JPH0479407B2 - - Google Patents
Info
- Publication number
- JPH0479407B2 JPH0479407B2 JP58106244A JP10624483A JPH0479407B2 JP H0479407 B2 JPH0479407 B2 JP H0479407B2 JP 58106244 A JP58106244 A JP 58106244A JP 10624483 A JP10624483 A JP 10624483A JP H0479407 B2 JPH0479407 B2 JP H0479407B2
- Authority
- JP
- Japan
- Prior art keywords
- harmful gas
- valve
- detector
- normally open
- monitoring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/02—Devices for withdrawing samples
- G01N1/22—Devices for withdrawing samples in the gaseous state
- G01N1/26—Devices for withdrawing samples in the gaseous state with provision for intake from several spaces
Landscapes
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Engineering & Computer Science (AREA)
- Biomedical Technology (AREA)
- Molecular Biology (AREA)
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Sampling And Sample Adjustment (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Description
【発明の詳細な説明】
本発明は、半導体工場や化学工場等において多
数の製造室等の監視領域での不慮の事故による有
害ガス発生を検知するための有害ガス警報器に関
する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a harmful gas alarm device for detecting the generation of harmful gas due to an unexpected accident in a monitoring area such as a large number of manufacturing rooms in a semiconductor factory, a chemical factory, or the like.
従来の上記警報器としては、監視領域夫々に接
続した通気路に対し、各通気路ごとに有害ガス検
知器を設けたものとか、あるいは、監視領域夫々
に接続した通気路夫々を、有害ガス検知器を介在
させた１本の探査用流路に接続するとともに、通
気路夫々に開閉弁を設け、それら開閉弁を、例え
ば５分おき等、所定時間ずつ順に択一的に開いて
いくものがあつた。 Conventional alarms include those in which a harmful gas detector is installed in each ventilation path connected to each monitoring area, or a harmful gas detector is installed in each ventilation path connected to each monitoring area. In addition to being connected to a single exploration channel with a container interposed between them, each ventilation channel is provided with an on-off valve, and these on-off valves are selectively opened in sequence for a predetermined period of time, such as every 5 minutes. It was hot.
ところが、前者の場合、監視領域が多くなるに
連れ、備えるべき検知器の個数が多くなり、高価
につく欠点があつた。他方、後者の場合、開閉弁
を開いてサンプリングした後、次にサンプリング
するまでに時間を要し、殊に監視領域が多くなれ
ばなる程、非サンプリング時間が長くなり、その
途中で有害ガスが発生していてもそのことを検出
できず、有害ガス発生の検知に遅れを生じ、安全
性に欠ける欠点があつた。 However, in the former case, as the area to be monitored increases, the number of detectors that must be provided increases, resulting in high costs. On the other hand, in the latter case, after opening the on-off valve and sampling, it takes time to sample the next time, especially as the number of monitoring areas increases, the non-sampling time becomes longer, and harmful gas may be released in the process. Even if the gas was generated, it could not be detected, resulting in a delay in detecting the generation of harmful gas, resulting in a lack of safety.
本発明は、上述の事柄に留意してなされたもの
で、その目的とするところは、複数の監視領域に
おける有害ガスの発生を単一の有害ガス検知器に
よつて検出することができると共に、その発生箇
所を特定できるようにした有害ガス警報器を提供
することにある。 The present invention has been made with the above-mentioned considerations in mind, and its purpose is to be able to detect the occurrence of harmful gases in multiple monitoring areas with a single harmful gas detector, and to An object of the present invention is to provide a harmful gas alarm device that can identify the location where the gas is generated.
上述の目的を達成するため、本発明に係る有害
ガス警報器は、複数の監視領域のそれぞれに接続
された通気路のそれぞれを、有害ガス検知器を介
在させた１本の探査用流路に接続し、前記通気路
のそれぞれに各別に常開型開閉弁を設けると共
に、前記常開型開閉弁を選択的に閉じ操作する選
択操作機構を設け、常時は、全ての監視領域のガ
スを同時に混合状態で検知器に流入させるように
する一方、前記有害ガス検知器によつて有害ガス
検出した場合には、前記選択操作機構によつて前
記常開型開閉弁を選択的に閉じ操作することによ
り、有害ガスの発生している監視領域を特定する
ようにしている。 In order to achieve the above object, the harmful gas alarm according to the present invention converts each of the ventilation channels connected to each of the plurality of monitoring areas into a single exploration flow channel with a harmful gas detector interposed therebetween. A normally open on-off valve is provided for each of the ventilation passages, and a selection operation mechanism is provided to selectively close the normally open on-off valve. While allowing the gas to flow into the detector in a mixed state, when the harmful gas is detected by the harmful gas detector, the normally open on-off valve is selectively closed by the selection operation mechanism. This allows us to identify monitoring areas where harmful gases are being generated.
