JPH0482070B2 - - Google Patents
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- Publication number
- JPH0482070B2 JPH0482070B2 JP5586686A JP5586686A JPH0482070B2 JP H0482070 B2 JPH0482070 B2 JP H0482070B2 JP 5586686 A JP5586686 A JP 5586686A JP 5586686 A JP5586686 A JP 5586686A JP H0482070 B2 JPH0482070 B2 JP H0482070B2
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- JP
- Japan
- Prior art keywords
- semiconductor laser
- light
- wavelength
- output
- frequency
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/06—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium
- H01S5/068—Stabilisation of laser output parameters
- H01S5/0683—Stabilisation of laser output parameters by monitoring the optical output parameters
- H01S5/0687—Stabilising the frequency of the laser
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- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Optics & Photonics (AREA)
- Semiconductor Lasers (AREA)
Description
【発明の詳細な説明】
《産業上の利用分野》
本発明は、半導体レーザの波長を原子や分子の
吸収線に制御して安定化する量子標準形半導体レ
ーザ波長安定化装置の特性の改善に関する。[Detailed Description of the Invention] <<Industrial Application Field>> The present invention relates to improving the characteristics of a quantum standard semiconductor laser wavelength stabilizing device that stabilizes the wavelength of a semiconductor laser by controlling it to the absorption line of atoms or molecules. .
《従来の技術》
第10図は従来の半導体レーザ波長安定化装置
を示す構成ブロツク図である。半導体レーザLD
の電流に周波数mの変調信号を重畳してレーザ
出力の発振波長を変調し、ビームスプリツタBS
で分離した光の一方を特定の波長で吸収を起こす
標準物質を封入した吸収セルCLに入射する。ビ
ームスプリツタBSで分離した他方の光はミラー
Mで反射されて出力光となる。吸収セルCLから
の出射光は光検出器PDで電気信号に変換され、
ロツクインアンプLAで同期整流される。制御手
段CTでロツクインアンプLAの出力すなわち周波
数に対する1次微分信号が0となるように半導体
レーザLDの電流を制御することにより、半導体
レーザLDの波長を吸収セルCL内の原子の吸収線
にロツクさせることができる。<<Prior Art>> FIG. 10 is a block diagram showing a conventional semiconductor laser wavelength stabilizing device. semiconductor laser LD
The oscillation wavelength of the laser output is modulated by superimposing a modulation signal of frequency m on the current of beam splitter BS.
One of the separated lights is incident on the absorption cell CL, which contains a standard substance that causes absorption at a specific wavelength. The other light separated by the beam splitter BS is reflected by a mirror M and becomes output light. The light emitted from the absorption cell CL is converted into an electrical signal by the photodetector PD,
It is synchronously rectified by lock-in amplifier LA. By controlling the current of the semiconductor laser LD using the control means CT so that the output of the lock-in amplifier LA, that is, the first-order differential signal with respect to the frequency, becomes 0, the wavelength of the semiconductor laser LD is adjusted to the absorption line of the atoms in the absorption cell CL. It can be locked.
《発明が解決しようとする問題点》
しかしながら、上記のような構成の半導体レー
ザ波長安定化装置では、半導体レーザの出力光の
平均周波数は標準物質の吸収線にロツクされて安
定となるが、変調周波数mで常に周波数が変動
しているので、発振周波数の瞬時値は安定でな
く、スペクトル幅が広がるという問題点があつ
た。<<Problems to be Solved by the Invention>> However, in the semiconductor laser wavelength stabilizing device configured as described above, the average frequency of the output light of the semiconductor laser is locked to the absorption line of the standard material and becomes stable; Since the frequency always fluctuates at the frequency m, the instantaneous value of the oscillation frequency is not stable and there is a problem that the spectral width widens.
本発明はこのような問題点を解決するためにな
されたもので、波長が安定でスペクトル幅の狭い
半導体レーザ波長安定化装置を実現することを目
的とする。 The present invention has been made to solve these problems, and an object of the present invention is to realize a semiconductor laser wavelength stabilization device that has a stable wavelength and a narrow spectrum width.
