JPH0469085B2 - - Google Patents
Info
- Publication number
- JPH0469085B2 JPH0469085B2 JP60153322A JP15332285A JPH0469085B2 JP H0469085 B2 JPH0469085 B2 JP H0469085B2 JP 60153322 A JP60153322 A JP 60153322A JP 15332285 A JP15332285 A JP 15332285A JP H0469085 B2 JPH0469085 B2 JP H0469085B2
- Authority
- JP
- Japan
- Prior art keywords
- nitrogen
- gas
- product
- pressure
- adsorption
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 117
- 229910052757 nitrogen Inorganic materials 0.000 claims description 55
- 238000000034 method Methods 0.000 claims description 24
- 239000007789 gas Substances 0.000 claims description 21
- 238000001179 sorption measurement Methods 0.000 claims description 20
- 229910001873 dinitrogen Inorganic materials 0.000 claims description 7
- 230000008569 process Effects 0.000 claims description 7
- 239000002994 raw material Substances 0.000 claims description 7
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 claims description 2
- 239000000571 coke Substances 0.000 claims description 2
- 229910001882 dioxygen Inorganic materials 0.000 claims description 2
- 239000002808 molecular sieve Substances 0.000 claims description 2
- URGAHOPLAPQHLN-UHFFFAOYSA-N sodium aluminosilicate Chemical compound [Na+].[Al+3].[O-][Si]([O-])=O.[O-][Si]([O-])=O URGAHOPLAPQHLN-UHFFFAOYSA-N 0.000 claims description 2
- 230000007423 decrease Effects 0.000 description 6
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 5
- 230000008859 change Effects 0.000 description 5
- 230000014075 nitrogen utilization Effects 0.000 description 5
- 239000001301 oxygen Substances 0.000 description 5
- 229910052760 oxygen Inorganic materials 0.000 description 5
- 238000003795 desorption Methods 0.000 description 4
- 230000009467 reduction Effects 0.000 description 3
- 238000007796 conventional method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 238000010926 purge Methods 0.000 description 2
- 230000008929 regeneration Effects 0.000 description 2
- 238000011069 regeneration method Methods 0.000 description 2
- 239000002699 waste material Substances 0.000 description 2
- 238000013459 approach Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 239000002912 waste gas Substances 0.000 description 1
Landscapes
- Separation Of Gases By Adsorption (AREA)
- Oxygen, Ozone, And Oxides In General (AREA)
Description
【発明の詳細な説明】
本発明は、系から排出される製品窒素ガスの純
度を検出し、それによつて電力消費を節約してな
る窒素濃縮方法に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method for concentrating nitrogen by detecting the purity of product nitrogen gas discharged from a system, thereby saving power consumption.
発明で解決しようとする問題点
一般に圧力変動式吸着（PSA）を使用する窒
素濃縮装置は、製品窒素を利用する系とシリーズ
に連結して使用する従来の窒素吸着装置は吸着カ
ラム２筒を交互に約１〜２分程度の一定周期で切
替え、それぞれ吸着−均圧−脱着・排気（再生）
の各工程をくり返す方式となつている。もしその
窒素濃縮装置と連結している製品窒素を利用する
系において一時的に製品窒素を使用しなかつた
り、又その使用量が減少したりする場合がある。
その窒素濃縮装置はそれに連結した製品窒素利用
系の最大窒素使用量に基づいて設計されている。
すなわち窒素利用系の通常運転において窒素を供
給できるように窒素濃縮系が設計されていて製品
窒素利用系において製品窒素の使用が一時的に減
少するか又は０となつた時、窒素濃縮系の稼動を
継続すれば、２つの系において製品窒素が余つて
くる。このような場合、所定濃度の窒素が余分に
生産されずに、製品窒素の濃度が必要以上に高く
なり、これは窒素濃縮装置の電力の無駄となる。
このように次に連結した製品窒素利用系における
窒素の使用が減少又は０となつても窒素濃縮系を
通常のように運転することを所謂「空廻り運転」
と呼ばれる。Problems to be Solved by the Invention Nitrogen concentrators that generally use pressure swing adsorption (PSA) are connected in series to a system that uses product nitrogen. Conventional nitrogen adsorption equipment uses two adsorption columns alternately. are switched at a constant cycle of about 1 to 2 minutes, respectively adsorption, pressure equalization, desorption, and exhaust (regeneration).
