JPH0460070B2 - - Google Patents
Info
- Publication number
- JPH0460070B2 JPH0460070B2 JP60298091A JP29809185A JPH0460070B2 JP H0460070 B2 JPH0460070 B2 JP H0460070B2 JP 60298091 A JP60298091 A JP 60298091A JP 29809185 A JP29809185 A JP 29809185A JP H0460070 B2 JPH0460070 B2 JP H0460070B2
- Authority
- JP
- Japan
- Prior art keywords
- heating element
- ceramic
- layer
- sintering
- oxide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Resistance Heating (AREA)
- Compositions Of Oxide Ceramics (AREA)
Description
〔産業上の利用分野〕
本発明は、強度と硬さが大で、耐摩耗性と耐食
性に優れた酸化物系セラミツクからなる発熱素子
に関する。
〔従来の技術〕
従来から、発熱体として、ニクロムやカンタル
合金等の金属発熱体と炭化珪素、ランタンクロマ
イト（LaCrO3）を主体とするセラミツク発熱体
が知られている。
前者の金属発熱体は、その耐熱性の点から高温
発熱体として使用できず、専ら高温発熱用の抵抗
体としては炭化珪素、ランタンクロマイトを主体
とするセラミツク発熱体が使用されている。
しかしながら、かかるセラミツク発熱体は比較
的熱衝撃に弱く金属結線との接合性に劣る欠点が
ある。さらには、上記セラミツク発熱体は比抵抗
が高いため低電圧では使用が困難であるといつた
問題がある。
この対応のため、本願出願人は熱衝撃に強いア
ルミナ質セラミツクに着目し、これに導電付与剤
としてMo2Ｃ，ZrC，NbC，TaC，WC，Cr2C3
等の炭化物を添加して比抵抗を改善した発熱体を
特開昭60−127260号において開示した。
〔発明が解決しようとする問題点〕
しかしながら、かかる酸化物系セラミツク発熱
体の端子部は、電極との接合性が不十分であるた
め、電極と発熱体との接触抵抗が増加し、導通不
良あるいは接合部の異常発熱を起こす場合があ
り、導電付与剤として添加した炭化物が酸化しや
すいこともあつて耐酸化性にも問題があり、発熱
体自体の寿命を低下させる要因となつていた。
本発明において解決すべき課題は、かかる酸化
物系セラミツク発熱素子としての接合部の改善と
ともに、耐熱、耐酸化性を向上せしめ、且つ低電
圧でも使用可能な酸化物系セラミツク発熱体を安
定した発熱素子として使用を確立することにあ
る。
〔問題点を解決するための手段〕
本発明は、絶縁セラミツクスである酸化物系セ
ラミツク焼結体は、導電付与剤である炭化物、窒
化物、硼化物又はそれらの複合物の添加を制御す
ることによつて比抵抗の制御が可能であり、且つ
かかる発熱体は焼結後端子部に金属化処理しても
発熱体本体の比抵抗に何等悪影響を与えることな
く、接触抵抗変化がない発熱素子が得られるとい
う知見に基づくものである。
すなわち、本発明は、発熱体本体が周期律表の
ａ，ａ，ａ族の炭化物、窒化物、硼化物及
びそれらの複合物からなる群の中から選択した少
なくとも１種を15.0〜40.0容量％含有する酸化物
系セラミツクの焼結体からなり、且つ、発熱体本
体の端部に金属化した端子部を有するセラミツク
発熱素子において、この金属化した端子部が
Ti：Cu：Mnが重量比で20〜70：20〜70：２〜20
からなる下地層の上にMoまたはNi層を設けたこ
とを特徴とする。
さらに、この金属化した端子がTi：Cu：Mnが
重量比で20〜70：20〜70：２〜20からなる下地層
の上に設けたMoまたはNi層の上には、さらに、
端子用金属をろう付けした構造とすることができ
る。
酸化物系セラミツクとしては、アルミナのみな
らず酸化ジルコニウム、酸化マグネシウム、酸化
クロム、酸化チタン等の単一酸化物や、ムライ
ト、ジルコン、スピネル等の複合酸化物が適用で
きる。
また、導電付与剤としては、周期律表のａ，
ａ，ａ族の炭化物、窒化物、硼化物又はそれ
らの複合物からなる群の中から選択した少なくと
も１種を、ヒーターの容量に応じて適宜含有せし
める。
これらの導電性付与成分の含有量が多くなるに
従つて電気比抵抗は小さくなる傾向となるが、難
焼結性の炭化物、窒化物、硼化物が多くなる程焼
結温度が高くなり、必然的に結晶粒径が粗大化し
強度が低下し、かつ粗大スポツトの発生率が大と
なるため好ましくない。
