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JPH0453817B2 - - Google Patents
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JPH0453817B2 - - Google Patents

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Publication number
JPH0453817B2
JPH0453817B2 JP62142984A JP14298487A JPH0453817B2 JP H0453817 B2 JPH0453817 B2 JP H0453817B2 JP 62142984 A JP62142984 A JP 62142984A JP 14298487 A JP14298487 A JP 14298487A JP H0453817 B2 JPH0453817 B2 JP H0453817B2
Authority
JP
Japan
Prior art keywords
oxide
superconductor
composition
thin film
oxide superconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP62142984A
Other languages
Japanese (ja)
Other versions
JPS63307115A (en
Inventor
Akira Negishi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP62142984A priority Critical patent/JPS63307115A/en
Publication of JPS63307115A publication Critical patent/JPS63307115A/en
Publication of JPH0453817B2 publication Critical patent/JPH0453817B2/ja
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00Superconducting devices
    • H10N60/01Manufacture or treatment
    • H10N60/0268Manufacture or treatment of devices comprising copper oxide
    • H10N60/0296Processes for depositing or forming copper oxide superconductor layers
    • H10N60/0324Processes for depositing or forming copper oxide superconductor layers from a solution

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Oxygen, Ozone, And Oxides In General (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
  • Superconductor Devices And Manufacturing Methods Thereof (AREA)
  • Superconductors And Manufacturing Methods Therefor (AREA)

Description

【発明の詳細な説明】 [産業上の利用分野] 本発明は電子技術および電力技術の分野での多
種多様な応用を有する特性のすぐれた酸化物超伝
導体の製造方法に関する。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a method for producing oxide superconductors with excellent properties, which have a wide variety of applications in the fields of electronic technology and power technology.

[従来の技術] 極低温度において電気抵抗がゼロになる超伝導
材としては、Nb3Sn,Nb3GeなどニオブNb系合
金が最も多く用いられている。しかしこれらNb
合金の臨界温度は20K付近であり、液体ヘリウム
で冷却しなければ使用できない。そのため、Nb
合金をクライオエレクトロニクス素子、電磁石、
超伝導線、発電機などの回転機、トランスなどに
応用する場合は、液体ヘリウムで冷却しながらそ
れらを使用していた。
[Prior Art] Niobium-Nb alloys such as Nb 3 Sn and Nb 3 Ge are most commonly used as superconducting materials whose electrical resistance becomes zero at extremely low temperatures. However, these Nb
The critical temperature of the alloy is around 20K, and it cannot be used unless it is cooled with liquid helium. Therefore, Nb
Alloys are used in cryoelectronic devices, electromagnets,
When applied to superconducting wires, rotating machines such as generators, transformers, etc., they were used while being cooled with liquid helium.

[発明が解決しようとする問題点] しかしながら、従来の超伝導応用技術において
は、液体ヘリウムで冷却するために、素子および
磁石などの使用が簡便ではなく、そのためにそれ
らの応用および普及が限定されてしまうという問
題点があつた。また、資源が少なく高価なヘリウ
ムを冷却のために使用しなければならないという
問題点があつた。
[Problems to be solved by the invention] However, in conventional superconducting application technology, it is not easy to use elements and magnets because they are cooled with liquid helium, which limits their application and widespread use. There was a problem with this. Another problem was that helium, which is a scarce resource and is expensive, must be used for cooling.

最近、Nb合金よりも高温で超伝導状態となる
物質が次々に発見された。例えば、組成式
(La1-xSrx2CuO4-yで表わされる超伝導材では、
超伝導臨界温度は50Kを示す。また、
(YBa22Cu6O14は液体窒素温度90Kで超伝導状態
となる。しかし、(YBa22Cu6O14の酸化物超伝
導材は、その製造過程において金属成分の揮発を
伴うため、良質のものを得るのが困難である。例
えば、イツトリウム、バリウム、銅の硝酸塩溶液
にシユウ酸溶液を加える共沈法で得られるシユウ
酸塩粉末を出発物質とし、空気中での加熱により
酸化物超伝導体が形成される過程を示差熱分析・
熱重量分析計を用いて、示差熱分析と熱重量分析
を同時に行つた結果を第3図に示す。図中曲線A
は示差熱分析結果、曲線Bは熱重量分析結果であ
る。
Recently, a number of materials have been discovered that become superconducting at temperatures higher than Nb alloys. For example, in a superconducting material represented by the composition formula (La 1-x Sr x ) 2 CuO 4-y ,
The superconducting critical temperature is 50K. Also,
(YBa 2 ) 2 Cu 6 O 14 becomes superconductive at a liquid nitrogen temperature of 90K. However, it is difficult to obtain high-quality oxide superconducting materials such as (YBa 2 ) 2 Cu 6 O 14 because the manufacturing process involves volatilization of metal components. For example, an oxide superconductor is formed by heating in air using an oxalate powder obtained by a coprecipitation method in which an oxalic acid solution is added to a nitrate solution of yttrium, barium, and copper as a starting material. analysis·
FIG. 3 shows the results of simultaneous differential thermal analysis and thermogravimetric analysis using a thermogravimetric analyzer. Curve A in the figure
is the result of differential thermal analysis, and curve B is the result of thermogravimetric analysis.

シユウ酸塩粉末を加熱すると、約70℃まで吸熱
反応が起こる。これは残留した溶媒の蒸発による
もので、熱重量分析による2%の重量減も溶媒の
蒸発による。約260℃、約280℃および約390℃に
おける発熱はシユウ酸塩の分解酸化による発熱反
応である。但し3個のピークのどれが酸化イツト
リウム、酸化バリウムおよび酸化銅の形成に対応
するかは特定できていない。21.4%および15.6%
の2段の重量減はシユウ酸塩から酸化物への変化
に対応するもので、合計37%の重量減は、
YC2O4、BaC2O4およびCuC2O4から
(YB22Cu6O14が形成されたものとした計算値に
かなり近い値である。
When oxalate powder is heated, an endothermic reaction occurs up to about 70°C. This is due to the evaporation of the remaining solvent, and the 2% weight loss determined by thermogravimetric analysis is also due to the evaporation of the solvent. The exotherms at about 260°C, about 280°C and about 390°C are exothermic reactions due to decomposition and oxidation of oxalate. However, it has not been determined which of the three peaks corresponds to the formation of yttrium oxide, barium oxide, and copper oxide. 21.4% and 15.6%
The two-stage weight loss corresponds to the change from oxalate to oxide, and the total weight loss of 37% is
This value is quite close to the calculated value assuming that (YB 2 ) 2 Cu 6 O 14 is formed from YC 2 O 4 , BaC 2 O 4 and CuC 2 O 4 .

加熱により500℃付近まででイツトリウム、バ
リウム、銅を含む酸化物が得られるが、超伝導性
を示すペロブスカイト構造の酸化物を得るために
は、さらに750℃ないし950℃での加熱を必要とす
る。第3図ではこの過程は曲線Aにおける吸熱過
程として観察されるが、同時に曲線Bに見られる
ように重量減少を伴う。この原料物質の9%に達
する減量は銅、バリウムの酸化物の揮発による。
有機酸塩や酸化物炭酸塩を出発原料とする場合も
同様な過程でペロブスカイト構造の酸化物が得ら
れる。
Oxides containing yttrium, barium, and copper can be obtained by heating up to around 500°C, but further heating to 750°C to 950°C is required to obtain perovskite-structured oxides that exhibit superconductivity. . In FIG. 3, this process is observed as an endothermic process in curve A, but is accompanied by a weight loss as seen in curve B. This weight loss of up to 9% of the raw material is due to the volatilization of copper and barium oxides.
When an organic acid salt or an oxide carbonate is used as a starting material, an oxide with a perovskite structure can be obtained through a similar process.

このため、製造された酸化物超伝導体を、例え
ばエネルギー分散型X線分析装置により分析する
と、表面層は揮発のため中央部と組成が異なり、
超伝導性を示さず、このため良質な超伝導体とな
らない。このことは薄膜製造において特に重要で
ある。
For this reason, when a manufactured oxide superconductor is analyzed using, for example, an energy dispersive X-ray analyzer, the composition of the surface layer is different from that of the center layer due to volatilization.
It does not exhibit superconductivity and therefore cannot be a high-quality superconductor. This is particularly important in thin film manufacturing.

酸化イツトリウム、炭酸バリウム、酸化銅など
の粉末を混合して焼結して酸化物磁性体を作製す
る場合にも同様の問題が生ずる。
A similar problem occurs when an oxide magnetic material is produced by mixing and sintering powders of yttrium oxide, barium carbonate, copper oxide, and the like.

本発明の目的は上述の問題点を解決し、組成分
布が少なく、均一な酸化物超伝導体を得る方法を
提供することである。
An object of the present invention is to solve the above-mentioned problems and provide a method for obtaining a uniform oxide superconductor with a small composition distribution.

[問題点を解決するための手段] かかる目的を達成するために、本発明は、酸化
物超伝導体の製造方法において、酸化物超伝導体
または超伝導体となるべき組成の酸化物を、酸化
物を構成する金属成分を含む雰囲気中で加熱する
工程を含むことを特徴とする。
[Means for Solving the Problems] In order to achieve the above object, the present invention provides a method for producing an oxide superconductor, in which an oxide superconductor or an oxide having a composition to become a superconductor, The method is characterized by including a step of heating in an atmosphere containing a metal component constituting the oxide.

[作用] 本発明によれば、金属成分の揮発を防止しなが
ら酸化物超伝導体を製造できるので、均一で良質
な酸化物超伝導体を得ることができる。
[Function] According to the present invention, an oxide superconductor can be manufactured while preventing volatilization of metal components, and therefore a uniform and high-quality oxide superconductor can be obtained.

[実施例] 以下に図面を参照して本発明の実施例を説明す
る。
[Examples] Examples of the present invention will be described below with reference to the drawings.

実施例 1 第1図は、銅、バリウム、イツトリウムウのオ
クチル酸塩を出発材料として酸化物超伝導体
(Y0.4Ba0.6)CuO7-xの薄膜を作製する工程を説明
するためのフローチヤートである。
Example 1 Figure 1 is a flowchart for explaining the process of producing a thin film of oxide superconductor (Y 0.4 Ba 0.6 ) CuO 7-x using copper, barium, and yttrium octylate as starting materials. be.

Cu,BaおよびYのオクチル酸塩、詳しく
は、2−エチルヘキシル酸塩のそれぞれの、シ
ンナー溶液またはトルエン溶液を調製する。混
合の原子数比は、Cu:Ba:Y=1:0.6:0.4
とする。
Thinner solutions or toluene solutions of Cu, Ba and Y octolates, specifically 2-ethylhexylate salts, are prepared. The atomic ratio of the mixture is Cu:Ba:Y=1:0.6:0.4
shall be.

溶液を均一にし、粘度を調整し、イツトリア
安定化ジルコニア板を溶液中に浸漬する。ある
いは、イツトリア安定化ジルコニア板に刷毛で
均一に溶液を塗る。
The solution is homogenized, the viscosity is adjusted, and the Ittria-stabilized zirconia plate is immersed in the solution. Alternatively, apply the solution evenly to the Ittria-stabilized zirconia plate with a brush.

室温空気中で乾燥させて塗膜を形成させる。 Dry in air at room temperature to form a coating.

500℃の電気炉中で約15分間加熱し、塗膜を
酸化熱分解させる。
Heat in an electric furnace at 500℃ for about 15 minutes to oxidize and thermally decompose the coating.

〜を繰り返して、厚さ1〜2μmの酸化
物を作製する。
Repeat ~ to produce an oxide with a thickness of 1 to 2 μm.

所定の厚さの酸化物を形成したイツトリア安
定化ジルコニア板を、別途作製した銅、バリウ
ムおよびイツトリウムを含む酸化物粉末、例え
ば(Y0.4Ba0.6)CuO7粉末中に埋める。
The yttria-stabilized zirconia plate on which an oxide of a predetermined thickness has been formed is buried in a separately prepared oxide powder containing copper, barium, and yttrium, such as (Y 0.4 Ba 0.6 )CuO 7 powder.

酸化物粉末中に埋めた酸化物薄膜を800℃で
5時間加熱して、酸化物超伝導体薄膜を作製し
た。
An oxide thin film buried in oxide powder was heated at 800°C for 5 hours to produce an oxide superconductor thin film.

本実施例では、別途通常の方法で作製された酸
化物超伝導材の粉末を用いて、その中に埋め込む
ことによつて雰囲気を調整した。このことによ
り、目的とする薄膜の周囲では粉体からの金属成
分の発揮とその他の部分への凝縮が、薄膜からの
揮発と凝縮と共に生じており、結果として薄膜の
成分変化を防止している。そのために表面層と中
央部の成分変化を生ずることなく、均一な組成の
超伝導薄膜を得ることができた。
In this example, the atmosphere was adjusted by embedding a powder of an oxide superconducting material separately produced by a conventional method and embedding it therein. As a result, around the target thin film, the metal components from the powder are released and condensed in other parts, along with the volatilization and condensation from the thin film, and as a result, changes in the composition of the thin film are prevented. . As a result, we were able to obtain a superconducting thin film with a uniform composition without causing any change in the composition between the surface layer and the center.

なお、酸化物薄膜を埋め込むための酸化物粉末
の組成は、目的とする超伝導体薄膜の組成と同一
であることが望ましいが、同一組成である必要は
ない。
Note that the composition of the oxide powder for embedding the oxide thin film is preferably the same as the composition of the target superconductor thin film, but it is not necessary that the composition be the same.

本実施例においては、超伝導体として(Y0.4
Ba0.6)CuO7-x薄膜を例として説明したが、本発
明が広く酸化物超伝導体の作製に適用できること
は言うまでもない。
In this example, as a superconductor (Y 0.4
Although the description has been given using a Ba 0.6 ) CuO 7-x thin film as an example, it goes without saying that the present invention can be widely applied to the production of oxide superconductors.

またオクチル酸塩を出発原料として酸化物超伝
導体を作製する方法について説明したが、他の方
法によつて超伝導体となるべき組成の酸化物を形
成し、加熱してペロブスカイト構造を有する酸化
物超伝導体の製造に、本発明が広く適用できるこ
とも言うまでもない。
In addition, although we have explained a method for producing an oxide superconductor using octylate as a starting material, we can form an oxide with the composition that should become a superconductor by other methods, and then heat it to form an oxide with a perovskite structure. It goes without saying that the present invention is widely applicable to the production of physical superconductors.

実施例 2 第2図に焼結法による実施例の工程図を示す。Example 2 FIG. 2 shows a process diagram of an example using the sintering method.

酸化銅、炭酸バリウム、酸化イツトリウムのそ
れぞれの粉末を所望のモル比で混合し、800℃〜
900℃で1〜5時間仮焼し、400Kg/cm2程度の圧力
でプレスして成形し、酸素を含む雰囲気中で800
℃〜900℃、1〜5時間加熱、焼結してペロブス
カイト構造の酸化物超伝導体とする。この工程に
おいて、焼結工程、または焼結工程と仮焼工程と
を、銅、バリウムおよびイツトリウムを含む雰囲
気中、例えば(Y0.4Ba0.6)CuO7粉末中で行う。
Copper oxide, barium carbonate, and yttrium oxide powders are mixed in the desired molar ratio and heated to 800℃~
Calcined at 900℃ for 1 to 5 hours, pressed and molded at a pressure of about 400Kg/ cm2 , and heated to 800℃ in an oxygen-containing atmosphere.
C. to 900.degree. C. for 1 to 5 hours and sintered to obtain an oxide superconductor with a perovskite structure. In this step, the sintering step, or the sintering step and the calcination step, are performed in an atmosphere containing copper, barium, and yttrium, for example, in (Y 0.4 Ba 0.6 )CuO 7 powder.