This method involves repeating each step. If a system that uses product nitrogen that is connected to the nitrogen concentrator may temporarily not use product nitrogen, or the amount used may decrease.
The nitrogen concentrator is designed based on the maximum nitrogen usage of the product nitrogen utilization system connected to it.
In other words, if the nitrogen concentrator system is designed to supply nitrogen during normal operation of the nitrogen utilization system, and when the use of product nitrogen in the product nitrogen utilization system temporarily decreases or becomes zero, the nitrogen concentrator system will not be activated. If this continues, there will be a surplus of product nitrogen in the two systems. In such a case, nitrogen of a predetermined concentration is not produced in excess, and the concentration of the product nitrogen becomes higher than necessary, which wastes the power of the nitrogen concentrator.
In this way, even if the nitrogen usage in the next connected product nitrogen utilization system decreases or becomes zero, the nitrogen concentration system is operated as usual, which is called "idle operation".
It is called.
従来の圧縮機吐出量負荷の制御は、圧縮機吐出
直後の圧力で行なつていたため、圧力変動が激し
く、また製品ガス圧力との関連もなかつた。その
ためアンローダー機構が頻繁に作動したり、全体
のプロセス圧力が低下し、製品ガス圧力が仕様値
以下となつたり、逆に製品ガスバツフアタンク圧
力が上昇し、むだな動力を消費する欠点があつ
た。 Conventional compressor discharge load control was performed using the pressure immediately after the compressor discharged, resulting in large pressure fluctuations and no correlation with product gas pressure. As a result, the unloader mechanism operates frequently, the overall process pressure decreases, the product gas pressure falls below the specified value, and conversely, the product gas buffer tank pressure increases, resulting in wasted power consumption. It was hot.
問題を解決するための手段
本発明は、電力の無駄な浪費につながる窒素濃
縮系の空廻り運転を回避するためになされたもの
である。Means for Solving the Problem The present invention has been made in order to avoid idle operation of the nitrogen concentration system, which leads to wasteful consumption of electric power.
本発明の実験によると、装置能力の100％〜40
％の範囲では、吸着の切替周期一定の場合は、窒
素使用流量と窒素純度はほぼ逆比例の関係となる
ことがわかつた。更に、窒素純度を一定とするた
めには、窒素使用流量にほぼ逆比例して吸着の切
替周期を延長または短縮すればよいことを見出し
た。すなわち、窒素使用流量が少なくなればなる
ほど、切替周期を延長することを発見した。 According to the experiments of the present invention, 100% to 40% of the device capacity
% range, it was found that when the adsorption switching period is constant, the flow rate of nitrogen used and the nitrogen purity are almost inversely proportional. Furthermore, it has been found that in order to keep the nitrogen purity constant, the adsorption switching period can be lengthened or shortened in approximately inverse proportion to the flow rate of nitrogen used. In other words, it was discovered that the lower the flow rate of nitrogen used, the longer the switching period.