《問題点を解決するための手段》
本発明は物質の吸収スペクトル線に半導体レー
ザの波長を制御して波長を安定化する半導体レー
ザ波長安定化装置に係るもので、その特徴とする
ところは半導体レーザの出力光を所定の周波数差
を有する2つの光出力に分離するシフト分離手段
と、このシフト分離手段からの2つの出力光を入
射して特定の波長で吸収を起こす物質を封入した
吸収セルとを備え、前記吸収セルの2つの出力光
の検出出力の差が0となるように半導体レーザの
波長を制御する点にある。<Means for Solving the Problems> The present invention relates to a semiconductor laser wavelength stabilizing device that stabilizes the wavelength by controlling the wavelength of a semiconductor laser according to the absorption spectrum line of a substance. A shift separation means that separates the output light of the laser into two optical outputs having a predetermined frequency difference, and an absorption cell in which the two output lights from the shift separation means are input and a substance that causes absorption at a specific wavelength is sealed. The wavelength of the semiconductor laser is controlled so that the difference between the detection outputs of the two output lights of the absorption cell becomes zero.
《実施例》 以下本発明を図面を用いて詳しく説明する。"Example" The present invention will be explained in detail below using the drawings.
第1図は本発明の一実施例を示す構成ブロツク
図である。LDは半導体レーザ、LSはこの半導体
レーザLDの出力光を平行光とするレンズ、S1
はこのレンズLSの出力光を入力するシフト分離
手段である。シフト分離手段S1において、
PBS1は前記レンズLSからの出力光を入射する
第1の偏光ビームスプリツタ、P1はこの偏光ビ
ームスプリツタPBS1で反射した光を入射する
1/4波長板、AOMはこの1/4波長板P1を通過し
た光を入射する音響光学変調器、M1はこの音響
光学変調器AOMの出力光を入射するミラー、P
2はこのミラーM1で反射された光が前記音響光
学変調器AOM,1/4波長板P1および前記偏光
ビームスプリツタPBS1を介して入射する1/4波
長板、M2はこの1/4波長板P1を通過した光が
入射するミラーである。CLはこのシフト分離手
段S1のミラーM2で反射した光が前記1/4波長
板P2および前記偏光ビームスプリツタPBS1
を介して出力される光を入射し特定の波長の光を
吸収する標準物質(ここではCs)を封入した吸
収セル、PBS2はこの吸収セルCLの透過光を入
射する第2の偏光ビームスプリツタ、BS1はこ
の偏光ビームスプリツタPBS2の透過光を入射
するビームスプリツタ、PD1,PD2は前記偏光
ビームスプリツタPBS2,ビームスプリツタBS
1の反射光をそれぞれ入射する受光素子、Aはこ
の受光素子PD1,PD2の電気出力を入力する差
動増幅器、OPはこの差動増幅器Aの出力を入力
する演算回路、DRはこの演算回路OPの出力を入
力して前記半導体レーザLDの電流を駆動する駆
動回路、Vは前記音響光学変調器AOMを周波数
mで駆動する駆動源である。 FIG. 1 is a block diagram showing an embodiment of the present invention. LD is a semiconductor laser, LS is a lens that converts the output light of this semiconductor laser LD into parallel light, and S1
is a shift separation means that inputs the output light of this lens LS. In the shift separation means S1,
PBS1 is a first polarizing beam splitter into which the output light from the lens LS is incident, P1 is a quarter-wave plate into which the light reflected by this polarizing beam splitter PBS1 is incident, and AOM is this quarter-wave plate P1. M1 is a mirror that receives the output light of this acousto-optic modulator AOM, P
2 is a 1/4 wavelength plate through which the light reflected by this mirror M1 enters through the acousto-optic modulator AOM, 1/4 wavelength plate P1, and the polarizing beam splitter PBS1, and M2 is this 1/4 wavelength plate. This is a mirror on which the light that has passed through P1 is incident. CL means that the light reflected by the mirror M2 of this shift separation means S1 is transmitted to the quarter wavelength plate P2 and the polarizing beam splitter PBS1.
