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JPH0471017B2 - - Google Patents
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JPH0471017B2 - - Google Patents

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Publication number
JPH0471017B2
JPH0471017B2 JP3582887A JP3582887A JPH0471017B2 JP H0471017 B2 JPH0471017 B2 JP H0471017B2 JP 3582887 A JP3582887 A JP 3582887A JP 3582887 A JP3582887 A JP 3582887A JP H0471017 B2 JPH0471017 B2 JP H0471017B2
Authority
JP
Japan
Prior art keywords
optical fiber
temperature
base material
fiber base
heating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP3582887A
Other languages
Japanese (ja)
Other versions
JPS63206327A (en
Inventor
Ichiro Tsucha
Tatsuo Saito
Yoichi Ishiguro
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Priority to JP3582887A priority Critical patent/JPS63206327A/en
Publication of JPS63206327A publication Critical patent/JPS63206327A/en
Publication of JPH0471017B2 publication Critical patent/JPH0471017B2/ja
Granted legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01Manufacture of glass fibres or filaments
    • C03B37/012Manufacture of preforms for drawing fibres or filaments
    • C03B37/014Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/01446Thermal after-treatment of preforms, e.g. dehydrating, consolidating, sintering
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01Manufacture of glass fibres or filaments
    • C03B37/012Manufacture of preforms for drawing fibres or filaments
    • C03B37/014Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/01446Thermal after-treatment of preforms, e.g. dehydrating, consolidating, sintering
    • C03B37/0146Furnaces therefor, e.g. muffle tubes, furnace linings

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • General Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Thermal Sciences (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Manufacture, Treatment Of Glass Fibers (AREA)

Description

【発明の詳細な説明】 <発明の属する技術分野> 本発明は多孔質光フアイバ母材の透明化方法お
よびこの方法を実施するための装置の改良に係
り、更に詳しくはガラス原料物質を火災加水分解
し、生成する媒状ガラス微粒子を積層して得られ
る多孔質光フアイバ母材を高温炉中で加熱・焼結
して脱水および/又は屈折率制増加、減少物質添
加、透明化する場合において、従来方法よりも迅
速、かつ中心部まで一様、確実に透明化できる多
孔質光フアイバ母材の透明化方法および装置に関
する。
Detailed Description of the Invention <Technical Field to Which the Invention Pertains> The present invention relates to a method for making a porous optical fiber base material transparent and an improvement in an apparatus for carrying out the method, and more specifically relates to a method for making a glass raw material transparent by adding fire and water to When a porous optical fiber base material obtained by decomposing and laminating the resulting medium glass particles is heated and sintered in a high-temperature furnace to dehydrate and/or add a refractive index increasing or decreasing substance and make it transparent. The present invention relates to a method and apparatus for transparentizing a porous optical fiber base material, which can be made transparent evenly and reliably up to the center more quickly than conventional methods.

<従来の技術> ガラス原料物質を火災加水分解して、生成する
媒状ガラス微粒子を堆積せしめ、得られる多孔質
光フアイバ母材を高温炉中で加熱・焼結して透明
化する方法はすでに公知である。例えば特開昭55
−67533号公報には次の二種類の方法が開示され
ている。
<Prior art> There is already a method of fire-hydrolyzing a glass raw material, depositing the resulting medium glass particles, and heating and sintering the resulting porous optical fiber base material in a high-temperature furnace to make it transparent. It is publicly known. For example, JP-A-55
Publication No. -67533 discloses the following two methods.

○イ 第一の方法は、ガラス微粒子積層体を弗素化
合物ガスを含む雰囲気中で、温度1000℃以下で
加熱し、次いでそのガラス微粒子の積層体を不
活性ガス雰囲気中で1400℃以上に加熱して透明
化する方法であり、第3図に示すように均熱炉
31中に保持して行つており、第3図中の2は
多孔質光フアイバ母材である。
○B The first method is to heat a laminate of glass particles to a temperature of 1000°C or lower in an atmosphere containing fluorine compound gas, and then heat the laminate of glass particles to a temperature of 1400°C or higher in an inert gas atmosphere. This is a method of making the fiber transparent by holding it in a soaking furnace 31 as shown in FIG. 3, and 2 in FIG. 3 is a porous optical fiber base material.

○ロ 第二の方法は、多孔質光フアイバ母材2を弗
素化合物ガスおよび不活性ガスの混合雰囲気中
で1400℃以上に加熱し弗素を含むガラス体を形
成する方法であり第5図に示されるように加熱
体40を備えたゾーン炉41中を通過させて行
つている。
○B The second method is to heat the porous optical fiber base material 2 to 1400°C or higher in a mixed atmosphere of fluorine compound gas and inert gas to form a glass body containing fluorine, as shown in FIG. This is carried out by passing through a zone furnace 41 equipped with a heating element 40 so that the temperature is high.