本発明は、分子篩コークスを充填した少なくと
も２基以上の吸着カラムに交番的に窒素ガス以外
に少なくとも酸素ガスを含有する原料ガスを送入
する窒素自動濃縮装置を使用して吸着工程−均圧
工程−減圧排気工程を繰り返すことからなる圧力
変動式吸着により窒素を濃縮する方法において、
製品ガスの純度及び製品ガスの圧力の少なくとも
１つを検出して、その信号により、各吸着カラム
の１サイクルの時間を自動的に変化させ、製品窒
素ガス純度をある一定の範囲内に保持しながら窒
素を濃縮する方法に関する。本発明のメカニズム
をさらに詳しく説明すると、次工程において製品
窒素使用量が減少すると製品窒素の純度が高くな
る。本発明では製品窒素の純度を検出し、窒素濃
縮装置における各吸着カラムの各工程の切替周期
を延長させる。一般にPSA装置において各吸着
カラムの再生工程において、高圧のガスを外部に
廃棄する。この廃棄は電力消費を意味する各吸着
カラムにおける各工程の切替周期が短かければ、
時間当り多くのガスを廃棄しなければならない。
一方切替周期が長くなれば時間当りの廃棄ガスが
少なくなる。これは消費電力の減少につながる。 The present invention utilizes an automatic nitrogen concentrator that alternately feeds a raw material gas containing at least oxygen gas in addition to nitrogen gas into at least two adsorption columns filled with molecular sieve coke. - a method for concentrating nitrogen by pressure swing adsorption consisting of repeated vacuum evacuation steps,
At least one of the purity of the product gas and the pressure of the product gas is detected, and the time of one cycle of each adsorption column is automatically changed based on the signal to maintain the product nitrogen gas purity within a certain range. Concerning a method for concentrating nitrogen while To explain the mechanism of the present invention in more detail, when the amount of nitrogen used in the next step is reduced, the purity of the nitrogen product increases. In the present invention, the purity of the product nitrogen is detected and the switching cycle of each process of each adsorption column in the nitrogen concentrator is extended. Generally, in the regeneration process of each adsorption column in a PSA device, high-pressure gas is disposed of to the outside. This waste means power consumption.If the switching cycle of each process in each adsorption column is short,
A lot of gas has to be disposed of per hour.
On the other hand, the longer the switching period, the less waste gas per hour. This leads to a reduction in power consumption.
窒素濃縮系に連結した製品窒素利用系における
製品窒素の使用量が極端に減少するか又は０近く
なつた場合、単に各工程の切替周期を長くしただ
けで完全の空廻り運転を防止することができな
い。この場合にはさらに製品窒素ガスの圧力を検
出し、その信号により原料ガスの流量を調節す
る。又原料ガスの流量の調節する方法として下記
のような手段がある。 If the amount of product nitrogen used in the product nitrogen utilization system connected to the nitrogen concentration system decreases significantly or approaches zero, it is possible to prevent complete idle operation simply by lengthening the switching cycle of each process. Can not. In this case, the pressure of the product nitrogen gas is further detected, and the flow rate of the source gas is adjusted based on the signal. Further, as a method of adjusting the flow rate of the raw material gas, there are the following means.
() 圧縮機の回転数を制御する；
() 製品窒素ガス圧力の上下限設定圧力で圧縮
機をロードにしたりアンロードにしたりする；
および
() 圧縮機の台数を制御する（たとえば通常の
場合圧縮機を３台使用し、原料ガスの流量を少
なくしたい時１台の圧縮機を止め、圧縮機２台
で運転する）
これらの１つの手段又は２〜３の手段を組合せ
て行なつても良い。() Control the rotation speed of the compressor; () Load and unload the compressor at the upper and lower limit set pressures of the product nitrogen gas pressure;
and () Control the number of compressors (for example, normally three compressors are used, but when you want to reduce the flow rate of raw material gas, one compressor is stopped and two compressors are operated). One means or a combination of two or three means may be used.
本発明をさらに図面により説明する。第１図は
PSA式窒素濃縮装置の概略図である。 The present invention will be further explained with reference to the drawings. Figure 1 is
It is a schematic diagram of a PSA type nitrogen concentrator.
第１図において１１は圧縮機である。２１およ
び２２は吸着カラムである。３１〜３６は自動弁
である。４１〜４２は逆止弁である。１５は安全
弁である。１６は製品窒素タンクである。１７は
流量計である。１８は脱着ガスパージ管である。
１９は酸素濃度計である。２０は従来のシーケン
サーである。５１は出力信号配線である。５２は
本発明のシーケンサーである。１３は圧力導管で
ある。 In FIG. 1, 11 is a compressor. 21 and 22 are adsorption columns. 31 to 36 are automatic valves. 41 and 42 are check valves. 15 is a safety valve. 16 is a product nitrogen tank. 17 is a flow meter. 18 is a desorption gas purge pipe.
19 is an oxygen concentration meter. 20 is a conventional sequencer. 51 is an output signal wiring. 52 is a sequencer of the present invention. 13 is a pressure conduit.
既存PSA式窒素自動濃縮装置は第１図に示す
如く、シーケンサー２０により、切替周期一定の
シーケンスが組まれ、自動弁３１，３２，３３，
３４，３５，３６が駆動されている。本発明方法
は、上記シーケンサー２０に代えてシーケンサー
５２を設置し、酸素温度計１９（窒素純度は当該
濃度の逆数）の出力信号を検出し、目標濃度との
偏差に対応して、吸着筒２１，２２の切替周期を
自動的に延長させる又は短縮させるシーケンスに
より、自動弁３１，３２，３３，３４，３５，３
６を駆動させる方式である。 As shown in Fig. 1, in the existing PSA type automatic nitrogen concentrator, a sequence with a constant switching cycle is set up by a sequencer 20, and automatic valves 31, 32, 33,
34, 35, and 36 are being driven. In the method of the present invention, a sequencer 52 is installed in place of the sequencer 20, and the output signal of the oxygen thermometer 19 (nitrogen purity is the reciprocal of the concentration) is detected. , 22 automatically extends or shortens the switching period of the automatic valves 31, 32, 33, 34, 35, 3.
This is a method for driving 6.
一方、吸着カラム２１，２２の切替周期が変化
すればこれに伴なつて、所要圧縮空気量は「使用
窒素の変化量＋脱着排気ロスの変化量」分だけ変
化する。その変化によつて、製品窒素タンクの圧
力が上昇あるいは下降するため、当該製品窒素タ
ンク圧により空気圧縮機１１のアンローダを作動
させ、空気圧縮機容量を変化させる、いわゆる圧
力制御方式とする。本発明は、切替周期の増減に
より、製品ガス純度を一定にすることによつて節
減した原料空気量を有効に原単位（消費動力）の
低減に結びつけるため、第２の発明として、製品
ガスバツフアータンクの圧力により圧縮機の吐出
量を主としてアンローダ方式、またはインバータ
ー方式または台数制御方式またはこれらの併用方
式により調整することを特徴とする。 On the other hand, if the switching period of the adsorption columns 21 and 22 changes, the required amount of compressed air will change by the amount of "change in nitrogen used + change in desorption/exhaust loss". Due to this change, the pressure in the product nitrogen tank increases or decreases, so the unloader of the air compressor 11 is operated based on the product nitrogen tank pressure to change the air compressor capacity, which is a so-called pressure control method. The present invention has a second aspect of the present invention, in which the amount of raw material air saved by keeping the product gas purity constant by increasing or decreasing the switching cycle is effectively linked to a reduction in the basic unit (power consumption). It is characterized in that the discharge amount of the compressor is adjusted by the pressure of the fur tank mainly by an unloader method, an inverter method, a number control method, or a combination of these methods.
実施例 次に本発明の実施例を示す。Example Next, examples of the present invention will be shown.
実施例の装置仕様は次の通りである。 The device specifications of the example are as follows.
