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JPH0450700B2 - - Google Patents
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JPH0450700B2 - - Google Patents

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Publication number
JPH0450700B2
JPH0450700B2 JP61043429A JP4342986A JPH0450700B2 JP H0450700 B2 JPH0450700 B2 JP H0450700B2 JP 61043429 A JP61043429 A JP 61043429A JP 4342986 A JP4342986 A JP 4342986A JP H0450700 B2 JPH0450700 B2 JP H0450700B2
Authority
JP
Japan
Prior art keywords
lens
electrode
electrodes
shield electrode
quadrupole electrostatic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61043429A
Other languages
Japanese (ja)
Other versions
JPS62202449A (en
Inventor
Morio Ishihara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Denshi KK filed Critical Nihon Denshi KK
Priority to JP61043429A priority Critical patent/JPS62202449A/en
Publication of JPS62202449A publication Critical patent/JPS62202449A/en
Publication of JPH0450700B2 publication Critical patent/JPH0450700B2/ja
Granted legal-status Critical Current

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  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Tubes For Measurement (AREA)

Description

【発明の詳細な説明】 [産業上の利用分野] 本発明は、質量分析装置などに用いられる4極
静電レンズの改良に関する。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an improvement of a quadrupole electrostatic lens used in mass spectrometers and the like.

[従来技術] 第2図は従来から質量分析装置で用いられてい
る4極静電レンズの一例を示し、第3図はそのA
−A断面図である。4極静電レンズは同一円周上
に90゜間隔でイオンビームの進行方向(z方向)
に平行に配置される4本のレンズ電極1〜4及び
シールド板5,6から構成される。レンズ電極
は、本来は双曲線電極(切口が双曲線)である
が、図のように円柱電極を近似的に用いることも
できる。そして、イオンビームの軌道平面に垂直
な方向(y方向)に対向するレンズ電極1,3に
は正の電位が印加され、イオンビームの動径方向
(x方向)に対向する電極2,4には負の電位が
印加され、レンズ電極によつて囲まれる空間に双
曲線電界が形成される。
[Prior art] Figure 2 shows an example of a quadrupole electrostatic lens conventionally used in mass spectrometers, and Figure 3 shows its A.
-A sectional view. The 4-pole electrostatic lens aligns the ion beam in the traveling direction (z direction) at 90° intervals on the same circumference.
It is composed of four lens electrodes 1 to 4 and shield plates 5 and 6 arranged in parallel to each other. The lens electrode is originally a hyperbolic electrode (the cut end is a hyperbola), but a cylindrical electrode can also be used approximately as shown in the figure. A positive potential is applied to the lens electrodes 1 and 3 facing in the direction perpendicular to the orbital plane of the ion beam (y direction), and the electrodes 2 and 4 facing in the radial direction (x direction) of the ion beam are applied with a positive potential. A negative potential is applied to the lens electrode, and a hyperbolic electric field is formed in the space surrounded by the lens electrode.

[発明が解決しようとする問題点] 4極静電レンズの端縁場におけるポテンシヤル
φ(x,y,z)は、松田氏等により、K(z)を
四重極場の強さに関する係数として、 φ=(x,y,z) ={K(z)/2}{(x2+y2) +{K(z)″/24}{(x4−y4)} …(1) と仮定されており、イオン光学系の設計の際にも
この式に基づいた計算が行われている。この(1)式
は、双曲線電極以外で生じる高次項を無視したも
のである。
[Problem to be solved by the invention] The potential φ(x, y, z) in the edge field of a quadrupole electrostatic lens is determined by Matsuda et al., where K(z) is a coefficient related to the strength of the quadrupole field. As, φ=(x,y,z) ={K(z)/2}{(x 2 +y 2 ) +{K(z)″/24}{(x 4 −y 4 )} …(1) It is assumed that calculations are based on this equation when designing ion optical systems.Equation (1) ignores higher-order terms that occur outside of hyperbolic electrodes.

