JPH0473739B2 - - Google Patents
Info
- Publication number
- JPH0473739B2 JPH0473739B2 JP4072686A JP4072686A JPH0473739B2 JP H0473739 B2 JPH0473739 B2 JP H0473739B2 JP 4072686 A JP4072686 A JP 4072686A JP 4072686 A JP4072686 A JP 4072686A JP H0473739 B2 JPH0473739 B2 JP H0473739B2
- Authority
- JP
- Japan
- Prior art keywords
- light
- sample
- optical
- optical fiber
- disposed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000523 sample Substances 0.000 claims description 62
- 239000013307 optical fiber Substances 0.000 claims description 30
- 230000003287 optical effect Effects 0.000 claims description 29
- 238000005259 measurement Methods 0.000 claims description 17
- 238000009792 diffusion process Methods 0.000 description 6
- 108010063955 thrombin receptor peptide (42-47) Proteins 0.000 description 6
- 230000005540 biological transmission Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000001678 irradiating effect Effects 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical group [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/47—Scattering, i.e. diffuse reflection
- G01N21/4738—Diffuse reflection, e.g. also for testing fluids, fibrous materials
- G01N21/474—Details of optical heads therefor, e.g. using optical fibres
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
Description
【発明の詳細な説明】
〈産業上の利用分野〉
この発明は光学測定用プローブに関し、さらに
詳細にいえば、試料に拡散光を照射し、試料から
の反射光を光フアイバにより受光させることによ
り、試料の光学的特性を測定する場合に好適に使
用される光学測定用プローブに関する。[Detailed Description of the Invention] <Industrial Application Field> The present invention relates to an optical measurement probe, and more specifically, the present invention relates to an optical measurement probe that irradiates a sample with diffused light and receives the reflected light from the sample using an optical fiber. , relates to an optical measurement probe suitably used when measuring optical properties of a sample.
〈従来の技術〉
従来から、試料の光学的特性の測定を行なうた
めに、第2図に示す構成のプローブが提供されて
いた。<Prior Art> Conventionally, a probe having the configuration shown in FIG. 2 has been provided in order to measure the optical characteristics of a sample.
さらに詳細に説明すると、下部を小径とした筒
状ケース21の大径部22に光源23、および反
射鏡24を配設して、光源23からの出射光を小
径部25に向かつて効率よく導くようにしてい
る。そして、上記小径部25の下端開口部を試料
Sに密着状に対峙させ得るようにしてあるととも
に、小径部25の内面を、反射効率が高い光反射
面26としてあり、小径部25の上端部を蔽うよ
うに光透過型拡散板27が取付けられてある。さ
らに、上記光透過型拡散板27の所定位置を貫通
させた状態で受光用の光フアイバ28が取付けら
れてあるとともに、光フアイバ28の先端部に光
透過型補助拡散板29が取付けられている。尚、
30は色補度変換フイルタ、または干渉フイルタ
である(特開昭60−202317号公報参照)。 To explain in more detail, a light source 23 and a reflecting mirror 24 are arranged in the large diameter part 22 of the cylindrical case 21 whose lower part has a small diameter, and the light emitted from the light source 23 is efficiently guided toward the small diameter part 25. That's what I do. The lower end opening of the small diameter section 25 is configured to face the sample S in close contact with the sample S, and the inner surface of the small diameter section 25 is formed as a light reflecting surface 26 with high reflection efficiency, and the upper end of the small diameter section 25 A light transmission type diffuser plate 27 is attached to cover the area. Furthermore, an optical fiber 28 for receiving light is attached to pass through a predetermined position of the light-transmitting diffuser plate 27, and a light-transmitting auxiliary diffuser plate 29 is attached to the tip of the optical fiber 28. . still,
30 is a color complementation conversion filter or an interference filter (see Japanese Patent Laid-Open No. 60-202317).
したがつて、光源23からの出射光を効率よく
光透過型拡散板27に導き、拡散板27、および
補助拡散板29により一様に拡散された光を光反
射面26により効率よく試料Sに照射することが
できる。 Therefore, the light emitted from the light source 23 is efficiently guided to the light transmission type diffuser plate 27, and the light uniformly diffused by the diffuser plate 27 and the auxiliary diffuser plate 29 is efficiently guided to the sample S by the light reflecting surface 26. It can be irradiated.
