JPH0460212B2 - - Google Patents
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- Publication number
- JPH0460212B2 JPH0460212B2 JP18803584A JP18803584A JPH0460212B2 JP H0460212 B2 JPH0460212 B2 JP H0460212B2 JP 18803584 A JP18803584 A JP 18803584A JP 18803584 A JP18803584 A JP 18803584A JP H0460212 B2 JPH0460212 B2 JP H0460212B2
- Authority
- JP
- Japan
- Prior art keywords
- filter film
- inspected
- angle
- light
- wavelength
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
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- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Testing Of Optical Devices Or Fibers (AREA)
- Optical Filters (AREA)
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、光学系に於けるフイルタ膜を、基準
フイルタ膜をもとに検査するフイルタ膜検査装置
に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a filter film inspection device for inspecting a filter film in an optical system based on a reference filter film.
光通信システムや各種の光学系に於いては、特
定波長帯の光のみ抽出する為のバンドパスフイル
タや、特定波長以下の波長の光のみ透過させるロ
ーパスフイルタ等の各種の光学フイルタが用いら
れている。このような各種の光学フイルタの検査
は、従来分光器等を用いた可変波長光源からの光
を被検査フイルタ膜に入射させ、波長をスイープ
させて、フイルタ膜の波長特性を検査するもので
あつた。
In optical communication systems and various optical systems, various optical filters are used, such as bandpass filters that extract only light in a specific wavelength band and low-pass filters that only transmit light with wavelengths below a specific wavelength. There is. Inspection of these various optical filters has conventionally been carried out by using a spectroscope or the like to make light from a variable wavelength light source enter the filter film to be inspected, sweep the wavelength, and inspect the wavelength characteristics of the filter film. Ta.
第３図は従来のフイルタ膜の検査装置の説明図
であり、分光器１０から前述のように順次異なる
波長の光を出力し、その光をレンズ１１により平
行光線として被検査フイルタ膜１２に入射させ、
被検査フイルタ膜１２の透過光を光検出部１３に
より検出して、表示又は記録等の処理を行う検出
処理部１４にその検出出力を加えて、波長特性を
測定するものであつた。 FIG. 3 is an explanatory diagram of a conventional filter film inspection device, in which a spectroscope 10 sequentially outputs light of different wavelengths as described above, and the light is converted into parallel light by a lens 11 and enters a filter film 12 to be inspected. let me,
The light transmitted through the filter film 12 to be inspected was detected by a photodetector 13, and the detected output was applied to a detection processing section 14 that performed processing such as display or recording to measure wavelength characteristics.
被検査フイルタ膜１２によつてバンドパスフイ
ルタを構成している場合に、分光器１０からλ1〜
λ2の波長範囲で出力光を変化させ、光検出部１３
の検出出力を記録した時、例えば、第４図に示す
波長特性が得られることになる。この波長特性か
ら中心波長λ0及び波長帯域幅が許容範囲内のもの
であるか否か検査することになる。 When a bandpass filter is configured by the filter film 12 to be inspected, λ 1 to
The output light is changed in the wavelength range of λ 2 , and the photodetector 13
When the detection output of is recorded, for example, the wavelength characteristics shown in FIG. 4 will be obtained. From this wavelength characteristic, it is inspected whether the center wavelength λ 0 and the wavelength bandwidth are within the allowable range.
被検査フイルタ膜１２を透過して光検出部１３
に入射される光は、通常は非常に微弱なものとな
るから、この微弱光に対する光検出部１３の応答
速度が遅くなり、その為に分光器１０による波長
のスイープを高速化できないものであつた。又被
検査フイルタ膜１２の波長特性を正確に測定する
為には、数nmの波長毎に測定点を設定すること
になり、例えば、100点程度の測定点を必要とす
るものであつた。このように波長スイープを低速
で行うと共に測定点が多いことによつて、一つの
フイルタ膜に対する検査時間が長くなる欠点があ
つた。又分光器１０は高価であるから、検査装置
全体が高価となる欠点があつた。
The light passes through the filter film 12 to be inspected and the light detecting section 13
Since the incident light is usually very weak, the response speed of the photodetector 13 to this weak light is slow, and therefore the wavelength sweep by the spectrometer 10 cannot be made faster. Ta. In addition, in order to accurately measure the wavelength characteristics of the filter film 12 to be inspected, measurement points must be set for every wavelength of several nanometers, and for example, about 100 measurement points are required. Since the wavelength sweep is performed at a low speed and there are many measurement points, there is a drawback that the inspection time for one filter film becomes long. Furthermore, since the spectrometer 10 is expensive, there is a drawback that the entire inspection device is expensive.