上記特徴的構成によれば、常時は、全ての監視
領域のガスを同時に混合状態で単一の検知器に流
入させるようにしているので、何れかの監視領域
で有害ガスが発生した場合、これを直ちに検出す
ることができる。従つて、複数の監視領域に対し
て単一の検知器を設けるだけで有害ガスの発生を
検出することができるので安価である。 According to the above-mentioned characteristic configuration, the gases from all the monitoring areas are normally flowed into a single detector in a mixed state at the same time, so if noxious gas is generated in any monitoring area, this can be detected immediately. Therefore, the generation of harmful gas can be detected by simply providing a single detector for a plurality of monitoring areas, which is inexpensive.
そして、前記監視領域の何れかで有害ガスが発
生した場合には、その検知後において、常開型開
閉弁を選択的に閉じ操作することにより、有害ガ
スが発生している監視領域を検出（特定）するこ
とができるから、設定時間ずつ開閉弁を択一的に
開操作する従来のものと比べて、開閉弁の操作時
間を大幅に短縮することができ、それだけ、有害
ガスの発生している監視領域を早く特定すること
ができ、安全性を向上させることができる。 If harmful gas is generated in any of the monitoring areas, after detection, the normally open on-off valve is selectively closed to detect the monitoring area where the harmful gas is generated ( Compared to the conventional method, which selectively opens the on-off valve at set intervals, the operation time of the on-off valve can be significantly shortened, and this reduces the amount of harmful gas generated. It is possible to quickly identify the monitoring area where the system is located, and safety can be improved.
以下、本発明の実施例を図面を基にして説明す
る。 Embodiments of the present invention will be described below with reference to the drawings.
半導体工場、化学工場等における製造室等の監
視領域１，１，１夫々に通気路２が接続されると
ともに、それら通気路２…のすべてが、有害ガス
検知器３を介在させた１本の探査用流路４に接続
され、かつ、前記通気路２…夫々に電磁式の第１
ないし第３常開型開閉弁５ａ，５ｂ，５ｃが設け
られるとともに、前記検知器３に連係の選択操作
機構６によつて開閉弁５…を選択的に閉じ操作す
るように構成され、有害ガスの発生している監視
領域１…を検知する有害ガス警報器が構成されて
いる。 A ventilation path 2 is connected to each monitoring area 1, 1, 1 of a manufacturing room, etc. in a semiconductor factory, a chemical factory, etc., and all of these ventilation paths 2... An electromagnetic first
or third normally open type on-off valves 5a, 5b, 5c are provided, and the on-off valves 5 are configured to be selectively closed by a selection operation mechanism 6 linked to the detector 3. A harmful gas alarm is configured to detect a monitoring area 1 where gas is occurring.
前記通気路２…夫々に、吸引ポンプ７、流量計
８及び流量調整弁９が設けられ、監視領域１…
夫々から互いに必要量のガスを吸引して検知器３
に供給するように調整可能に構成されている。 The ventilation path 2... is provided with a suction pump 7, a flow meter 8, and a flow rate adjustment valve 9, respectively, and the monitoring area 1...
Detector 3 sucks the required amount of gas from each
is configured to be adjustable to supply
前記選択操作機構６は、検知器３からの信号を
入力する制御回路１０と、その制御回路１０から
の指令信号により前記開閉弁５ａ，５ｂ，５ｃを
閉じ操作する駆動回路１１とから構成され、検知
器３による有害ガス発生の検知に伴つて開閉便５
ａ，５ｂ，５ｃを選択的に閉じ操作し、有害ガス
の発生している監視領域１…を検出するように構
成されている。 The selection operation mechanism 6 is composed of a control circuit 10 that inputs a signal from the detector 3, and a drive circuit 11 that closes the on-off valves 5a, 5b, 5c based on the command signal from the control circuit 10. Opening/closing stool 5 upon detection of harmful gas generation by detector 3
A, 5b, 5c are selectively closed to detect monitoring areas 1 where harmful gases are generated.
具体的には、前記制御回路１０は、開閉弁５
ａ，５ｂ，５ｃを例えば次のように閉じ操作す
る。 Specifically, the control circuit 10 includes an on-off valve 5
For example, a, 5b, and 5c are closed as follows.
即ち、前記検知器３が有害ガスの発生を検知し
たとき、
○イ 先ず第２及び第３開閉弁５ｂ，５ｃを閉じ
る。 That is, when the detector 3 detects the generation of harmful gas, first, the second and third on-off valves 5b and 5c are closed.
○ロ 次に、第２開閉弁５ｂを開くと共に、第１開
閉弁５ａを閉じる。○B Next, the second on-off valve 5b is opened, and the first on-off valve 5a is closed.
○ハ 最後に、第３開閉弁５ｃを開くと共に第２開
閉弁５ｂを閉じる。○C Finally, open the third on-off valve 5c and close the second on-off valve 5b.
以上の操作をもつて、どの監視領域１で有害ガ
スが発生しているかを検知することができるので
あり、勿論、２箇所の監視領域で同時に有害ガス
が発生していても、その事態を検知できる。 With the above operations, it is possible to detect in which monitoring area 1 harmful gas is being generated. Of course, even if harmful gas is occurring in two monitoring areas at the same time, the situation can be detected. can.