そして、試料Sからの反射光を光フアイバ28
により受光して図示しない解析装置等に導くこと
により、試料Sの色彩情報等を得ることができ
る。 Then, the reflected light from the sample S is transferred to the optical fiber 28.
By receiving the light and guiding it to an analysis device (not shown), color information etc. of the sample S can be obtained.
〈発明が解決しようとする問題点〉
上記の構成のプローブにおいては、試料Sから
の反射光の一部が拡散板により再び反射させられ
て試料Sに照射されることになるので、試料Sの
色、反射率等によつて試料Sに照射される光が変
化したのと同等の結果になり、正確な測定結果を
得ることができなくなるという問題がある。<Problems to be Solved by the Invention> In the probe with the above configuration, a part of the reflected light from the sample S is reflected again by the diffuser plate and is irradiated onto the sample S. This results in the same result as if the light irradiated onto the sample S changes depending on the color, reflectance, etc., and there is a problem that accurate measurement results cannot be obtained.
また、反射率が既知である標準白色反射板とダ
ーク状態とに基いて0〜100%の補正を行なうの
であるが、完全な補正は期待できないという問題
がある。特に、試料Sからの反射光は、光反射面
26、および拡散板27,29により複数回反射
させられた後に再び試料Sに照射させられるので
あり、しかもこの現象は、光の各波長毎の反射率
に基いて定まるのであるから、補正を行なうこと
は極めて困難であり、実際問題としては不可能で
ある。 Further, although correction is performed from 0 to 100% based on a standard white reflector whose reflectance is known and the dark state, there is a problem in that complete correction cannot be expected. In particular, the reflected light from the sample S is reflected multiple times by the light reflecting surface 26 and the diffusion plates 27 and 29 before being irradiated onto the sample S again. Since it is determined based on the reflectance, it is extremely difficult to perform correction, and as a practical matter, it is impossible.
〈発明の目的〉
この発明は上記の問題点に鑑みてなされたもの
であり、試料から1回以上反射させられた光が再
び試料に照射されることを阻止して、照射光の均
一性を確保し、正確な光学測定を行なうことがで
きる光学測定用プローブを提供することを目的と
している。<Purpose of the Invention> This invention was made in view of the above problems, and it is an object of the present invention to prevent light that has been reflected from a sample more than once from being irradiated onto the sample again, thereby improving the uniformity of the irradiated light. The object of the present invention is to provide an optical measurement probe that can perform accurate optical measurements.
〈問題点を解決するための手段〉
上記の目的を達成するための、この発明の光学
測定用プローブは、2焦点を有する集光系の一方
の焦点に光源を配設してあるとともに、他方の焦
点に微小サイズの光透過型拡散板を配設してあ
り、上記拡散板は、拡散光を試料に効率よく導く
鏡面筒体の一端部に配設されてあるとともに、鏡
面筒体の一端部に取付けられた光トラツプの中央
部に配設されてあり、さらに試料からの反射光を
受光できる所定位置に光フアイバを配設してあ
る。<Means for Solving the Problems> In order to achieve the above object, the optical measurement probe of the present invention has a light source disposed at one focus of a condensing system having two focal points, and a light source disposed at one focus of a condensing system having two focal points. A micro-sized light-transmitting type diffuser plate is disposed at the focal point of the mirror. The optical fiber is disposed at the center of the optical trap attached to the sample, and an optical fiber is disposed at a predetermined position where it can receive reflected light from the sample.
但し、上記光フアイバは、開口角により試料全
体からの反射光を受光できる位置に配設されてあ
ればよいが、上記光フアイバの受光端面が拡散板
と面一状となるように配設されてあることが好ま
しい。 However, it is sufficient that the optical fiber is placed at a position where it can receive reflected light from the entire sample depending on the aperture angle, but the optical fiber may be placed so that the light-receiving end surface of the optical fiber is flush with the diffuser plate. It is preferable that the
さらには、上記光フアイバの、少なくとも光ト
ラツプの内部に位置する部分の外面が黒色に形成
されてあることが好ましい。 Furthermore, it is preferable that the outer surface of at least the portion of the optical fiber located inside the optical trap is formed in black.
