JPH0474319B2 - - Google Patents
Info
- Publication number
- JPH0474319B2 JPH0474319B2 JP5824488A JP5824488A JPH0474319B2 JP H0474319 B2 JPH0474319 B2 JP H0474319B2 JP 5824488 A JP5824488 A JP 5824488A JP 5824488 A JP5824488 A JP 5824488A JP H0474319 B2 JPH0474319 B2 JP H0474319B2
- Authority
- JP
- Japan
- Prior art keywords
- single crystal
- crystal
- temperature gradient
- melt
- geo
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000013078 crystal Substances 0.000 claims description 52
- 239000000155 melt Substances 0.000 claims description 12
- 238000000034 method Methods 0.000 claims description 10
- 238000004519 manufacturing process Methods 0.000 claims description 5
- 239000002994 raw material Substances 0.000 claims description 3
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 6
- 230000007547 defect Effects 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 3
- 229910052697 platinum Inorganic materials 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000006698 induction Effects 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 125000006850 spacer group Chemical group 0.000 description 2
- 229910015902 Bi 2 O 3 Inorganic materials 0.000 description 1
- 230000005697 Pockels effect Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 230000035936 sexual power Effects 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Description
(産業上の利用分野)
この発明は、単結晶の製造方法、とくに引上げ
法を適用したBi12SiO20単結晶あるいはBi12GeO20
単結晶の製造方法に関するものである。
(従来の技術)
従来から、フアラデー効果、ポツケルス効果を
共に有する単結晶として、Bi12SiO20単結晶ある
いはBi12GeO20単結晶等が知られており、これら
はるつぼ内に装入した原料を加熱溶融させたの
ち、溶融原料に引上軸の先端にとりつけた種結晶
を浸し、該引上軸を回転させつつ徐々に引上げる
いわゆる引上げ法を適用して製造されている。
ここに、上記の技術を適用した単結晶の育成で
は、固液界面で発生する潜熱を放散するために、
融液直上すなわち融液面上部10mm付近において比
較的急峻な温度勾配を形成する必要があるが、こ
の温度勾配が大きすぎると異種結晶相の成長が不
可避でしかも引上げた単結晶上部にクラツクが発
生する等の問題により、該領域の温度勾配を10〜
40℃/cmに設定するのが一般的であつた。
(発明が解決しようとする課題)
ところでBi12SiO20やBi12GeO20の如き単結晶を
製造するに当り、従来技術をただ単に適用しただ
けでは育成した単結晶のとくに肩部に数〜数十μ
mの気泡が発生し易く、また育成過程において単
結晶と融液とが分断される等の問題があつた。
上述したような従来問題を解消し、内部欠陥や
クラツク等のない高品質の単結晶を得ることがで
きる新規な手法を与えることがこの発明の目的で
ある。
(課題を解決するための手段)
この発明は引上げ法を適用してBi12SiO20又は
Bi12GeO20の単結晶を製造するに当り、上記単結
晶用の原料を装入したるつぼ内融液面から単結晶
の引上げ方向上方における10mmまでの間の温度勾
配を50〜75℃/cmに調整すること、それに引続く
150mmに至るまでの間の温度勾配を10℃/cm以下
に調整することを特徴とする単結晶の製造方法で
ある。
ここで、まずるつぼ内融液面からその上方10mm
までの間の温度勾配を50〜75℃/cmの範囲に規制
する理由は、融液面から10mmまでの間の温度勾配
が50℃/cm未満では固液界面にて発生する熱の放
散が不十分となり気泡が発生し易くなる一方、75
℃/cmを越えるとBi2O3の揮発によつて、所望の
結晶とは異なる結晶相の成長が起り易いからであ
る。また、これに引続く150mmまでの間の温度勾
配を10℃/cm以下とするのはこの領域における温
度勾配が10℃/cmを越えるとクラツクが発生し易
くなるからである。
(作用)
この発明では、上記の条件に従つてBi12SiO20
あるいはBi12GeO20の単結晶を育成するので、得
られた単結晶には、気泡やクラツクなどの発生が
全くなく、所期した目指を有利に達成できるので
ある。
なお単結晶の育成過程においてこの発明に従う
温度勾配を実現するためには、誘導加熱方式によ
る育成炉の断面構造を一例として示す第1図にお
いて、例えばBi12SiO2の融液1を収容する白金製
るつぼ3と温度勾配の調整を司る白金製アフター
ヒーター8との間隔lをセラミツクの如きスペー
サ9にて20〜50mmに、より好ましくは25〜40mmに
設定するのが好適である。
(実施例)
実施例 1
上掲第1図に示した育成炉のるつぼ(外径150
mm、高さ150mm)にBi12SiO20焼結体を14Kg装入し
たのち、高周波誘導加熱により上記の焼結体を融
液化し、該融液を900℃に維持しつつ表−1に示
す条件の下に直径60mm、直胴部長100mmになる
Bi12SiO20の単結晶を育成し、得られた単結晶の
品質を調査した。
その結果を表1に併せて示す。
なお、引上げ軸の先端には<100>方位の種子
結晶を取付けた。
(Industrial Application Field) This invention relates to a method for producing a single crystal, particularly a Bi 12 SiO 20 single crystal or Bi 12 GeO 20 using a pulling method.