ところが、上述した二種の従来方法について本
発明者らの検討結果によれば、次のことが判つ
た。すなわち、第一の方法により第3図の構成に
よりガラス微粒子積層体を弗素化合物ガスを含む
雰囲気中で1000℃以下で加熱するときは、ガラス
微粒子積層体は多孔質のまま保たれる。続いて該
ガラス微粒子積層体を不活性ガス雰囲気中で加熱
すると透明化する。かくして得られた光フアイバ
母材の屈折率分布を測定したところ、第4図に示
したように周辺部の屈折率は中心部より高く、す
なわち周辺部の弗素含有は中心部の弗素添加量に
比べて少なかつた。ただし、図に示すRは母材外
径である。
However, according to the results of studies conducted by the present inventors regarding the above-mentioned two types of conventional methods, the following was found. That is, when the glass fine particle laminate is heated at 1000° C. or lower in an atmosphere containing a fluorine compound gas with the configuration shown in FIG. 3 according to the first method, the glass fine particle laminate remains porous. Subsequently, when the glass fine particle laminate is heated in an inert gas atmosphere, it becomes transparent. When we measured the refractive index distribution of the optical fiber base material obtained in this way, we found that the refractive index in the peripheral part was higher than that in the central part, as shown in Figure 4. In other words, the fluorine content in the peripheral part was proportional to the amount of fluorine added in the central part. There was less compared to that. However, R shown in the figure is the outer diameter of the base material.

これは弗素化合物ガスを含む雰囲気中で1.00℃
に加熱し、弗素添加処理が終つた時点ではガラス
微粒子積層体はなお多孔質状態にあり、一旦添加
した弗素も高温処理で再び揮散してしまうためと
考えられる。
This is 1.00℃ in an atmosphere containing fluorine compound gas.
This is considered to be because the glass fine particle laminate is still in a porous state at the time when the fluorine addition treatment is completed and the fluorine once added is volatilized again by the high temperature treatment.

第二の方法により、弗素化合物ガスおよび不活
性ガスからなる雰囲気のゾーン炉(第5図)中
で、1400℃以上に加熱しながら通過させたところ
ガラス微粒子積層体を透明化することができた。
By the second method, the glass fine particle laminate could be made transparent by passing it through a zone furnace (Fig. 5) with an atmosphere consisting of fluorine compound gas and inert gas while heating it to 1400°C or higher. .

得られた光フアイバ母材の屈折率分布は第6図
に示すごとく中心部の弗素含有量が少なかつた。
これはガラス微粒子積層体の透明化が同時に進行
するため、弗素添加するゾーン炉中にある時間が
実質的に短かく、充分な量の弗素がガラス微粒子
積層体の中心部まで達しないためと考えられる。
試みに炉内におけるガラス微粒子積層体の移動速
度を通常の透明化の場合の1/2以下にしたところ、
弗素は中心部まで一様に添加されていたが、処理
時間がはなはだしく増加することが判明した。
As shown in FIG. 6, the refractive index distribution of the obtained optical fiber base material had a low fluorine content in the center.
This is thought to be because the time in the zone furnace during which fluorine is added is substantially short because the glass particle laminate becomes transparent at the same time, and a sufficient amount of fluorine does not reach the center of the glass particle laminate. It will be done.
As an experiment, we reduced the moving speed of the glass particle stack in the furnace to less than half of the normal transparency.
Although fluorine was added uniformly to the center, it was found that the processing time increased significantly.

本発明者らは上記特開昭55−67533号公報に開
示されているような従来の多孔質光フアイバ母材
の透明化方法の不具合な点を除去するための方法
として、先の特願昭61−78379号において、光フ
アイバ母材に弗素を一様に添加できかつ短時間に
透明化できる方法として、ガラス微粒子積層体が
多孔質の状態にある温度において当該積層体に弗
素を添加した後、積層体を弗素化合物ガス雰囲気
の高温炉中で保持するか通過させることにより透
明化することを提案した。
The present inventors proposed a method for eliminating the disadvantages of the conventional method for making a porous optical fiber base material transparent as disclosed in the above-mentioned Japanese Patent Application Laid-Open No. 55-67533. In No. 61-78379, as a method that can uniformly add fluorine to an optical fiber base material and make it transparent in a short time, after adding fluorine to the glass particle laminate at a temperature where the glass particle laminate is in a porous state, proposed that the laminate be made transparent by holding or passing it through a high-temperature furnace in a fluorine compound gas atmosphere.

<発明が解決しようとする問題点> ところが、特願昭61−78379号において提案さ
れた光フアイバ母材の製造方法は透明化された光
フアイバ母材中に含まれた屈折率制御物質の含有
量を中心とした分析結果であつて高温加熱と多孔
質積層体の透明化の関係を分析したものではな
い。
<Problems to be Solved by the Invention> However, the method for manufacturing an optical fiber base material proposed in Japanese Patent Application No. 61-78379 involves the inclusion of a refractive index controlling substance in a transparent optical fiber base material. The analysis results focus on the quantity, and do not analyze the relationship between high temperature heating and the transparency of the porous laminate.

そこで、本発明者らは上述したガラス微粒子積
層体の炉中高温加熱と透明化の関係について検討
を重ねたところ、ガラス微粒子積層体を加熱ゾー
ンがガラス微粒子積層体の実効長よりも短かいゾ
ーン加熱炉中を通過させるときは、当該ガラス微
粒子積層体全体を脱水および/又は弗素添加透明
化するのに長時間必要とする。
Therefore, the present inventors repeatedly investigated the relationship between the above-mentioned high-temperature heating of the glass particle laminate in a furnace and its transparency, and found that the glass particle laminate was heated in a zone where the heating zone was shorter than the effective length of the glass particle laminate. When passing through a heating furnace, it takes a long time to dehydrate and/or fluoride the entire glass particle laminate to make it transparent.

