JPH0465795B2 - - Google Patents
Info
- Publication number
- JPH0465795B2 JPH0465795B2 JP60045462A JP4546285A JPH0465795B2 JP H0465795 B2 JPH0465795 B2 JP H0465795B2 JP 60045462 A JP60045462 A JP 60045462A JP 4546285 A JP4546285 A JP 4546285A JP H0465795 B2 JPH0465795 B2 JP H0465795B2
- Authority
- JP
- Japan
- Prior art keywords
- recording
- recording layer
- layer
- amorphous
- phase transition
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000007704 transition Effects 0.000 claims description 15
- 239000000758 substrate Substances 0.000 claims description 10
- 238000000034 method Methods 0.000 claims description 5
- 239000010410 layer Substances 0.000 description 39
- 238000000137 annealing Methods 0.000 description 7
- 239000013078 crystal Substances 0.000 description 6
- 238000002425 crystallisation Methods 0.000 description 6
- 230000008025 crystallization Effects 0.000 description 6
- 239000000203 mixture Substances 0.000 description 5
- 229910008355 Si-Sn Inorganic materials 0.000 description 4
- 229910006453 Si—Sn Inorganic materials 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 229910005939 Ge—Sn Inorganic materials 0.000 description 3
- 238000002441 X-ray diffraction Methods 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 230000001678 irradiating effect Effects 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 238000000151 deposition Methods 0.000 description 2
- 238000012827 research and development Methods 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 239000003440 toxic substance Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 239000000383 hazardous chemical Substances 0.000 description 1
- 238000007733 ion plating Methods 0.000 description 1
- 231100001231 less toxic Toxicity 0.000 description 1
- 239000013081 microcrystal Substances 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 231100000167 toxic agent Toxicity 0.000 description 1
- 231100000419 toxicity Toxicity 0.000 description 1
- 230000001988 toxicity Effects 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41M—PRINTING, DUPLICATING, MARKING, OR COPYING PROCESSES; COLOUR PRINTING
- B41M5/00—Duplicating or marking methods; Sheet materials for use therein
- B41M5/26—Thermography ; Marking by high energetic means, e.g. laser otherwise than by burning, and characterised by the material used
Landscapes
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Thermal Transfer Or Thermal Recording In General (AREA)
- Optical Record Carriers And Manufacture Thereof (AREA)
Description
【発明の詳細な説明】
発明の背景
技術分野
本発明は、情報記録媒体、特にヒートモード情
報記録媒体および記録方法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an information recording medium, particularly a heat mode information recording medium and a recording method.
先行技術
ヒートモードの情報記録媒体は、媒体と書き込
みないし読み出しヘツドが非接触であるので、記
録媒体が摩耗劣化しないという特徴をもち、この
ため、種々のヒートモードの記録媒体の開発研究
が行われている。Prior Art Heat mode information recording media have the characteristic that the recording medium does not deteriorate due to wear and tear because there is no contact between the medium and the writing or reading head.For this reason, research and development of various heat mode recording media has been carried out. ing.
このヒートモードの情報記録媒体には、大別し
て、ピツト形成タイプと、いわゆる相転移タイプ
のものがある。 The heat mode information recording medium can be roughly divided into pit formation type and so-called phase change type.
相転移タイプのものは、レーザー等の記録光に
より、照射部の記録層に非晶質−結晶質の相転移
等を生起させて情報を記録し、読み出し光で反射
率の変化等を検出して読み出しを行うものであ
る。 The phase transition type records information by causing an amorphous-crystalline phase transition in the recording layer of the irradiated area using recording light such as a laser, and detects changes in reflectance with readout light. It is used for reading data.
このような相転移を利用する記録媒体として
は、Teを主体とする材料を記録層とするものが
大半を占めている。 Most recording media that utilize such a phase transition have a recording layer made of a material containing Te as a main component.
しかし、近年、Te系材料が人体に有害である
ことから、これにかわる他の材料を用いての研
究、開発が行われている。 However, in recent years, since Te-based materials are harmful to the human body, research and development using other materials to replace them has been conducted.
そこで本発明者らは、Te系にかわり、より低
毒性のGe−Sn系物質を用いる旨の提案(特願昭
59−275373号)を行つている。このGe−Sn系の
記録層は、記録光により、相転移ないし結晶状態
の変化を良好に行うことができるものである。た
だ、Ge−Sn系は、情報記録が安定して行えるGe
−Sn組成比領域が比較的狭い。 Therefore, the present inventors proposed the use of less toxic Ge-Sn based substances instead of Te based substances (patent application).
59-275373). This Ge--Sn-based recording layer can undergo a phase transition or a change in crystal state favorably by recording light. However, the Ge-Sn system is Ge-Sn, which allows stable information recording.
-Sn composition ratio range is relatively narrow.
発明の目的
本発明の目的は、記録層を従来のTe系の有害
物質の系から、新規な低毒性物質の系で形成し、
しかもこの記録層に例えば記録光を照射して、照
射部の記録層に非晶質−結晶質の相転移ないし結
晶の状態の変化を生起させて、情報の記録を安定
に行うことができる情報記録媒体および記録方法
を提供することにある。 Purpose of the Invention The purpose of the present invention is to form a recording layer with a new low-toxic substance system instead of the conventional Te-based toxic substance system,
Furthermore, by irradiating this recording layer with recording light, for example, and causing an amorphous-crystalline phase transition or a change in the crystal state in the recording layer in the irradiated area, information can be stably recorded. The objective is to provide a recording medium and a recording method.
発明の開示
このような目的は、下記の本発明によつて達成
される。 DISCLOSURE OF THE INVENTION These objects are achieved by the invention described below.
すなわち第1の発明は、
SiおよびSnを含み、Sn/(Si+Sn)の原子比
が0.05〜0.95の記録層を基体上に有することを特
徴とする情報記録媒体である。 That is, the first invention is an information recording medium characterized by having a recording layer on a substrate that contains Si and Sn and has an atomic ratio of Sn/(Si+Sn) of 0.05 to 0.95.
また、第2の発明は、
SiおよびSnを含み、Sn/(Si+Sn)の原子比
が0.05〜0.95の記録層を基体上に有する情報記録
媒体に非晶質−結晶質相転移または結晶状態の変
化を生起させて記録を行うことを特徴とする情報
記録方法である。 Further, the second invention provides an information recording medium having a recording layer on a substrate containing Si and Sn and having an atomic ratio of Sn/(Si+Sn) of 0.05 to 0.95. This is an information recording method characterized by recording by causing a change.
発明の具体的構成
以下、本発明の具体的構成について、詳細に説
明する。 Specific Configuration of the Invention The specific configuration of the present invention will be described in detail below.
本発明の情報記録媒体は、基体の上に記録層を
設層することによつて形成される。 The information recording medium of the present invention is formed by depositing a recording layer on a base.
また、このようなものを2つ用い、互いの記録
層を対向させて一体化することによつて構成して
もよい。 Alternatively, two such devices may be used and integrated with their recording layers facing each other.
ここで、基体としては、ガラス、樹脂等からな
る平板状のものである。記録手段として光を用い
る場合は、光透過率の良いガラスまたは樹脂を用
いるのが好ましい。 Here, the substrate is a flat plate made of glass, resin, or the like. When using light as a recording means, it is preferable to use glass or resin with good light transmittance.
これにより、基体裏面側からの書き込み、読み
出しなどが可能となる。 This allows writing, reading, etc. from the back side of the base.
また、基体の記録層形成面には、トラツキング
用の溝が形成されていることが好ましい。 Further, it is preferable that tracking grooves are formed on the recording layer forming surface of the substrate.
基体上には記録層が設層される。 A recording layer is provided on the substrate.
記録層は、SiおよびSnを含み、Sn/(Si+Sn)
の原子比は0.05〜0.95である。 The recording layer contains Si and Sn, Sn/(Si+Sn)
The atomic ratio of is 0.05-0.95.