PBS2 is a second polarizing beam splitter that receives the light transmitted from this absorption cell CL, and PBS2 is a polarizing beam splitter that receives the light transmitted from this absorption cell CL. , BS1 is a beam splitter into which the transmitted light of this polarizing beam splitter PBS2 is incident, and PD1 and PD2 are the polarizing beam splitter PBS2 and beam splitter BS.
A is a differential amplifier that inputs the electrical outputs of these photodetectors PD1 and PD2, OP is an arithmetic circuit that inputs the output of this differential amplifier A, and DR is this arithmetic circuit OP. A drive circuit inputs the output of the semiconductor laser LD to drive the current of the semiconductor laser LD, V is the frequency of the acousto-optic modulator AOM.
It is a driving source driven by m.
上記のような構成の半導体レーザ波長安定化装
置の動作を以下に詳しく説明する。半導体レーザ
LDの周波数oの出力光はレンズLSで平行光とな
つたのち、偏光ビームスプリツタPBS1で2方
向に分離される。偏光ビームスプリツタPBS1
の(紙面に垂直な偏波面を有する)反射光は第2
図の動作説明図に示すように、1/4波長板P1で
円偏光となり、音響光学変調器AOMで回折しド
ツプラ効果によりmの周波数シフトを受ける。
この回折光はミラーM1で反射して元の方向へ戻
り、再び音響光学変調器AOMでmの周波数シフ
トを受けるので、最終的に2mの周波数シフトを
受けた周波数o+2mの光となる。この光が再び
1/4波長板P1を通過すると紙面に平行な偏波面
となり、偏光ビームスプリツタPBS1を透過す
る。この透過光を1/4波長板P2で円偏光とし、
ミラーM2で反射した後1/4波長板P2で紙面に
垂直な偏波面として再び偏光ビームスプリツタ
PBS1に入射すると、全て反射される。この反
射光は吸収セルCLに入射し透過光が偏光ビーム
スプリツタPBS2で全て反射されて受光素子PD
1に入射する。一方第3図に示すように、初めに
偏光ビームスプリツタPBS1を透過した紙面に
偏波面が水平な光は吸収セルCLを通過した後、
偏光ビームスプリツタPBS2を透過しビームス
プリツタBS1で一部が反射して受光素子PD2に
入射する。ビームスプリツタBS1を透過した光
は出力光として外部へ取出される。受光素子PD
2に入射する光および外部への出力光は半導体レ
ーザの発振周波数oそのままであるが、受光素
子PD1に入射する光は、2mの周波数シフトを
受けた周波数o+2mの光となつているから、発
振周波数oを掃引した場合の受光素子の出力は
第4図に示すようになりAの受光素子PD1出力
とBの受光素子PD2出力は互いに吸収の中心が
周波数2mだけずれている。差動増幅器Aは受光
素子PD1およびPD2の出力の差を演算し、その
出力はCのようになる。演算回路OPおよび駆動
回路DRはこの差動増幅器A出力のゼロクロス点
(0と交差する点)に半導体レーザLDの発振波長
を制御する。ゼロクロス点に波長が制御された状
態における半導体レーザLDの発振周波数は、吸
収セル内の物質の共鳴周波数をRとすると、o=
R−mとなつて安定する。但し、共鳴周波数R
に対するドツプラシフトの広がりは対称であると
する。 The operation of the semiconductor laser wavelength stabilizing device configured as described above will be described in detail below. semiconductor laser
The output light of the frequency o of the LD is converted into parallel light by the lens LS, and then separated into two directions by the polarizing beam splitter PBS1. Polarizing beam splitter PBS1
The reflected light (with a plane of polarization perpendicular to the plane of the paper) is the second
As shown in the operation diagram in the figure, it becomes circularly polarized light by the quarter-wave plate P1, is diffracted by the acousto-optic modulator AOM, and undergoes a frequency shift of m due to the Doppler effect.
This diffracted light is reflected by the mirror M1 and returns to the original direction, and is again subjected to a frequency shift of m by the acousto-optic modulator AOM, so that it finally becomes light with a frequency of o+2m that has undergone a frequency shift of 2m. When this light passes through the quarter-wave plate P1 again, it becomes polarized with a plane parallel to the plane of the paper, and is transmitted through the polarizing beam splitter PBS1. This transmitted light is made into circularly polarized light by a 1/4 wavelength plate P2,
After being reflected by mirror M2, it is polarized again by 1/4 wavelength plate P2 with a polarization plane perpendicular to the plane of the paper.
When it enters PBS1, it is all reflected. This reflected light enters the absorption cell CL, and the transmitted light is completely reflected by the polarizing beam splitter PBS2 and then passes through the light receiving element PD.
1. On the other hand, as shown in Fig. 3, the light whose plane of polarization is horizontal to the plane of the paper that first passes through the polarizing beam splitter PBS1 passes through the absorption cell CL, and then
The light passes through the polarizing beam splitter PBS2, is partially reflected by the beam splitter BS1, and enters the light receiving element PD2. The light transmitted through the beam splitter BS1 is extracted to the outside as output light. Photodetector PD
The light incident on PD2 and the light output to the outside have the same oscillation frequency o of the semiconductor laser, but the light incident on photodetector PD1 has been shifted in frequency by 2m and has a frequency of o+2m, so the oscillation occurs. The output of the light receiving element when the frequency o is swept is as shown in FIG. 4, and the centers of absorption of the output of the light receiving element PD1 of A and the output of the light receiving element PD2 of B are shifted by a frequency of 2 m. Differential amplifier A calculates the difference between the outputs of light receiving elements PD1 and PD2, and the output is as shown in C. The arithmetic circuit OP and the drive circuit DR control the oscillation wavelength of the semiconductor laser LD to the zero cross point (point where it intersects with 0) of the output of the differential amplifier A. The oscillation frequency of the semiconductor laser LD when the wavelength is controlled to the zero crossing point is o =
It becomes stable as R −m. However, the resonance frequency R
Assume that the spread of the Doppler shift for is symmetric.
このような構成の半導体レーザ波長安定化装置
によれば、ロツクインアツプを用いずにゼロクロ
ス点に波長を制御するので、出力光が変調されて
おらず、スペクトル幅を狭くすることができる。 According to the semiconductor laser wavelength stabilizing device having such a configuration, the wavelength is controlled to the zero cross point without using lock-in up, so the output light is not modulated and the spectral width can be narrowed.
またゼロクロス点に制御するので高安定であ
り、吸収セルの温度が変化して吸収量が変つても
ゼロクロス点の波長は変らない。 Furthermore, since it is controlled to the zero-crossing point, it is highly stable, and even if the absorption amount changes due to changes in the temperature of the absorption cell, the wavelength at the zero-crossing point does not change.
なお上記の実施例では半導体レーザの発振波長
を電流を制御して変えているが、これに限らず、
温度などを制御してもよい。 Note that in the above embodiments, the oscillation wavelength of the semiconductor laser is changed by controlling the current, but the present invention is not limited to this.
Temperature, etc. may also be controlled.
また吸収セルCLの標準物質としては、Csのほ
かに例えばRb,NH3,H2Oなどを用いてもよい。 Further, as a standard substance for the absorption cell CL, in addition to Cs, for example, Rb, NH 3 , H 2 O, etc. may be used.
また後述の飽和吸収法を用いてもよい。 Alternatively, the saturation absorption method described later may be used.
