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JPH0437564B2 - - Google Patents
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JPH0437564B2 - - Google Patents

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Publication number
JPH0437564B2
JPH0437564B2 JP7566788A JP7566788A JPH0437564B2 JP H0437564 B2 JPH0437564 B2 JP H0437564B2 JP 7566788 A JP7566788 A JP 7566788A JP 7566788 A JP7566788 A JP 7566788A JP H0437564 B2 JPH0437564 B2 JP H0437564B2
Authority
JP
Japan
Prior art keywords
gas
container
winding
capacitor element
capacitor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP7566788A
Other languages
Japanese (ja)
Other versions
JPH01246811A (en
Inventor
Koichi Toshikura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Risho Kogyo Co Ltd
Original Assignee
Risho Kogyo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Risho Kogyo Co Ltd filed Critical Risho Kogyo Co Ltd
Priority to JP7566788A priority Critical patent/JPH01246811A/en
Publication of JPH01246811A publication Critical patent/JPH01246811A/en
Publication of JPH0437564B2 publication Critical patent/JPH0437564B2/ja
Granted legal-status Critical Current

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  • Fixed Capacitors And Capacitor Manufacturing Machines (AREA)

Description

【発明の詳細な説明】 (イ) 発明の目的 [産業上の利用分野] この発明は絶縁耐力の弱点部に絶縁ガスを介在
させてまわりを合成樹脂でモールドしたコンデン
サの製造法に関する。
[Detailed Description of the Invention] (a) Object of the Invention [Field of Industrial Application] The present invention relates to a method of manufacturing a capacitor in which the weak point of dielectric strength is molded with synthetic resin with an insulating gas interposed therebetween.

[従来の技術] プラスチツクフイルムを誘電体とし、これに金
属を蒸着した金属化フイルムを積み重ねながら巻
き取つた、所謂、巻回型コンデンサは、無極性で
あり誘電損失が少ないこと、等から電力用に用い
られる。しかし、高電圧下に用いられるとき巻回
両端面部にコロナ放電を生じ易いことはよく知ら
れている。
[Prior art] So-called wound capacitors, in which a plastic film is used as a dielectric material and a metallized film on which a metal is deposited are stacked and wound, are used for electric power because they are non-polar and have low dielectric loss. used for. However, it is well known that when used under high voltage, corona discharge tends to occur at both ends of the winding.

ところで、巻回両端面部のコロナ放電開始電圧
の向上を目的とした、特開昭60−72212号公報に
記載の、モールドコンデンサの製造法の発明があ
る。
By the way, there is an invention of a method for manufacturing a molded capacitor described in Japanese Patent Application Laid-open No. 72212/1983, which aims to improve the corona discharge starting voltage at both end faces of the winding.

このモールドコンデンサの製造法は、大気中
で、金属化フイルムを積み重ねながら巻き取り、
巻き取つた素子の両端面に金属を溶射して電極を
形成し、この電極に引き出し線を接続してコンデ
ンサ素子を得て、得られたコンデンサ素子を真空
高温槽に入れて加熱処理および真空処理を行い、
コンデンサ素子に絶縁ガスを充填して、絶縁ガス
を充填したコンデンサ素子をモールド樹脂の中に
埋設して取り出す製法であり、このモールドコン
デンサの製造法はコンデンサ素子の巻回両端面の
凹凸部に僅かながら絶縁ガスの滞留が期待でき、
コンデンサ素子に絶縁ガスを充填しないものに較
べてコロナ放電特性が向上すると同時に絶縁耐力
が向上する利点がある。
The manufacturing method for this molded capacitor involves stacking and winding metallized films in the atmosphere.
Metal is thermally sprayed on both end faces of the wound element to form electrodes, lead wires are connected to these electrodes to obtain a capacitor element, and the obtained capacitor element is placed in a vacuum high temperature chamber for heat treatment and vacuum treatment. and
This is a manufacturing method in which a capacitor element is filled with insulating gas, and the capacitor element filled with insulating gas is buried in a molded resin and taken out.This method of manufacturing a molded capacitor has slight unevenness on both ends of the winding of the capacitor element. However, insulating gas can be expected to remain.
Compared to capacitor elements that are not filled with insulating gas, this has the advantage of improved corona discharge characteristics and improved dielectric strength.