Sn/(Si+Sn)の原子比が0.95をこえると、Si
−Snからなる記録層は非晶質化しにくい。その
ため、例えば光照射などによつて記録層に熱を加
えても、非晶質−結晶質の相転移や粒径変化等の
結晶状態の変化による記録を行うことができな
い。 When the atomic ratio of Sn/(Si+Sn) exceeds 0.95, Si
-A recording layer made of Sn is difficult to become amorphous. Therefore, even if heat is applied to the recording layer by, for example, light irradiation, recording cannot be performed due to a change in the crystal state such as an amorphous-crystalline phase transition or a change in grain size.
また、Sn/(Si+Sn)の原子比が0.05より小
さくなると、結晶化温度が高く、記録に際し、多
くのエネルギーが必要となる。 Furthermore, when the atomic ratio of Sn/(Si+Sn) is smaller than 0.05, the crystallization temperature is high and a lot of energy is required for recording.
つまり、0.05以上となると、結晶化温度が低く
なり、記録に際し、より少ない熱エネルギーで相
転移状態変化が生じ、実用上好ましい。さらに好
ましくは、0.15〜0.7となると、結晶化温度と安
定性の両者が好ましいものとなる。 In other words, when it is 0.05 or more, the crystallization temperature becomes low and a phase transition state change occurs with less thermal energy during recording, which is preferable in practice. More preferably, when it is 0.15 to 0.7, both crystallization temperature and stability are favorable.
このような記録層は、蒸着法、スパツタ法、イ
オンプレーテイング法等のドライコーテイング方
式等を用いて設層すればよい。 Such a recording layer may be formed using a dry coating method such as a vapor deposition method, a sputtering method, or an ion plating method.
記録層の厚さは20nm〜1μm程度である。 The thickness of the recording layer is approximately 20 nm to 1 μm.
また、必要に応じて基体と記録層の間および/
または記録層上に、公知の種々の安定化層や熱吸
収層等を設層してもよい。 Also, if necessary, between the substrate and the recording layer and/or
Alternatively, various known stabilizing layers, heat absorbing layers, etc. may be provided on the recording layer.
これにより、記録層の劣化を防止でき、さらに
記録のための熱効率を向上させることができる。 This makes it possible to prevent deterioration of the recording layer and further improve the thermal efficiency for recording.
また、基体の他面上には、各種保護層を設けて
もよい。 Furthermore, various protective layers may be provided on the other surface of the base.
このような記録層を基体上に有する情報記録媒
体に記録を行うには、光ないし熱エネルギーを付
与する。 To record on an information recording medium having such a recording layer on a substrate, light or thermal energy is applied.
一般的には、記録光としては、半導体レーザー
等を用いればよい。 Generally, a semiconductor laser or the like may be used as the recording light.
記録光の照射により、照射部の記録層に非晶質
−結晶質の相転移を生起させ、記録が行われる。
すなわち、非晶質から結晶質への相転移、あるい
は結晶質から非晶質への相転移を利用して記録を
行う。 By irradiating the recording light, an amorphous-crystalline phase transition is caused in the recording layer of the irradiated area, and recording is performed.
That is, recording is performed using phase transition from amorphous to crystalline or from crystalline to amorphous.
さらに、このような相転移の他、記録は、結晶
状態の変化によつてもよい。結晶状態の変化とし
ては、微結晶の粒径の変化、結晶形の種類、配向
性や結晶化率の変化などがある。 Furthermore, in addition to such a phase transition, recording may also be based on a change in crystalline state. Changes in the crystal state include changes in the grain size of microcrystals, types of crystal forms, orientation, and crystallinity.
記録後の読みとりは、読みとり光を照射するな
どして、記録層の反射率の変化等を利用して検出
すればよい。 Reading after recording may be performed by irradiating reading light or detecting a change in the reflectance of the recording layer.