本発明は、廉価な構成で短時間に被検査フイル
タ膜の検査を可能とすることを目的とするもので
ある。 An object of the present invention is to enable inspection of a filter membrane to be inspected in a short time with an inexpensive configuration.
本発明のフイルタ膜検査装置は、白色光源と、
この白色光源からの白色光を入射させる基準フイ
ルタ膜と、この基準フイルタ膜を透過した光を入
射させる被検査フイルタ膜と、この被検査フイル
タ膜を透過した光を検出する光検出部と、前記基
準フイルタ膜又は前記被検査フイルタ膜の何れか
一方を入射光に対して角度を変化させその角度に
対応した前記光検出部の検出出力信号を測定する
手段とを備えているものである。
The filter film inspection device of the present invention includes a white light source,
a reference filter film into which the white light from the white light source enters; a test filter film into which the light transmitted through the reference filter film enters; a photodetector unit which detects the light transmitted through the test filter film; and means for changing the angle of either the reference filter film or the filter film to be inspected relative to the incident light and measuring the detection output signal of the photodetector corresponding to the angle.
フイルタ膜の波長特性が光の入射角度に依存す
るものであるから、基準フイルタ膜又は被検査フ
イルタ膜の何れか一方の角度を変化させて、その
角度対応の透過光を光検出部で検出し、基準フイ
ルタ膜と被検査フイルタ膜とが同一角度に於いて
所定の透過光検出出力が得られた場合は、基準フ
イルタ膜と被検査フイルタ膜とは同一の波長特性
を有すると判断し、又基準フイルタ膜と被検査フ
イルタ膜とが同一角度に於いて透過光検出出力が
最大値となるが所定の値より小さい場合は、基準
フイルタ膜に対して被検査フイルタ膜の波長特性
曲線の形状が異なると判断し、又基準フイルタ膜
と被検査フイルタ膜とが異なる角度に於いて透過
光検出出力が最大値で且つ所定の値となつた場合
は、基準フイルタ膜に対して被検査フイルタ膜の
例えば中心波長がずれていると判断するものであ
る。
Since the wavelength characteristics of a filter film depend on the incident angle of light, the angle of either the reference filter film or the inspected filter film is changed, and the transmitted light corresponding to that angle is detected by the photodetector. If a predetermined transmitted light detection output is obtained when the reference filter film and the filter film to be inspected are at the same angle, it is determined that the reference filter film and the filter film to be inspected have the same wavelength characteristics, or If the transmitted light detection output reaches its maximum value when the reference filter film and the filter film to be inspected are at the same angle, but is smaller than the predetermined value, the shape of the wavelength characteristic curve of the filter film to be inspected is different from that of the reference filter film. If it is determined that they are different, and if the transmitted light detection output reaches the maximum value and a predetermined value when the reference filter film and the inspected filter film are at different angles, then For example, it is determined that the center wavelength is shifted.
以下図面を参照して、本発明の実施例について
詳細に説明する。
Embodiments of the present invention will be described in detail below with reference to the drawings.
第１図は本発明の実施例の説明図であり、１は
白色光源、２はレンズ、３は基準フイルタ膜、４
は被検査フイルタ膜、５は光検出部、６は検出処
理部である。白色光源１は、被検査フイルタ膜４
の波長範囲に対応した波長範囲の光を含む光源で
あり、例えば、ハロゲンランプと光学フイルタと
の組合せ、又は発光ダイオード等により構成する
ことができる。又基準フイルタ膜３又は被検査フ
イルタ膜４の何れか一方の角度を変化できる構成
とするものであり、第１図に於いては、被検査フ
イルタ膜４の角度を変化する場合を示す。 FIG. 1 is an explanatory diagram of an embodiment of the present invention, in which 1 is a white light source, 2 is a lens, 3 is a reference filter film, and 4 is an explanatory diagram of an embodiment of the present invention.
5 is a filter film to be inspected, 5 is a photodetection section, and 6 is a detection processing section. A white light source 1 is a filter film 4 to be inspected.