[発明が解決しようとする問題点] しかしながら、上記モールドコンデンサの製造
法は、大気中で、金属化フイルムを積み重ねなが
ら巻き取るので、巻き取つた金属化フイルムの内
側と、それに面する金属化フイルム面との間およ
び外側に面する金属化フイルム面との間に空気を
抱き込み、抱き込まれた空気が金属化フイルム間
の空気のボイドとなつて存在する問題点がある。
[Problems to be Solved by the Invention] However, in the above method for manufacturing a molded capacitor, the metallized film is rolled up while being stacked in the atmosphere, so that the inner side of the wound metallized film and the metallized film facing it are There is a problem in that air is trapped between the metallized film surface and the metallized film surface facing outward, and the trapped air exists as air voids between the metallized films.

このような空気を抱き込んでコンデンサ素子を
熱処理および真空処理するとコンデンサ素子の巻
回両端面の凹凸部の空気や水分を取り除くことは
できるが、金属化フイルム間に存在している空気
のボイドは、この熱処理や真空処理では取り去る
ことができないという問題点がある。
If such air is trapped and the capacitor element is heat-treated and vacuum-treated, it is possible to remove the air and moisture from the uneven parts on both ends of the winding of the capacitor element, but the air voids that exist between the metallized films are removed. However, there is a problem in that it cannot be removed by heat treatment or vacuum treatment.

また、絶縁ガスを充填したコンデンサ素子をモ
ールド樹脂の中に埋設する際に、コンデンサ素子
をモールド樹脂液の中に入れた段階でコンデンサ
素子の巻回両端面の凹凸部に滞留していた絶縁ガ
スがモールド樹脂液より浮力を得て一部はモール
ド樹脂液中を気泡となつて出て行き、更に、モー
ルド樹脂液を硬化反応温度に上げて硬化反応を進
める段階で残留している絶縁ガスは暖められ一層
大きな浮力を得てモールド樹脂液中を気泡となつ
て出て行くので、コンデンサ素子の巻回両端面の
凹凸部に絶縁ガスの滞留をあまり期待することが
できなくなるという問題点もある。
In addition, when embedding a capacitor element filled with insulating gas in mold resin, the insulating gas that remained in the uneven parts of both ends of the winding of the capacitor element when the capacitor element was placed in the mold resin liquid. obtains buoyancy from the mold resin liquid and some of it leaves the mold resin liquid as bubbles, and when the mold resin liquid is raised to the curing reaction temperature to proceed with the curing reaction, the remaining insulating gas is removed. There is also the problem that the insulating gas cannot be expected to remain in the concave and convex portions of both ends of the winding of the capacitor element because it is warmed up, gains greater buoyancy, and exits the mold resin liquid as bubbles. .

そこで、この発明は金属化フイルムの巻回した
コンデンサ素子の巻回両端面部の金属薄膜縁面ま
わりの絶縁耐力弱点部、及び金属化フイルム間の
ボイドによる絶縁耐力弱点部のコロナ放電特性の
改善を計りうるコンデンサの製造法を提供しよう
とするものである。
Therefore, the present invention aims to improve the corona discharge characteristics of the weak points of dielectric strength around the edges of the metal thin film on both ends of the winding of a capacitor element wound with a metallized film, and the weak points of dielectric strength due to voids between the metallized films. The aim is to provide a method for manufacturing capacitors that can be measured.

(ロ) 発明の構成 [問題点を解決するための手段] この発明は、上記の問題点を解決するために、
プラスチツクフイルムに金属薄膜を形成した金属
化フイルムをSF6ガス雰囲気中で巻き取りを行う
工程、巻き取つた素子を大気中で素子両端面に電
極を形成し引き出し線を接続する工程、電極を形
成し引き出し線を接続したコンデンサ素子を容器
に収容し真空処理する工程、真空状態の容器内に
SF6ガスを充填する工程、SF6ガスを充填した容
器のまわりを合成樹脂でモールドする工程を経る
ことを特徴とする製造法に構成したのである。
(b) Structure of the invention [Means for solving the problems] In order to solve the above problems, this invention has the following features:
A process of winding a metallized film, which is a metal thin film formed on a plastic film, in an SF 6 gas atmosphere, a process of forming electrodes on both end faces of the element and connecting lead wires with the wound element in the air, and forming an electrode. The capacitor element with lead wires connected is housed in a container and subjected to vacuum treatment.
The manufacturing method is characterized by the steps of filling the container with SF 6 gas and molding the container filled with SF 6 gas with synthetic resin.

