JPH0457615B2 - - Google Patents
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- Publication number
- JPH0457615B2 JPH0457615B2 JP62226543A JP22654387A JPH0457615B2 JP H0457615 B2 JPH0457615 B2 JP H0457615B2 JP 62226543 A JP62226543 A JP 62226543A JP 22654387 A JP22654387 A JP 22654387A JP H0457615 B2 JPH0457615 B2 JP H0457615B2
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- Prior art keywords
- precipitate
- solution
- powder
- perovskite
- component
- Prior art date
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- Compositions Of Oxide Ceramics (AREA)
- Inorganic Compounds Of Heavy Metals (AREA)
- Ceramic Capacitors (AREA)
Description
(産業上の利用分野)
本発明は、ペロブスカイトおよびその固溶体の
原料粉末の製造方法に関するものである。
ペロブスカイトおよびその固溶体は、圧電体、
誘電体、半導体、センサー、オプトエレクトロニ
クス材料等の機能性セラミツクスとして広範囲に
利用されている。最近はこの機能をより高度にす
ることが望まれており、その要請に対応できる易
焼結性、均一性、高嵩密度で、且つ低コストのペ
ロブスカイトおよびその固溶体の原料粉末が多量
に効率的に製造できる技術の開発が要望されてい
る。
また最近では、コンデンサー材料として低温焼
結ができるのが要望されている。本発明は特にコ
ンデンサー材料として優れた特性を示す材料粉末
の製造に関するものである。
(従来技術およびその問題点)
従来、ペロブスカイトの原料粉末の製造方法と
しては、乾式法、共沈法が知られている。
乾式法は構成原料成分の化合物を乾式で混合
し、これを仮焼する方法である。しかし、この方
法では、均一組成の原料粉末が得難いため、優れ
た機能性を持つペロブスカイトを得難いし、また
焼結性も十分ではない。
共沈法はその構成成分のすべてを一緒にした混
合溶液を作り、これにアルカリ等の沈澱形成液を
添加して共沈させ、共沈物を乾燥、仮焼させる方
法である。
この共沈法によると、均一性の優れた粉末が得
易いが、その均一性なるが故に、沈澱生成時、乾
燥時または仮焼時に粒子が凝結して二次粒子を形
成し、焼結性が良好でないという欠点があつた。
また、共沈法では各成分の該沈澱形成液に対す
る沈澱形成能が同じでない場合は、例えば或成分
は実質的に100%沈澱を生成するが、他の成分は
実質的に全部沈澱を生成し得ないことが起り、所
望組成のものを得ることが困難であつた。特に
Mg成分、Zn成分を定量的に沈澱させることは非
常に難しい。これらの成分の量は焼結体の物理
的・電気的特性に大きく影響するため、定量的に
入れることが非常に重要である。またコンデンサ
ー材料として使う場合、粉の段階でペロブスカイ
トになつている割合が高い方が好ましいが、前述
の方法ではいずれもペロブスカイトの割合が低
く、好ましいものではなかつた。
(発明の目的)
本発明の目的は、前記乾式法、共沈法の問題点
を解決し、所望組成のペロブスカイト型コンデン
サー材料の原料粉末を製造することができる方法
を提供することにある。
さらに詳しくは、易焼結性、均一性、低コスト
を満足し、かつペロブスカイト率が100%に近く、
Mg成分、Zn成分をはじめ含有成分を定量的に含
有しうるペロブスカイト型コンデンサー材料の原
料粉末を効率よく製造することができる方法を提
供することにある。
(問題点を解決するための技術的手段)
本発明者等は前記目的を達成すべく鋭意研究の
結果、本発明に到つた。
本発明は一般式
Pb1-XAX(B1/3Nb2/3)yTi1-yO3
(ただし、AはBa、SrおよびCaのうちの少な
くとも一種を示し、BはMgおよびZnのうちの少
なくとも一種を示し、x=0.01〜0.50、y=0.50
〜1.0の値である。)で表されるペロブスカイトお
よびその固溶体の原料粉末の製造に際し、B−
Nb−O系複合酸化物の粉末を予め調製した後、
(1) 液相にB−Nb−O系複合酸化物の粉末を分
散させ、次いで残りの成分の化合物の溶液を沈
澱形成液と接触させて沈澱を生成させるか、
あるいは、
(2) 残りの成分の化合物の溶液を沈澱形成液と接
触させて沈澱を生成させ、これとB−Nb−O
系複合酸化物の粉末を混合することにより、
B−Nb−O系複合酸化物と残りの成分の沈澱
物との混合物を調製し、これを仮焼することを特
徴とする低温焼結性ペロブスカイト型コンデンサ
−材料の原料粉末の製造方法に関するものであ
る。
本発明において、「溶液」とは可溶物を溶解さ
せた溶液または不溶物を分散させた懸濁液を意味
する。
本発明における一般式
Pb1-XAX(B1/3Nb2/3)yTi1-yO3
で表されるペロブスカイトおよびその固溶体のA
成分はBa、SrおよびCaのうちの少なくとも一種
であり、B成分はMgおよびZnのうちの少なくと
も一種であり、前記一般式における
Pb1-xAx成分と(B1/3Nb2/3)yTi1-y成分の原子
比は通常1.0であるが、この原子比を1.0より高い
値、もしくは低い値にずらした不定比性ペロブス
カイトも含まれる。
また前記一般式中のxおよびyはx=0.01〜
0.50、y=0.50〜1.0の数値であり、この範囲をは
ずれると特性的に問題となるので好ましくない。
本発明のB−Nb−O系複合酸化物は、
酸化物固相法で、B成分の酸化物粉末と酸化
ニオブ粉末を混合し、これを仮焼するか、
半湿式法で、液相中に酸化ニオブ粉末または
水酸化ニオブを懸濁させ、B成分の硝酸塩、塩
化物等の溶液と沈澱形成液を接触させて沈澱物
を生成させるか、あるいは液相中にB成分の酸
化物粉末を懸濁させ、塩化ニオブ溶液と沈澱形
成液を接触させるか、または水酸化ニオブを添
加することにより、沈澱物を生成させ、次いで
得られた沈澱物を仮焼するか、
湿式法で、B成分とNbの可溶性物質の溶液
と沈澱形成液を接触させて沈澱物を生成させ、
これを仮焼することにより調製される。
沈澱形成液としては、アンモニア、炭酸アンモ
ニウム、しゆう酸アンモニウム、苛性アルカリ等
の溶液が挙げられる。
前記酸化物固相法、半湿式法、湿式法のいずれ
においても仮焼は、空気中500〜1300℃の温度で
行う。
このようにして得られたB−Nb−O系複合酸
化物粉末を用いて、以下の手法により前記一般式
で表される組成物が得られる。
(1) B−Nb−O系複合酸化物粉末を沈澱形成剤
を含んだ液相中に分散させ、攪拌しながらPb
成分、Ba成分およびTi成分の溶液を滴下して、
それらの沈澱物を形成させるか、またはB−
Nb−O系複合酸化物粉末を液相中に分散させ、
次いでPb成分、Ba成分およびTi成分の溶液を
滴下するのと同時あるいは後から沈澱形成剤を
滴下して沈澱物を形成させるか、あるいは
(2) Pb成分、Ba成分およびTi成分の溶液を沈澱
形成液と接触させることにより、それらの沈澱
物を形成させ、次いで沈澱物とB−Nb−O系
複合酸化物粉末を乾式あるいは湿式で混合す
る。
これらの方法によつて得られたPb成分、Ba成
分およびTi成分の沈澱物とB−Nb−O系複合酸
化物との混合物は、傾瀉法の如き通常の洗浄方法
により水等で洗浄して、別、乾燥した後、仮焼
する。
前記沈澱反応に用いられる原料は、溶解性のも
のであれば特に制限はなく、例えば水酸化物、炭
酸塩、オキシ塩、硫酸塩、硝酸塩、塩化物等の無
機塩、酢酸塩、しゆう酸塩等の有機酸塩、酸化物
等から適宜選択される。これらは一般に水溶液と
して使用されるが水に可溶でない場合には酸を添
加して可溶させればよく、不溶原料については懸
濁溶液として使用してもよい。
沈澱形成液としては、アンモニア、炭酸アンモ
ニウム、しゆう酸アンモニウム、苛性アルカリ、
等の溶液が挙げられる。
仮焼温度としては、過度に低いと沈澱物の脱
水、熱分解が不十分であり、また過度に高いと粉
末が粗大化するので、通常、仮焼温度は500〜
1000℃の範囲が好適である。
(実施例)
以下に実施例および比較例を示し、さらに詳し
く本発明について説明する。
なお、実施例における特性評価は次の方法で行
つた。
・粉末の粒径 :透過型電子顕微鏡
・ ペロブスカイト率 :X線回析のペロブスカ
イトの(110)面のピーク強度Iperpとバイロク
ロアの(222)面のピーク強度Ipyrpより
ペロブスカイト率=Iperp/Ipyrp+Iperp×100
・密度 :アルキメデス法
・電気特性 :LCRメーター(1KHz)
実施例 1
Pb0.9Ba0.1(Zn1/3Nb2/3)0.1(Mg1/3Nb2/3)0.8Ti0.
1
O3
酸化亜鉛(ZnO)0.0033モルと酢酸マグネシウ
ム(MgO)0.027モルと水酸化ニオブ[Nb(OH)
5]0.060モルを水50mlに加え、ジルコニアボール
でボールミルを10時間行つた後、スラリを乾燥機
で乾燥固化させ、乳鉢で粉砕した後、1000℃で焼
成した。
得られたZn−Mg−Nb−O系複合酸化物を6N
−アンモニア水500mlに懸濁させ、攪拌しながら
硝酸鉛[Pb(NO3)2]0.09モルと硝酸バリウム
[Ba(NO3)2]0.01モルを水300mlに溶解した溶液
と四塩化チタン(TiCl4)0.01モルを水200mlに溶
解した溶液を滴下し、沈澱を生成させた。この沈
澱物含有液を静置し、上澄液を除去し、新たに水
2000mlを加えて充分攪拌した後、再度静置して上
澄液を除去するという傾瀉操作を3回繰返し、最
後に別により沈澱物を得た。次いで沈澱物を乾
燥機で乾燥した後、電気炉で800℃で2時間仮焼
した。得られた粉末をエタノール存在下、ボール
ミル処理し、その一部を透過型電子顕微鏡により
粒子を観察したところ、粒径は0.4μm程度で均一
であつた。さらにX線回析によりペロブスカイト
構造の割合を調べたところ、99%であつた。
上記粉末にポリビニルアルコールを0.8重量%
添加して1t/cm2で成型し、950℃で10時間焼結し
た結果、焼結体の密度は理論密度の99%であつ
た。さらに、電気特性を室温で測定したところ、
比誘電率14500、誘電損失(tanδ)0.8%であつ
た。
実施例 2〜7
実施例1と同様な方法により第1表に示す組成
のものを製造し、電気特性を測定した。その結果
を第2表に示す。
比較例 1
Pb0.9Ba0.1(Zn1/3Nb2/3)0.1(Mg1/3Nb2/3)0.8Ti0.
1
O3
酸化鉛(PbO)、炭酸バリウム(BaCO3)、酸
化亜鉛(ZnO)、酸化マグネシウム(MgO)、酸
化ニオブ(Nb2O5)および酸化チタン(TiO2)
を上記組成となるように秤取し、これらをボール
ミルにて十分に混合した後、これを800℃で2時
間仮焼した。得られた粉末の粒径は0.5〜5μmで
分布の大きいものであつた。この粉末にポリビニ
ルアルコールを0.8重量%添加して1t/cm2で成型
した後、950℃で10時間焼結した。焼結体の密度
は理論密度の94%であり、また電気特性は比誘電
率8100、tanδ85.2%であつた。
(Industrial Application Field) The present invention relates to a method for producing raw material powder of perovskite and its solid solution. Perovskites and their solid solutions are piezoelectric materials,
It is widely used as functional ceramics for dielectrics, semiconductors, sensors, optoelectronic materials, etc. Recently, there has been a desire to further improve this function, and raw material powders of perovskite and its solid solution that are easily sinterable, uniform, high bulk density, and low cost are available in large quantities to meet these demands. There is a need for the development of technology that can produce these products. Recently, there has also been a demand for capacitor materials that can be sintered at low temperatures. The present invention particularly relates to the production of material powders that exhibit excellent properties as capacitor materials. (Prior Art and its Problems) Conventionally, dry methods and coprecipitation methods are known as methods for producing perovskite raw material powders. The dry method is a method in which compounds of constituent raw materials are mixed in a dry method and then calcined. However, with this method, it is difficult to obtain a raw material powder with a uniform composition, so it is difficult to obtain a perovskite with excellent functionality, and the sinterability is also not sufficient. The coprecipitation method is a method in which a mixed solution is prepared by combining all of the constituent components, a precipitate-forming liquid such as an alkali is added to the mixed solution to cause coprecipitation, and the coprecipitate is dried and calcined. According to this coprecipitation method, it is easy to obtain powder with excellent uniformity, but because of its uniformity, the particles coagulate to form secondary particles during precipitate formation, drying, or calcination, resulting in poor sinterability. The problem was that the quality was not good. In addition, in the coprecipitation method, if the precipitate forming ability of each component in the precipitate forming solution is not the same, for example, one component will form substantially 100% of the precipitate, while other components will form substantially all of the precipitate. Therefore, it was difficult to obtain a desired composition. especially
It is extremely difficult to quantitatively precipitate Mg and Zn components. Since the amounts of these components greatly affect the physical and electrical properties of the sintered body, it is very important to add them quantitatively. When used as a capacitor material, it is preferable to have a high proportion of perovskite in the powder stage, but in all of the above methods, the proportion of perovskite was low, which was not preferable. (Objective of the Invention) An object of the present invention is to provide a method capable of solving the problems of the dry method and coprecipitation method and producing a raw material powder of a perovskite capacitor material having a desired composition. More specifically, it satisfies easy sinterability, uniformity, and low cost, and has a perovskite ratio close to 100%.