原料空気量 850Nm2／Hr
製品ガス流量 250Nm2／Hr
製品ガス純度 98.5％（N2＋Ar）
必要動力 110KW
本実施例のPSA式窒素自動濃縮装置において、
シーケンサー２０に代えてシーケンサー５２を新
規設置し、酸素濃度計１９の出力信号（４〜20ｍ
Ａ DC）配線５１を取付けた。目標酸素濃度1.5
％（窒素純度98.5％相当）に対し、指示濃度が偏
差を生ずれば、偏差に対応して、吸着カラム２
１，２２の切替周期が１〜３分間の範囲内で延長
あるいは短縮されるシーケンスをプログラムした
ものを組込み、自動弁３１，３２，３３，３４，
３５，３６を駆動させた。Raw material air amount 850Nm 2 /Hr Product gas flow rate 250Nm 2 /Hr Product gas purity 98.5% (N 2 +Ar) Required power 110KW In the PSA type nitrogen automatic concentrator of this example,
A new sequencer 52 was installed in place of the sequencer 20, and the output signal of the oxygen concentration meter 19 (4 to 20 m
A DC) Wiring 51 was installed. Target oxygen concentration 1.5
% (equivalent to 98.5% nitrogen purity), if there is a deviation in the indicated concentration, the adsorption column 2
The automatic valves 31, 32, 33, and
35 and 36 were driven.
一方、製品窒素タンク１６より圧力導管１３を
取出し、空気圧縮機１１のアンローダーに連結
し、製品窒素タンクが4.3Kg／cm2・Ｇとなればア
ンローダーが作動し、4.0Kg／cm2・Ｇで復帰する
よう調節した。テストは250Nm3／Ｈから50N
m3／Ｈの範囲まで行なつた。 On the other hand, the pressure conduit 13 is taken out from the product nitrogen tank 16 and connected to the unloader of the air compressor 11. When the product nitrogen tank reaches 4.3Kg/cm 2 ·G, the unloader operates and the pressure reaches 4.0Kg/cm 2 · Adjusted to return with G. Test is 250Nm 3 /H to 50N
It was carried out up to the range of m 3 /H.
発明の効果
(イ) 第２図に示す如く、従来の方法では、窒素純
度は装置の最大能力流量で98.5％（O21.5％）、
50％の減量運転時では99.5％（O20.5％）と上
昇した。本発明方法では目標設定純度98.5％
（O21.5％）に対し±0.25％純度範囲内に制御し
得た。Effects of the invention (a) As shown in Figure 2, in the conventional method, the nitrogen purity is 98.5% (O 2 1.5%) at the maximum capacity flow rate of the device.
During operation with a 50% reduction, it increased to 99.5% (O 2 0.5%). In the method of the present invention, the target purity is 98.5%.
(O 2 1.5%), the purity could be controlled within the range of ±0.25%.
(ロ) また、電力原単位は第３図に示す如く、例え
ば窒素流量が装置最大能力流量の70％流量で比
較した場合、従来方法で0.68KW／Ｎm3であつ
たものが本発明の方法では0.48KW／Ｎm3とな
り約30％向上した。これは、装置最大能力流量
時の電力原単位に非常に近い数値である。(b) In addition, as shown in Figure 3, the electric power consumption rate is 0.68 KW/Nm 3 in the conventional method, compared to 0.68 KW/Nm 3 in the method of the present invention, for example, when the nitrogen flow rate is 70% of the maximum capacity flow rate of the device. In this case, it was 0.48KW/Nm 3 , an improvement of about 30%. This value is very close to the power consumption rate at the maximum capacity flow rate of the device.
第１図は本発明を実施する好ましい装置の概略
図である；第２図は窒素純度と窒素使用流量比と
の関係を示すグラフである；そして第３図は電力
原単位と窒素使用流量比との関係を示すグラフで
ある。
１１：空気圧縮機、２１〜２２：吸着塔、３１
〜３６：自動弁、４１，４２：逆止弁、１５：安
全弁、１６：製品窒素タンク、１７：流量計、１
８：脱着ガスパージ管、１９：酸素濃度計、２
０：従来シーケンサー、５１：出力信号配線、５
２：新設シーケンサー、１３：圧力導管。
FIG. 1 is a schematic diagram of a preferred apparatus for carrying out the present invention; FIG. 2 is a graph showing the relationship between nitrogen purity and nitrogen usage flow rate; and FIG. 3 is a graph showing the relationship between nitrogen purity and nitrogen usage flow rate. It is a graph showing the relationship between 11: Air compressor, 21-22: Adsorption tower, 31
~36: Automatic valve, 41, 42: Check valve, 15: Safety valve, 16: Product nitrogen tank, 17: Flow meter, 1
8: Desorption gas purge pipe, 19: Oxygen concentration meter, 2
0: Conventional sequencer, 51: Output signal wiring, 5
2: New sequencer, 13: Pressure conduit.