以下、各工程について図面を用いて説明する。
第1図はSF6ガス雰囲気中で金属化フイルムを積
み重ねながら巻き取りを行うフイルム巻取装置の
概略を示す図面、第2図はモールドコンデンサの
断面図、第3図はモールドコンデンサの要部拡大
断面図、第4図は真空処理、SF6ガス導入、およ
び合成樹脂モールドが可能な真空槽装置の概略を
示す図面である。
Each step will be explained below using the drawings.
Figure 1 is a schematic diagram of a film winding device that stacks and winds metallized films in an SF 6 gas atmosphere, Figure 2 is a cross-sectional view of a molded capacitor, and Figure 3 is an enlarged view of the main parts of a molded capacitor. The cross-sectional view and FIG. 4 are drawings schematically showing a vacuum chamber apparatus capable of vacuum processing, SF 6 gas introduction, and synthetic resin molding.

SF6ガス雰囲気中で金属化フイルムを積み重ね
ながら巻き取りを行う装置の概略を示す図面で、
フイルム巻取り機の巻き取り部、即ち、巻き取り
軸、金属化フイルム5,6の巻き取りボビン4へ
の導入部は上が開口したタンク1の下部に位置さ
せてある。
This is a schematic drawing of a device that stacks and winds metallized films in an SF 6 gas atmosphere.
The winding section of the film winding machine, that is, the winding shaft and the introduction section of the metalized films 5 and 6 into the winding bobbin 4 are located at the bottom of the tank 1 which is open at the top.

ボビン4のセツト、ボビン4への金属化フイル
ム5,6のセツト等々の各種の操作作業はタンク
1の上部開口より行う。
Various operations such as setting the bobbin 4 and metallized films 5 and 6 onto the bobbin 4 are performed through the upper opening of the tank 1.

SF6ガス3をタンク1内に入れると、SF6ガス
3の密度は空気2の約5倍であるので、タンク1
内の空気2は浮力を得て上にあがり、SF6ガス3
がタンク1の下部より溜り、タンク1の下部ほど
SF6ガスの密度の高いSF6ガスの溜りができる。
このタンク1の下部に溜つたSF6ガス3の雰囲気
中で金属化フイルム5,6を巻き取ると、巻き取
られる金属化フイルタ5,6の間に生じる隙間に
SF6ガス3を抱き込み、巻き取つた素子の金属化
フイルム間にSF6ガス3のボイド7が生じる。
When SF 6 gas 3 is put into tank 1, the density of SF 6 gas 3 is about 5 times that of air 2, so tank 1
The air 2 inside gains buoyancy and rises, forming SF 6 gas 3
accumulates from the bottom of tank 1, and near the bottom of tank 1
SF 6 gas forms a dense pool of SF 6 gas.
When the metallized films 5 and 6 are wound up in the atmosphere of SF 6 gas 3 accumulated at the bottom of the tank 1, the gap created between the metalized filters 5 and 6 is
SF 6 gas 3 is trapped and voids 7 of SF 6 gas 3 are created between the metallized films of the wound element.

また、SF6ガス雰囲気中での金属化フイルムの
巻き取りとして、例えば、図示を省略したが、巻
き取られる金属化フイルム5,6の巻取り直前に
SF6ガスを導入しながら巻き取つてもよい。この
場合、巻き取られる金属化フイルム5,6の間に
生じる隙間に前記と同様にSF6ガス3を抱き込
み、巻き取つた素子の金属化フイルム間にSF6
ス3のボイド7を生じることになる。
In addition, as for winding the metallized film in an SF 6 gas atmosphere, for example, although not shown, immediately before winding the metallized films 5 and 6 to be wound,
Winding may be performed while introducing SF 6 gas. In this case, the SF 6 gas 3 is trapped in the gap created between the metalized films 5 and 6 being wound up in the same way as described above, and voids 7 of the SF 6 gas 3 are created between the metalized films of the wound element. become.