ところが、第2図の構造を持つ4極静電レンズ
においては、シールド板及びその前後の空間は自
由空間となつており、従つて、(1)式で示されると
ころの、双曲線電極で作られる場からは大きくず
れていると考えられる。そのため、(1)式に基づい
て設計されるイオン光学系では、所期の分解能及
び感度が得られないということが起り得る。
However, in the quadrupole electrostatic lens with the structure shown in Figure 2, the shield plate and the space before and after it are free spaces, and therefore the space created by the hyperbolic electrode shown in equation (1) It is thought that it is far out of place. Therefore, in the ion optical system designed based on equation (1), it may happen that the desired resolution and sensitivity cannot be obtained.

本発明はこの点に鑑みてなされたものであり、
上記(1)式に従う端縁場を発生することのできる4
極静電レンズを提供することを目的としている。
The present invention has been made in view of this point,
4 that can generate an edge field according to equation (1) above.
The purpose is to provide a polar electrostatic lens.

[問題点を解決するための手段] この目的達成のため、本発明は、荷電粒子の軌
道を中心として4本のレンズ電極を回転対称に配
置する4極静電レンズにおいて、前記4本のレン
ズ電極と略等しい断面形状を持つたシールド電極
を、該4本のレンズ電極の端部延長上に近接配置
すると共に、該シールド電極を接地したことを特
徴としている。
[Means for Solving the Problems] To achieve this objective, the present invention provides a quadrupole electrostatic lens in which four lens electrodes are arranged rotationally symmetrically around the trajectory of charged particles. The present invention is characterized in that a shield electrode having a cross-sectional shape approximately equal to that of the electrode is disposed close to the extension of the end portions of the four lens electrodes, and the shield electrode is grounded.

以下、図面を用いて本発明の一実施例を詳説す
る。
Hereinafter, one embodiment of the present invention will be explained in detail using the drawings.

[実施例] 第1図は本発明の一実施例を示す構成図であ
り、4本のレンズ電極1〜4の両端に、該レンズ
電極と同一径を持つシールド電極7が絶縁スペー
サ8を介してネジ9によつて取付けられている。
[Embodiment] FIG. 1 is a configuration diagram showing an embodiment of the present invention, in which shield electrodes 7 having the same diameter as the lens electrodes are placed at both ends of four lens electrodes 1 to 4 via insulating spacers 8. It is attached by screws 9.

このような構成の4極静電レンズでは、レンズ
出入口の端縁場の部分にも双曲線電極(シールド
電極)が存在しており、この部分の電界は、この
双曲線電極(シールド電極)による規制を受ける
ため、前記(1)式で良く近似できる場が形成される
ことになる。そのため、このような構成の4極静
電レンズを構成要素として用い、イオン光学系の
設計を(1)式に基づいて行なえば、設計通りの分解
能及び感度の得られる質量分析装置が実現でき
る。
In a quadrupole electrostatic lens with such a configuration, a hyperbolic electrode (shield electrode) is also present in the edge field portion of the lens entrance and exit, and the electric field in this portion is regulated by this hyperbolic electrode (shield electrode). Therefore, a field that can be well approximated by the above equation (1) is formed. Therefore, if the quadrupole electrostatic lens having such a configuration is used as a component and the ion optical system is designed based on equation (1), a mass spectrometer that can obtain the designed resolution and sensitivity can be realized.

尚、シールド電極はできるだけ長く、絶縁スペ
ーサはできるだけ薄いことが望ましい。おおよそ
の目安としては、シールド電極の長さを4本のレ
ンズ電極に内接する円の直径以上、絶縁スペーサ
の厚さは、その内接円の直径の1/10以下が望まし
い。
Note that it is desirable that the shield electrode be as long as possible, and that the insulating spacer be as thin as possible. As a rough guide, it is desirable that the length of the shield electrode be at least the diameter of the circle inscribed in the four lens electrodes, and that the thickness of the insulating spacer be 1/10 or less of the diameter of the inscribed circle.