一方、導電性付与剤の含有量が少なすぎると、
焼結体である発熱体の比抵抗が大きくなりすぎて
１×10-3Ω・cmを超え発熱体としては不適とな
る。これらの導電性付与成分は15.0〜40.0容量％
の範囲に設定する必要がある。この範囲内でこれ
らの導電性付与成分を調整すれば、焼結体の比抵
抗を発熱体として任意に調整できる。
また、導電付与剤としては、同量の添加では炭
化物に比べて窒化物、硼化物又はそれらの複合物
を添加する方が比抵抗が低く、かつ耐熱、耐酸化
性に優れたセラミツク発熱素子を得ることができ
る。
また、かかるセラミツク発熱体は、上記導電付
与剤の配合によつて調整した比抵抗に何等影響を
与えることなく、端子部に金属化処理を施すこと
ができる。
金属化処理は、例えばTi，Cu及びMnとからな
る下地層とこの下地層の上にMo層あるいはNiの
メツキ層を形成せしめて金属化し、さらに、必要
に応じて金属化処理部に耐酸化導電材料、Ag，
Cu，Au等をメツキするか、又は金属化処理部に
セラミツクと熱膨張係数が近い組成のAg−Ｗ，
Ag−WC，Cu−Ｗをろう付けし、端子部を形成
する。
本発明の下地層として使用する金属化組成物
は、粉末状のチタンと銅とマンガンとを、それぞ
れ重量比で20〜70：20〜70：２〜20の割合で含有
してなるものである。
チタンとマンガンは、金属化処理中に酸化物と
なり、これがセラミツクスと反応して強固な接着
層を形成するチタンは、その配合比が少ないと反
応層の形成が少なくなり反応が遅くなるので、上
記の割合にする必要がある。
銅はそれ自体も酸化物となりセラミツクスとの
反応に寄与するが、チタンとマンガンとを共存せ
しめることによつて組成物全体の融点を下げ、反
応を促進する作用を有し、そのためには上記の20
の配合比が必要である。
しかしながら、その配合比が増大すると、チタ
ンとマンガンの作用を低下せしめることになるの
で、上記重量比が70以下である必要がある。
マンガンの上記の少量範囲の配合は、チタンと
銅とによる接着層の強度を高くし、安定化する作
用を有する。
その理由は明確には解明できてはいないが、マ
ンガンの酸化反応がチタンの酸化反応との相乗効
果を生じることによると考えられる。マンガンの
配合重量比は上記の２未満ではその効果がなく、
また、20を超えるとチタンとの相乗効果が薄れ、
かえつて悪くなつてしまう。
本発明の発熱素子の本体発熱部の製造に際して
は、MgO他の公知の酸化物系の焼結助剤を添加
しても発熱体としての比抵抗値に何等影響を与え
ることなく、焼結を促進せしめとができる。また
かかる焼結助剤を含有せしめることによつて、発
熱素子として特に望ましい緻密で且つ均質な焼結
体を得ることができる。
本発明の発熱素子の製造に際しては、各種原料
粉末の平均粒径が3μm以下、好ましくは1.5μm以
下の粉末を所定量に配合し、ボールミル機により
粉砕混合した後、乾燥整粒して焼結性用原料を得
る。
また、炭化物、窒化物、硼化物及びそれらの複
合物の導電性付与成分は、焼結体中で平均粒径
3μm以下、より好ましくは1.5μm以下の粒子とし
て均一に分散し、かつ少なくともネツト構造を形
成する量配合することにより導電性が得られ、導
電性付与成分としての効果を発揮する。
焼結に際しては、非酸化性雰囲気で圧力10Kg／
cm2以下で焼結する方法、非酸化性雰囲気中で対理
論密度95％以上に予備焼結した後ホツトアイソス
タテイツクプレス（以下HIPという）法、100〜
300Kg／cm2の加圧力の下でホツトプレス焼結する
方法等、任意の焼結法が適用できるが、いずれに
しろ、対理論密度を98.5％以上好ましくは99.0％
以上に緻密化焼結する必要がある。
さらに、本発明の発熱素子は耐熱衝撃性と共に
高い機械的強度を有するために、薄板状の発熱素
子としても使用することができる。この薄板状の
形状を有する発熱体素子の成形焼結はドクターブ
レード法により製造したシートを所定寸法にカツ
トした後、望みの形状に加工したまま緻密焼結す
る方法やスリツプキヤステイング法により単純形
状及び湾曲形状や複雑形状にしたり、押出成形し
た丸棒又は角棒を所定形状にカツトして焼結する
ことにより製造することができる。
さらに本発明のセラミツク発熱素子は、発熱体
本体の端部に電極取付のために金属化処理を施し
て電極との電気的な接合を改善している。
この金属化処理のためにには種々の方法が適用
できるが、特にTi，Cu及びMnを必須成分とし
Ti：Cu：Mnをそれぞれ重量比で20〜70：20〜
70：２〜20の割合の配合物を発熱体本体の端部に
塗布してその上部にMoの薄板を置き、真空雰囲
気中で焼成して同時にセラミツク素子と結合さ
せ、さらにNiメツキ層を形成させる。さらに、
このままでは金属化処理部の酸化が発生する場合