このような素子を続いて製作するには、タンク
1内にSF6ガスが既に入つているのでタンク1の
上部開口よりボビン4のセツト、ボビン4への金
属化フイルム5,6のセツト等々の各種の操作作
業を行つて金属フイルム5,6の巻き取りへと進
むことになり、タンク1内のSF6ガス量が消耗し
少なくなると適宜に補充して、継続できる。
To continue manufacturing such an element, since SF 6 gas is already contained in the tank 1, it is necessary to set the bobbin 4 through the upper opening of the tank 1, set the metallized films 5 and 6 onto the bobbin 4, etc. After performing various operations, the process proceeds to winding up the metal films 5 and 6, and when the amount of SF 6 gas in the tank 1 becomes exhausted and decreases, the process can be continued by replenishing it as appropriate.

巻き取つた素子の金属化フイルム間に発生した
SF6ガス3のボイド7はボイド7の発生した位置
や形によつて容易に外に出て行き得ない状態のも
のと外に容易に流出する状態のものとがあり、大
多数が容易に外に出て行き得ない状態のもので一
部が外に流出可能な状態のものてある。
Occurred between the metalized films of the wound element.
Depending on the position and shape of the void 7, there are two types of voids 7 in SF 6 gas 3: those that cannot easily escape and those that can easily escape. There are things that cannot go out, and some that can go out.

このような巻き取つた素子を大気中に出し、素
子の端面に金属を溶射して巻き取られた金属薄膜
5a,6aに接続の電極8a,8bを形成し、こ
の電極8a,8bに引き出し線9a,9bを半田
付けしてコンデンサ素子10を得る。この際に、
素子のボイド7のうち容易に外に出て行き得ない
状態のものは内部に滞留した状態を保ち、外に容
易に流出する状態のものはSF6ガスが流出するこ
とになる。
The wound element is exposed to the atmosphere, and metal is thermally sprayed onto the end face of the element to form connection electrodes 8a and 8b on the wound metal thin films 5a and 6a, and lead wires are connected to the electrodes 8a and 8b. 9a and 9b are soldered to obtain a capacitor element 10. At this time,
Among the voids 7 of the element, those that cannot easily go out remain in the interior, and those that can easily flow out will cause SF 6 gas to flow out.

このコンデンサ素子10を、大気中で、容器1
2に収容して容器収容形コンデンサ素子13に形
成する。なお、この容器12は容器本体12aと
蓋体12bの嵌合面に容器12内の空気を真空引
きでき容器内にSF6ガスを充填できて、容器12
のまわりを合成樹脂でモールドする際にモールド
樹脂が容器12のなかに侵入し得ない程度の大き
さの間隙12cを形成してあつて、この容器まわ
りに巻くガラスクロス11は容器内の空気の真空
引きおよびSF6ガスの充填に影響を与えない程度
の隙間のあるものを使用する。
This capacitor element 10 is placed in a container 1 in the atmosphere.
2 to form a container-housed capacitor element 13. In addition, this container 12 can evacuate the air inside the container 12 on the fitting surface of the container body 12a and the lid body 12b, and can fill the container with SF 6 gas.
A gap 12c is formed that is large enough to prevent the molding resin from entering the container 12 when the synthetic resin is molded around the container. Use one with enough clearance to not affect vacuuming and SF 6 gas filling.

この容器収容形コンデンサ素子13のまわりに
ガラスクロス11を巻いて金型14にセツトし、
真空槽15に入れる。バルブ17を開き、他のバ
ルブを閉じて真空槽15内に真空引きすと、容器
まわりに巻くガラスクロス11は容器内の空気の
真空引きおよびSF6ガスの充填に影響を与えない
程度の隙間のあるものを使用してあり、容器12
の間隙12cからガラスクロス11の隙間を通つ
て容器12内の空気も真空槽15外に排気するこ
とができる。
A glass cloth 11 is wrapped around this container-housed capacitor element 13 and set in a mold 14.
Place it in a vacuum chamber 15. When the valve 17 is opened and the other valves are closed to draw a vacuum inside the vacuum chamber 15, the glass cloth 11 wrapped around the container has a gap that does not affect the vacuuming of the air inside the container and the filling of SF 6 gas. Container 12
Air inside the container 12 can also be exhausted to the outside of the vacuum chamber 15 from the gap 12c through the gap in the glass cloth 11.

