JPH048692B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a local exhaust system for air-conditioned dust-proof rooms, and particularly to a local exhaust system suitable for air-conditioned dust-proof rooms in semiconductor manufacturing factories, drug manufacturing factories, food manufacturing factories, hospitals, and the like.

If gas containing hot air, organic gas, dust, etc. is generated from production equipment installed at each work location in the air-conditioned dust-proof room, these gases must be exhausted outside. Conventionally, for such exhaust, exhaust branch pipes having suction ports are provided at each work location, and moths generated indoors are exhausted through a main exhaust pipe that joins these exhaust branch pipes. However, in conventional air-conditioned dust-proof rooms, the exhaust volume of the main exhaust pipe is the maximum amount required when all production equipment in each work area in the air-conditioned dust-proof room is in operation, and the amount of air corresponding to that amount is supplied. I try to do that. Therefore, in conventional air-conditioned dust-proof rooms, even if a certain production facility is stopped and its intake port is closed, the exhaust fan in the main exhaust pipe exhausts more than the necessary amount of air, and the air supply pipe supplies more than the necessary amount of air. This results in a loss of energy. That is, if the exhaust volume is large, it is necessary to supply air corresponding to the volume, and in this case, since the air supplied to the air-conditioned dust-proof room is conditioned, energy loss occurs because the excess air is conditioned. In addition, if production equipment at a certain work location is stopped and more air than necessary is exhausted from the exhaust fan even though the suction port is closed, the exhaust balance of the remaining exhaust branch pipes will be disrupted, and each exhaust There is a risk of adversely affecting the exhaust of branch pipes.

The present invention has been made in view of the above circumstances, and an object of the present invention is to propose a local exhaust system for an air-conditioned dust-proof room that can adjust the exhaust volume and air supply amount according to the working situation in the air-conditioned dust-proof room. It is said that

The present invention has a plurality of suction ports opened at each work location in an air conditioning dustproof room, and the suction ports are connected to a plurality of exhaust branch pipes that open and close depending on the work conditions, and each exhaust branch pipe is connected to the exhaust fan. An exhaust main pipe that exhausts indoor air to the outside, an air supply pipe that supplies conditioned air into the room using an air supply fan according to the air exhausted by the exhaust main pipe, and an exhaust pipe that is installed in the exhaust main pipe. A throttle valve that can adjust the pressure inside the main pipe,
A pressure detection sensor and an air volume detection sensor provided in the main exhaust pipe, and a control unit that controls the rotation speed of the exhaust fan, the rotation speed of the air supply fan, and the opening degree of the throttle valve based on the detection signals of both detection sensors. It is characterized by consisting of.

DESCRIPTION OF THE PREFERRED EMBODIMENTS Preferred embodiments of a local exhaust system for an air-conditioned dust-proof room according to the present invention will be described in detail below with reference to the accompanying drawings.

In the figure, 10 is an air conditioning dustproof room, 12 is a supply chamber formed in the air conditioning dustproof room 10, 14 is a mixing chamber, 16 is an environment control room, and 18 is a return chamber. The plurality of internal conditioners 20 suck in a portion of the air from the return chamber 18 through the duct 22 and air-condition the air in the supply chamber 12 .
supply to. The side wall of the air-conditioning dust-proof chamber 10 is configured as a twin wall, and most of the air in the return chamber 18 is sent to the mixing chamber 14 through the passage 24 of this twin wall. Supply chamber 12 in mixing chamber 14
The air from the air and the air from the passage 24 are mixed, and clean air is supplied to the environmental control room 16 by an air supply unit 26 that has a built-in HEPA filter. The above is a schematic structure showing the air circulation path in the air-conditioned dust-proof room.

Next, the local exhaust system will be explained. Inside the environment control room 16, different types of production equipment 28 to 38 are arranged at each work location, and each production equipment 28 to 38 is provided with each exhaust branch pipe 40 to 50. Each of the exhaust branch pipes 40 to 50 has suction ports 52 to 62, respectively, and is designed to suck in organic gas, inorganic gas, hot air, dust, etc. generated from the production equipment. As shown, the exhaust branch pipes 40 and 46 join the exhaust main pipe 64, the exhaust branch pipes 42 and 48 join the exhaust main pipe 66, and the exhaust branch pipes 44 and 50 join the exhaust main pipe 68. Also, the exhaust main pipe 6
4 is provided with a throttle valve 70 and an exhaust fan 72,
Further, the exhaust main pipe 66 is provided with a throttle valve 73 and an exhaust fan 74, and the exhaust main pipe 68 is also provided with a throttle valve 76 and an exhaust fan 78. Further, the exhaust main pipe 64 is provided with a pressure detection sensor 80 and an air volume detection sensor 82, and the exhaust main pipe 66 is further provided with a pressure detection sensor 84 and an air volume detection sensor 8.
Similarly, the exhaust main pipe 68 is also provided with a pressure detection sensor 88 and an air volume detection sensor 90.