上記実施例では、シールド電極をレンズ電極に
取付けたが、シールド電極を外部から支持できれ
ば、必ずしもレンズ電極に取付ける必要はない
し、シールド電極をレンズ電極の延長上に絶縁を
保つて近接配置できれば、絶縁スペーサも必要で
はない。
In the above embodiment, the shield electrode was attached to the lens electrode, but if the shield electrode can be supported from the outside, it is not necessarily necessary to attach it to the lens electrode, and if the shield electrode can be placed close to the lens electrode while maintaining insulation, it is possible to Spacers are also not required.

[効果] 以上詳述した如く、本発明によれば、上記(1)式
で良く近似できる端縁場を発生し得る4極静電レ
ンズが提供される。そのため、この4極静電レン
ズを構成要素として用い、イオン光学系の設計を
(1)式に基づいて行なえば、設計通りの分解能及び
感度の得られる質量分析装置が実現できる。
[Effects] As described in detail above, the present invention provides a quadrupole electrostatic lens that can generate an edge field that can be well approximated by the above equation (1). Therefore, using this quadrupole electrostatic lens as a component, we can design an ion optical system.
If the calculation is performed based on equation (1), a mass spectrometer that can obtain the designed resolution and sensitivity can be realized.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の一実施例を示す構成図、第2
図は従来から質量分析装置で用いられている4極
静電レンズの一例を示す図、第3図はそのA−A
断面図である。 1〜4:レンズ電極、5,6:シールド板、
7:シールド電極、8:絶縁スペーサ、9:ネ
ジ。
FIG. 1 is a configuration diagram showing one embodiment of the present invention, and FIG.
The figure shows an example of a quadrupole electrostatic lens conventionally used in mass spectrometers, and Figure 3 shows its A-A.
FIG. 1 to 4: lens electrode, 5, 6: shield plate,
7: Shield electrode, 8: Insulating spacer, 9: Screw.

Claims (1)

【特許請求の範囲】 1 荷電粒子の軌道を中心として4本のレンズ電
極を回転対称に配置する4極静電レンズにおい
て、前記4本のレンズ電極と略等しい断面形状を
持つたシールド電極を、該4本のレンズ電極の端
部延長上に近接配置すると共に、該シールド電極
を接地したことを特徴とする4極静電レンズ。 2 前記シールド電極は、前記レンズ電極の端部
に絶縁スペーサを介して取付けられることを特徴
とする特許請求の範囲第1項記載の4極静電レン
ズ。
[Claims] 1. In a quadrupole electrostatic lens in which four lens electrodes are arranged rotationally symmetrically around the trajectory of charged particles, a shield electrode having a cross-sectional shape substantially equal to that of the four lens electrodes, A quadrupole electrostatic lens, characterized in that the four lens electrodes are disposed close to each other on extensions of end portions thereof, and the shield electrode is grounded. 2. The quadrupole electrostatic lens according to claim 1, wherein the shield electrode is attached to an end of the lens electrode via an insulating spacer.
JP61043429A 1986-02-28 1986-02-28 Four-electrode electrostatic lens Granted JPS62202449A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61043429A JPS62202449A (en) 1986-02-28 1986-02-28 Four-electrode electrostatic lens

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61043429A JPS62202449A (en) 1986-02-28 1986-02-28 Four-electrode electrostatic lens

Publications (2)

Publication Number Publication Date
JPS62202449A JPS62202449A (en) 1987-09-07
JPH0450700B2 true JPH0450700B2 (en) 1992-08-17

Family

ID=12663452

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61043429A Granted JPS62202449A (en) 1986-02-28 1986-02-28 Four-electrode electrostatic lens

Country Status (1)

Country Link
JP (1) JPS62202449A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20130015340A1 (en) * 2011-07-15 2013-01-17 Bruker Daltonics, Inc. Multipole assembly having a main mass filter and an auxiliary mass filter

Also Published As

Publication number Publication date
JPS62202449A (en) 1987-09-07

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