その後、バルブ17を閉じ、バルブ18を開い
て真空槽15内にSF6ガスを導入し、容器12内
にSF6ガス3を充填する。このSF6ガスの充填に
より、前記電極溶射、引き出し線接続時に素子の
SF6ガスボイド7のうちSF6ガスが外に流出した
空所にも充填できる。
Thereafter, the valve 17 is closed, the valve 18 is opened, SF 6 gas is introduced into the vacuum chamber 15 , and the container 12 is filled with SF 6 gas 3 . By filling this SF 6 gas, the element is heated during electrode spraying and lead wire connection.
Among the SF 6 gas voids 7, the spaces where SF 6 gas has leaked out can also be filled.

バルブ19を開いて金型14の中に合成樹脂液
20′を入れ、SF6ガスの充填されている容器1
2のまわりを合成樹脂液20′で包囲し、その後
真空槽内を正圧に保ちつつ加熱して硬化反応させ
る。樹脂が硬化すると合成樹脂20のモールドが
完了するので、取り出してモールドコンデンサを
得ることができる。
Open the valve 19, put the synthetic resin liquid 20' into the mold 14, and pour the container 1 filled with SF 6 gas.
2 is surrounded by a synthetic resin liquid 20', and then heated while maintaining a positive pressure in the vacuum chamber to cause a curing reaction. When the resin hardens, the molding of the synthetic resin 20 is completed, so that it can be taken out to obtain a molded capacitor.

(ハ) 発明の効果 (1) 金属化フイルムをSF6ガス雰囲気中で巻き取
りを行うことにより、巻き取られる金属化フイ
ルムの間にSF6ガスを抱き込ませ、抱き込ませ
たSF6ガスのボイド7の大部分を容易に外に出
て行き得ない状態に内部に滞留させると共に外
に流出したSF6ガスのボイド部の空所にその後
の工程でSF6ガスを充填できるので、巻回金属
化フイルム間のボイドをSF6ガスのボイドに形
成することによつてコロナ放電開始電圧を高く
することができる。
(c) Effects of the invention (1) By winding up a metallized film in an SF 6 gas atmosphere, SF 6 gas is trapped between the rolled up metallized films, and the SF 6 gas is trapped. Most of the voids 7 in the winding can be retained in the interior in a state where they cannot easily go out, and the empty space in the void part of the SF6 gas that has flowed out can be filled with SF6 gas in the subsequent process. The corona discharge starting voltage can be increased by forming voids between the double metallized films into SF 6 gas voids.

(2) 内部滞留したSF6ガスは容易に外に出て行き
得ず、外に流出したSF6ガスのボイド部の空所
にSF6ガスを充填できることにより、大気中に
取り出して巻回両端面に電力の金属溶射がで
き、引出し線の接続ができるので、電極形成、
引出し線の接続作業が容易になる。
(2) The SF 6 gas stagnant inside cannot easily go out, and by filling the voids of the SF 6 gas that has leaked out, it can be taken out into the atmosphere and removed from both ends of the winding. Electric power metal spraying can be applied to the surface, and lead wires can be connected, making it possible to form electrodes,
The work of connecting lead wires becomes easier.

(3) コンデンサ素子を容器に収容してこれを真空
処理し容器内にSF6ガスを充填して、その後
に、容器のまわりを合成樹脂でモールドする一
連の工程により、コンデンサ素子巻回両端面の
金属薄膜縁面まわりにSF6ガスを高密度に充填
させることができるので、コンデンサ素子巻回
両端面の金属薄膜縁面まわりのコロナ放電開始
電圧を高くできる。
(3) The capacitor element is placed in a container, the container is vacuum-treated, the container is filled with SF 6 gas, and the container is then molded with synthetic resin. Through a series of steps, both ends of the capacitor element are wound. Since SF 6 gas can be densely filled around the edge of the metal thin film, the corona discharge starting voltage around the edge of the metal thin film on both ends of the winding of the capacitor element can be increased.