また、加熱ゾーンがガラス微粒子積層体の実効
長よりも長い均一加熱炉中に保持加熱するとき
は、外表面の透明化は高いが積層体内部にガス成
分が残留し、積層体外に排出されないので気泡が
残り、均一に透明化した光フアイバ母材が得難か
つた。
In addition, when heating is carried out in a uniform heating furnace where the heating zone is longer than the effective length of the glass particle laminate, the outer surface becomes highly transparent, but gas components remain inside the laminate and are not discharged outside the laminate. Air bubbles remained, making it difficult to obtain a uniformly transparent optical fiber base material.

本発明は、上述した従来の多孔質光フアイバ母
材の透明化方法の欠点を除去するためになされた
ものであつて、ガラス原料物質を火災加水分解し
て得られる媒状ガラス微粒子積層体を、高温炉中
で迅速、かつ内部まで一様に透明化できる多孔質
光フアイバ母材の透明化方法を提供しようとする
ものである。
The present invention was made in order to eliminate the drawbacks of the above-mentioned conventional method for making a porous optical fiber base material transparent, and it uses a medium glass fine particle laminate obtained by fire hydrolysis of a glass raw material. The present invention aims to provide a method for transparentizing a porous optical fiber base material, which can be quickly and uniformly transparentized to the inside in a high-temperature furnace.

また、本発明はこのような多孔質光フアイバ母
材の透明化方法の実施に適する装置を提供しよう
とするものである。
Further, the present invention aims to provide an apparatus suitable for implementing such a method of making a porous optical fiber base material transparent.

<問題点を解決するための手段> 以上の目的を達成するため、本発明の多孔質光
フアイバ母材の透明化処理方法は、ガラス原料物
質を火災加水分解し生成する媒状ガラス微粒子を
積層して得られる多孔質光フアイバ母材を高温炉
中に入れて脱水および/又は屈折率制御物質を添
加し透明化する多孔質光フアイバ母材の透明化方
法において、高温炉として多孔質光フアイバ母材
の実効長よりも短かい加熱ゾーンを有するゾーン
加熱体を複数個、互いに一定の間隔をおいて多孔
質光フアイバ母材の挿入側上流から下流に順次直
列に配置し、かつこれら複数個のゾーン加熱体に
より形成される加熱領域全長が少なくとも上記多
孔質光フアイバ母材と略等しい長さの均一加熱ゾ
ーンを形成するものを用いると共に、この高温炉
に多孔質光フアイバ母材を挿入保持し、透明化温
度以下の温度に一定時間均一加熱処理した後、高
温炉内のゾーン加熱体温度を個々に操作し、多孔
質光フアイバ母材の上端から下端部又は下端から
上端部に透明化温度以上の温度に一定時間加熱す
る加熱ゾーンを移動することを特徴とするもので
ある。
<Means for Solving the Problems> In order to achieve the above object, the method for transparentizing a porous optical fiber base material of the present invention involves laminating medium glass fine particles produced by fire hydrolysis of a glass raw material. In a method for transparentizing a porous optical fiber preform, the porous optical fiber preform obtained by placing the obtained porous optical fiber preform into a high-temperature furnace and dehydrating it and/or adding a refractive index controlling substance to make it transparent. A plurality of zone heating bodies each having a heating zone shorter than the effective length of the base material are arranged in series from upstream to downstream on the insertion side of the porous optical fiber base material at a constant interval from each other, and these plurality A zone heating member is used which forms a uniform heating zone in which the total length of the heating region is at least approximately equal to the length of the porous optical fiber base material, and the porous optical fiber base material is inserted and held in the high temperature furnace. After uniform heating treatment at a temperature below the transparentization temperature for a certain period of time, the temperature of the zone heating element in the high-temperature furnace is individually controlled to transparentize the porous optical fiber base material from the top to the bottom or from the bottom to the top. It is characterized by moving a heating zone that is heated to a temperature higher than that temperature for a certain period of time.

また、本発明の多孔質光フアイバ母材の透明化
装置は炉体内を中心軸方向に炉心管が貫挿し、炉
心管を周回し多孔質光フアイバ母材の実効長より
も短かい加熱ゾーンを有するゾーン加熱体を複数
個、炉心管に沿つて多孔質光フアイバの挿入側上
端から下端側に向けて順次直列配列されると共
に、これら複数個のゾーン加熱体全体により形成
される加熱領域が少くとも多孔質光フアイバ母材
の実効長と略等しい長さの均一加熱領域を形成す
る高温炉と;炉心管内に挿入される多孔質光フア
イバ母材を保持又は出入自在に支持する支持装置
と;炉心管に接続し、炉心管内を脱水材含有ガス
雰囲気又は屈折率増加、減少ガス雰囲気若しくは
Heを主成分とするガス雰囲気にするガス供給装
置と;炉心管に接続され炉心管内ガスを排気する
排気装置と;上記ゾーン加熱体の加熱温度を自在
に制御する加熱温度制御装置とを有することを特
徴とするものである。
In addition, in the apparatus for transparentizing a porous optical fiber base material of the present invention, a furnace core tube is inserted into the furnace body in the direction of the central axis, and the furnace core tube is circulated to create a heating zone shorter than the effective length of the porous optical fiber base material. A plurality of zone heating bodies having a plurality of zone heating bodies are sequentially arranged in series along the furnace tube from the upper end to the lower end of the insertion side of the porous optical fiber, and the heating area formed by the entire plurality of zone heating bodies is small. a high-temperature furnace that forms a uniform heating region with a length substantially equal to the effective length of the porous optical fiber base material; a support device that holds or moves in and out the porous optical fiber base material inserted into the furnace core tube; Connect to the reactor core tube and create a gas atmosphere containing a dehydrating agent or a gas atmosphere that increases or decreases the refractive index within the core tube.
A gas supply device that creates a gas atmosphere containing He as a main component; an exhaust device that is connected to the core tube and exhausts the gas in the core tube; and a heating temperature control device that freely controls the heating temperature of the zone heating body. It is characterized by:

<作用> 以上のように本発明の多孔質光フアイバ母材の
透明化方法は 高温炉として加熱ゾーンが透明化しようとする
多孔質光フアイバ母材の実効長よりも短かいゾー
ン加熱体を複数個、互いに一定の間隔をおいて多
孔質光フアイバ母材の挿入側上流から下流側に向
けて順次直列に配列し、かつこれら複数個のゾー
ン加熱体により形成される加熱領域の全長が、少
くとも上記多孔質光フアイバ母材の実効長と略等
しい長さの均一加熱ゾーンを形成するものを使用
し、かつこの高温炉内において 炉内に入れた多孔質光フアイバ母材を、上記複
数個のゾーン加熱体により、全体を透明化温度以
下の温度に一定時間、均一に加熱した後、さらに 上記ゾーン加熱体の温度を個々に操作し、多孔
質光フアイバ母材の上端から下端部に移動して透
明化温度以上の温度に一定時間、順次ゾーン加熱
する結果、内部に残留したガス成分に基づく気泡
が、順次多孔質光フアイバ母材外に排出される。
<Function> As described above, the method for making a porous optical fiber base material transparent according to the present invention involves using a plurality of zone heating bodies as a high-temperature furnace whose heating zone is shorter than the effective length of the porous optical fiber base material to be made transparent. The zone heating elements are arranged in series from the upstream side to the downstream side of the porous optical fiber base material at a constant interval from each other, and the total length of the heating area formed by these multiple zone heating elements is small. In this high-temperature furnace, the plurality of porous optical fiber base materials placed in the furnace are After uniformly heating the whole body to a temperature below the transparentization temperature for a certain period of time using the zone heating element, the temperature of the zone heating element is individually controlled to move the porous optical fiber base material from the upper end to the lower end. As a result of sequential zone heating to a temperature equal to or higher than the transparentization temperature for a certain period of time, bubbles based on gas components remaining inside are sequentially discharged to the outside of the porous optical fiber base material.

また、本発明にかかる多孔質光フアイバ母材の
透明化装置は、中心軸方向に炉体内を炉心管が貫
挿されると共に、炉心管の外周に多孔質光フアイ
バ母材の実効長よりも短かい加熱ゾーンを有する
ゾーン加熱体が複数個、炉心管に沿つて一定間隔
をおいて順次上流から下流方向に配設され、かつ
これら複数個のゾーン加熱体全体によつて少くと
も多孔質光フアイバ母材の実効長と略等しい長さ
の均一加熱ゾーンを形成する高温炉と;上記各ゾ
ーン加熱体にその温度を制御する加熱温度制御装
置が設けられているから、多孔質光フアイバ母材
を移動しなくても、同一の高温炉内において、透
明化温度以下の温度において一定時間加熱処理し
た後、引き続き、透明化温度以上の温度で一定時
間、多孔質光フアイバ母材の上端から下端側又は
その反対方向に順次加熱ゾーンを移動して、ゾー
ン加熱して透明化処理することができる。
Further, in the apparatus for making a porous optical fiber preform transparent according to the present invention, the furnace core tube is inserted into the furnace body in the central axis direction, and the outer periphery of the furnace core tube has a length shorter than the effective length of the porous optical fiber preform. A plurality of zone heating bodies each having a hollow heating zone are disposed sequentially from upstream to downstream at regular intervals along the furnace core tube, and the plurality of zone heating bodies collectively heat at least a porous optical fiber. A high temperature furnace that forms a uniform heating zone with a length approximately equal to the effective length of the base material; and a heating temperature control device that controls the temperature of each zone heating element is provided, so that the porous optical fiber base material can be heated. Even without moving, the porous optical fiber base material is heated from the upper end to the lower end in the same high-temperature furnace at a temperature below the clearing temperature for a certain period of time, and then at a temperature above the clearing temperature for a certain period of time. Alternatively, the heating zones can be sequentially moved in the opposite direction to carry out zone heating and transparentization treatment.

<実施例> つぎに、本発明の多孔質光フアイバの透明化装
置の代表的な一実施例にしたがつて、多孔質光フ
アイバの透明化方法について具体的に説明する。
<Example> Next, a method for making a porous optical fiber transparent will be specifically described according to a typical example of the apparatus for making a porous optical fiber transparent according to the present invention.

第1図は多孔質光フアイバの透明化装置の概略
構成を示す要部縦断面図であつて、16は縦形の
炉体17の中心部を貫挿する炉心管であつて、炉
心管16の外周には、炉心管16の外周を巻回
し、かつ炉心管内に加熱ゾーンを形成する加熱ヒ
ータ18,19,20が炉心管に沿つて上流から
下流方向に直列に配設されている。加熱ヒータ1
8,19,20はそれぞれの設置位置近傍に温度
センサ21,22,23が設けられ、これらのセ
ンサの示す温度が加熱温度制御装置24,25,
26により予め設定した温度になるように制御さ
れる。
FIG. 1 is a vertical cross-sectional view of the main part showing a schematic configuration of a porous optical fiber transparentizing device, and 16 is a furnace core tube that penetrates the center of a vertical furnace body 17. Heaters 18, 19, and 20 are arranged around the outer circumference of the furnace core tube 16 in series from upstream to downstream along the furnace core tube to form a heating zone within the furnace core tube. Heater 1
8, 19, 20 are provided with temperature sensors 21, 22, 23 near their respective installation positions, and the temperatures indicated by these sensors are transmitted to heating temperature control devices 24, 25,
26, the temperature is controlled to a preset temperature.