A light source that includes light in a wavelength range corresponding to the wavelength range of , and can be configured, for example, by a combination of a halogen lamp and an optical filter, or a light emitting diode. Further, the configuration is such that the angle of either the reference filter film 3 or the filter film to be inspected 4 can be changed, and FIG. 1 shows the case where the angle of the filter film to be inspected 4 is changed.
誘電体多層膜によりフイルタ膜を構成した場合
の波長特性は、光の入射角度に依存するものであ
り、例えば、中心波長が0.8〜1.3μmのバンドパス
フイルタに於いては、波長特性の入射角度依存性
は、数度の角度範囲内で、中心波長が３〜５
〔nm／度〕の割合で変化するものである。又バン
ドパスフイルタとして使用する場合は、フイルタ
膜に対して或る角度で光を入射させる構成とする
ことが一般的であるから、第１図に於いては、基
準フイルタ膜３を或る角度θ0で傾斜させて配置し
ている。 When a filter film is composed of a dielectric multilayer film, the wavelength characteristics depend on the incident angle of light. For example, in a bandpass filter with a center wavelength of 0.8 to 1.3 μm, the wavelength characteristics depend on the incident angle. The dependence is within an angular range of a few degrees, with the center wavelength between 3 and 5
It changes at a rate of [nm/degree]. Furthermore, when used as a bandpass filter, it is common to have a configuration in which light is incident on the filter film at a certain angle, so in FIG. It is arranged at an angle of θ 0 .
又被検査フイルタ膜４の基準位置は、基準フイ
ルタ膜３と同一角度θ0で傾斜させて配置し、これ
を中心として、＋Δθの位置４′と−Δθの位置４″
との範囲内で角度を変化させる構成とするもので
ある。この被検査フイルタ膜４の角度を変化させ
る手段は、基準位置に対する角度情報が得られる
構成とするものであり、公知の手動、自動等の任
意の構成を採用することができるものであつて、
その角度変化の為の構成の図示は省略している。 The reference position of the filter film 4 to be inspected is arranged to be inclined at the same angle θ 0 as the reference filter film 3, and with this as the center, +Δθ position 4' and -Δθ position 4''
The angle is changed within the range of . The means for changing the angle of the filter membrane 4 to be inspected is configured to obtain angle information with respect to the reference position, and any known configuration such as manual or automatic can be adopted.
The illustration of the configuration for changing the angle is omitted.
前述のバンドパスフイルタを構成する基準フイ
ルタ膜３及び被検査フイルタ膜４の場合、被検査
フイルタ膜４の角度変化と光検出部５の検出出力
との一例を第２図に示す。同図に於いて、横軸
は、フイルタ膜の波長特性の入射角度依存性が、
３〔nm／度〕の場合に、基準フイルタ膜３と同一
角度θ0の時を０〔゜〕とし、且つシフト波長を０
〔nm〕として示し、縦軸は、光検出部５の検出出
力が所定の値即ち基準フイルタ膜３と被検査フイ
ルタ膜４とが全く同じ波長特性である時の同一角
度に於ける検出出力を100〔％〕として示すもので
ある。 In the case of the reference filter film 3 and the filter film to be inspected 4 that constitute the aforementioned bandpass filter, an example of the angle change of the filter film to be inspected 4 and the detection output of the photodetector 5 is shown in FIG. In the figure, the horizontal axis represents the incident angle dependence of the wavelength characteristics of the filter film.
3 [nm/degree], the time when the angle θ is the same as the reference filter film 3 is 0 [°], and the shift wavelength is 0.
[nm], and the vertical axis represents the detection output of the photodetector 5 at a predetermined value, that is, the detection output at the same angle when the reference filter film 3 and the filter film 4 to be inspected have exactly the same wavelength characteristics. It is shown as 100 [%].
第２図の実線曲線ａは、角度０〔゜〕に於いて
100〔％〕の最大検出出力となり、角度を＋又は−
方向に変化するに従つて検出出力は低下する特性
の場合を示し、基準フイルタ膜３と同一の角度θ0
の時に、所定の最大検出出力が得られるので、こ
のような特性の被検査フイルタ膜４は、基準フイ
ルタ膜３と同一の波長特性を有することになる。 The solid line curve a in Figure 2 is at an angle of 0 [°].
The maximum detection output is 100 [%], and the angle can be changed to + or -.
This shows a case where the detection output decreases as the direction changes, and the angle θ 0 is the same as that of the reference filter film 3.
Since a predetermined maximum detection output is obtained when , the filter film 4 to be inspected having such characteristics has the same wavelength characteristics as the reference filter film 3.
又点線曲線ｂは、被検査フイルタ膜４を基準位
置から＋３〔゜〕変化させた時に、100〔％〕の最
大検出出力となり、ほぼ実線曲線ａを右方向にシ
フトさせた特性の場合を示し、このような特性の
被検査フイルタ膜４は、基準フイルタ膜３の中心
波長に対して、−９〔nm〕シフトした中心波長を
有する波長特性を有するものである。従つて、中
心波長のずれの許容範囲を±10〔゜〕とすると、
この場合の被検査フイルタ膜４は許容範囲内のも
のであると判断できることになる。 Moreover, the dotted line curve b shows the case where the maximum detection output is 100 [%] when the filter film 4 to be inspected is changed by +3 [°] from the reference position, and the characteristic is approximately shifted to the right from the solid line curve a. The filter film 4 to be inspected having such characteristics has a wavelength characteristic having a center wavelength shifted by -9 [nm] with respect to the center wavelength of the reference filter film 3. Therefore, if the allowable range of center wavelength deviation is ±10 [°], then
In this case, it can be determined that the filter film 4 to be inspected is within the permissible range.
又鎖線曲線ｃは、検出出力の最大値が０〔゜〕
の角度で生じているが、その最大値は、所定の値
であるところの100〔％〕より小さい値の場合を示
し、このような特性の被検査フイルタ膜４は、基
準フイルタ膜３と中心波長が同一であるが、波長
特性曲線の形状が異なる特性を有するものであ
る。この場合、波長特性曲線の形状のずれが大き
い程、最大値が小さくなるから、最大値の許容範
囲を定めておくことにより、被検査フイルタ膜４
が基準フイルタ膜３に対して許容範囲内の特性を
有するものであるか否かを判断することができ
る。 In addition, for the chain line curve c, the maximum value of the detection output is 0 [°]
However, the maximum value is smaller than 100% of the predetermined value. Although the wavelengths are the same, the shapes of the wavelength characteristic curves are different. In this case, the larger the deviation in the shape of the wavelength characteristic curve, the smaller the maximum value.
It can be determined whether the characteristics of the reference filter film 3 are within the allowable range.
前述のように、被検査フイルタ膜４の角度と光
検出部５の検出出力とを対応付けて記録又は表示
することによつて、基準フイルタ膜３の特性に対
する被検査フイルタ膜４のずれを容易に識別する
ことができる。又測定点も僅かで済むから、短時
間で検査を行うことができる。又被検査フイルタ
膜４の角度変化は、手動、自動の何れでも可能で
あり、手動の場合は、被検査フイルタ膜４の角度
変化を角度目盛等で読取り、その時の光検出部５
の検出出力をプロツトすれば良いことになる。又
自動化する場合は、モータや電磁石等により基準
位置から＋Δθと−Δθの範囲内で変化させ、角度
センサ例えば回転エンコーダ等を用いて被検査フ
イルタ膜４の角度情報を検出処理部６に入力し、
その角度情報と光検出部５の検出出力とにより、
第２図に示す特性曲線を表示或いは印字出力し
て、被検査フイルタ膜４が許容範囲内の波長特性
を有するものであるか否かを判断するか、或い
は、検出処理部６で許容範囲内の波長特性である
か否かを判断させることができる。 As described above, by recording or displaying the angle of the filter film 4 to be inspected and the detection output of the photodetector 5 in association with each other, it is possible to easily check the deviation of the filter film 4 to be inspected relative to the characteristics of the reference filter film 3. can be identified. Furthermore, since the number of measurement points is small, inspection can be carried out in a short time. Further, the angle change of the filter film 4 to be inspected can be done either manually or automatically. In the case of manual operation, the angle change of the filter film 4 to be inspected is read on an angle scale, etc., and the light detection unit 5 at that time is read.
All you have to do is plot the detection output. In addition, in the case of automation, the angle information of the filter membrane 4 to be inspected is inputted to the detection processing section 6 by changing the angle within the range of +Δθ and -Δθ from the reference position using a motor or electromagnet, etc. using an angle sensor such as a rotary encoder. ,
Based on the angle information and the detection output of the light detection section 5,
The characteristic curve shown in FIG. It is possible to determine whether the wavelength characteristics are the same or not.
以上説明したように、本発明は、白色光源１か
らの白色光を入射させる基準フイルタ膜３と、基
準フイルタ膜３を透過した光を入射させる被検査
フイルタ膜４と、被検査フイルタ膜４の透過光を
検出する光検出部５と、基準フイルタ膜３又は被
検査フイルタ膜４の何れか一方の角度を変化させ
て光検出部５の検出出力信号を測定する検出処理
部６等の手段とを備えたものであり、光源として
は、白色光源１を用いるものであるから、従来例
の分光器を用いる場合に比較して廉価な構成とな
る。又基準フイルタ膜３又は被検査フイルタ膜４
の何れか一方の角度を変化させて、透過光の検出
出力を測定するものであり、測定点も僅かで済む
から、検査所要時間が短くなる利点がある。
As explained above, the present invention includes a reference filter film 3 into which the white light from the white light source 1 is incident, a filter film 4 to be inspected into which light transmitted through the reference filter film 3 is incident, and a filter film 4 to be inspected. A light detection section 5 that detects transmitted light; and means such as a detection processing section 6 that measures the detection output signal of the light detection section 5 by changing the angle of either the reference filter film 3 or the inspected filter film 4; Since the white light source 1 is used as the light source, the configuration is less expensive than when using a conventional spectrometer. Also, the reference filter film 3 or the inspected filter film 4
The detection output of the transmitted light is measured by changing the angle of one of the two, and since only a few measurement points are required, there is an advantage that the time required for inspection is shortened.
第１図は本発明の実施例の説明図、第２図は本
発明の実施例に於ける測定曲線の説明図、第３図
は従来の検査装置の説明図、第４図はバンドパス
フイルタの波長特性曲線図である。
１は白色光源、２はレンズ、３は基準フイルタ
膜、４は被検査フイルタ膜、５は光検出部、６は
検出処理部である。
Fig. 1 is an explanatory diagram of an embodiment of the present invention, Fig. 2 is an explanatory diagram of a measurement curve in an embodiment of the present invention, Fig. 3 is an explanatory diagram of a conventional inspection device, and Fig. 4 is an explanatory diagram of a bandpass filter. It is a wavelength characteristic curve diagram of. 1 is a white light source, 2 is a lens, 3 is a reference filter film, 4 is a filter film to be inspected, 5 is a light detection section, and 6 is a detection processing section.
Claims (1)
させる基準フイルタ膜と、該基準フイルタ膜を透
過した光を入射させる被検査フイルタ膜と、該被
検査フイルタ膜を透過した光を検出する光検出部
と、前記基準フイルタ膜又は前記被検査フイルタ
膜の何れか一方を入射光に対して角度を変化させ
該角度に対応した前記光検出部の検出出力信号を
測定する手段とを備えたことを特徴とするフイル
タ膜検査装置。1. A white light source, a reference filter film into which the white light from the white light source enters, a test filter film into which light transmitted through the reference filter film enters, and a light that detects the light transmitted through the test filter film. comprising: a detection section; and means for changing the angle of either the reference filter film or the inspected filter film with respect to the incident light and measuring a detection output signal of the photodetection section corresponding to the angle. A filter membrane inspection device characterized by:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18803584A JPS6166139A (en) | 1984-09-10 | 1984-09-10 | Filter-film examining device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18803584A JPS6166139A (en) | 1984-09-10 | 1984-09-10 | Filter-film examining device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6166139A JPS6166139A (en) | 1986-04-04 |
| JPH0460212B2 true JPH0460212B2 (en) | 1992-09-25 |
Family
ID=16216525
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18803584A Granted JPS6166139A (en) | 1984-09-10 | 1984-09-10 | Filter-film examining device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6166139A (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6450001A (en) * | 1987-08-21 | 1989-02-27 | Asahi Optical Co Ltd | Wavelength band adjusting method for luminous flux of optical system |
| JP4895436B2 (en) * | 2001-06-26 | 2012-03-14 | 日本分光株式会社 | Method and apparatus for measuring optical characteristics of rejection filter |
-
1984
- 1984-09-10 JP JP18803584A patent/JPS6166139A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6166139A (en) | 1986-04-04 |
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