があり、用途に応じては金属化処理部に耐酸化導
電材料、Ag，Cu，Au等をメツキするか良導電性
の金属板をろう付けするのが好ましい。
なお、上記の金属板はセラミツク発熱素子と熱
膨張率が近い成分のものが良く、具体的にはAg
−Ｗ，Ag−WC，Cu−Ｗ等をろう付けすれば、
熱膨張率の差異によるセラミツク発熱素子の割れ
を防止できる。
〔実施例〕
純度99.9％、平均粒子径0.5μmのＡ2O3と導電
性付与剤として平均粒子径2μm以下の周期律表
ａ，ａ，ａ族の炭化物、窒化物、硼化物、そ
れらの複合物と焼結助剤として純度99.9％で平均
粒子径が0.5μmのMgOとを所定量秤量し、第１
表に示す配合割合で湿式ボールミルにより20時間
粉砕混合した。この混合粉末を乾燥整粒して50×
50mm、高さ60mmの黒鉛型内に充填してそれぞれ最
適の焼結温度1350℃〜1800℃で100〜300Kg／cm2の
圧力を加え60分保持し、ついで圧力を除去し放冷
することにより対理論密度98.5％以上の50×50×
５mmの焼結体を得た。各々の焼結体をダイヤモン
ド砥石で切断研削してそれぞれの試験片を作成し
各種試験に供した。物性調査試料としては、ダイ
ヤモンド砥石による３×４×40mmの研削試片を用
い、また、発熱体素子としての試料は、0.5×３
×30mmの薄板上に切断研削加工し試験に供した。
これらの試験結果を第１表に示す。
表１に示す試料No.のうち、No.２〜No.15に示した
各種試料に相当する材料から、５×1.0×50mmの
板状に切削加工し、端子部はTi：Cu：Mnが重量
比で45：45：10の混合物ペーストを塗布し乾燥さ
せその上に0.5mm厚さのMo板を置き、10-4mmHg
の真空中で1300℃で30分間保持して端部を金属化
した。次にMo層の上部に厚さ10μmのNiメツキ
を施した。さらにその上部に厚さ１mmのAg−Ｗ
をろう付けし端子を形成した。
これらの発熱素子を12Vの電圧で昇温した結果
いずれも10秒間以内で500℃以上に達した。
これらを樹脂切断用ヒータとして使用した結
果、金属ヒータと比べて溶融樹脂による腐食もな
く、いずれも３倍以上の長寿命を示し、また消費
電力も40％以下であつた。
[Industrial Field of Application] The present invention relates to a heating element made of oxide ceramic which has high strength and hardness, and has excellent wear resistance and corrosion resistance. [Prior Art] Metal heating elements such as nichrome and kanthal alloys and ceramic heating elements mainly made of silicon carbide and lanthanum chromite (LaCrO 3 ) have been known as heating elements. The former metal heating element cannot be used as a high-temperature heating element due to its heat resistance, and ceramic heating elements mainly made of silicon carbide or lanthanum chromite are used exclusively as resistors for high-temperature heating. However, such ceramic heating elements have the drawback of being relatively weak against thermal shock and having poor bondability with metal wires. Furthermore, the ceramic heating element has a high specific resistance, making it difficult to use at low voltages. To address this issue, the applicant focused on alumina ceramic, which is resistant to thermal shock, and added Mo 2 C, ZrC, NbC, TaC, WC, Cr 2 C 3 as conductive agents to this alumina ceramic.
