in series, and a plurality of flip-flops having a delay time of one cycle and/or multiple cycles to synchronize the oscillation frequency with the clock signal. a delay signal generating means, a p-group q-bit variable string generating means obtained by arbitrarily combining m×n-bit output signals from n-sets of m-bit counters incremented by the clock signal;
p selector means for selecting the delayed signal according to a variable string of q bits, and address, data input, chip select, etc. for sending from the tester to the IC memory of the device under test according to the output signal of the selector. It is equipped with a plurality of flip-flops that perform switching operations for each input signal, and selects the delayed signal according to the combination of the output signals of the variable string generation means for each clock signal of the tester, and selects the delay signal from the tester to the IC under test. An IC memory testing device characterized in that a different skew is applied to each of the input signals to the memory.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57140312A JPS5930072A (en) | 1982-08-12 | 1982-08-12 | Method for testing ic memory |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57140312A JPS5930072A (en) | 1982-08-12 | 1982-08-12 | Method for testing ic memory |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5930072A JPS5930072A (en) | 1984-02-17 |
| JPH0429991B2 true JPH0429991B2 (en) | 1992-05-20 |
Family
ID=15265863
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57140312A Granted JPS5930072A (en) | 1982-08-12 | 1982-08-12 | Method for testing ic memory |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5930072A (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62100274A (en) * | 1985-10-29 | 1987-05-09 | Freunt Ind Co Ltd | Food preservation methods and food preservation tools |
| JPS62155071A (en) * | 1985-12-24 | 1987-07-10 | 陳 森義 | Food preservatives and preservation of food using the same |
-
1982
- 1982-08-12 JP JP57140312A patent/JPS5930072A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5930072A (en) | 1984-02-17 |
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