The object of the present invention is to provide a method that can efficiently produce a raw material powder for a perovskite capacitor material that can quantitatively contain components such as Mg component and Zn component. (Technical Means for Solving the Problems) The inventors of the present invention have conducted intensive research to achieve the above-mentioned object, and as a result, have arrived at the present invention. The present invention is based on the general formula Pb 1 - X A Indicates at least one type of Zn, x = 0.01 to 0.50, y = 0.50
It has a value of ~1.0. ) When producing raw material powder of perovskite and its solid solution represented by
After preparing the powder of the Nb-O-based composite oxide in advance, (1) the powder of the B-Nb-O-based composite oxide is dispersed in the liquid phase, and then the solution of the remaining component compounds is brought into contact with the precipitation forming solution. or (2) bring the solution of the remaining component compound into contact with the precipitate forming solution to form a precipitate, which is then combined with B-Nb-O.
A low-temperature sinterable perovskite characterized by preparing a mixture of a B-Nb-O-based composite oxide and a precipitate of the remaining components by mixing powders of the B-Nb-O-based composite oxide, and calcining the mixture. The present invention relates to a method for producing raw material powder for type capacitor materials. In the present invention, the term "solution" refers to a solution in which soluble substances are dissolved or a suspension in which insoluble substances are dispersed. A of the perovskite and its solid solution represented by the general formula Pb 1-X A X (B 1/3 Nb 2/3 ) y Ti 1-y O 3 in the present invention
The component is at least one of Ba, Sr and Ca, the B component is at least one of Mg and Zn, and the Pb 1-x A x component and (B 1/3 Nb 2/3 ) y Ti The atomic ratio of the 1-y component is usually 1.0, but nonstoichiometric perovskites in which this atomic ratio is shifted to a value higher or lower than 1.0 are also included. In addition, x and y in the above general formula are x=0.01~
0.50, y=0.50 to 1.0, and if it deviates from this range, it will cause problems in terms of characteristics, so it is not preferable. The B-Nb-O composite oxide of the present invention can be produced by mixing the oxide powder of the B component and niobium oxide powder using an oxide solid phase method, and calcining the mixture, or by using a semi-wet method in a liquid phase. Either niobium oxide powder or niobium hydroxide is suspended in the liquid phase, and a solution of nitrate, chloride, etc. of component B is brought into contact with a precipitate forming liquid to form a precipitate, or the oxide powder of component B is suspended in the liquid phase. A precipitate is formed by suspending and contacting a niobium chloride solution with a precipitate-forming liquid, or by adding niobium hydroxide, and then calcining the obtained precipitate, or by a wet method. A solution of a soluble substance of Nb and a precipitate forming solution are brought into contact to form a precipitate,
It is prepared by calcining this. Examples of the precipitate-forming liquid include solutions of ammonia, ammonium carbonate, ammonium oxalate, caustic alkali, and the like. In any of the oxide solid phase method, semi-wet method, and wet method, calcination is performed in air at a temperature of 500 to 1300°C. Using the B--Nb--O composite oxide powder thus obtained, a composition represented by the above general formula can be obtained by the following method. (1) Disperse B-Nb-O composite oxide powder in a liquid phase containing a precipitant, and add Pb while stirring.