JP-A-60-127260 discloses a heating element whose specific resistance has been improved by adding carbides such as [Problems to be Solved by the Invention] However, since the terminal portion of such an oxide-based ceramic heating element has insufficient bonding properties with the electrode, the contact resistance between the electrode and the heating element increases, resulting in poor conduction. Alternatively, abnormal heat generation may occur at the joint, and the carbide added as a conductivity imparting agent is likely to oxidize, resulting in a problem in oxidation resistance, which is a factor that shortens the life of the heating element itself. The problem to be solved by the present invention is to improve the joints of such oxide-based ceramic heating elements, improve heat resistance and oxidation resistance, and make oxide-based ceramic heating elements capable of stable heat generation that can be used even at low voltages. The goal is to establish its use as a device. [Means for Solving the Problems] The present invention provides an oxide ceramic sintered body, which is an insulating ceramic, by controlling the addition of carbide, nitride, boride, or a composite thereof as a conductivity imparting agent. It is possible to control the specific resistance by the heating element, and even if the terminal portion of such a heating element is metallized after sintering, there is no adverse effect on the specific resistance of the heating element body, and there is no change in contact resistance. This is based on the knowledge that the following can be obtained. That is, in the present invention, the main body of the heating element contains 15.0 to 40.0% by volume of at least one selected from the group consisting of carbides, nitrides, borides, and composites thereof belonging to groups a, a, and a of the periodic table. In a ceramic heating element which is made of a sintered body of oxide-based ceramic and has a metalized terminal part at the end of the heating element body, the metalized terminal part is
Ti:Cu:Mn weight ratio is 20~70:20~70:2~20
The feature is that a Mo or Ni layer is provided on the base layer consisting of. Furthermore, this metalized terminal is further placed on a Mo or Ni layer provided on a base layer consisting of Ti:Cu:Mn in a weight ratio of 20 to 70:20 to 70:2 to 20.
It can have a structure in which the terminal metal is brazed. As the oxide ceramic, not only alumina but also single oxides such as zirconium oxide, magnesium oxide, chromium oxide, and titanium oxide, and complex oxides such as mullite, zircon, and spinel can be used. In addition, as a conductive agent, a of the periodic table,
At least one selected from the group consisting of carbides, nitrides, borides, or composites thereof of groups A and A is appropriately contained depending on the capacity of the heater. As the content of these conductivity-imparting components increases, the electrical resistivity tends to decrease, but as the amount of carbides, nitrides, and borides that are difficult to sinter increases, the sintering temperature increases, resulting in This is not preferable because the crystal grain size becomes coarse, the strength decreases, and the incidence of coarse spots increases. On the other hand, if the content of the conductivity imparting agent is too small,
The specific resistance of the heating element, which is a sintered body, becomes too large, exceeding 1×10 -3 Ω·cm, making it unsuitable as a heating element. These conductivity-imparting components are 15.0 to 40.0% by volume
It is necessary to set it within the range of . By adjusting these conductivity-imparting components within this range, the specific resistance of the sintered body can be arbitrarily adjusted as a heating element. In addition, when adding the same amount of conductive agents, nitrides, borides, or their composites have lower specific resistance than carbides, and ceramic heating elements have excellent heat resistance and oxidation resistance. Obtainable. Furthermore, the terminal portion of such a ceramic heating element can be subjected to metallization treatment without affecting the specific resistance adjusted by the combination of the conductivity imparting agent. The metallization treatment is performed by forming a base layer made of Ti, Cu, and Mn, and a plating layer of Mo or Ni on the base layer, and then adding oxidation-resistant coating to the metallized part as necessary. Conductive material, Ag,
Plating with Cu, Au, etc., or using Ag-W with a composition similar to that of ceramic in the metallized part,
Braze Ag-WC and Cu-W to form a terminal part. The metallized composition used as the underlayer of the present invention contains powdered titanium, copper, and manganese in a weight ratio of 20 to 70:20 to 70:2 to 20, respectively. . Titanium and manganese become oxides during the metallization process, and this reacts with ceramics to form a strong adhesive layer.If the mixing ratio of titanium is small, the formation of a reaction layer will be small and the reaction will be slow. It is necessary to make the ratio of Copper itself becomes an oxide and contributes to the reaction with ceramics, but by coexisting titanium and manganese, it has the effect of lowering the melting point of the entire composition and promoting the reaction. 20
A mixing ratio of However, if the blending ratio increases, the effects of titanium and manganese will be reduced, so the weight ratio needs to be 70 or less. The addition of manganese in the above-mentioned small amount has the effect of increasing and stabilizing the strength of the adhesive layer made of titanium and copper. Although the reason for this has not been clearly elucidated, it is thought that the oxidation reaction of manganese produces a synergistic effect with the oxidation reaction of titanium. If the weight ratio of manganese is less than 2, it will not have this effect.
Also, if it exceeds 20, the synergistic effect with titanium will weaken,
Instead, it gets worse. When manufacturing the heat generating part of the main body of the heat generating element of the present invention, even if MgO or other known oxide-based sintering aids are added, sintering can be carried out without affecting the resistivity value of the heat generating element in any way. It can be promoted. Furthermore, by including such a sintering aid, a dense and homogeneous sintered body that is particularly desirable as a heat generating element can be obtained. When manufacturing the heating element of the present invention, various raw material powders with an average particle size of 3 μm or less, preferably 1.5 μm or less are blended in a predetermined amount, pulverized and mixed in a ball mill, dried, sized, and sintered. Obtain raw materials for sex. In addition, the conductivity-imparting components of carbides, nitrides, borides, and their composites have an average particle size in the sintered body.
Conductivity can be obtained by blending in an amount that is uniformly dispersed as particles of 3 μm or less, more preferably 1.5 μm or less, and forms at least a net structure, and exhibits its effect as a conductivity-imparting component. During sintering, the pressure is 10kg/in a non-oxidizing atmosphere.
A method of sintering at less than cm 2 , a hot isostatic press (hereinafter referred to as HIP) method after preliminary sintering to a theoretical density of 95% or more in a non-oxidizing atmosphere, 100 ~
Any sintering method can be applied, such as hot press sintering under a pressure of 300 kg/ cm2 , but in any case, the theoretical density should be 98.5% or more, preferably 99.0%.
It is necessary to perform densification and sintering to a higher degree. Furthermore, since the heating element of the present invention has high mechanical strength as well as thermal shock resistance, it can also be used as a thin plate-shaped heating element. The shaping and sintering of this thin plate-like heating element is performed by cutting a sheet produced by the doctor blade method into a predetermined size and then densely sintering it while processing it into the desired shape, or by slip casting method. It can also be manufactured into a curved shape or a complicated shape, or by cutting an extruded round or square bar into a predetermined shape and sintering it. Further, in the ceramic heating element of the present invention, the ends of the heating element body are metallized for attachment of electrodes to improve electrical connection with the electrodes. Various methods can be applied for this metallization treatment, but in particular, methods that include Ti, Cu, and Mn as essential components.
Ti:Cu:Mn weight ratio: 20~70:20~
A mixture with a ratio of 70:2 to 20 is applied to the end of the heating element body, a Mo thin plate is placed on top of it, and it is fired in a vacuum atmosphere to simultaneously bond with the ceramic element and further form a Ni plating layer. let moreover,
If this continues, oxidation may occur in the metallized part, so depending on the application, plate the metallized part with an oxidation-resistant conductive material such as Ag, Cu, or Au, or braze it with a highly conductive metal plate. is preferable. The metal plate mentioned above should preferably be made of a material with a coefficient of thermal expansion close to that of the ceramic heating element, specifically Ag.
If you braze -W, Ag-WC, Cu-W, etc.,
It is possible to prevent cracks in the ceramic heating element due to differences in thermal expansion coefficients. [Example] A 2 O 3 with a purity of 99.9% and an average particle size of 0.5 μm, and carbides, nitrides, and borides of groups a, a, and a of the periodic table with an average particle size of 2 μm or less as a conductivity imparting agent. A predetermined amount of the composite and MgO with a purity of 99.9% and an average particle size of 0.5 μm as a sintering aid was weighed, and the first
The mixture was pulverized and mixed for 20 hours using a wet ball mill at the mixing ratio shown in the table. Dry and size this mixed powder and
By filling it into a graphite mold of 50 mm and height 60 mm, applying a pressure of 100 to 300 kg/cm 2 at the optimal sintering temperature of 1350°C to 1800°C and holding it for 60 minutes, then removing the pressure and allowing it to cool. 50×50× with theoretical density of 98.5% or more
A sintered body of 5 mm was obtained. Each sintered body was cut and ground using a diamond grindstone to prepare each test piece, which was subjected to various tests. A specimen of 3 x 4 x 40 mm ground with a diamond grinding wheel was used as a sample for physical property investigation, and a sample of 0.5 x 3 mm was used as a heating element element.