Claims (1)
上の吸着カラムに交番的に窒素ガス以外に少なく
とも酸素ガスを含有する原料ガスを送入する窒素
自動濃縮装置を使用して吸着工程−均圧工程−減
圧排気工程を繰り返すことからなる圧力変動式吸
着により窒素を濃縮する方法において、製品ガス
の純度及び製品ガスの圧力の少なくとも１つを検
出して、その信号により、各吸着カラムの１サイ
クルの時間を自動的に変化させ、製品窒素ガス純
度をある一定の範囲内に保持しながら窒素を濃縮
する方法。 ２ 圧縮機の回転数を制御したり、製品ガス圧力
の上下限設定圧力でロード又はアンロードさせた
り、圧縮機の台数を制御したり又はこれらを併用
することにより原料ガスの供給量を調節すること
からなる特許請求の範囲第１項記載の方法。[Claims] 1. An adsorption step using an automatic nitrogen concentrator that alternately feeds a raw material gas containing at least oxygen gas in addition to nitrogen gas to at least two adsorption columns filled with molecular sieve coke. In a method of concentrating nitrogen by pressure fluctuation adsorption, which consists of repeating the pressure equalization process and the depressurization exhaust process, at least one of the purity of the product gas and the pressure of the product gas is detected, and the signal is used to determine the concentration of each adsorption column. A method of concentrating nitrogen while maintaining the purity of the product nitrogen gas within a certain range by automatically changing the time of one cycle. 2. Adjust the supply amount of raw material gas by controlling the rotation speed of the compressor, loading or unloading at the upper and lower limit set pressures of product gas pressure, controlling the number of compressors, or using these in combination. A method according to claim 1, comprising:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60153322A JPS6217008A (en) | 1985-07-11 | 1985-07-11 | Concentrating method or nitrogen utilizing pressure swing adsorption |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60153322A JPS6217008A (en) | 1985-07-11 | 1985-07-11 | Concentrating method or nitrogen utilizing pressure swing adsorption |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6217008A JPS6217008A (en) | 1987-01-26 |
| JPH0469085B2 true JPH0469085B2 (en) | 1992-11-05 |
Family
ID=15559958
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60153322A Granted JPS6217008A (en) | 1985-07-11 | 1985-07-11 | Concentrating method or nitrogen utilizing pressure swing adsorption |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6217008A (en) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63115038U (en) * | 1987-01-20 | 1988-07-25 | ||
| JPH01104327A (en) * | 1987-10-17 | 1989-04-21 | Tokico Ltd | Apparatus for gas separation |
| JPH0183422U (en) * | 1987-11-20 | 1989-06-02 | ||
| JP2872678B2 (en) * | 1988-12-09 | 1999-03-17 | 大同ほくさん株式会社 | Reduction operation control method in pressure swing adsorption system |
| US5951741A (en) * | 1998-03-27 | 1999-09-14 | John Zink Company | Hydrocarbon vapor recovery processes and apparatus |
| US6277174B1 (en) * | 2000-01-07 | 2001-08-21 | Praxair Technology, Inc. | Low pressure ratio VPSA plant tuning and balancing system |
| JP2003019415A (en) * | 2001-07-06 | 2003-01-21 | Kuraray Chem Corp | Method for separating gaseous mixture |
| JP2005262000A (en) * | 2004-03-16 | 2005-09-29 | Yokota Technica:Kk | Nitrogen gas generation method |
| CN103058153B (en) * | 2012-12-19 | 2014-09-10 | 山东金宇轮胎有限公司 | Nitrogen preparation recycle system and control method thereof |
-
1985
- 1985-07-11 JP JP60153322A patent/JPS6217008A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6217008A (en) | 1987-01-26 |
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