Detection signals from the pressure detection sensors 80 , 84 , 88 and the air volume detection sensors 82 , 86 , 90 are input to a control device 92 . Also, based on the input signal from this detection sensor, the throttle valve 7
Opening degrees of 0, 73, 76 and exhaust fans 72, 7
A rotation speed of 6.78 is controlled. When the indoor air is exhausted through the exhaust main pipes 64, 66, and 68, it is necessary to supply an amount of air corresponding to the amount of exhaust into the air-conditioning dust-proof room 10, and the air is supplied by the following devices. It will be done. That is, the air taken in from the air intake ports 94 and 96 is sent to the outside air conditioner 9.
8,100, and this conditioned air is supplied to the internal air conditioner 2 by air supply fans 102,104.
0 and is supplied into the supply chamber 12. The control device 92 also controls the pressure detection sensor 8.
0, 84, 88, air volume detection sensor 82, 86, 9
Based on the detected value of 0, the exhaust fans 72, 76, 7
Similarly to 8, the rotational speed of the air supply fans 102 and 104 is controlled.

The operation of the embodiment according to the present invention constructed as described above is as follows. First, production equipment 28 to 38
are all in operation, the suction ports 52 to 6
2 is fully opened, exhaust fans 72, 76, 78 exhaust air at maximum displacement, and air supply fan 10
2, 104 is also driven accordingly to supply air commensurate with this displacement amount.

That is, the control device 92 controls the throttle valves 70, 73, 7
6 and the rotational speed of the exhaust fans 72, 74, 78 so that the pressure detected by the pressure detection sensors 80, 84, 88 becomes a predetermined reference pressure,
Further, the rotational speed of the air supply fans 102, 104 is controlled based on the air volume detected by the air volume detection sensors 82, 86, 90, respectively, and when the suction ports 52 to 62 are fully open, each exhaust fan 72, 74 ,78
is controlled to reach the maximum displacement, and at this time, the pressure detected by the pressure detection sensors 80, 84, and 88 becomes a predetermined reference pressure. In addition, the air supply fan 102,1
04 is controlled based on the air volume detected by the air volume detection sensors 82, 86, and 90, and supplies air corresponding to the maximum exhaust volume.

Next, a certain production equipment, for example, production equipment 28, 32
When the engine stops, its suction ports 52, 56 are closed. As a result, the pressure inside the ducts 64 and 68 decreases, and the air volume also decreases slightly, but this is detected by the pressure detection sensors 80 and 88 and the air volume detection sensors 82 and 90, and is input to the control device 92. The control device 92 is
Throttle valves 70, 76 are installed so that the reduced pressure returns to the original pressure, that is, to reduce the amount of displacement that is no longer needed due to the suspension of production equipment 28, 32.
and the rotation speed of the exhaust fans 72 and 78. At the same time, the control device 92 detects that the amount of air supplied into the room and the amount of exhaust air become unbalanced due to this reduction in the amount of exhaust air, so the air amount detection sensors 82, 9
Based on the detection signal of 0, a signal is sent to the air supply fans 102 and 104 to also reduce the amount of air supply, and the number of revolutions thereof is decreased.

In the embodiment, the exhaust main pipes 64, 66, 68
Although three systems were used, the system is not limited to this, and depending on the type of production equipment, one system or three or more systems may be used. Also, in the air supply system, if the capacity of the air supply fan is large, there is no need to provide two air supply fans 102 and 104 as in the previous embodiment.

As explained above, according to the local exhaust system for an air-conditioned dust-proof room according to the present invention, the exhaust fan and the air supply fan can be controlled according to the operating status of the production equipment, and the exhaust volume and air supply volume can also be changed. Therefore, energy loss is eliminated. Further, when the air suction port of the production equipment is closed due to the suspension of the production equipment, the rotational speed of the exhaust fan is also reduced, so that the exhaust system of the other suction ports is not adversely affected.

[Brief explanation of drawings]

The drawing is an explanatory view showing an embodiment of a local exhaust system for an air-conditioned dust-proof room according to the present invention. 10...Air conditioning dustproof room, 26...Air supply unit,
28 to 38... Production equipment, 40 to 50... Exhaust branch pipes, 52 to 62... Suction ports, 64, 66,
68... Exhaust main pipe, 70, 73, 76... Throttle valve, 72, 76, 78... Exhaust fan, 80,
84, 88...pressure detection sensor, 82, 86, 9
0...Air volume detection sensor, 92...Control device, 10
2,104...Air supply fan.

Claims (1)

[Scope of Claims] 1. In an air-conditioned dust-proof room in which indoor air is circulated and an air conditioner and an air filter are arranged in the air circulation path, a plurality of suction ports open at each work location in the room. a plurality of exhaust branch pipes with suction ports that open and close according to work conditions; a main exhaust pipe where the exhaust branch pipes meet and exhaust air from the room to the outside using an exhaust fan; an air supply pipe that supplies conditioned air into the room by an air supply fan according to the amount of air that is being supplied to the room; a throttle valve that is installed in the main exhaust pipe and that can adjust the pressure in the main exhaust pipe; a pressure detection sensor and an air volume detection sensor, and rotation of the exhaust fan so that the pressure detected by the pressure detection sensor becomes a predetermined reference pressure when the plurality of suction ports are fully open and when any of the suction ports is closed. In addition to controlling the number and opening degree of the throttle valve,
a control unit that controls the rotation speed of the air supply fan based on the air volume detected by the air volume detection sensor, and the exhaust volume and air supply volume correspond to the open/closed states of the plurality of suction ports. A local exhaust system for air-conditioned dust-proof rooms featuring: