JPH0451307B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a device for correcting a surface plate such as a lapping plate.

[Prior Art] The surface plate of a lapping plate wears out with use and is generally unable to maintain its initial accuracy. In order to correct this, conventionally, as shown in FIGS. 1 and 2, the correction ring 1 is moved left and right while touching the top surface of the surface plate 2. That is, when the central part of the surface plate 2 is high, as shown in Fig. 1, move the correction ring 1 to the center, and when the periphery is high, as shown in Fig. 2,
Move correction ring 1 to the periphery and make corrections.

[Problems to be Solved by the Invention] However, such conventional correction devices have the disadvantage that the flatness of the surface plate 2 cannot be corrected accurately because the correction is made by simply moving the center of gravity of the correction ring 1. Motsu.

SUMMARY OF THE INVENTION It is therefore an object of the present invention to provide a surface plate correction device that eliminates the above-mentioned drawbacks.

[Means for Solving the Problems] According to the present invention, the upper surface of a surface plate such as a lap plate,
A device for making corrections by applying a rotatable correction ring, comprising a holding plate holding the correction ring, a fixed shaft holding the holding plate so as to be pivotable, and an arm fixed in the middle of the fixed shaft. ,
A plurality of pins arranged around the fixed shaft and held by the arm so as to be movable respectively in a direction parallel to the fixed shaft; and a plurality of weights that respectively bias the plurality of pins with an adjustable biasing force so as to press the rollers into contact with the retaining plate, and the outer diameter of the correction ring is There is obtained a surface plate correction device characterized in that the radius is set larger than the radius of the surface plate.

[Examples] Examples of the present invention will be described below with reference to the drawings.

FIG. 3 shows an embodiment of the surface plate correction device according to the present invention. In FIG. 3, a large correction ring 3 that spans the center and periphery of the surface plate 2 is shown.
are using. The correction ring 3 is rotated by the pivot 5 of the holding plate 4 about the fixed shaft 6 due to the friction caused by the difference in circumferential speed between the inner and outer diameters of the surface plate.

An arm 7 is further fixed to the fixed shaft 6 using a screw 8. There is a pin 9 near the tip of arm 7.
is held through. The pin 9 is prevented from rotating relative to the arm 7 by the key 11, but is allowed to move up and down. Note that the arm 7 may be a disk.

A roller holder 12 is fixed to the lower end of the pin 9. A roller 13 is rotatably held in the roller holder 12 using a nut 14 or the like. As shown in the figure, the rollers 13 are placed on the upper surface of the retaining plate 4 that holds the correction ring 3 near its outer periphery.

Furthermore, a collar 15 is attached to the top of the pin 9, and a weight 16 that is fitted onto the pin 9 from the upper end is attached to the collar 15.
It is designed to engage with. In this way, it is possible to apply a load independently to each part of the correction ring 3 by means of the weight 16. The number of weights 16 can be changed arbitrarily.

Note that the fixed shaft 6 may be reciprocated from side to side in order to facilitate grinding of the surface plate 2.

According to the surface plate correction device having the above-described structure, an arbitrary eccentric load can be applied to the correction ring 3 by selecting the number and weight of the weights 16 fitted to the left and right pins 9. Therefore, the flatness of the surface plate 2 can be corrected accurately.

[Effects of the Invention] As explained above, according to the surface plate correction device of the present invention, by applying an eccentric load to the correction ring using a plurality of pins with a plurality of weights, it is possible to stabilize a lapping plate, etc. It is possible to perform correction processing for uneven wear on the disc.

Further, according to the surface plate correction device of the present invention, since a correction ring having a diameter larger than the surface plate radius is used,
The rotational stability of this correction ring is not easily affected by eccentric loads, so it can be machined with high precision, and any eccentric load can be applied to the desired position using rollers depending on the condition of the surface plate. I can,
It is possible to perform correction processing on the surface plate relatively quickly.

Further, according to the surface plate correction device of the present invention, since the correction ring having a diameter larger than the radius of the surface plate is used as described above, stable correction is always possible without causing instability in the rotation of the correction ring. Can be processed.

[Brief explanation of the drawing]

Fig. 1 is a sectional view showing a conventional correction method when the central part of the surface plate of a lap plate is high, and Fig. 2 is a sectional view showing a conventional correction method when the peripheral part is high.
FIG. 3 is a sectional view showing an embodiment of the surface plate correction device according to the present invention. 1... Correction ring, 2... Surface plate, 3... Correction ring,
6... Fixed shaft, 9... Pin, 11... Key, 13... Roller, 16... Weight.

Claims (1)

[Claims] 1. A device that corrects the top surface of a surface plate such as a lapping plate by applying a rotatable correction ring, which includes a holding plate that holds the correction ring, a fixed shaft that holds the holding plate so that it can pivot. , an arm fixed in the middle of the fixed shaft, a plurality of pins disposed around the fixed shaft and held by the arm so as to be movable in directions parallel to the fixed shaft, and ends of the plurality of pins. rollers each attached to the retaining plate and in contact with different portions near the periphery of the retaining plate; and a plurality of weights biasing the plurality of pins with adjustable biasing forces so as to bring the rollers into pressure contact with the retaining plate. A surface plate correction device characterized in that the outer diameter of the correction ring is set larger than the radius of the surface plate.