このような場合、830nmの波長においては、非
晶質状態にて約40%程度の反射率が、結晶化する
ことにより、5〜40%程度変化する。 In such a case, at a wavelength of 830 nm, the reflectance, which is about 40% in an amorphous state, changes by about 5 to 40% due to crystallization.
このように、比較的、大きな反射率の変化が得
られるため、書き込み、読み出し等の記録特性の
品質は安定する。 In this way, since a relatively large change in reflectance can be obtained, the quality of recording characteristics such as writing and reading is stable.
発明の具体的効果
本発明の情報記録媒体は、Si−Sn系の物質か
ら形成される。 Specific Effects of the Invention The information recording medium of the present invention is formed from a Si-Sn based material.
この記録層は、記録光などを照射することによ
つて、照射部の記録層に非晶質−結晶質の相転移
や結晶状態の変化が生起する。従つて、この現象
を利用することによつて、情報を記録することが
できる。 When this recording layer is irradiated with recording light or the like, an amorphous-crystalline phase transition or a change in crystal state occurs in the recording layer in the irradiated portion. Therefore, by utilizing this phenomenon, information can be recorded.
このため、従来のTe系の有害物質系に比べ、
低毒性で同等の記録特性をもつ媒体が実現する。
また、本発明の媒体はTeに比べ耐候性も良好で
ある。 Therefore, compared to the conventional Te-based hazardous substance system,
A medium with lower toxicity and equivalent recording properties will be realized.
Furthermore, the medium of the present invention has better weather resistance than Te.
しかも、情報記録が安定して行えるSi−Sn組
成比の領域が比較的広く、読み出しのS/N比も
高く、品質の安定性に優れた効果を有する。 Moreover, the Si-Sn composition ratio range in which information can be stably recorded is relatively wide, the S/N ratio for reading is high, and quality stability is excellent.
発明の具体的実施例
以下、本発明の実施例を挙げ、本発明をさらに
詳細に説明する。 Specific Examples of the Invention Hereinafter, the present invention will be explained in further detail by giving examples of the present invention.
実施例
ガラス基板上に、Si−Snからなる薄膜層をス
パツタ法により膜厚180nmに設層し、記録層とし
た。Example A thin film layer made of Si--Sn was deposited on a glass substrate to a thickness of 180 nm by sputtering to form a recording layer.
記録層のSn/(Si+Sn)の原子比は、XPSで
測定した結果、0.32であつた。 The atomic ratio of Sn/(Si+Sn) in the recording layer was 0.32 as measured by XPS.
また、このSi−Sn記録層を設層後、および200
℃、10分のアニール後にX線回析を行つて、Si−
Snの非晶質−結晶質の相転移を確認した。 In addition, after depositing this Si-Sn recording layer and 200
After annealing for 10 minutes at ℃, X-ray diffraction was performed and Si-
The amorphous-crystalline phase transition of Sn was confirmed.
設層直後のX線回析の結果を第1図に、アニー
ル後のものを第2図に示した。 The results of X-ray diffraction immediately after layer formation are shown in Figure 1, and the results after annealing are shown in Figure 2.
さらに、第3図には、波長830nmにおけるアニ
ール温度と反射率の関係が示される。 Furthermore, FIG. 3 shows the relationship between annealing temperature and reflectance at a wavelength of 830 nm.
第3図から、830nmの反射率は設層直後の状態
から相転移により約40%変化していることがわか
る。 From FIG. 3, it can be seen that the reflectance at 830 nm changes by about 40% from the state immediately after layer formation due to phase transition.
これとは別に、比較として、上記と同様に、
Sn/(Si+Sn)の原子比が0.99の組成で設層し
たところ、Si−Snは非晶質化しておらず、すで
に結晶化しており、相転移は生じなかつた。 Apart from this, as a comparison, as above,
When a layer was formed with a composition in which the atomic ratio of Sn/(Si+Sn) was 0.99, Si-Sn did not become amorphous but was already crystallized, and no phase transition occurred.
