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JPH0456792B2 - - Google Patents
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JPH0456792B2 - - Google Patents

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Publication number
JPH0456792B2
JPH0456792B2 JP60099304A JP9930485A JPH0456792B2 JP H0456792 B2 JPH0456792 B2 JP H0456792B2 JP 60099304 A JP60099304 A JP 60099304A JP 9930485 A JP9930485 A JP 9930485A JP H0456792 B2 JPH0456792 B2 JP H0456792B2
Authority
JP
Japan
Prior art keywords
weight
silicon carbide
density
carbon
sintering
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60099304A
Other languages
Japanese (ja)
Other versions
JPS61256976A (en
Inventor
Koichi Yamada
Masahide Mori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Chemical Co Ltd
Original Assignee
Sumitomo Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Chemical Co Ltd filed Critical Sumitomo Chemical Co Ltd
Priority to JP60099304A priority Critical patent/JPS61256976A/en
Publication of JPS61256976A publication Critical patent/JPS61256976A/en
Publication of JPH0456792B2 publication Critical patent/JPH0456792B2/ja
Granted legal-status Critical Current

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Description

【発明の詳細な説明】 本発明は炭化珪素焼結体の製造方法に関し、更
に詳細には炭化珪素粉末に焼結助剤として特定の
炭素含有物質とホウ素化合物を特定量範囲で存在
せしめた後成形し、真空中で加熱後更に不活性雰
囲気中にて焼結することにより、焼結体中に特定
量の炭素とホウ素を含有する高密度炭化珪素焼結
体の製造方法に関するものである。 炭化珪素は物理的および化学的性質に優れてお
り、特に高硬度でかつ、耐蝕性を有し、高温にお
いても室温と変わらない機械的性質を有するため
従来より耐摩耗材料、高温構造材料として有望視
されていた。しかし難焼結性のため高密度に焼結
することが通常の方法では困難であるため、ホツ
トプレス法による焼結、焼結助剤添加による焼結
等が提案されている。 例えば特開昭51−148712号公報には1〜100
m2/gの比表面積を有するα型炭化珪素91〜
99.35重量部に25〜75重量%の炭化率を有する炭
化可能な有機溶剤可溶性の有機材料0.67〜20重量
部、0.15〜3.0重量部のホウ素を含有するホウ素
源および一時的結合剤5〜15重量部を混合し焼結
することにより高密度の炭化珪素焼結体が得られ
ることが教示されている。 しかしながら該方法によれば、高密度の炭化珪
素焼結体は得られるものの機械的強度においては
満足し得るものではなく、例えば抗折力で50Kg/
mm2を越えるものは見られない。 そのため本発明者等は、従来一般に炭化珪素の
場合その焼結密度を上げるために必要とされてい
るホウ素量よりも少ない添加量範囲に特定の炭素
含有物質を特定量範囲で添加併用する場合には焼
結密度の低下を招くことなく機械的強度に優れた
焼結体が得られることを見出し、先に特許出願を
行つた。ところがその方法を継続して検討してい
たところ厚みの薄い焼結体においては容易に高密
度品が得られるものの、成形体の厚みが厚い場合
には必ずしも高密度な焼結体が得られないことが
あるとの不都合に直面した。 かかる事情下に鑑み本発明者らは、成形体の厚
みが厚い場合に高密度焼結体が得られない原因を
鋭意検討した結果、成形体の厚みが厚い場合には
焼結助剤として存在せしめた炭素含有物質が焼結
体の内部に残留しやすくなり、その結果高密度化
が妨げられるためであると考察し、炭素含有物質
の焼結助剤としての役割を損なうことなく焼結体
中に存在する過剰残留炭素を除く方法、更には適
正炭素量等を検討した結果、成形体の焼結方法を
特定化することにより成形体の厚みが厚い、例え
ば10mmを越える場合においても高密度でかつ、高
強度の焼結体が得られることを見出し、本発明方
法を完成するに至つた。 すなむち本発明は、炭化珪素粉末に焼結助剤と
してホウ素換算で0.03重量%を越え0.15重量%未
満のホウ素化合物と炭化珪素粉末中に含有される
炭素との総量が4重量%を越え8重量%未満の炭
素となる如くタールピツチを添加混合し、成形し
た成形体を真空中1500℃以上の温度に加熱し、次
いで不活性雰囲気中2300℃以下の温度で焼結さ
せ、ホウ素含有量が0.03重量%を越え0.15重量%
未満で炭素含有量が2.0重量%以下であり、かつ
該焼結体が理論密度の90%以上の密度を有する炭
化珪素焼結体を得ることを特徴とする高密度炭化
珪素焼結体の製造方法を提供するにある。 以下、本発明方法を更に詳細に説明する。 本発明方法で使用する炭化珪素粉末としては平
均粒径1μ以下の主としてアルフア或いは非等軸
晶系の結晶形態を有する炭化珪素からなる炭化珪
素粉末が好適であるが、更にはベータ型炭化珪素
粉末単独或いはこれらの混合物を使用することも
できる。これら炭化珪素粉末中には0.2〜2重量
%の付加的炭素が包含されているのが一般的であ
り、本発明方法に適用される炭化珪素粉末も例外
ではない。 本発明方法においては、炭化珪素粉末に対しホ
ウ素換算で0.03重量%を越え0.15重量%未満のホ
ウ素化合物と炭化珪素粉末中に含有される付加的
炭素をも含めて総量で4重量%を越え8重量%未
満の炭素となる如きタールピツチを存在せしめる
が、炭化珪素粉末に対するホウ素化合物の添加量
がホウ素に換算して0.03重量%以下の場合には焼
結密度が低下し好ましくなく、他方0.15重量%以
上の場合には高密度焼結体を得ることはできるも
のの、焼結体の機械的強度が低下するので好まし
くない。 また炭化珪素粉末に対するタールピツチの添加
量が炭化珪素粉末中に含有される付加的炭素をも
加えて炭素としての総量が4重量%以下の場合に
は焼結前に炭化珪素が粒成長を起こし、高密度焼
結体を得ることができず、他方8重量%を越える
場合には焼結体の機械的強度が低下するので好ま
しくない。 本発明方法の実施において使用し得るホウ素化
合物としては特に制限されないが、一般には対象
とする焼結体の焼結温度まで安定に存在し、かつ
ホウ素含有量の高い化合物が望ましく、具体的に
はホウ素、炭化ホウ素等が挙げられる。 度が低下するので好ましくない。 またタールピツチとしては特に制限されないが
40〜60重量%の炭化率を有する有機溶剤可溶性の
コールタールピツチ或いはオイルタールピツチの
使用が適当である。 本発明において上記組成配合となる如く構成し
た炭化珪素粉末とホウ素化合物とタールピツチは
ベンゼン、キノリン、アントラセン等の有機溶媒
或いは水を用いて均一に混合した後、スリツプキ
ヤステイング成形するか、或いはスプレードライ
法により造粒し、プレス成形法により加圧成形す
るか、或いは有機バインダーを混合し、押出成形
や射出成形等により成形体を得ればよい。 このようにして得た成形体は必要に応じて機械
加工や脱バインダー処理を行つた後、真空中で
1500℃以上の温度に昇温し、更にアルゴン、ヘリ
ウム、窒素等の不活性雰囲気中で2300℃以下の温
度で焼結を行う。真空から不活性雰囲気に切換え
る温度及び時間は成形体中に含有される炭素量や
使用する真空度等により一義的ではないが、焼結
後の焼結体中の炭素含有量が2重量%以下となる
条件が選択される。この様な条件としては通常真
空度10-1torr以上、好ましくは10-3〜10-6torrで
温度1500〜2000℃、1〜10時間加熱した後更に不
活性雰囲気中で焼結する方法が挙げられる。一般
的には炭素含有量が同一の場合には真空度が高
く、加熱温度が高いほど真空下における加熱時間
は短時間となるが、これら条件は簡単な予備実験
により容易に設定し得る。 本発明方法において真空中での加熱温度が1500
℃未満の場合には焼結体中の炭素残量が2重量%
を越え、高密度化品が得られず好ましくなく、他
方2000℃を越える場合には炭化珪素の蒸発が生起
するので好ましくない。また不活性雰囲気下での
処理温度は2300℃以下、好ましくは2050〜2300℃
であり、焼結温度が2300℃を越える場合には炭化
珪素の蒸発や結晶粒の粗大化が起こり、焼結体の
機械的強度が低下し好ましくない。 本発明方法は厚みの厚い成形体の焼結に特に適
しているが、厚みの薄い成形体にも適用し得る。 本発明方法を適用することにより何故厚みの厚
い成形体を強度の低下を見ることなく高密度化で
きるのか理由は詳らかではないが、成形体の厚み
が厚い場合、成形体中で蒸発した炭素が成形体の
外へ拡散し難く、成形体中で平衡蒸気圧に達する
ため炭素のさらなる蒸発が抑制される。そのため
1900℃以上の温度の焼結および粒子成長を抑制
し、高密度品とならないが、真空下で1500℃以上
の温度に加熱する場合には成形体中で蒸発した炭
素が成形体の外へ拡散し、次工程での不活性雰囲
気での焼結時に炭素が炭化珪素の焼結を抑制しな
い量まで、すなわち2重量%以下までに減少せし
めることが可能となり、その結果として焼結時の
炭素による炭化珪素の焼結抑制がなく、かつ不活
性雰囲気が高温での炭化珪素の分解を抑制しつつ
焼結反応を遂行するので機械的強度の低下のない
高密度炭化珪素焼結体が得られるものと推測され
る。 以上詳述した本発明方法によれば、炭化珪素粉
末に特定の炭素含有物質とホウ素化合物を特定量
範囲で焼結助剤として添加存在せしめて成形体を
形成し、次いで真空中で特定温度以上に加熱し、
引続き不活性雰囲気中で加熱し、焼結せしめると
いう二段階加熱方式を採用することによりホウ素
含有量が0.03重量%を越え0.15重量%未満で炭素
含有量が2.0重量%以下でありかつ、理論密度の
90%以上の密度を有する機械的強度にも優れた高
密度炭化珪素焼結体を得ることを可能ならしめた
もので、タービン翼、ポンプ部品、抄紙機械部品
等の工業材料の製造方法としてその工業的価値は
頗る大なるものである。 以下実施例により本発明を更に詳細に説明す
る。 実施例 1 コールタールピツチ(炭素収率50%)12gをキ
ノリン18gに溶解した後、ベンゼン400gを加え
十分混合を行つた。この溶液に炭素1.5重量%を
含有する炭化珪素含有量97%、BET比表面積15
m2/gのα型炭化珪素200g、1200メツシユパス
の炭化ホウ素0.3gを加え、プラスチツクボール
ミルを用い3時間分散混合した。窒素ガスを流し
ながら60℃で乾燥し、解砕した後180メツシユの
篩を通し、得られた混合粉末を冷間プレス後ゴム
型に装入し、1.5トン/cm2の成形圧で静水圧プレ
ス成形を行い、80φ×15mmの成形体を作製した。 この成形体を10-3〜10-4torrの真空下で常温よ
り200℃/hrの昇温速度で1700℃まで昇温し、30
分間保持しつつアルゴンガスを導入した。
760torrに達した後アルゴンガス雰囲気下2100℃
の温度条件で1時間焼結した。得られた焼結体の
焼結密度は3.11g/cm3、3点曲げ試験(試料寸法
4×3×50mm、スパン30mm)による曲げ強度は60
Kg/cm2であり、焼結体中の残存炭素量は0.8重量
%であつた。 実施例 2 オイルタールピツチ(炭素収率50%)24gをキ
ノリン36gに溶解した後、ベンゼン400gを加え
十分混合を行つた。この溶液に炭素0.6重量%を
含有する炭化珪素含有量97.5%、BET比表面積
10m2/gのα型炭化珪素200g、1200メツシユパ
スの炭化ホウ素0.3gを加え、プラスチツクボー
ルミルを用い3時間分散混合した。窒素ガスを流
しながら60℃で乾燥し、解砕した後180メツシユ
の篩を通し、得られた混合粉末を冷間プレス後ゴ
ム型に装入し、1.5トン/cm2の成形圧で静水圧プ
レス成形を行い、80φ×15mmの成形体を作製し
た。 この成形体を10-3〜10-4torrの真空下で常温よ
り200℃/hrの昇温速度で1900℃まで昇温し、30
分間保持しつつアルゴンガスを導入した。
760torrに達した後アルゴンガス雰囲気下2100℃
の温度条件で1時間焼結した。得られた焼結体の
焼結密度は3.08g/cm3、3点曲げ強度は58Kg/mm2
であり、焼結体中の残存炭素量は1.2重量%であ
つた。 比較例 1 実施例1と同じ条件で作成した成形体をアルゴ
ンガスを流しながら600℃の温度で3時間の焼成
を行つた後アルゴンガス雰囲気下2100℃の温度条
件で1時間焼結した。得られた焼結体の焼結密度
は2.80g/cm3、曲げ強度は27Kg/mm2であり、焼結
体中の残存炭素量は2.5重量%であつた。 実施例3,4および比較例2〜5 第1表に記載の条件で成形体を形成し、焼結
し、得られた焼結体の物性を測定した。その結果
を第1表に示す。 【表】
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method for producing a silicon carbide sintered body, and more particularly, the present invention relates to a method for producing a silicon carbide sintered body, and more specifically, after a specific carbon-containing substance and a boron compound are present in a specific amount range as a sintering aid in silicon carbide powder. The present invention relates to a method for manufacturing a high-density silicon carbide sintered body containing specific amounts of carbon and boron in the sintered body by molding, heating in vacuum, and sintering in an inert atmosphere. Silicon carbide has excellent physical and chemical properties, particularly high hardness, corrosion resistance, and mechanical properties that are the same even at high temperatures as at room temperature, making it a promising candidate for wear-resistant materials and high-temperature structural materials. was being watched. However, since it is difficult to sinter to a high density by normal methods due to the difficulty of sintering, sintering by hot pressing, sintering by adding a sintering aid, etc. have been proposed. For example, in Japanese Patent Application Laid-Open No. 51-148712, 1 to 100
α-type silicon carbide 91~ having a specific surface area of m 2 /g
99.35 parts by weight of a carbonizable organic solvent-soluble organic material with a carbonization rate of 25-75% by weight, 0.67-20 parts by weight, a boron source containing 0.15-3.0 parts by weight of boron and 5-15 parts by weight of a temporary binder. It is taught that a high-density sintered silicon carbide body can be obtained by mixing and sintering the two parts. However, according to this method, although a high-density silicon carbide sintered body is obtained, the mechanical strength is not satisfactory, for example, the transverse rupture strength is 50 kg/
Nothing larger than mm 2 is seen. Therefore, the inventors of the present invention have proposed that when adding a specific carbon-containing substance in a specific amount range to silicon carbide in an amount smaller than the amount of boron that is generally required to increase the sintered density of silicon carbide. discovered that a sintered body with excellent mechanical strength could be obtained without causing a decrease in sintered density, and filed a patent application earlier. However, as we continued to study this method, we found that while it was easy to obtain a high-density product for thin sintered bodies, it was not necessarily possible to obtain a high-density sintered body for thick compacts. I have faced some inconveniences. In view of these circumstances, the inventors of the present invention have intensively investigated the reason why a high-density sintered body cannot be obtained when the thickness of the molded body is thick. We believe that this is because the carbon-containing material that has been sintered tends to remain inside the sintered body, and as a result, densification is hindered. As a result of considering the method of removing excess residual carbon present in the molded body, as well as the appropriate amount of carbon, the method of sintering the molded body was specified to achieve high density even when the thickness of the molded body is thick, for example, exceeding 10 mm. It was discovered that a sintered body having a large size and high strength could be obtained, and the method of the present invention was completed. In other words, the present invention provides silicon carbide powder with a boron compound as a sintering aid in an amount exceeding 0.03% by weight and less than 0.15% by weight in terms of boron, and a total amount of carbon contained in the silicon carbide powder exceeding 4% by weight. Tarpitz is added and mixed so that the carbon content is less than 8% by weight, and the formed compact is heated in a vacuum to a temperature of 1500°C or higher, and then sintered in an inert atmosphere at a temperature of 2300°C or lower to reduce the boron content. More than 0.03% by weight and 0.15% by weight
Production of a high-density silicon carbide sintered body, characterized in that the carbon content is less than 2.0% by weight, and the sintered body has a density of 90% or more of the theoretical density. We are here to provide you with a method. The method of the present invention will be explained in more detail below. As the silicon carbide powder used in the method of the present invention, it is preferable to use a silicon carbide powder consisting of silicon carbide having an average particle size of 1 μm or less and mainly having an alpha or anisometric crystal form, but a beta type silicon carbide powder is also preferable. They can be used alone or in combination. These silicon carbide powders generally contain 0.2 to 2% by weight of additional carbon, and the silicon carbide powder applied to the method of the present invention is no exception. In the method of the present invention, the total amount of boron compounds, including more than 0.03% by weight and less than 0.15% by weight in terms of boron, and additional carbon contained in the silicon carbide powder, is more than 4% by weight and 8% by weight, based on the silicon carbide powder. However, if the amount of the boron compound added to the silicon carbide powder is less than 0.03% by weight in terms of boron, the sintered density will decrease, which is undesirable; In the above case, although a high-density sintered body can be obtained, the mechanical strength of the sintered body decreases, which is not preferable. Furthermore, if the amount of tar pitch added to the silicon carbide powder is less than 4% by weight, including the additional carbon contained in the silicon carbide powder, the silicon carbide will cause grain growth before sintering. A high-density sintered body cannot be obtained, and if the content exceeds 8% by weight, the mechanical strength of the sintered body decreases, which is not preferable. There are no particular restrictions on boron compounds that can be used in the method of the present invention, but in general, compounds that stably exist up to the sintering temperature of the target sintered body and have a high boron content are desirable. Examples include boron and boron carbide. This is not preferable because it lowers the degree of oxidation. Also, there are no particular restrictions on tarpitz.
It is suitable to use organic solvent-soluble coal tar pitch or oil tar pitch having a carbonization rate of 40 to 60% by weight. In the present invention, the silicon carbide powder, boron compound, and tar pitch having the above-mentioned composition are uniformly mixed using an organic solvent such as benzene, quinoline, anthracene, or water, and then subjected to slip casting molding or spray drying. A molded product may be obtained by granulation by a method and pressure molding by a press molding method, or by mixing an organic binder and by extrusion molding, injection molding, or the like. The molded body thus obtained is subjected to mechanical processing and debinding treatment as necessary, and then placed in a vacuum.
The temperature is raised to 1,500°C or higher, and sintering is performed at a temperature of 2,300°C or lower in an inert atmosphere such as argon, helium, nitrogen, etc. The temperature and time for switching from vacuum to inert atmosphere are not unique depending on the amount of carbon contained in the compact and the degree of vacuum used, but the carbon content in the sintered compact after sintering is 2% by weight or less. The conditions are selected. Such conditions include heating at a vacuum level of 10 -1 torr or more, preferably 10 -3 to 10 -6 torr, and a temperature of 1500 to 2000°C for 1 to 10 hours, followed by further sintering in an inert atmosphere. Can be mentioned. Generally, when the carbon content is the same, the degree of vacuum is higher, and the higher the heating temperature, the shorter the heating time under vacuum, but these conditions can be easily set by simple preliminary experiments. In the method of the present invention, the heating temperature in vacuum is 1500℃.
If the temperature is less than ℃, the remaining amount of carbon in the sintered body is 2% by weight.
If the temperature exceeds 2000° C., it is not preferable because a highly densified product cannot be obtained. On the other hand, if the temperature exceeds 2000° C., evaporation of silicon carbide occurs, which is not preferable. In addition, the processing temperature under an inert atmosphere is 2300℃ or less, preferably 2050 to 2300℃.
Therefore, if the sintering temperature exceeds 2300°C, silicon carbide evaporates and crystal grains become coarser, which is undesirable because the mechanical strength of the sintered body decreases. Although the method of the present invention is particularly suitable for sintering thick molded bodies, it can also be applied to thin molded bodies. It is not clear why the method of the present invention can increase the density of a thick molded body without deteriorating its strength, but when the thickness of the molded body is thick, the carbon evaporated in the molded body Since it is difficult to diffuse out of the molded body and reaches an equilibrium vapor pressure within the molded body, further evaporation of carbon is suppressed. Therefore
It suppresses sintering and particle growth at temperatures above 1900℃, and does not result in high-density products, but when heated to temperatures above 1500℃ under vacuum, the carbon evaporated in the compact will diffuse out of the compact. However, during sintering in an inert atmosphere in the next step, it is possible to reduce the amount of carbon to an amount that does not inhibit the sintering of silicon carbide, that is, to less than 2% by weight. A high-density silicon carbide sintered body with no reduction in mechanical strength can be obtained because the sintering reaction of silicon carbide is not suppressed and the sintering reaction is carried out while the inert atmosphere suppresses the decomposition of silicon carbide at high temperatures. It is assumed that. According to the method of the present invention detailed above, a molded body is formed by adding a specific carbon-containing substance and a boron compound as sintering aids in a specific amount range to silicon carbide powder, and then in a vacuum at a temperature above a specific temperature. Heat to
By adopting a two-step heating method of successively heating and sintering in an inert atmosphere, the boron content is more than 0.03% by weight and less than 0.15% by weight, the carbon content is less than 2.0% by weight, and the theoretical density is of
It has made it possible to obtain a high-density silicon carbide sintered body with a density of 90% or more and excellent mechanical strength, and it is used as a manufacturing method for industrial materials such as turbine blades, pump parts, paper machine parts, etc. Its industrial value is enormous. The present invention will be explained in more detail with reference to Examples below. Example 1 After dissolving 12 g of coal tar pitch (50% carbon yield) in 18 g of quinoline, 400 g of benzene was added and thoroughly mixed. Silicon carbide content 97% with carbon 1.5% by weight in this solution, BET specific surface area 15
200 g of α-type silicon carbide of m 2 /g and 0.3 g of boron carbide of 1200 mesh passes were added and dispersed and mixed for 3 hours using a plastic ball mill. Dry at 60℃ while flowing nitrogen gas, crush, pass through a 180-mesh sieve, cold press the resulting mixed powder, charge it into a rubber mold, and hydrostatically press at a molding pressure of 1.5 tons/ cm2 . Press molding was performed to produce a molded body of 80φ x 15mm. This molded body was heated from room temperature to 1700°C at a heating rate of 200°C/hr under a vacuum of 10 -3 to 10 -4 torr.
Argon gas was introduced while holding for a minute.
2100℃ under argon gas atmosphere after reaching 760torr
It was sintered for 1 hour under the temperature conditions of . The sintered density of the obtained sintered body was 3.11 g/cm 3 , and the bending strength in a 3-point bending test (sample dimensions 4 x 3 x 50 mm, span 30 mm) was 60.
Kg/cm 2 , and the amount of residual carbon in the sintered body was 0.8% by weight. Example 2 After 24 g of oil tar pitch (carbon yield 50%) was dissolved in 36 g of quinoline, 400 g of benzene was added and thoroughly mixed. Silicon carbide content 97.5%, BET specific surface area containing 0.6% carbon by weight in this solution
200 g of α-type silicon carbide of 10 m 2 /g and 0.3 g of boron carbide of 1200 mesh passes were added and dispersed and mixed for 3 hours using a plastic ball mill. Dry at 60℃ while flowing nitrogen gas, crush, pass through a 180-mesh sieve, cold press the resulting mixed powder, charge it into a rubber mold, and hydrostatically press at a molding pressure of 1.5 tons/ cm2 . Press molding was performed to produce a molded body of 80φ x 15mm. This molded body was heated from room temperature to 1900°C under a vacuum of 10 -3 to 10 -4 torr at a heating rate of 200°C/hr.
Argon gas was introduced while holding for a minute.
2100℃ under argon gas atmosphere after reaching 760torr
It was sintered for 1 hour under the temperature conditions of . The sintered density of the obtained sintered body was 3.08 g/cm 3 , and the 3-point bending strength was 58 Kg/mm 2
The amount of residual carbon in the sintered body was 1.2% by weight. Comparative Example 1 A molded body prepared under the same conditions as Example 1 was sintered at 600° C. for 3 hours while flowing argon gas, and then sintered at 2100° C. for 1 hour in an argon gas atmosphere. The obtained sintered body had a sintered density of 2.80 g/cm 3 , a bending strength of 27 Kg/mm 2 , and a residual carbon content of 2.5% by weight. Examples 3 and 4 and Comparative Examples 2 to 5 Molded bodies were formed and sintered under the conditions listed in Table 1, and the physical properties of the obtained sintered bodies were measured. The results are shown in Table 1. 【table】

Claims (1)

【特許請求の範囲】[Claims] 1 炭化珪素粉末に焼結助剤としてホウ素換算で
0.03重量%を越え0.15重量%未満のホウ素化合物
と炭化珪素粉末中に含有される炭素との総量が4
重量%を越え8重量%未満の炭素となる如くター
ルピツチを添加混合し、成形した成形体を真空中
1500℃以上の温度に加熱し、次いで不活性雰囲気
中2300℃以下の温度で焼結させ、ホウ素含有量が
0.03重量%を越え0.15重量%未満で炭素含有量が
2.0重量%以下であり、かつ該焼結体が理論密度
の90%以上の密度を有する炭化珪素焼結体を得る
ことを特徴とする高密度炭化珪素焼結体の製造方
法。
1 Silicon carbide powder as a sintering aid in terms of boron
The total amount of boron compounds exceeding 0.03% by weight and below 0.15% by weight and carbon contained in the silicon carbide powder is 4
Tar pitch is added and mixed so that the carbon content exceeds 8% by weight, and the molded product is placed in a vacuum.
Heating to a temperature above 1500℃ and then sintering at a temperature below 2300℃ in an inert atmosphere reduces the boron content.
Carbon content is more than 0.03% by weight and less than 0.15% by weight
2.0% by weight or less, and the sintered body has a density of 90% or more of the theoretical density.
JP60099304A 1985-05-10 1985-05-10 Manufacture of high density silicon carbide sintered body Granted JPS61256976A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60099304A JPS61256976A (en) 1985-05-10 1985-05-10 Manufacture of high density silicon carbide sintered body

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Application Number Priority Date Filing Date Title
JP60099304A JPS61256976A (en) 1985-05-10 1985-05-10 Manufacture of high density silicon carbide sintered body

Publications (2)

Publication Number Publication Date
JPS61256976A JPS61256976A (en) 1986-11-14
JPH0456792B2 true JPH0456792B2 (en) 1992-09-09

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Country Link
JP (1) JPS61256976A (en)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6414174A (en) * 1987-07-06 1989-01-18 Ngk Insulators Ltd Silicon carbide sintered body and its production

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