炉心管16には支持装置14により炉心管内に
おいて回転自在に支持したシード棒15上に、例
えば気相軸付け法(以下「VAD法」と云う)に
より生成積層させた多孔質光フアイバ母材2が取
付けられている。
The core tube 16 has a porous optical fiber base material 2 produced and laminated by, for example, a vapor phase axial attachment method (hereinafter referred to as "VAD method") on a seed rod 15 that is rotatably supported within the core tube by a support device 14. is installed.

さらに、この炉心管16内にはガス供給装置9
から、送り込むガスの種類および流量を調節して
送給できる構成になつており、さらに、炉心管1
6内ガスを排気する排気装置10が接続されてい
る。
Furthermore, a gas supply device 9 is provided in the core tube 16.
It is configured so that the type and flow rate of the gas to be fed can be adjusted and fed from the furnace core tube 1.
An exhaust device 10 is connected to exhaust the gas inside 6.

なお、温度センサ21,22,23により検出
される温度値がすべて同一になるように加熱温度
制御装置24,25,26を制御し、加熱ヒータ
18,19,20を操作したときの炉17の均一
加熱領域(例えば±25℃程度の温度範囲)の鉛直
方向の長さは、この装置を使用する多孔質光フア
イバの実効長の最も長いものよりも長くする必要
がある。
The heating temperature control devices 24, 25, and 26 are controlled so that the temperature values detected by the temperature sensors 21, 22, and 23 are all the same, and the temperature of the furnace 17 when the heaters 18, 19, and 20 are operated is controlled. The vertical length of the uniform heating region (for example, a temperature range of about ±25° C.) needs to be longer than the longest effective length of the porous optical fiber in which this device is used.

本実施例の装置を用いて、多孔質光フアイバ母
材の脱水、弗素添加および透明化処理を行うには
次のようにして行う。
The dehydration, fluoridation, and transparency treatment of a porous optical fiber base material using the apparatus of this example is carried out as follows.

先ず、温度センサ21,22,23の指示する
温度がすべてT0となるように第2図のように炉
心管16を予熱しておき、支持装置により、処理
しようとする多孔質光フアイバ2に取付けた多孔
質光フアイバを炉心管内に挿入し回転させる。
First, the furnace core tube 16 is preheated as shown in FIG. 2 so that the temperatures indicated by the temperature sensors 21, 22, and 23 are all T 0 , and the porous optical fiber 2 to be processed is heated by the support device. Insert the attached porous optical fiber into the reactor core tube and rotate it.

次いで、温度センサ21,22,23の指示す
る温度がすべて脱水温度T1(透明化温度より低
い)になるように昇温させると共に、炉心管内ガ
ス雰囲気をHeと脱水材としての塩素系ガスの混
合ガス雰囲気にする。そして、この条件下で脱水
が終了したら、温度センサ21,22,23の指
示する温度がすべて弗素添加温度T2に上昇する
と共に、炉心管内ガス雰囲気をHeを弗素混合ガ
ス雰囲気にする。
Next, the temperature is raised so that the temperatures indicated by the temperature sensors 21, 22, and 23 are all the dehydration temperature T 1 (lower than the transparentization temperature), and the gas atmosphere in the core tube is changed to a mixture of He and chlorine gas as a dehydration agent. Create a mixed gas atmosphere. When the dehydration is completed under these conditions, the temperatures indicated by the temperature sensors 21, 22, and 23 all rise to the fluorine addition temperature T2 , and the gas atmosphere in the core tube is changed to a He/fluorine mixed gas atmosphere.

そして、この条件で弗素添加が終了したら、上
流側と中央の温度センサ21,22の指示する温
度をT4にし、最下流の温度センサ24の温度が
透明化温度T3になるように加熱ヒータ20の加
熱温度を徐々に昇温させる。
When fluorine addition is completed under these conditions, the temperatures indicated by the upstream and central temperature sensors 21 and 22 are set to T4 , and the heater is turned on so that the temperature of the most downstream temperature sensor 24 becomes the transparent temperature T3 . The heating temperature of step 20 is gradually raised.

本実施例においては第2図に示すように、温度
T4は弗素を添加する温度T2よりより低いが、こ
れは必ずしも必須要件ではない。センサ23の温
度がT3に達したら、センサ22の温度がT2にな
るように加熱ヒータ9の加熱温度を徐々に上げ、
センサ22の温度もT2に達したらセンサ21の
温度がT3になるように加熱ヒータ18の加熱温
度を徐々に上げる。また、加熱ヒータ20は温度
センサ23が待機温度T0になるまで電源を切つ
て降温させる。そして、センサ21の指示温度が
T3になつたら、加熱ヒータ19の電源を切り、
センサ22の指示温度が待機温度T0に達するま
で降温させる。
In this example, as shown in Figure 2, the temperature
Although T 4 is lower than the temperature at which fluorine is added, T 2 , this is not necessarily a requirement. When the temperature of the sensor 23 reaches T3 , the heating temperature of the heater 9 is gradually increased so that the temperature of the sensor 22 reaches T2 .
When the temperature of the sensor 22 also reaches T2 , the heating temperature of the heater 18 is gradually increased so that the temperature of the sensor 21 reaches T3 . Further, the heater 20 is turned off and cooled down until the temperature sensor 23 reaches the standby temperature T 0 . Then, the temperature indicated by the sensor 21 is
When T 3 is reached, turn off the power to the heater 19,
The temperature is lowered until the temperature indicated by the sensor 22 reaches the standby temperature T 0 .