さらに、上記と同様に、Sn/(Si+Sn)の原
子比が0.01で設層したところ、この組成では、設
層直後も300℃のアニール後も非晶質であること
が確認された。 Furthermore, in the same manner as above, when a layer was formed with an atomic ratio of Sn/(Si+Sn) of 0.01, it was confirmed that with this composition, the layer was amorphous both immediately after the layer was formed and after annealing at 300°C.
なお、上記に準じ、各組成のサンプルを設層
し、その結晶化温度を測定した。結果を第4図に
示す。 In addition, according to the above, samples of each composition were layered and their crystallization temperatures were measured. The results are shown in Figure 4.
第4図から、Sn/(Si+Sn)が0.95をこえる
と非晶質化せず、また0.05未満となると400℃の
アニール後も非晶質のままであることがわかる。 From FIG. 4, it can be seen that when Sn/(Si+Sn) exceeds 0.95, it does not become amorphous, and when it is less than 0.05, it remains amorphous even after annealing at 400°C.
また、上記本発明のサンプルにつき、830nmの
半導体レーザーで記録を行い、830nmの半導体レ
ーザーで再生を行つたところ、良好な記録再生を
行うことができた。 Furthermore, when the sample of the present invention was recorded with an 830 nm semiconductor laser and reproduced with an 830 nm semiconductor laser, good recording and reproduction could be performed.
なお、Sn/(Si+Sn)=0.01および0.99のもの
では記録再生はできなかつた。 Note that recording and reproduction could not be performed with Sn/(Si+Sn)=0.01 and 0.99.
第1図および第2図は、それぞれ本発明のSi−
Sn記録層の設層直後およびアニール後のX線回
析のチヤートである。第3図は、この本発明のSi
−Sn記録層の設層直後およびアニール温度によ
る反射率の変化を示すグラフである。第4図は、
Sn/(Si+Sn)と結晶化温度との関係を示すグ
ラフである。
1 and 2 respectively show the Si-
This is a chart of X-ray diffraction immediately after the formation of the Sn recording layer and after annealing. Figure 3 shows the Si of this invention.
3 is a graph showing changes in reflectance immediately after the -Sn recording layer is deposited and depending on annealing temperature. Figure 4 shows
It is a graph showing the relationship between Sn/(Si+Sn) and crystallization temperature.
Claims (1)
比が0.05〜0.95の記録層を基体上に有することを
特徴とする情報記録媒体。 2 SiおよびSnを含み、Sn/(Si+Sn)の原子
比が0.05〜0.95の記録層を基体上に有する情報記
録媒体に非晶質−結晶質相転移または結晶状態の
変化を生起させて記録を行うことを特徴とする情
報記録方法。[Scope of Claims] 1. An information recording medium comprising a recording layer on a substrate that contains Si and Sn and has an atomic ratio of Sn/(Si+Sn) of 0.05 to 0.95. 2 Recording is performed by causing an amorphous-crystalline phase transition or a change in the crystalline state in an information recording medium that has a recording layer on a substrate that contains Si and Sn and has an atomic ratio of Sn/(Si+Sn) of 0.05 to 0.95. An information recording method characterized by:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60045462A JPS61205186A (en) | 1985-03-07 | 1985-03-07 | Information recording medium and recording system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60045462A JPS61205186A (en) | 1985-03-07 | 1985-03-07 | Information recording medium and recording system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61205186A JPS61205186A (en) | 1986-09-11 |
| JPH0465795B2 true JPH0465795B2 (en) | 1992-10-21 |
Family
ID=12720029
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60045462A Granted JPS61205186A (en) | 1985-03-07 | 1985-03-07 | Information recording medium and recording system |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61205186A (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62127286A (en) * | 1985-11-27 | 1987-06-09 | Nec Corp | Optical recording material |
-
1985
- 1985-03-07 JP JP60045462A patent/JPS61205186A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61205186A (en) | 1986-09-11 |
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| JPH02139280A (en) | Optical recording medium and manufacture thereof |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |