JPH0446353B2 - - Google Patents

Description

Detailed Description of the Invention [Technical Field] The present invention relates to a heating technology, particularly a technology for heating an object to be heated by accommodating it in a furnace. The present invention relates to a technique effective for use in cure baking for curing.

[Background Art] In the manufacture of semiconductor devices, it is conceivable that a resin-sealed package molded using a thermosetting resin is housed in a baking oven and thermosetted.

However, in such cases, opening the door during baking reduces efficiency, so the door cannot be opened midway through baking, and there is a problem in that loading and unloading of products is restricted for a long period of time. ,
This was revealed by the present inventor.

[Object of the Invention] An object of the present invention is to provide a heating technique that allows a product to be taken in and out during heating.

The above and other objects and novel features of the present invention will become apparent from the description of this specification and the accompanying drawings.

[Summary of the Invention] A brief overview of typical inventions disclosed in this application is as follows.

In other words, by dividing the inside of the furnace into multiple chambers and providing multiple doors on the front of the furnace corresponding to the multiple chambers, heat dissipation is suppressed when each door is opened, thereby preventing a drop in thermal efficiency. This enabled timely loading and unloading of products.

[Example] FIG. 1 is a front view showing a heating device as an example of the present invention, and FIG. 2 is an enlarged side sectional view thereof.

In this embodiment, this heating device is configured as a device for curing-baking a resin-sealed package molded using a thermosetting resin.

This apparatus includes a baking oven 1 as a heating furnace, and an interior 2 of this oven 1 is partitioned into a plurality of compartments 3. Each compartment 3 has a magazine 31 which will be described later.
Each compartment 3 has a horizontally long door 4 attached to the frontage thereof so as to be able to open one side in the horizontal direction. Bake oven 1
Electric heaters 5 as heating means are provided at appropriate locations in the interior 2 of the heater 5.
is constructed so that the three groups of compartments can be uniformly heated all at once. An air blowing furnace 6 is disposed at the back of the interior 2 of the baking oven 1, and the air blowing furnace 6 is communicated with each compartment 3 through each air outlet 7 opened at the back of each compartment 3. .

A plurality of vent holes 8 are opened in each compartment 3 so as to communicate the adjacent compartments 3 with each other, and the lowest vent 8 communicates with an exhaust passage 9 formed in the lower part of the furnace 1. has been done. A centrifugal fan 10 is disposed at the lower part of the furnace 1 , an air intake port 11 of the fan 10 is opened to the exhaust passage 9 , and an air supply opening 12 is communicated with the air supply passage 6 .

An automatic loading/unloading device 13 is installed on the front side of the outside of the baking oven 1 to automatically load/unload objects to be heated. That is, a pair of left and right rails 14 are laid on the floor in front of the baking oven 1, respectively, substantially at right angles to the front of the oven 1, and on both rails 14, self-propelled carts 15 are installed, respectively. Both trolleys 1
A screw type jack 16 is mounted on each of the jacks 16, and an elevating body 18 is screwed onto the ram screw shaft 17 of both jacks 16 so as to be able to move up and down.
A feed screw shaft 19 and a guide rail (not shown) are horizontally mounted between both the elevating bodies 18, and the feed screw shaft 19 is connected to a servo motor 2 mounted on the elevating body 18.
It is designed to be rotated in forward and reverse directions by 0. A moving body 21 is attached to the feed screw shaft 19 and the guide rail.
is supported so as to be movable left and right, and a servo motor 22 is installed at the bottom of the moving body 21. The motor 22 is configured to rotate the left and right screw shafts 23 in forward and reverse directions, and a pair of holders 24 are screwed onto the left and right screw shafts 23 so as to be openable and closable. Further, a rod 25 for opening and closing the door 4 is provided protruding from the moving body 21. A carry-in conveyor 26 and a carry-out conveyor 27, each of which is a belt conveyor, are installed on the floor between the left and right rails 14.

In this embodiment, the object to be heated 28 is a plurality of resin-sealed packages 30 molded with a thermosetting resin on a multi-lead frame 29, and the object to be heated 28 is a magazine formed into a substantially rectangular cylinder shape. A plurality of sheets are stored in a stacked manner in 31.

Next, the action will be explained.

When a magazine 31 containing a plurality of objects to be heated 28 is carried to the baking oven 1 by the carry-in conveyor 26, the automatic loading/unloading device 13 picks up the magazine 31. That is, after the movable body 21 is three-dimensionally moved by the cart 15, jack 16, and feed screw shaft 19 and positioned directly above the magazine 31, it is moved by the left and right screw shafts 23 to both holders 24, 2.
4 is closed to hold the magazine 31. When the magazine 31 is picked up, the movable body 21 is moved three-dimensionally in response to a command from a computer or the like, and the magazine 31 is transported to the front of the empty compartment 3 of the baking oven 1. Then, the moving body 21 hooks the rod 25 onto the handle 4a of the door 4, and then moves backward to open the door 4. Subsequently, the moving body 13 in the automatic loading/unloading device 13 inserts the transported magazine 31 into the compartment 3 with the door 4 open. After insertion, the movable body 13 closes the door 4 by pushing it.

When taking out the magazine 31 from the compartment 3 after a predetermined baking time has elapsed, the automatic take-out device 13
works in almost the opposite way as described above. That is, moving body 2
1 moves to the position of the compartment 3 where the magazine 31 is to be taken out according to a command from a computer, opens the door 4, picks up the magazine 31 in the compartment 3 and pulls it out, closes the door 4, and then moves the magazine 31 to the compartment 3 where it is to be taken out. is conveyed to the carry-out conveyor 26 and transferred.

On the other hand, in the interior 2 of the baking oven 1, the 3 groups of compartments are heated all at once, and the hot air is heated by the fan 1.
0, and is forcedly circulated almost uniformly to each compartment 3 via the air supply path 6, each air outlet 7, each ventilation port 8, and each exhaust path 9. Therefore, the three compartments have a substantially isothermal and uniform atmosphere throughout the furnace.

In this atmosphere, when the door 4 of a certain compartment 3 is opened, the temperature of the opened compartment 3 decreases and the atmosphere also changes. However, since the interior 2 of the baking oven 1 is partitioned into three groups of compartments, changes in one open compartment 3 hardly affect the other compartments 3. Therefore, the doors of each compartment 3 can be opened and closed as needed.

The operation of the automatic loading/unloading device 13 and the control of the electric heater 5, fan 10, etc. of the baking oven 1 are as follows.
It is desirable to centrally manage the information using a computer or the like. In particular, it is desirable to rationally manage vacant rooms, control the baking duration of storage rooms, etc. across all compartments.

[Effects] (1) By dividing the inside of the furnace into multiple chambers and installing multiple doors on the front of the furnace, even if the door of one chamber is opened, the atmosphere inside the furnace will not change due to the door opening to other chambers. Since the spread can be suppressed, heated items can be taken in and out in a timely manner.

(2) By taking in and out the heated items in a timely manner, it is possible to process the heated items continuously without having to process them in batches, which eliminates or shortens the waiting time for heating treatment, and improves product quality. The completion time can be shortened and the number of products in progress can be reduced.

(3) By sharing heating means, hot air circulation means, etc. in each room group, the number of equipment such as heating means, circulation means, etc. can be saved, so equipment costs and operating costs can be reduced.

(4) By automatically transferring heated items into and out of each chamber and by controlling the process using a computer,
Since it can be unmanned, continuous operation for long periods of time is possible, and it is safe and can be integrated with other processes.

Although the invention made by the present inventor has been specifically explained based on Examples above, the present invention is not limited to the Examples described above, and it is understood that various changes can be made without departing from the gist of the invention. Needless to say.

For example, there are no limitations on the shape, structure, or number of the chambers and doors, and there are no limitations on the heating means or hot air circulation means.

An articulated robot can be used as the automatic loading/unloading device, or it can also be omitted.

[Field of Application] In the above explanation, the invention made by the present inventor was mainly applied to the cure baking of resin-sealed packages, which is the background field of application, but the present invention is not limited thereto. This method can be applied, for example, when drying adhesives, printing inks, etc., or when performing an aging heating test to eliminate products that deteriorate at high temperatures.

[Brief explanation of the drawing]

FIG. 1 is a front view showing a heating device according to an embodiment of the present invention, and FIG. 2 is an enlarged side sectional view thereof. 1...Bake oven (heating furnace), 2...Inside the oven, 3
... Compartment room, 4 ... Door, 5 ... Electric heater (heating means), 6 ... Air supply path, 7 ... Air outlet, 8 ... Ventilation port, 9 ... Exhaust path, 10 ... Fan, 11...
Intake port, 12...Air supply port, 13...Automatic loading/unloading device, 14...Rail, 15...Dolly, 16...
jack, 17... feed screw shaft, 18... elevating body, 19... feed screw shaft, 20... servo motor, 21... moving body, 22... servo motor, 2
3... Left and right screw shaft, 24... Holder, 25... Rod, 26... Carrying in conveyor, 27... Carrying out conveyor, 28... Heated object, 29... Lead frame, 30... Resin sealed package , 31...magazine.

Claims (1)

[Scope of Claims] 1. A heating device characterized in that the interior of the furnace is partitioned into a plurality of chambers and a plurality of doors are provided on the front side of the furnace. 2. The heating device according to claim 1, wherein the heating device is configured so that a plurality of chambers are heated all at once and hot air is circulated.