この状態で、多孔質光フアイバ6が完全に焼
結、透明化が完了したら加熱ヒータ18の電源を
切つて温度センサ21も待機温度T0になるよう
に降温させる。また、炉心管内ガス雰囲気をN2
などの不活性ガス雰囲気にさせる。
In this state, when the porous optical fiber 6 is completely sintered and made transparent, the power to the heater 18 is turned off and the temperature of the temperature sensor 21 is also lowered to the standby temperature T 0 . In addition, the gas atmosphere inside the reactor core tube was changed to N 2
Create an inert gas atmosphere such as

炉心管ガス雰囲気置換が完了したら、すべての
加熱ヒータ近傍の温度センサ21,22,23の
値がT0に降温していなくても、透明化した光フ
アイバ母材を支持装置から取外すことができる。
以上の時間対加熱処理過程は、第2図に示すごと
きタイムテーブルとなる。
When the core tube gas atmosphere replacement is completed, the transparent optical fiber base material can be removed from the support device even if the values of the temperature sensors 21, 22, 23 near all the heaters have not fallen to T0 . .
The above time versus heat treatment process results in a time table as shown in FIG.

以上の実施例は、多孔質光フアイバ母材を、脱
水、弗素添加および焼結透明化する工程について
説明したが、多孔質光フアイバ母材の種類によつ
ては弗素などの屈折率を減少又は増大させる屈折
率制御物質の添加又は脱水処理を要しない場合も
ある。その場合は、本実施例に説明した処理工程
中、屈折率添加又は脱水処理の工程を除いて処理
される。
The above embodiments have described the steps of dehydrating, adding fluorine, and sintering the porous optical fiber base material to make it transparent. In some cases, addition of an increasing refractive index controlling substance or dehydration treatment may not be necessary. In that case, the process is performed excluding the refractive index addition or dehydration process in the process described in this example.

SiO2を火災加水分解して生成した媒状シリカ
微粒子をシード棒上に積層堆積させた長さ750mm
の多孔質光フアイバ母材を、予熱温度800°(=
T0)、脱水温度(=T1)1070℃、弗素添加温度
(=T2)1290℃、焼結透明化温度(=T3)1550
℃、焼結・透明化前待機温度(=T4)1200℃な
る加熱条件で、脱水処理1時間、弗素添加時間
2.4時間、焼結・透明化1.2時間、昇降温およびガ
ス置換処理を含め合計6.2時間で脱水、弗素添加
を完全に行うことができた。
Medium silica fine particles produced by fire hydrolysis of SiO 2 are stacked and deposited on a seed rod with a length of 750 mm.
The porous optical fiber base material was preheated to a temperature of 800° (=
T 0 ), dehydration temperature (=T 1 ) 1070℃, fluorine addition temperature (=T 2 ) 1290℃, sintering transparency temperature (=T 3 ) 1550
℃, standby temperature before sintering/clarification (= T 4 ) under heating conditions of 1200℃, dehydration treatment for 1 hour, fluorine addition time
Dehydration and fluorine addition were completed in a total of 6.2 hours, including 2.4 hours, 1.2 hours for sintering/clarification, temperature raising/cooling, and gas replacement.

しかも、得られた光フアイバ母材には全く気泡
が認められなかつた。
Moreover, no air bubbles were observed in the optical fiber base material obtained.

一方、同じ方法でSiO2を火災加水分解し得ら
れた媒状シリカを積層堆積させた同じ大きさの多
孔質光フアイバ母材を、従来形のゾーン炉中で脱
水、弗素添加、焼結・透明化し、かつ同じ温度条
件で脱水1.6時間、弗素添加5.3時間、焼結・透明
化処理1.6時間、昇降温およびガス置換操作を含
めた計10.0時間かけないと、脱水、弗素添加が完
全に行われた光フアイバ母材が得られなかつた。
On the other hand, a porous optical fiber base material of the same size, in which medium silica obtained by fire hydrolysis of SiO 2 was deposited in layers using the same method, was dehydrated, fluoridated, sintered, and Dehydration and fluorine addition must be completed for a total of 10.0 hours, including 1.6 hours of dehydration, 5.3 hours of fluorine addition, 1.6 hours of sintering/clarification treatment, temperature raising/lowering, and gas replacement operations under the same temperature conditions. However, the optical fiber base material could not be obtained.

また、従来形均一炉を使用して、同じ方法によ
り作製した同じ寸法の多孔質光フアイバ母材を脱
水、弗素添加および焼結透明化処理したところ、
どうしてもある程度の気泡が残り、良好な光フア
イバ母材を良好な歩留りで作製することができな
かつた。
In addition, when a porous optical fiber base material of the same size prepared by the same method was treated with dehydration, fluoridation, and sintering to make it transparent using a conventional homogeneous furnace,
A certain amount of air bubbles inevitably remained, making it impossible to produce a good optical fiber base material at a good yield.