A thin plate of 30 mm was cut and ground for testing. The results of these tests are shown in Table 1. Among the sample numbers shown in Table 1, materials corresponding to various samples shown in No. 2 to No. 15 were cut into a plate shape of 5 x 1.0 x 50 mm, and the terminal part was made of Ti:Cu:Mn. Apply a paste mixture with a weight ratio of 45:45:10, dry it, place a 0.5mm thick Mo plate on top, and apply a 10 -4 mmHg mixture.
The ends were metallized by holding at 1300°C in a vacuum for 30 minutes. Next, Ni plating with a thickness of 10 μm was applied to the top of the Mo layer. Furthermore, 1mm thick Ag-W is placed on top of it.
The terminals were formed by brazing. When these heating elements were heated with a voltage of 12V, they all reached over 500℃ within 10 seconds. When these were used as heaters for cutting resin, they were free from corrosion due to molten resin compared to metal heaters, had a lifespan more than three times longer, and consumed less than 40% of the power.
【表】
さらに、第１表に示す試料No.５を選択して、下
地を変化させたときの特性を、下地層を形成しな
い場合と、下地層の組成が本発明の範囲を逸脱す
る場合の比較例と共に、第２表に示す。[Table] Furthermore, we selected sample No. 5 shown in Table 1 and compared the characteristics when the base layer was changed, when no base layer was formed, and when the composition of the base layer was outside the scope of the present invention. The results are shown in Table 2 along with comparative examples.
本発明の発熱素子は、強度、耐熱、耐酸化、耐
食性に優れ、比抵抗が比較的低く低電圧での使用
も可能である。また、端子接続部の接合性は極め
て良好で、金属発熱素子並の低い安定した接触抵
抗値を有する。
従つて、本発明に係る発熱素子は、熱風発生機
用ヒータ、車用の各種発熱体素子、加熱炉用ヒー
タ、樹脂加工用ヒータ、繊維加工用ヒータ、OA
機用等、あらゆる分野の発熱素子として好適に使
用できる。
The heating element of the present invention has excellent strength, heat resistance, oxidation resistance, and corrosion resistance, has a relatively low specific resistance, and can be used at low voltage. Furthermore, the bondability of the terminal connection portion is extremely good, and the contact resistance value is as low and stable as that of a metal heating element. Therefore, the heating element according to the present invention can be used in heaters for hot air generators, various heating element elements for cars, heaters for heating furnaces, heaters for resin processing, heaters for textile processing, and OA heaters.
It can be suitably used as a heating element in all fields such as machine use.
Claims (1)
の炭化物、窒化物、硼化物及びそれらの複合物か
らなる群の中から選択した少なくとも１種を15.0
〜40.0容量％含有する酸化物系セラミツクの焼結
体からなり、同発熱体本体の端部に金属化した端
子部を有するセラミツク発熱素子において、前記
金属化した端子部がTi：Cu：Mnが重量比で20〜
70：20〜70：２〜20からなる下地層の上にMoま
たはNi層を設けた金属化層からなるセラミツク
発熱素子。 ２ 発熱体本体が周期律表のａ，ａ，ａ族
の炭化物、窒化物、硼化物及びそれらの複合物か
らなる群の中から選択した少なくとも１種を15.0
〜40.0容量％含有する酸化物系セラミツクの焼結
体からなり、同発熱体本体の端部に金属化した端
子部を有するセラミツク発熱素子において、前記
金属化した端子部がTi：Cu：Mnが重量比で20〜
70：20〜70：２〜20からなる下地層の上にMoま
たはNi層を設けた金属化層の上に、端子用金属
をろう付けしてなる金属化層からなるセラミツク
発熱素子。[Scope of Claims] 1. The main body of the heating element is made of at least one member selected from the group consisting of carbides, nitrides, borides, and composites thereof belonging to groups a, a, and a of the periodic table.
In a ceramic heating element which is made of a sintered body of oxide ceramic containing ~40.0% by volume and has a metalized terminal part at the end of the heating element body, the metalized terminal part has Ti:Cu:Mn. 20~ in weight ratio
A ceramic heating element consisting of a metallized layer with a Mo or Ni layer provided on a base layer consisting of 70:20 to 70:2 to 20. 2. The main body of the heating element is made of at least one member selected from the group consisting of carbides, nitrides, borides, and composites of groups A, A, and A of the periodic table.
In a ceramic heating element which is made of a sintered body of oxide ceramic containing ~40.0% by volume and has a metalized terminal part at the end of the heating element body, the metalized terminal part has Ti:Cu:Mn. 20~ in weight ratio
70:20~70:2~20 A ceramic heating element comprising a metallized layer formed by brazing terminal metal onto a metallized layer comprising a Mo or Ni layer on a base layer of 70:20 to 70:2 to 20.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60298091A JPS62158161A (en) | 1985-12-28 | 1985-12-28 | ceramic heating element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60298091A JPS62158161A (en) | 1985-12-28 | 1985-12-28 | ceramic heating element |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62158161A JPS62158161A (en) | 1987-07-14 |
| JPH0460070B2 true JPH0460070B2 (en) | 1992-09-25 |
Family
ID=17855045
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60298091A Granted JPS62158161A (en) | 1985-12-28 | 1985-12-28 | ceramic heating element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62158161A (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01132078A (en) * | 1987-11-18 | 1989-05-24 | Yazaki Corp | Electrode for heat pressure welding |
| JP2002226269A (en) * | 2001-01-30 | 2002-08-14 | Wicera Co Ltd | Conductive ceramic and its manufacturing method |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54101812A (en) * | 1978-01-27 | 1979-08-10 | Sumitomo Electric Industries | Heat generating ceramics |
| JPS5978973A (en) * | 1982-10-27 | 1984-05-08 | 株式会社日立製作所 | conductive ceramics |
| JPS5991684A (en) * | 1982-11-16 | 1984-05-26 | 松下電工株式会社 | Method of formng electrode of ceramic heater |
-
1985
- 1985-12-28 JP JP60298091A patent/JPS62158161A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62158161A (en) | 1987-07-14 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4912305A (en) | Silicon nitride base ceramic heater element and method of producing same | |
| US4613455A (en) | Ceramic heater and a method for its production | |
| CN106376107B (en) | High-power silicon nitride ceramic heating plate and manufacturing method of high-power silicon nitride ceramic heating plate with soft inside and hard outside | |
| EP0170864B1 (en) | Zrb2 composite sintered material | |
| JP2001064080A (en) | Silicon nitride sintered body and its production | |
| JPS5991685A (en) | Ceramic heater | |
| JP2675971B2 (en) | Tempered glass ceramic substrate for semiconductor | |
| JPH0460070B2 (en) | ||
| JPS6033265A (en) | Silicon carbide electroconductive ceramics | |
| CN104370554B (en) | A kind of silicon nitride composite ceramics heater material and preparation method thereof | |
| JPH0546674B2 (en) | ||
| US2848586A (en) | Non-metallic electrical heating elements | |
| CN114315367B (en) | Titanium diboride-boron carbide-titanium carbide composite ceramic material and hot-pressing preparation method thereof | |
| JP3716045B2 (en) | Ceramic heater | |
| JP3740544B2 (en) | Silicon carbide based heating element | |
| JP2537606B2 (en) | Ceramic Heater | |
| JP2534847B2 (en) | Ceramic Heater | |
| JPH1112039A (en) | Manufacturing method of aluminum nitride based sintered body for high heat dissipation lid | |
| CN113170926A (en) | Integrally conductive aerosol generation substrate heating body and preparation process and application thereof | |
| JPS61286268A (en) | Electroconductively variable zrb2 base composite sintered body | |
| JP2505833B2 (en) | Conductive ceramics | |
| JPS6256545A (en) | Zrb2-cu type sintered body | |
| JP2564857B2 (en) | Nickel-Morbuden compound boride sintered body | |
| JP2004026517A (en) | Silicon carbide conductive sintered body and method for producing the same | |
| JPS63144170A (en) | Silicon nitirde titanium nitirde base composite electroconductive materail |