第5図は本発明に係る半導体レーザ波長安定化
装置の第2の実施例を示す構成ブロツク図であ
る。第1図装置と同じ部分は同一の記号を付して
説明を省略する。シフト分離手段S2において、
BS2は半導体レーザLDの出力光を2方向に分離
するビームスプリツタ、BS3はこのビームスプ
リツタBS2の透過光を入射しその透過光を外部
出力光とし反射光が音響光学変調器AOMに入射
するビームスプリツタである。受光素子PD1,
PD2はそれぞれビームスプリツタBS2の反射光
および音響光学変調器AOMの透過光を吸収セル
CLを介して入射する。受光素子PD1には半導体
レーザLDの発振周波数oの光が入射し、受光素
子PD2にはシフトした周波数o+mの光が入射
する。 FIG. 5 is a block diagram showing a second embodiment of the semiconductor laser wavelength stabilizing device according to the present invention. The same parts as in the apparatus of FIG. 1 are given the same symbols and explanations are omitted. In the shift separation means S2,
BS2 is a beam splitter that separates the output light of the semiconductor laser LD into two directions. BS3 inputs the transmitted light of this beam splitter BS2, uses the transmitted light as external output light, and the reflected light enters the acousto-optic modulator AOM. It is a beam splitter. Photodetector PD1,
PD2 is a cell that absorbs the reflected light from the beam splitter BS2 and the transmitted light from the acousto-optic modulator AOM, respectively.
Incident via CL. Light having an oscillation frequency o of the semiconductor laser LD is incident on the light receiving element PD1, and light having a shifted frequency o+m is incident on the light receiving element PD2.
このような構成の装置によれば、音響光学変調
器AOMに光を2回通さずにそのまま吸収セルに
照射しているので、構成が簡単になる。 According to the device having such a configuration, the structure is simplified because the light is directly irradiated onto the absorption cell without passing through the acousto-optic modulator AOM twice.
第6図は本発明の第3の実施例で飽和吸収を用
いたものを示す構成ブロツク図であ(飽和吸収に
関する参考文献:T.Yabuzaki,A.Hori,M.
Kitano,and T.Ogawa;Frequency
Stabilization of Diode Lasers Using Doppler
−Free Atomic Spectra,Proc.Int.Conf.Laser's
83/堀,門田,北野,藪崎,小川;飽和吸収分光
を用いた半導体レーザの周波数安定化,信学技報
OQE82−116)。第5図と同じ部分は同一の記
号を付して説明を省略する。シフト分離手段S2
のビームスプリツタBS2の反射光はポンプ光と
して吸収セルCLに入射し、透過光がミラーM3
で反射し、再びプローブ光として反対方向からポ
ンプ光と重なるように吸収セルCLを通過し受光
素子PD1でドツプラ広がりのない鋭い吸収光を
検出する。同様に音響光学変調器AOMの出力回
折光はポンプ光として吸収セルCLに入射し、透
過光がミラーM4で反射して再びプローブ光とし
て吸収セルCLを通過し受光素子PD2でドツプラ
広がりのない鋭い吸収光を検出する。第7図Aに
示すように、受光素子PD1,PD2の出力の周波
数特性は共にラム・デイツプを生じ、互いに周波
数mのずれを有する。このときの差動増幅器A
の出力特性はBのようになり、ゼロクロス点が鋭
い勾配を有するもので周波数安定度をより高める
ことができる。 FIG. 6 is a block diagram showing a third embodiment of the present invention using saturated absorption (References regarding saturated absorption: T. Yabuzaki, A. Hori, M.
Kitano,and T.Ogawa;Frequency
Stabilization of Diode Lasers Using Doppler
−Free Atomic Spectra,Proc.Int.Conf.Laser's
83/Hori, Kadota, Kitano, Yabusaki, Ogawa; Frequency stabilization of semiconductor lasers using saturation absorption spectroscopy, IEICE Technical Report
OQE82−116). The same parts as in FIG. 5 are given the same symbols and the explanation will be omitted. Shift separation means S2
The reflected light from the beam splitter BS2 enters the absorption cell CL as pump light, and the transmitted light enters the mirror M3.