〈作用〉
以上の構成の光学測定用プローブであれば、光
源からの光を集光系により効率よく微小サイズの
光透過型拡散板に導くことができ、拡散板を通つ
て一様に拡散させられた光が、鏡面筒体により効
率よく試料の表面に導かれる。そして、試料から
の反射光は、一部が光フアイバにより受光され、
残余の反射光は光トラツプにより吸収されるの
で、試料には、拡散板を透過して一様に拡散させ
られた光のみが照射され、試料から1回以上反射
された光が再び試料に照射させられることを防止
することができる。<Function> With the optical measurement probe configured as described above, the light from the light source can be efficiently guided to the microscopic light-transmitting diffuser plate by the condensing system, and can be uniformly diffused through the diffuser plate. The reflected light is efficiently guided to the surface of the sample by the mirror cylinder. A part of the reflected light from the sample is received by an optical fiber,
The remaining reflected light is absorbed by the optical trap, so the sample is irradiated with only the light that has passed through the diffuser plate and is uniformly diffused, and the light that has been reflected from the sample one or more times is irradiated onto the sample again. You can prevent this from happening.
また、上記光フアイバが、開口角により試料全
体からの反射光を受光できる位置に配設されてあ
るが、試料の全範囲からの反射光を光フアイバに
より受光させることができ、特に、上記光フアイ
バの受光端面が拡散板と面一状となるように配設
されてあれば、試料に照射される拡散光を光フア
イバが遮ることがないとともに、試料からの反射
光が拡散板により遮られることがなく、好まし
い。 Furthermore, although the optical fiber is arranged at a position where it can receive reflected light from the entire sample due to its aperture angle, it is possible to receive reflected light from the entire range of the sample with the optical fiber, and in particular, the above-mentioned light If the light-receiving end face of the fiber is arranged flush with the diffuser plate, the optical fiber will not block the diffused light irradiating the sample, and the diffuser plate will block the reflected light from the sample. There are no problems, which is preferable.
さらには、上記光フアイバの、少なくとも光ト
ラツプの内部に位置する部分の外面が黒色に形成
されてあれば、試料からの反射光が光フアイバの
側面により反射させられることがなく、一層好ま
しい。 Furthermore, it is more preferable if the outer surface of at least the portion of the optical fiber located inside the optical trap is formed black, since the reflected light from the sample will not be reflected by the side surface of the optical fiber.
〈実施例〉
以下、実施例を示す添付図面によつて詳細に説
明する。<Examples> Hereinafter, examples will be described in detail with reference to the accompanying drawings showing examples.
第1図はこの発明の光学測定用プローブの一実
施例を示す概略縦断面図であり、光源1と、集光
ミラー2と、光透過型の拡散板3と、鏡面筒体4
と、光フアイバ5と、光トラツプ6とから構成さ
れている。 FIG. 1 is a schematic vertical cross-sectional view showing an embodiment of the optical measurement probe of the present invention, which includes a light source 1, a condensing mirror 2, a light-transmissive diffuser plate 3, and a mirror cylinder 4.
, an optical fiber 5 , and an optical trap 6 .
さらに詳細に説明すると、上記光源1は点光源
と擬制できる程度の大きさのものであり、楕円面
鏡からなる集光ミラー2の一方の焦点位置に配設
されてある。そして、集光ミラー2の他方の焦点
位置に微小サイズの光透過型の拡散板3が配設さ
れている。 More specifically, the light source 1 has a size that can be simulated as a point light source, and is placed at one focal point of a condensing mirror 2 made of an ellipsoidal mirror. At the other focal point of the condensing mirror 2, a microscopic light-transmissive diffuser plate 3 is disposed.
したがつて、光源1からの出射光を効率よく微
小サイズの拡散板3に導くことができる。 Therefore, the light emitted from the light source 1 can be efficiently guided to the micro-sized diffuser plate 3.
また、上記鏡面筒体4は、試料Sが配設される
側の開口部から所定範囲にわたつて鏡面加工(例
えばクロム、アルミニウム等の蒸着加工等)が施
されたものであり、鏡面加工の終端位置に対応さ
せて上記拡散板3が配設できるようにし、拡散板
3から出射される一様な拡散光を全て効率よく試
料Sに照射し得るようにしてある。 Further, the mirror-finished cylinder 4 is mirror-finished (for example, by vapor deposition of chromium, aluminum, etc.) over a predetermined range from the opening on the side where the sample S is disposed. The above-mentioned diffusion plate 3 can be disposed corresponding to the terminal position, so that the sample S can be efficiently irradiated with all the uniformly diffused light emitted from the diffusion plate 3.
そして、上記鏡面筒体4の鏡面加工終端位置に
次続させて、先端側が外方に漸縮する形状で、し
かも内面が黒色に形成された光トラツプ6が配設
されてあるとともに、光トラツプ6の中心部に形
成した光通過部に上記拡散板3が取付けられてい
る。さらに、上記光トラツプ6の所定位置を貫通
させて、試料Sからの反射光を受光するための光
フアイバ5が取付けられている。 Next to the end position of the mirror finishing of the mirror barrel 4, an optical trap 6 is disposed, the tip side of which gradually contracts outward, and the inner surface of which is black. The above-mentioned diffuser plate 3 is attached to a light passage portion formed at the center of the light transmitting member 6 . Furthermore, an optical fiber 5 for receiving reflected light from the sample S is attached to pass through a predetermined position of the optical trap 6.
この光フアイバ5の取付けとしては、受光端面
における開口角が試料Sの全範囲をカバーする状
態であればよく、上記拡散板3の拡散面と面一状
に取付けることが最も好ましい。 The optical fiber 5 may be attached as long as the aperture angle at the light-receiving end surface covers the entire range of the sample S, and it is most preferable to attach it flush with the diffusion surface of the diffusion plate 3.
したがつて、光トラツプ6の外側形状により、
光源1からの光を確実に拡散板3に導くことがで
きるとともに、試料Sからの反射光を効果的に吸
収させ、再度試料Sに照射されるという不都合を
確実に防止することができる。 Therefore, depending on the outer shape of the optical trap 6,
The light from the light source 1 can be reliably guided to the diffuser plate 3, and the reflected light from the sample S can be effectively absorbed, thereby reliably preventing the inconvenience of the sample S being irradiated again.
上記の構成の光学測定用プローブの動作は次の
とおりである。 The operation of the optical measurement probe having the above configuration is as follows.
光源1から出射された光は、殆ど全てが集光ミ
ラー2により拡散板3に導かれ、拡散板3を透過
して一様に拡散させられた状態の拡散光が、鏡面
筒体4の内面により効率よく反射させられて試料
Sに導かれる。 Almost all of the light emitted from the light source 1 is guided to the diffuser plate 3 by the condensing mirror 2, and the diffused light that is uniformly diffused after passing through the diffuser plate 3 is reflected on the inner surface of the mirror cylinder 4. The light is efficiently reflected and guided to the sample S.
即ち、一様な拡散光により試料Sが照射される
ことになる。 That is, the sample S is irradiated with uniformly diffused light.
そして、試料Sからの反射光は、一部が光フア
イバ5の受光端面に入射され、図示しない測定装
置に導かれて色彩データ等が得られせることにな
る。 A portion of the reflected light from the sample S is incident on the light-receiving end face of the optical fiber 5, and is guided to a measuring device (not shown) to obtain color data and the like.
また、残余の反射光は光トラツプ6に導かれ
て、効果的に吸収され、再び試料Sに照射される
ことを確実に防止することができる。 Further, the remaining reflected light is guided to the optical trap 6, where it is effectively absorbed, and it is possible to reliably prevent the sample S from being irradiated again.
この場合において、光トラツプ6に導かれた後
も、光フアイバ5の外面により反射させられて、
再び試料Sに照射させられる可能性があるので、
再度の試料Sへの照射を確実に防止するために
は、光フアイバ5の外面を黒色に形成すればよ
い。 In this case, even after being guided into the optical trap 6, it is reflected by the outer surface of the optical fiber 5.
Since there is a possibility that the sample S will be irradiated again,
In order to reliably prevent the sample S from being irradiated again, the outer surface of the optical fiber 5 may be formed black.
また、光フアイバ5の受光端面の位置について
は、上記拡散板3より上方であつても、下方であ
つてもよいが、開口角が試料Sの全測定範囲をカ
バー得ることが必要であるとともに、光フアイバ
5に入射されるべき試料Sからの反射光が拡散板
3により遮られることのない位置に設定すること
が必要である。 The position of the light-receiving end face of the optical fiber 5 may be above or below the diffuser plate 3, but it is necessary that the aperture angle covers the entire measurement range of the sample S. , it is necessary to set the optical fiber 5 at a position where the reflected light from the sample S to be incident on the optical fiber 5 is not blocked by the diffuser plate 3.
尚、この発明は、上記の実施例に限定されるも
のではなく、例えば集光ミラー2に代えて集光レ
ンズを使用することが可能である他、この発明の
要旨を変更しない範囲内において種々の設計変更
を施すことが可能である。 Note that the present invention is not limited to the above-mentioned embodiments; for example, a condenser lens may be used in place of the condenser mirror 2, and various modifications may be made without departing from the gist of the present invention. It is possible to make design changes.
〈発明の効果〉
以上のようにこの発明は試料から反射された光
が再度試料に照射されることを確実に阻止して、
正確な光学測定を行なうことができるという特有
の効果を奏する。<Effects of the Invention> As described above, the present invention reliably prevents the light reflected from the sample from irradiating the sample again.
It has the unique effect of being able to perform accurate optical measurements.
第1図はこの発明の光学測定用プローブの一実
施例を示す概略縦断面図、第2図は従来例を示す
概略縦断面図。
1……光源、2……集光ミラー、3……拡散
板、4……鏡面筒体、5……光フアイバ、6……
光トラツプ。
FIG. 1 is a schematic vertical cross-sectional view showing an embodiment of the optical measurement probe of the present invention, and FIG. 2 is a schematic vertical cross-sectional view showing a conventional example. DESCRIPTION OF SYMBOLS 1... Light source, 2... Condensing mirror, 3... Diffusion plate, 4... Mirror cylinder, 5... Optical fiber, 6...
Light trap.
Claims (1)
配設してあるとともに、他方の焦点に微小サイズ
の光透過型拡散板を配設してあり、上記拡散板
は、拡散光を試料に効率よく導く鏡面筒体の一端
部に配設されてあるとともに、鏡面筒体の一端部
に取付けられた光トラツプの中央部に配設されて
あり、さらに試料からの反射光を受光できる所定
位置に光フアイバを配設してあることを特徴とす
る光学測定用プローブ。 2 上記光フアイバが、開口角により試料全体か
らの反射光を受光できる位置に配設されてある上
記特許請求の範囲第1項記載の光学測定用プロー
ブ。 3 上記光フアイバの受光端面が拡散板と面一状
となるように配設されてある上記特許請求の範囲
第1項記載の光学測定用プローブ。 4 上記光フアイバの、少なくとも光トラツプの
内部に位置する部分の外面が黒色に形成されてあ
る上記特許請求の範囲第1項記載の光学測定用プ
ローブ。[Claims] 1. A light source is disposed at one focal point of a condensing system having two focal points, and a microscopic light-transmitting type diffuser plate is disposed at the other focal point. is placed at one end of the specular tube that efficiently guides the diffused light to the sample, and is also placed in the center of the optical trap attached to one end of the specular tube. An optical measurement probe characterized in that an optical fiber is disposed at a predetermined position capable of receiving reflected light. 2. The optical measurement probe according to claim 1, wherein the optical fiber is disposed at a position where it can receive reflected light from the entire sample depending on the aperture angle. 3. The optical measurement probe according to claim 1, wherein the optical fiber is disposed so that the light receiving end face thereof is flush with the diffuser plate. 4. The optical measurement probe according to claim 1, wherein the outer surface of at least the portion of the optical fiber located inside the optical trap is black.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4072686A JPS63228044A (en) | 1986-02-25 | 1986-02-25 | Optical measuring probe |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4072686A JPS63228044A (en) | 1986-02-25 | 1986-02-25 | Optical measuring probe |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63228044A JPS63228044A (en) | 1988-09-22 |
| JPH0473739B2 true JPH0473739B2 (en) | 1992-11-24 |
Family
ID=12588618
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4072686A Granted JPS63228044A (en) | 1986-02-25 | 1986-02-25 | Optical measuring probe |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63228044A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8905752B2 (en) | 2009-07-14 | 2014-12-09 | Ihi Corporation | Burner apparatus |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5597237A (en) * | 1995-05-30 | 1997-01-28 | Quantum Logic Corp | Apparatus for measuring the emissivity of a semiconductor wafer |
-
1986
- 1986-02-25 JP JP4072686A patent/JPS63228044A/en active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8905752B2 (en) | 2009-07-14 | 2014-12-09 | Ihi Corporation | Burner apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63228044A (en) | 1988-09-22 |
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