このように、電極の形成、引出し線の接続を大
気中で行い得るので作業が容易となり、巻き込ま
れる金属化フイルム間のボイド部、及びコンデン
サ素子両端面の金属薄膜縁面まわり部のいづれの
絶縁耐力弱点部もコロナ放電開始電圧を高くでき
るので、高耐圧のモールドコンデンサを得ること
ができる製造法である。
In this way, the formation of electrodes and the connection of lead wires can be performed in the atmosphere, which makes the work easier, and the insulation of both the voids between the rolled-up metallized films and the areas around the edges of the metal thin films on both ends of the capacitor element can be improved. Since the corona discharge starting voltage can be increased even in weak parts of proof strength, this manufacturing method can produce molded capacitors with high breakdown voltage.

【図面の簡単な説明】[Brief explanation of drawings]

第1図はフイルム巻取り装置の概略を示す説明
図、第2図はモールドコンデンサの断面図、第3
図はモールドコンデンサの要部の拡大断面図、第
4図は真空槽装置の概略を示す説明図を示す。 1……上部開口タンク、2……空気、3……
SF6ガス、4……ボビン、5,6……それぞれ金
属化フイルム、7……SF6ガスのボイド、8a,
8b……それぞれ電極、9a,9b……それぞれ
引き出し線、10……コンデンサ素子、11……
ガラスクロス、12……容器、13……容器収容
形コンデンサ素子、14……金型、15……真空
槽、16,17,18,19……それぞれバル
ブ、20′……合成樹脂液、20……合成樹脂。
Fig. 1 is an explanatory diagram showing the outline of the film winding device, Fig. 2 is a sectional view of the molded capacitor, and Fig. 3 is an explanatory diagram showing the outline of the film winding device.
The figure shows an enlarged sectional view of the main part of the molded capacitor, and FIG. 4 shows an explanatory diagram showing the outline of the vacuum chamber device. 1...Top opening tank, 2...Air, 3...
SF 6 gas, 4... bobbin, 5, 6... each metallized film, 7... SF 6 gas void, 8a,
8b...Each electrode, 9a, 9b...Each lead wire, 10...Capacitor element, 11...
Glass cloth, 12... Container, 13... Container-housed capacitor element, 14... Mold, 15... Vacuum chamber, 16, 17, 18, 19... Valve, 20'... Synthetic resin liquid, 20 ...Synthetic resin.

Claims (1)

【特許請求の範囲】[Claims] 1 プラスチツクフイルムに金属薄膜を形成した
金属化フイルムを六弗化硫黄ガス(以下、SF6
スと云う)雰囲気中で巻き取りを行う工程、巻き
取つた素子を大気中で素子両端面に電極を形成し
引き出し線を接続する工程、電極を形成し引き出
し線を接続したコンデンサ素子を容器に収容し真
空処理する工程、真空状態の容器内にSF6ガスを
充填する工程、SF6ガスを充填した容器のまわり
を合成樹脂でモールドする工程を経ることを特徴
とするコンデンサの製造法。
1 The process of winding a metallized film, which is a metal thin film formed on a plastic film, in an atmosphere of sulfur hexafluoride gas (hereinafter referred to as SF 6 gas), and applying electrodes to both end faces of the element in the air. The process of forming and connecting the lead wires, the process of housing the capacitor element with the electrodes formed and connecting the lead wires in a container and vacuum processing, the process of filling the vacuum container with SF 6 gas, and filling the container with SF 6 gas. A capacitor manufacturing method that involves a process of molding the container around it with synthetic resin.
JP7566788A 1988-03-28 1988-03-28 Manufacture of capacitor Granted JPH01246811A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7566788A JPH01246811A (en) 1988-03-28 1988-03-28 Manufacture of capacitor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7566788A JPH01246811A (en) 1988-03-28 1988-03-28 Manufacture of capacitor

Publications (2)

Publication Number Publication Date
JPH01246811A JPH01246811A (en) 1989-10-02
JPH0437564B2 true JPH0437564B2 (en) 1992-06-19

Family

ID=13582788

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7566788A Granted JPH01246811A (en) 1988-03-28 1988-03-28 Manufacture of capacitor

Country Status (1)

Country Link
JP (1) JPH01246811A (en)

Also Published As

Publication number Publication date
JPH01246811A (en) 1989-10-02

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