The probe light passes through the absorption cell CL from the opposite direction so as to overlap with the pump light, and the light receiving element PD1 detects the sharp absorption light without Doppler spread. Similarly, the output diffracted light of the acousto-optic modulator AOM enters the absorption cell CL as a pump light, and the transmitted light is reflected by the mirror M4 and passes through the absorption cell CL again as a probe light. Detects absorbed light. As shown in FIG. 7A, the frequency characteristics of the outputs of the light-receiving elements PD1 and PD2 both exhibit a lamb dip, and have a frequency m deviation from each other. Differential amplifier A at this time
The output characteristic is as shown in B, and the zero crossing point has a sharp slope, which can further improve frequency stability.
第8図は本発明の半導体レーザ波長安定化装置
の第4の実施例を示す構成ブロツク図である。半
導体レーザLDからの出力光の一部はビームスプ
リツタBS4で反射され、シフト分離手段S3の
音響光学素子AOMに入射する。音響光学素子
AOMの−1次回折光はo−mの周波数シフト
を受け、+1次回折光はo+mの周波数シフトを
受けて、吸収セルCLを介してそれぞれ受光素子
PD1,PD2に入射する。第9図Aは受光素子
PD1,PD2の出力の周波数特性を示し、その差
である差動増幅器A出力は第9図Bに示すよう
に、ゼロクロス点が吸収セルの共鳴周波数Rに
一致する。したがつて変調周波数mの値が変動
してもゼロクロス点が変化しない。また音響光学
変調器AOMの回折効率が変つてもPD1,PD2
出力が同じように変わるので、ゼロクロス点は動
かない。また第6図装置と同様に飽和吸収法を用
いることもできる。 FIG. 8 is a block diagram showing a fourth embodiment of the semiconductor laser wavelength stabilizing device of the present invention. A part of the output light from the semiconductor laser LD is reflected by the beam splitter BS4 and enters the acousto-optic element AOM of the shift separation means S3. acousto-optic element
The -1st-order diffracted light of the AOM undergoes a frequency shift of o-m, and the +1st-order diffracted light undergoes a frequency shift of o+m, and then pass through the absorption cell CL to the light receiving element.
It enters PD1 and PD2. Figure 9A is the light receiving element
The frequency characteristics of the outputs of PD1 and PD2 are shown, and the differential amplifier A output, which is the difference between them, has a zero-crossing point that coincides with the resonant frequency R of the absorption cell, as shown in FIG. 9B. Therefore, even if the value of the modulation frequency m changes, the zero crossing point does not change. Also, even if the diffraction efficiency of the acousto-optic modulator AOM changes, PD1 and PD2
Since the output changes in the same way, the zero crossing point does not move. Further, the saturated absorption method can also be used as in the apparatus shown in FIG.
なお上記の各実施例では差動増幅回路Aの出力
が0となるように半導体レーザの波長を制御して
いるが、ゼロクロス点の安定性の低下を我慢すれ
ば任意の値を用いることができる。 Note that in each of the above embodiments, the wavelength of the semiconductor laser is controlled so that the output of the differential amplifier circuit A becomes 0, but any value can be used as long as a decrease in the stability of the zero-crossing point is tolerated. .
《発明の効果》
以上述べたように本発明によれば、波長が安定
でスペクトル幅の狭い半導体レーザ波長安定化装
置を簡単な構成で実現することができる。<<Effects of the Invention>> As described above, according to the present invention, a semiconductor laser wavelength stabilizing device having a stable wavelength and a narrow spectrum width can be realized with a simple configuration.