This invention relates to a method for producing a single crystal. (Prior art) Bi 12 SiO 20 single crystal or Bi 12 GeO 20 single crystal, etc., have been known as single crystals that have both the Faraday effect and the Pockels effect. After heating and melting, a seed crystal attached to the tip of a pulling shaft is immersed in the molten raw material, and the material is gradually pulled up while rotating the pulling shaft, which is the so-called pulling method. In growing single crystals using the above technology, in order to dissipate the latent heat generated at the solid-liquid interface,
It is necessary to form a relatively steep temperature gradient directly above the melt, i.e. around 10 mm above the melt surface, but if this temperature gradient is too large, the growth of foreign crystal phases is inevitable, and cracks occur at the top of the pulled single crystal. Due to problems such as
It was common to set the temperature to 40°C/cm. (Problem to be solved by the invention) By the way, when producing single crystals such as Bi 12 SiO 20 and Bi 12 GeO 20 , simply applying the conventional technology will result in the growth of several to several crystals, especially in the shoulder region of the grown single crystal. ten μ
There were problems such as easy generation of bubbles and separation of the single crystal and the melt during the growth process. It is an object of the present invention to solve the above-mentioned conventional problems and to provide a new method capable of obtaining high-quality single crystals free of internal defects and cracks. (Means for solving the problem) This invention applies a pulling method to produce Bi 12 SiO 20 or
In producing a single crystal of Bi 12 GeO 20 , the temperature gradient from the melt surface in the crucible charged with the raw material for the single crystal to 10 mm above the pulling direction of the single crystal is set at 50 to 75°C/cm. to be adjusted to, followed by
This method of producing a single crystal is characterized by adjusting the temperature gradient up to 150 mm to 10° C./cm or less. First, 10 mm above the melt surface in the crucible.
The reason for regulating the temperature gradient between 50 and 75℃/cm is that if the temperature gradient from the melt surface to 10mm is less than 50℃/cm, the heat generated at the solid-liquid interface will not dissipate. 75
This is because if the temperature exceeds .degree. C./cm, a crystal phase different from the desired crystal tends to grow due to volatilization of Bi 2 O 3 . Further, the temperature gradient in the subsequent 150 mm is set to 10° C./cm or less because cracks are likely to occur if the temperature gradient in this region exceeds 10° C./cm. (Operation) In this invention, according to the above conditions, Bi 12 SiO 20
Alternatively, since a single crystal of Bi 12 GeO 20 is grown, the obtained single crystal does not have any bubbles or cracks, and the desired goal can be advantageously achieved. In order to realize the temperature gradient according to the present invention in the single crystal growth process, for example, in FIG . It is preferable that the distance 1 between the crucible 3 and the after-heater 8 made of platinum, which controls the temperature gradient, be set to 20 to 50 mm, more preferably 25 to 40 mm, using a spacer 9 such as ceramic. (Example) Example 1 The crucible of the growth furnace shown in Figure 1 above (outer diameter 150
After charging 14 kg of Bi 12 SiO 20 sintered body into a sintered body (mm, height 150 mm), the above sintered body was melted by high-frequency induction heating, and the melt was maintained at 900°C as shown in Table 1. Under the conditions, the diameter is 60mm and the straight body length is 100mm.
A single crystal of Bi 12 SiO 20 was grown and the quality of the obtained single crystal was investigated. The results are also shown in Table 1. In addition, a <100> oriented seed crystal was attached to the tip of the pulling shaft.
【表】
この発明に従うBi12SiO20単結晶の育成では、
育成中結晶が融液から切離れる不具合が全くな
く、クラツクや気泡等の欠陥がない高品質の単結
晶を得ることができた。またこの単結晶を切断、
研磨後直交ニコル間に配置し観察したところ内部
ひずみは見られなかつた。
これに対し比較例における単結晶の育成は育成
中に結晶と融液が分断したり、クラツクの発生や
気泡の内在が確認され、何れの場合を高品質の単
結晶を得ることができなかつた。
実施例 2
実施例1と同様の育成炉のるつぼにBi12GeO20
焼結体を14Kg装入してから、高周波誘導加熱によ
り上記焼結体を融液化し該融液を930℃に維持し
つつ表2に示す条件の下に直径60mm、直胴部長
100mmになるBi12GeO20単結晶を育成し、得られ
た単結晶の品質を調査した。
その結果を表2に併せて示す。[Table] In the growth of Bi 12 SiO 20 single crystal according to this invention,
There was no problem of the crystal separating from the melt during growth, and a high-quality single crystal without defects such as cracks or bubbles could be obtained. Also, cutting this single crystal,
After polishing, it was placed between orthogonal nicols and observed, and no internal distortion was observed. On the other hand, in the case of growing single crystals in comparative examples, it was confirmed that the crystal and melt separated during the growth, that cracks were generated, and that bubbles were present, making it impossible to obtain high-quality single crystals. . Example 2 Bi 12 GeO 20 was placed in a crucible of a growth furnace similar to Example 1.
After charging 14 kg of the sintered body, the sintered body was melted by high-frequency induction heating, and while maintaining the melt at 930°C, it was heated to a diameter of 60 mm and a straight body part under the conditions shown in Table 2.
A Bi 12 GeO 20 single crystal of 100 mm was grown and the quality of the obtained single crystal was investigated. The results are also shown in Table 2.
【表】
この発明に従うBi12GeO20単結晶の育成におい
ては、育成過程で結晶が融液から分断することは
なく、クラツクや気泡等の欠陥がない品質の良好
な単結晶を得ることができた。またこの単結晶を
切断・研磨後直交ニコル間に配置し観察したが内
部ひずみは見られなかつた。
これに対し比較例では、単結晶の育成中に結晶
と融液が分断することはなかつたけれどもクラツ
クが発生したり気泡が内在し、高品質の単結晶を
得ることができないことが確かめられた。
(発明の効果)
かくしてこの発明によれば、Bi12SiO20又は
Bi12GeO20単結晶の育成過程における結晶と融液
の分断はもちろん、気泡、クラツク、熱ひずみ等
の欠陥を有利に回避して、単結晶の高品質化、結
晶製造における歩留りの向上、生産性の大幅な上
昇を図ることができる。[Table] In growing the Bi 12 GeO 20 single crystal according to the present invention, the crystal does not separate from the melt during the growth process, and a single crystal of good quality without defects such as cracks or bubbles can be obtained. Ta. After cutting and polishing, this single crystal was placed between crossed Nicols and observed, but no internal strain was observed. On the other hand, in the comparative example, although the crystal and the melt did not separate during single crystal growth, it was confirmed that cracks occurred and bubbles were present, making it impossible to obtain a high quality single crystal. . (Effect of the invention) Thus, according to this invention, Bi 12 SiO 20 or
It advantageously avoids the separation of the crystal and melt during the growth process of Bi 12 GeO 20 single crystal, as well as defects such as bubbles, cracks, and thermal distortion, resulting in higher quality single crystals, improved yields in crystal manufacturing, and production. It is possible to significantly increase sexual performance.
第1図は、育成炉の断面構造を示す模式図であ
る。
1……融液、2……単結晶、3……白金製るつ
ぼ、4……耐火物、5……耐火物、6……引上げ
軸、7……高周波コイル、8……白金製アフター
ヒーター、9……スペーサー。
FIG. 1 is a schematic diagram showing the cross-sectional structure of a growth furnace. 1... Melt, 2... Single crystal, 3... Platinum crucible, 4... Refractory, 5... Refractory, 6... Pulling shaft, 7... High frequency coil, 8... Platinum after heater , 9...Spacer.
Claims (1)
の単結晶を製造するに当り、 上記単結晶用の原料を装入したるつぼ内融液面
から単結晶の引上げ方向上方における10mmまでの
間の温度勾配を50〜75℃/cmに調整すること、そ
れに引続く150mmに至るまでの間の温度勾配を10
℃/cm以下に調整することを特徴とする単結晶の
製造方法。[Claims] 1 Bi 12 SiO 20 or Bi 12 GeO 20 by applying the pulling method
When producing a single crystal, the temperature gradient from the melt surface in the crucible charged with the raw material for the single crystal to 10 mm above the pulling direction of the single crystal should be adjusted to 50 to 75°C/cm. , followed by a temperature gradient of 10 to 150 mm.
A method for producing a single crystal characterized by adjusting the temperature to ℃/cm or less.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5824488A JPH01234399A (en) | 1988-03-14 | 1988-03-14 | Production of single crystal |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5824488A JPH01234399A (en) | 1988-03-14 | 1988-03-14 | Production of single crystal |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01234399A JPH01234399A (en) | 1989-09-19 |
| JPH0474319B2 true JPH0474319B2 (en) | 1992-11-25 |
Family
ID=13078706
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5824488A Granted JPH01234399A (en) | 1988-03-14 | 1988-03-14 | Production of single crystal |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01234399A (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6088139A (en) * | 1995-08-31 | 2000-07-11 | Ngk Insulators, Ltd. | Method and an apparatus for recording and reproducing using a hologram, an apparatus for irradiating light for reproduction to a hologram, a hologram device and a manufacturing method of the same |
-
1988
- 1988-03-14 JP JP5824488A patent/JPH01234399A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01234399A (en) | 1989-09-19 |
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