この操作によつて、作製された酸化物超伝導体
の組成を、均一な所望の組成とすることができ
る。
This operation allows the produced oxide superconductor to have a uniform desired composition.

[発明の効果] 以上説明したように本発明によれば、酸化物超
伝導体が成分の変化を伴わずに製造できるため、
良質な特性の優れた超伝導体、特にその薄膜が製
造できるので、酸化物超伝導体を電子技術および
電力技術の各分野に利用して、その効果を十分に
発揮させることが可能となる。
[Effects of the Invention] As explained above, according to the present invention, an oxide superconductor can be produced without changing its components;
Since it is possible to produce superconductors of high quality and excellent properties, especially thin films thereof, it becomes possible to utilize oxide superconductors in various fields of electronic technology and power technology to fully demonstrate their effects.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の一実施例を示す工程図、第2
図は他の実施例を示す工程図、第3図は従来法に
よる酸化物超伝導体の製造過程における示差熱分
析および熱重量分析結果を示す線図である。
Figure 1 is a process diagram showing one embodiment of the present invention, Figure 2 is a process diagram showing an embodiment of the present invention.
The figure is a process diagram showing another example, and FIG. 3 is a diagram showing the results of differential thermal analysis and thermogravimetric analysis in the manufacturing process of an oxide superconductor by a conventional method.

Claims (1)

【特許請求の範囲】 1 酸化物超伝導体の製造方法において、酸化物
超伝導体または超伝導体となるべき組成の酸化物
を、該酸化物を構成する金属成分の全てを含む酸
化物中に埋め込んで加熱することを特徴とする酸
化物超伝導体の製造方法。 2 前記加熱を、前記酸化物を予め作製した酸化
物超伝導体粉末中に埋め込んで行うことを特徴と
する特許請求の範囲第1項記載の酸化物超伝導体
の製造方法。
[Claims] 1. In a method for producing an oxide superconductor, an oxide superconductor or an oxide having a composition to become a superconductor is mixed into an oxide containing all of the metal components constituting the oxide. A method for producing an oxide superconductor, the method comprising embedding it in a superconductor and heating it. 2. The method for producing an oxide superconductor according to claim 1, wherein the heating is performed by embedding the oxide in oxide superconductor powder prepared in advance.
JP62142984A 1987-06-08 1987-06-08 Production of oxide superconductor Granted JPS63307115A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62142984A JPS63307115A (en) 1987-06-08 1987-06-08 Production of oxide superconductor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62142984A JPS63307115A (en) 1987-06-08 1987-06-08 Production of oxide superconductor

Publications (2)

Publication Number Publication Date
JPS63307115A JPS63307115A (en) 1988-12-14
JPH0453817B2 true JPH0453817B2 (en) 1992-08-27

Family

ID=15328225

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62142984A Granted JPS63307115A (en) 1987-06-08 1987-06-08 Production of oxide superconductor

Country Status (1)

Country Link
JP (1) JPS63307115A (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2949500B2 (en) * 1988-03-18 1999-09-13 富士通株式会社 Manufacturing method of superconducting ceramics
JPH0745357B2 (en) * 1990-07-03 1995-05-17 工業技術院長 Superconducting fibrous single crystal and method for producing the same

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63242923A (en) * 1987-03-31 1988-10-07 Sumitomo Electric Ind Ltd Method for manufacturing ceramic superconductor crystals
JPS63277556A (en) * 1987-05-08 1988-11-15 Natl Inst For Res In Inorg Mater Production of superconductive oxide sintered material

Also Published As

Publication number Publication date
JPS63307115A (en) 1988-12-14

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