第1図は本発明の一実施例を示す構成ブロツク
図、第2図および第3図は第1図装置の動作を説
明するための動作説明図、第4図は第1図装置の
動作を説明するための特性曲線図、第5図は本発
明の第2の実施例を示す構成ブロツク図、第6図
は本発明の第3の実施例を示す構成ブロツク図、
第7図は第6図装置の動作を説明するための特性
曲線図、第8図は本発明の第4の実施例を示す構
成ブロツク図、第9図は第8図装置の動作を説明
するための特性曲線図、第10図は従来の半導体
レーザ波長安定化装置を示す構成ブロツク図であ
る。
LD…半導体レーザ、S1,S2,S3…シフ
ト分離手段、CL…吸収セル。
FIG. 1 is a configuration block diagram showing an embodiment of the present invention, FIGS. 2 and 3 are operation explanatory diagrams for explaining the operation of the apparatus shown in FIG. 1, and FIG. 4 is an illustration of the operation of the apparatus shown in FIG. A characteristic curve diagram for explanation; FIG. 5 is a block diagram showing a second embodiment of the present invention; FIG. 6 is a block diagram showing a third embodiment of the present invention;
7 is a characteristic curve diagram for explaining the operation of the device shown in FIG. 6, FIG. 8 is a block diagram showing a fourth embodiment of the present invention, and FIG. 9 is a diagram for explaining the operation of the device shown in FIG. 8. FIG. 10 is a block diagram showing a conventional semiconductor laser wavelength stabilizing device. LD...Semiconductor laser, S1, S2, S3...Shift separation means, CL...Absorption cell.
Claims (1)
長を制御して波長を安定化する半導体レーザ波長
安定化装置において、 半導体レーザの出力光を所定の周波数差を有す
る2つの光出力に分離するシフト分離手段と、こ
のシフト分離手段からの2つの出力光を入射して
特定の波長で吸収を起こす物質を封入した吸収セ
ルとを備え、前記吸収セルの2つの出力光の検出
出力の差が0となるように半導体レーザの波長を
制御することを特徴とする半導体レーザ波長安定
化装置。 2 シフト分離手段が半導体レーザの出力光を周
波数シフトする音響光学素子を備えた特許請求の
範囲第1項記載の半導体レーザ波長安定化装置。 3 物質としてRbまたはCsを用いた特許請求の
範囲第1項記載の半導体レーザ波長安定化装置。[Claims] 1. In a semiconductor laser wavelength stabilization device that stabilizes the wavelength by controlling the wavelength of a semiconductor laser according to the absorption spectrum line of a substance, the output light of the semiconductor laser is divided into two optical outputs having a predetermined frequency difference. A shift separation means for separating the two output lights from the shift separation means, and an absorption cell sealed with a substance that causes absorption at a specific wavelength upon input of the two output lights from the shift separation means, the detection output of the two output lights of the absorption cell A semiconductor laser wavelength stabilizing device characterized by controlling the wavelength of a semiconductor laser so that the difference between the two becomes zero. 2. The semiconductor laser wavelength stabilization device according to claim 1, wherein the shift separation means includes an acousto-optic element that frequency-shifts the output light of the semiconductor laser. 3. The semiconductor laser wavelength stabilizing device according to claim 1, which uses Rb or Cs as the substance.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5586686A JPS62213186A (en) | 1986-03-13 | 1986-03-13 | Semiconductor laser wavelength stabilizer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5586686A JPS62213186A (en) | 1986-03-13 | 1986-03-13 | Semiconductor laser wavelength stabilizer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62213186A JPS62213186A (en) | 1987-09-19 |
| JPH0482070B2 true JPH0482070B2 (en) | 1992-12-25 |
Family
ID=13010994
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5586686A Granted JPS62213186A (en) | 1986-03-13 | 1986-03-13 | Semiconductor laser wavelength stabilizer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62213186A (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2520153B2 (en) * | 1988-07-01 | 1996-07-31 | 国際電信電話株式会社 | Semiconductor laser light source control device |
| US5063568A (en) * | 1988-09-05 | 1991-11-05 | Fujitsu Limited | Wavelength stabilized light source |
| JP2519335B2 (en) * | 1990-02-20 | 1996-07-31 | 日本電信電話株式会社 | Laser oscillation wavelength stabilizer |
| JP7464393B2 (en) * | 2020-01-21 | 2024-04-09 | 株式会社ミツトヨ | Laser frequency stabilization device and laser frequency stabilization method |
-
1986
- 1986-03-13 JP JP5586686A patent/JPS62213186A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62213186A (en) | 1987-09-19 |
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