<発明の効果> 以上の説明から明らかなように、本発明にかか
る多孔質光フアイバ母材の透明化方法によれば、
従来の多孔質光フアイバ母材の透明化方法に比
べ、極めて短時間に内部まで一様に透明な光フア
イバを確実に得ることができる。
<Effects of the Invention> As is clear from the above explanation, according to the method for making a porous optical fiber base material transparent according to the present invention,
Compared to conventional methods for making porous optical fiber base materials transparent, it is possible to reliably obtain an optical fiber that is uniformly transparent throughout the interior in an extremely short time.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の多孔質光フアイバ母材の透明
化装置の概略構成を示す要部断面図、第2図は第
1図に示す多孔質光フアイバ母材の透明化装置を
使用して脱水、弗素添加および焼結透明化すると
きの時間対処理温度の関係を示すタイムテーブ
ル、第3図は均熱炉による従来の多孔質光フアイ
バ母材の透明化方法を示す斜視図、第4図は第3
図に示す均熱炉により透明化された光フアイバ母
材の径方向の屈折率分布図、第5図はゾーン炉を
使用した従来の多孔質光フアイバ母材の透明化方
法を示す斜視図、第6図は第5図に示すゾーン炉
により透明化された光フアイバ母材の径方向の屈
折率分布図である。 図中、2……多孔質光フアイバ母材、14……
本発明の多孔質光フアイバ母材の透明化装置の支
持装置、15……シード棒、16……炉心管、1
7……炉体、18,19,20……加熱ヒータ、
21,22,23……温度センサ、24,25,
26……加熱ヒータの加熱温度を制御する加熱温
度制御装置、31……従来の多孔質光フアイバ母
材の透明化に用いていた均熱炉、40……従来の
多孔質光フアイバ母材の透明化に用いていた均熱
炉の加熱ヒータ、41……従来の多孔質光フアイ
バ母材の透明化に用いていたゾーン炉。
FIG. 1 is a cross-sectional view of the main parts showing the schematic structure of the apparatus for transparentizing a porous optical fiber base material of the present invention, and FIG. A timetable showing the relationship between time and treatment temperature for dehydration, fluoridation, and sintering to make it transparent; Figure 3 is a perspective view showing a conventional method for making a porous optical fiber base material transparent using a soaking furnace; Figure 4 The figure is the third
Fig. 5 is a radial refractive index distribution diagram of an optical fiber preform made transparent by a soaking furnace; Fig. 5 is a perspective view showing a conventional method for making a porous optical fiber preform transparent using a zone furnace; FIG. 6 is a radial refractive index distribution diagram of the optical fiber base material made transparent by the zone furnace shown in FIG. In the figure, 2... porous optical fiber base material, 14...
Supporting device for the porous optical fiber base material transparentization device of the present invention, 15... Seed rod, 16... Furnace tube, 1
7... Furnace body, 18, 19, 20... Heater,
21, 22, 23...Temperature sensor, 24, 25,
26...Heating temperature control device for controlling the heating temperature of the heater, 31...Soaking furnace used for making the conventional porous optical fiber base material transparent, 40...Soaking furnace used for making the conventional porous optical fiber base material transparent Heater of soaking furnace used for transparentization, 41...Zone furnace used for conventional transparentization of porous optical fiber base material.

Claims (1)

【特許請求の範囲】 1 ガラス原料物質を火災加水分解し生成する媒
状ガラス微粒子を積層して得られる多孔質光フア
イバ母材を高温炉中に入れて脱水および/又は屈
折率制御物質を添加し透明化する多孔質光フアイ
バ母材の透明化方法において、高温炉として多孔
質光フアイバ母材の実効長よりも短かい加熱ゾー
ンを有するゾーン加熱体を複数個、多孔質光フア
イバ母材の挿入側上流から下流に順次直列に配置
し、かつこれら複数個のゾーン加熱体により形成
される加熱領域全長が少なくとも上記多孔質光フ
アイバ母材と略等しい長さの均一加熱ゾーンを形
成するものを用いると共に、この高温炉内に多孔
質光フアイバ母材を挿入保持し、透明化温度以下
の温度に一定時間均一加熱処理した後、高温炉内
のゾーン加熱体を操作し、多孔質光フアイバ母材
の上端から下端部又は下端から上端部に透明化温
度以上に一定時間加熱する加熱ゾーンを移動する
ことを特徴とする多孔質光フアイバ母材の透明化
方法。 2 上記多孔質光フアイバ母材の高温炉内におけ
る透明化温度以下での均一加熱処理を脱水材含有
ガス雰囲気中で行い;多孔質光フアイバ母材の上
端から下端部又は下端から上端部に透明化温度以
上の温度で一定時間加熱する加熱ゾーンを移動す
るゾーン加熱処理はHeを主成分とする雰囲気中
で行うことを特徴とする特許請求の範囲第1項記
載の多孔質光フアイバ母材の透明化方法。 3 上記多孔質光フアイバ母材の高温炉内におけ
る透明化温度以下での均一加熱処理は、高温炉内
を光フアイバ母材の屈折率を増加又は低下させる
屈折率制御物質含ガス雰囲気中で行い、多孔質光
フアイバ母材の上端から下端部又は下端から上端
部に透明化温度以上の温度で一定時間加熱する加
熱ゾーンを移動するゾーン加熱処理はHeを主成
分とするガス雰囲気中で行うことを特徴とする特
許請求の範囲第1項記載の多孔質光フアイバ母材
の透明化方法。 4 炉体内を中心軸方向に炉心管が貫挿し、炉心
管を周回し多孔質光フアイバ母材の実効長よりも
短かい加熱ゾーンを有するゾーン加熱体が複数
個、炉心管に沿つて一定間隔をおいて多孔質光フ
アイバの挿入側上端から下端側に向けて順次直列
配列されると共に、これら複数個のゾーン加熱体
全体により形成される加熱領域が少くとも多孔質
光フアイバ母材の実効長と略等しい長さの均一加
熱領域を形成する高温炉と;炉心管内に挿入され
る多孔質光フアイバ母材を保持又は出入自在に支
持する支持装置と;炉心管に接続し、炉心管内を
脱水材含有ガス雰囲気又は屈折率増加、減少ガス
雰囲気若しくはHeを主成分とするガス雰囲気に
するガス供給装置と;炉心管に接続され炉心管内
ガスを排気する排気装置と;上記ゾーン加熱体の
加熱温度を自在に制御する加熱温度制御装置とを
有することを特徴とする多孔質光フアイバ母材の
透明化装置。
[Claims] 1. A porous optical fiber base material obtained by laminating medium glass fine particles produced by fire hydrolysis of a glass raw material is placed in a high temperature furnace, and dehydrated and/or a refractive index controlling substance is added. In a method for transparentizing a porous optical fiber base material, a plurality of zone heating bodies each having a heating zone shorter than the effective length of the porous optical fiber base material are used as a high temperature furnace. A device which is arranged in series from upstream to downstream on the insertion side and forms a uniform heating zone in which the total length of the heating area formed by the plurality of zone heating bodies is at least approximately equal to the length of the porous optical fiber base material. At the same time, the porous optical fiber base material is inserted and held in this high-temperature furnace, and after being uniformly heated to a temperature below the transparentization temperature for a certain period of time, the zone heating body in the high-temperature furnace is operated to remove the porous optical fiber base material. 1. A method for transparentizing a porous optical fiber base material, which comprises moving a heating zone that heats the material above the transparentization temperature for a certain period of time from the upper end to the lower end or from the lower end to the upper end. 2 Uniform heat treatment of the above porous optical fiber base material at a temperature below the transparentization temperature in a high temperature furnace in a gas atmosphere containing a dehydrating agent; The porous optical fiber base material according to claim 1, wherein the zone heating treatment in which the heating zone is moved for a certain period of time at a temperature higher than the oxidation temperature is carried out in an atmosphere containing He as a main component. Transparency method. 3. The uniform heat treatment of the porous optical fiber base material in a high-temperature furnace at a temperature below the transparentization temperature is performed in a high-temperature furnace in a gas atmosphere containing a refractive index controlling substance that increases or decreases the refractive index of the optical fiber base material. The zone heating treatment, in which the porous optical fiber base material is moved from the upper end to the lower end or from the lower end to the upper end through a heating zone that is heated for a certain period of time at a temperature higher than the transparentization temperature, must be performed in a gas atmosphere containing He as the main component. A method for making a porous optical fiber base material transparent according to claim 1, characterized in that: 4 A furnace core tube penetrates the furnace body in the direction of the central axis, and a plurality of zone heating bodies that go around the furnace core tube and have a heating zone shorter than the effective length of the porous optical fiber base material are spaced at regular intervals along the furnace core tube. The porous optical fibers are sequentially arranged in series from the upper end to the lower end on the insertion side, and the heating area formed by the entire plurality of zone heating bodies is at least as long as the effective length of the porous optical fiber base material. A high-temperature furnace that forms a uniform heating area of approximately equal length; a support device that holds a porous optical fiber base material inserted into the reactor core tube or supports it so that it can be freely moved in and out; a gas supply device that creates a material-containing gas atmosphere, a refractive index increasing or decreasing gas atmosphere, or a gas atmosphere containing He as a main component; an exhaust device that is connected to the reactor core tube and exhausts the gas in the reactor core tube; and a heating temperature of the zone heating element. 1. A device for transparentizing a porous optical fiber base material, comprising a heating temperature control device for freely controlling the heating temperature.
JP3582887A 1987-02-20 1987-02-20 Method and device for making porous optical fiber base material transparent Granted JPS63206327A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3582887A JPS63206327A (en) 1987-02-20 1987-02-20 Method and device for making porous optical fiber base material transparent

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3582887A JPS63206327A (en) 1987-02-20 1987-02-20 Method and device for making porous optical fiber base material transparent

Publications (2)

Publication Number Publication Date
JPS63206327A JPS63206327A (en) 1988-08-25
JPH0471017B2 true JPH0471017B2 (en) 1992-11-12

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Application Number Title Priority Date Filing Date
JP3582887A Granted JPS63206327A (en) 1987-02-20 1987-02-20 Method and device for making porous optical fiber base material transparent

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JP (1) JPS63206327A (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69834691T2 (en) * 1997-06-19 2007-04-26 Shin-Etsu Chemical Co., Ltd. Method and apparatus for drawing a glass preform
JP3970692B2 (en) * 2002-05-31 2007-09-05 信越化学工業株式会社 Preform manufacturing method
JP2016088821A (en) * 2014-11-10 2016-05-23 信越化学工業株式会社 Sintering apparatus and sintering method for porous glass preform for optical fiber
JP7205216B2 (en) * 2018-12-25 2023-01-17 住友電気工業株式会社 Manufacturing method of preform for optical fiber

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