第２図は、監視領域１が多数の場合の実施例を
示し、監視領域１…をグループＧ…分けし、その
グループＧ…ごとの中間流路１２…夫々を介して
通気路２…が探査用流路４に接続されると共に、
中間流路１２…夫々に電磁式の常開型開閉弁１３
が設けられ、選択操作機構６により、上述実施例
におけると同様の手順で、先ず、有害ガスを発生
しているグループＧを検出し、その後、有害ガス
が発生されているグループＧに対して上述と同様
の手順で第１ないし第３開閉弁５ａ，５ｂ，５ｃ
を開閉操作して、最終的に有害ガスの発生源であ
る監視領域１を検出するように構成されている。 FIG. 2 shows an embodiment in which there are a large number of monitoring areas 1, in which the monitoring areas 1 are divided into groups G, and the ventilation passages 2 are searched through the intermediate flow paths 12 for each group G. While being connected to the water flow path 4,
Intermediate flow path 12...An electromagnetic normally open on-off valve 13 for each
is provided, and the selection operation mechanism 6 first detects the group G generating harmful gas using the same procedure as in the above-mentioned embodiment, and then detects the group G generating harmful gas as described above. The first to third on-off valves 5a, 5b, 5c are
The monitor area 1 is configured to open and close to finally detect the monitoring area 1 that is the source of harmful gas.
尚、通気路２の本数が多い場合には、マイコン
により前記選択操作機構６を構成するようにして
も良い。 Incidentally, when the number of ventilation passages 2 is large, the selection operation mechanism 6 may be configured by a microcomputer.
また、前記吸引ポンプ７を探査用流路４の排出
側に設けても良い。 Further, the suction pump 7 may be provided on the discharge side of the exploration channel 4.
図面は本発明の有害ガス警報器の実施例を示
し、第１図はフローシート、第２図は他の実施例
を示すフローシートである。
１……監視領域、２……通気路、３……検出
器、４……探査用流路、５……常開型開閉弁、６
……選択操作機構。
The drawings show an embodiment of the harmful gas alarm of the present invention, with FIG. 1 being a flow sheet and FIG. 2 being a flow sheet showing another embodiment. 1... Monitoring area, 2... Ventilation path, 3... Detector, 4... Exploration channel, 5... Normally open on-off valve, 6
...Selection operation mechanism.
Claims (1)
路のそれぞれを、有害ガス検知器を介在させた１
本の探査用流路に接続し、前記通気路のそれぞれ
に各別に常開型開閉弁を設けると共に、これらの
常開型開閉弁を選択的に閉じ操作する選択操作機
構を設け、常時は、全ての監視領域のガスを同時
に混合状態で検知器に流入させるようにする一
方、前記有害ガス検知器によつて有害ガスを検出
した場合には、前記選択操作機構によつて前記常
開型開閉弁を選択的に閉じ操作することにより、
有害ガスの発生している監視領域を特定するよう
にしたことを特徴とする有害ガス警報器。1 Each of the ventilation passages connected to each of the plurality of monitoring areas is connected to a
A normally open on-off valve is provided for each of the air passages, and a selection operation mechanism is provided to selectively close these normally open on-off valves. While gases from all monitoring areas are made to simultaneously flow into the detector in a mixed state, when a harmful gas is detected by the harmful gas detector, the normally open type opening/closing is controlled by the selection operation mechanism. By selectively closing the valve,
A harmful gas alarm device characterized in that it specifies a monitoring area where harmful gas is generated.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10624483A JPS59230138A (en) | 1983-06-11 | 1983-06-11 | Alarm for harmful gas |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10624483A JPS59230138A (en) | 1983-06-11 | 1983-06-11 | Alarm for harmful gas |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59230138A JPS59230138A (en) | 1984-12-24 |
| JPH0479407B2 true JPH0479407B2 (en) | 1992-12-15 |
Family
ID=14428696
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10624483A Granted JPS59230138A (en) | 1983-06-11 | 1983-06-11 | Alarm for harmful gas |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59230138A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103411802A (en) * | 2013-08-14 | 2013-11-27 | 哈尔滨东方报警设备开发有限公司 | Explosion-proof suction pump with sound and light alarming, flow rate display, and regulation functions |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0713212Y2 (en) * | 1987-03-05 | 1995-03-29 | フイガロ技研株式会社 | Detectors for organic solvent vapors in the semiconductor industry |
| JP6442754B2 (en) * | 2013-11-11 | 2018-12-26 | 新コスモス電機株式会社 | Environmental monitoring system |
| JP2022075334A (en) * | 2020-11-06 | 2022-05-18 | 三菱電機株式会社 | Environmental research device |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5441518A (en) * | 1977-09-09 | 1979-04-02 | Nippon Kokan Kk | Method of constructing reinforced concrete |
-
1983
- 1983-06-11 JP JP10624483A patent/JPS59230138A/en active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103411802A (en) * | 2013-08-14 | 2013-11-27 | 哈尔滨东方报警设备开发有限公司 | Explosion-proof suction pump with sound and light alarming, flow rate display, and regulation functions |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59230138A (en) | 1984-12-24 |
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