Components, solutions of Ba component and Ti component are dropped,
to form those precipitates or B-
Dispersing Nb-O composite oxide powder in the liquid phase,
Next, at the same time as or after dropping the solution of the Pb component, Ba component, and Ti component, a precipitate is added to form a precipitate, or (2) the solution of the Pb component, Ba component, and Ti component is precipitated. These precipitates are formed by contacting with the forming liquid, and then the precipitates and the B--Nb--O complex oxide powder are mixed in a dry or wet manner. The mixture of the precipitates of Pb, Ba and Ti components and the B-Nb-O complex oxide obtained by these methods is washed with water etc. by a normal washing method such as a decanting method. , Separately, after drying, calcining. The raw materials used in the precipitation reaction are not particularly limited as long as they are soluble, such as inorganic salts such as hydroxides, carbonates, oxysalts, sulfates, nitrates, and chlorides, acetates, and oxalic acids. It is appropriately selected from organic acid salts such as salts, oxides, etc. These are generally used as an aqueous solution, but if they are not soluble in water, they can be made soluble by adding an acid, and insoluble raw materials may be used as a suspension solution. Precipitation forming liquids include ammonia, ammonium carbonate, ammonium oxalate, caustic alkali,
Examples include solutions such as: If the calcination temperature is too low, the dehydration and thermal decomposition of the precipitate will be insufficient, and if it is too high, the powder will become coarse.
A range of 1000°C is preferred. (Example) The present invention will be explained in more detail by showing Examples and Comparative Examples below. In addition, characteristic evaluation in Examples was performed by the following method.・Powder particle size: Transmission electron microscope ・Perovskite ratio: From the peak intensity of the (110) plane of perovskite in X-ray diffraction I perp and the peak intensity of the (222) plane of virochlore I pyrp Perovskite ratio = I perp /I pyrp +I perp ×100 ・Density: Archimedes method ・Electrical characteristics: LCR meter (1KHz) Example 1 Pb 0.9 Ba 0.1 (Zn 1/3 Nb 2/3 ) 0.1 (Mg 1/3 Nb 2/3 ) 0.8 Ti 0 .
1
O3 zinc oxide (ZnO) 0.0033 mol and magnesium acetate (MgO) 0.027 mol and niobium hydroxide [Nb(OH)
5 ] 0.060 mol was added to 50 ml of water, and the slurry was ball milled using zirconia balls for 10 hours. The slurry was dried and solidified using a dryer, ground in a mortar, and then fired at 1000°C. The obtained Zn-Mg-Nb-O composite oxide was
- Titanium tetrachloride ( TiCl 4 ) A solution of 0.01 mol dissolved in 200 ml of water was added dropwise to form a precipitate. Let this precipitate-containing liquid stand still, remove the supernatant liquid, and add fresh water.
After adding 2,000 ml and thoroughly stirring, the mixture was allowed to stand again and the supernatant liquid was removed. The decanting operation was repeated three times, and finally a precipitate was obtained separately. Next, the precipitate was dried in a drier and then calcined in an electric furnace at 800°C for 2 hours. The obtained powder was ball milled in the presence of ethanol, and part of the powder was observed using a transmission electron microscope, and the particle size was uniform at about 0.4 μm. Furthermore, when the percentage of perovskite structure was investigated by X-ray diffraction, it was found to be 99%. 0.8% by weight of polyvinyl alcohol in the above powder
The density of the sintered body was 99% of the theoretical density as a result of adding it and molding it at 1 t/cm 2 and sintering it at 950°C for 10 hours. Furthermore, when the electrical properties were measured at room temperature,
The dielectric constant was 14,500 and the dielectric loss (tan δ) was 0.8%. Examples 2 to 7 Products having the compositions shown in Table 1 were manufactured by the same method as in Example 1, and their electrical properties were measured. The results are shown in Table 2. Comparative example 1 Pb 0.9 Ba 0.1 (Zn 1/3 Nb 2/3 ) 0.1 (Mg 1/3 Nb 2/3 ) 0.8 Ti 0.
1
O3 lead oxide (PbO), barium carbonate ( BaCO3 ), zinc oxide (ZnO), magnesium oxide ( MgO ), niobium oxide ( Nb2O5 ) and titanium oxide ( TiO2 )
were weighed to have the above composition, thoroughly mixed in a ball mill, and then calcined at 800°C for 2 hours. The particle size of the obtained powder was 0.5 to 5 μm with a wide distribution. After adding 0.8% by weight of polyvinyl alcohol to this powder and molding it at 1 t/cm 2 , it was sintered at 950°C for 10 hours. The density of the sintered body was 94% of the theoretical density, and the electrical properties were a dielectric constant of 8100 and a tan δ of 85.2%.
【表】【table】
Claims (1)
し、AはBa、SrおよびCaのうちの少なくとも一
種を示し、BはMgおよびZnのうちの少なくとも
一種を示し、x=0.01〜0.50、y=0.50〜1.0の値
である。)で表される複合ペロブスカイト型構造
化合物(以下ペロブスカイトという)およびその
固溶体の原料粉末の製造に際し、B−Nb−O系
複合酸化物の粉末を予め調製した後、 (1) 液相にB−Nb−O系複合酸化物の粉末を分
散させ、次いで残りの成分の化合物の溶液を沈
澱形成液と接触させて沈澱を生成させるか、 あるいは、 (2) 残りの成分の化合物の溶液を沈澱形成液と接
触させて沈澱を生成させ、これとB−Nb−O
系複合酸化物の粉末を混合することにより、 B−Nb−O系複合酸化物と残りの成分の沈
澱物との混合物を調製し、これを仮焼すること
を特徴とする低温焼結性ペロブスカイト型コン
デンサー材料の原料粉末の製造方法。 [ Claims ] 1 General formula Pb 1 -X A B represents at least one of Mg and Zn, and the values are x = 0.01 to 0.50, y = 0.50 to 1.0. In the production of B-Nb-O complex oxide powder is prepared in advance, (1) the B-Nb-O complex oxide powder is dispersed in the liquid phase, and then a solution of the remaining component compounds is added. (2) Contact a solution of the remaining component compound with a precipitate forming solution to form a precipitate, and then combine this with B-Nb-O.
A low-temperature sinterable perovskite characterized by preparing a mixture of a B-Nb-O-based composite oxide and a precipitate of the remaining components by mixing powders of the B-Nb-O-based composite oxide, and calcining the mixture. A method for producing raw material powder for type capacitor materials.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62226543A JPS6469522A (en) | 1987-09-11 | 1987-09-11 | Low-temperature perovskite-type capacitor material |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62226543A JPS6469522A (en) | 1987-09-11 | 1987-09-11 | Low-temperature perovskite-type capacitor material |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6469522A JPS6469522A (en) | 1989-03-15 |
| JPH0457615B2 true JPH0457615B2 (en) | 1992-09-14 |
Family
ID=16846798
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62226543A Granted JPS6469522A (en) | 1987-09-11 | 1987-09-11 | Low-temperature perovskite-type capacitor material |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6469522A (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3098763B2 (en) * | 1990-07-03 | 2000-10-16 | 松下電器産業株式会社 | Dielectric resonator |
| WO2021025144A1 (en) * | 2019-08-08 | 2021-02-11 | 三井金属鉱業株式会社 | Niobic acid compound sol, sol coating film, and film-holding substrate |
| CN115157735B (en) * | 2022-08-12 | 2023-04-25 | 华中科技大学鄂州工业技术研究院 | Preparation method of composite thick film |
-
1987
- 1987-09-11 JP JP62226543A patent/JPS6469522A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6469522A (en) | 1989-03-15 |
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