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JPH048960B2 - - Google Patents
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JPH048960B2 - - Google Patents

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Publication number
JPH048960B2
JPH048960B2 JP2053934A JP5393490A JPH048960B2 JP H048960 B2 JPH048960 B2 JP H048960B2 JP 2053934 A JP2053934 A JP 2053934A JP 5393490 A JP5393490 A JP 5393490A JP H048960 B2 JPH048960 B2 JP H048960B2
Authority
JP
Japan
Prior art keywords
plating
liquid
tank
plating tank
printed circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP2053934A
Other languages
Japanese (ja)
Other versions
JPH0375377A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5393490A priority Critical patent/JPH0375377A/en
Publication of JPH0375377A publication Critical patent/JPH0375377A/en
Publication of JPH048960B2 publication Critical patent/JPH048960B2/ja
Granted legal-status Critical Current

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  • Printing Elements For Providing Electric Connections Between Printed Circuits (AREA)
  • Chemically Coating (AREA)

Description

【発明の詳細な説明】 (産業上の利用分野) 本発明は、プリント基板のスルーホールに無電
解メツキを施す装置に関する。
DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to an apparatus for performing electroless plating on through holes of printed circuit boards.

(従来の技術) 両面配線のプリント基板は、基板に穿つ孔の内
面にメツキ層を付着させスルーホールを形成する
ことにより、基板の両面を導通する。
(Prior Art) A printed circuit board with double-sided wiring provides conduction between both sides of the board by attaching a plating layer to the inner surface of a hole drilled in the board to form a through hole.

スルーホールを形成する場合、伝統的な電気メ
ツキ法においては、孔の内面にあらかじめ無電解
メツキにより薄い導電層を施したのち、その上に
電気メツキによりメツキ層を付着する。これに比
較し無電解メツキ法では、無電解メツキのみによ
り孔の内面に所定のメツキ層を仕上げるので、メ
ツキ層を均質に形成でき工程も短縮できる利点が
ある。
When forming a through hole, in the traditional electroplating method, a thin conductive layer is first applied to the inner surface of the hole by electroless plating, and then a plating layer is deposited thereon by electroplating. In contrast, in the electroless plating method, a predetermined plating layer is finished on the inner surface of the hole by electroless plating only, so the plating layer can be formed uniformly and the process can be shortened.

(発明が解決しようとする課題) しかし無電解メツキの場合、メツキ層の厚さは
メツキ液の温度や濃度によつて著しく相違するの
で、従来では、伝統的な電気メツキ法に比較して
スルーホールのメツキ層を均一の厚さに付着させ
ることが困難であつた。
(Problem to be solved by the invention) However, in the case of electroless plating, the thickness of the plating layer varies significantly depending on the temperature and concentration of the plating solution, so in the past, compared to the traditional electroplating method, It was difficult to adhere the hole plating layer to a uniform thickness.

本発明はこれを改良するもので、無電解メツキ
槽中の基板に対しメツキ液を平行にしかも流速の
分布を均等に流すことにより、基板全面における
メツキ液の温度および濃度分布を平均化し、スル
ーホールのメツキ層を均一の厚さに形成すること
を目的とする。
The present invention improves this by flowing the plating solution parallel to the substrate in the electroless plating tank and with an even flow rate distribution, thereby averaging the temperature and concentration distribution of the plating solution over the entire surface of the substrate, and allowing the plating solution to flow through the substrate in an electroless plating tank. The purpose is to form a hole plating layer with a uniform thickness.

(課題を解決するための手段) 本発明は、無電解メツキのメツキ槽を多孔板に
よりふたつに区画し、そのうちの一方にプリント
基板を浸漬する。そして基板を浸漬する側の、多
孔板に対向するメツキ槽背面とこの背面に近いメ
ツキ槽底面にそれぞれ排出口を開口し、メツキ液
循環ラインの液供給側端部は区画したメツキ槽の
基板を浸漬しない側に、またメツキ液循環ライン
の液排出側端部は前記の排出口にそれぞれ接続
し、スルーホールメツキすべきプリント基板は、
液排出側端部を接続した側のメツキ槽内に、前記
多孔板とは直交する方向に沿い侵漬するという構
成である。
(Means for Solving the Problems) According to the present invention, a plating tank for electroless plating is divided into two by a perforated plate, and a printed circuit board is immersed in one of the two. Discharge ports are opened on the back side of the plating tank facing the perforated plate on the side where the substrates are immersed, and on the bottom of the plating tank near this back side, and the end of the plating liquid circulation line on the liquid supply side is connected to the partitioned plating tank where the substrates are immersed. The side that is not immersed and the liquid discharge side end of the plating liquid circulation line are connected to the above-mentioned discharge port, and the printed circuit board to be through-hole plated is
The liquid discharge side end is immersed in the plating tank on the side connected thereto in a direction perpendicular to the perforated plate.

(作用) メツキ槽のメツキ液は、メツキ液循環ラインを
経由してメツキ槽より出てメツキ槽へ戻る。そし
てこのように循環する過程でメツキ液は加温され
また補給されるのであるが、本発明では、メツキ
槽の多孔板を挾んでメツキ液循環ラインの液供給
側端部と液排出側端部を接続するので、メツキ液
は必ず多孔板を通過する。
(Function) The plating liquid in the plating tank exits the plating tank via the plating liquid circulation line and returns to the plating tank. During this circulation process, the plating solution is heated and replenished. In the present invention, the plating solution is heated and replenished between the perforated plate of the plating tank and the solution supply end and solution discharge end of the plating solution circulation line. Since the plating liquid always passes through the perforated plate.

そして多孔板を通過する際、メツキ液の流速は
緩和され分散し、その流速分布が平均化される。
加えて、メツキ槽の排出口が多孔板に対向するメ
ツキ槽背面とこの背面に近いメツキ槽底面に開口
し、しかも多孔板がプリント基板に対し直交する
方向に沿つて設置されているので、多孔板を通過
したメツキ液は排出口に向けプリント基板に対し
平行に流れる。
When passing through the perforated plate, the flow velocity of the plating liquid is relaxed and dispersed, and the flow velocity distribution is averaged.
In addition, the outlet of the plating tank opens at the back of the plating tank facing the perforated plate and at the bottom of the plating tank near the back, and since the perforated plate is installed along the direction perpendicular to the printed circuit board, the perforated The plating liquid that has passed through the plate flows parallel to the printed circuit board toward the outlet.

このためプリント基板表面のメツキ液の温度及
び濃度分布が平均化し、スルーホールのメツキ層
の厚さが均一になる。
Therefore, the temperature and concentration distribution of the plating liquid on the surface of the printed circuit board are averaged, and the thickness of the plating layer of the through hole becomes uniform.

(実施例) 本発明の実施例を図面に示して説明すると、1
は平面が長方形の無電解銅メツキ槽で、その開放
した上面より槽内に基板収納かご2を吊り下げ、
かご内の基板3をメツキ槽1の短辺方向に平行に
多数設置する。基板3にはあらかじめ触媒微粒子
を接着塗布し、その上面にレジストを配線パター
ンに従い印刷する。
(Example) An example of the present invention will be explained with reference to the drawings.1
is an electroless copper plating tank with a rectangular plane, and a substrate storage basket 2 is suspended in the tank from the open top surface.
A large number of substrates 3 in the cage are installed parallel to the short side direction of the plating tank 1. Catalyst fine particles are adhesively coated on the substrate 3 in advance, and a resist is printed on the upper surface according to the wiring pattern.

そしてメツキ槽1の一方の長辺を構成する背面
板4に向けその底板5を緩く傾斜させ、背面板4
に近い底板5の最深部に底面排出口6を複数個開
口すると共に、背面板4には底面排出口6の上方
にのぞむ位置に底面排出口6と同数の背面排出口
7を開口する。
Then, the bottom plate 5 is gently inclined toward the back plate 4 that constitutes one long side of the plating tank 1, and the back plate 4 is
A plurality of bottom discharge ports 6 are opened at the deepest part of the bottom plate 5 near the bottom, and the same number of back discharge ports 7 as the bottom discharge ports 6 are opened in the back plate 4 at positions looking above the bottom discharge ports 6.

次にこれら複数個の各底面排出口6を合流して
1台の主循環ポンプ8の吸引側に配管し、その吐
出側をフイルタ9を経てミキシングチヤンバ10
の入口に配管する。11は自動液補給器で、その
排出管11aをミキシングチヤンバ10に連結
し、ミキシングチヤンバ10の出口は合流管12
を経て供給管13に配管する。
Next, these plurality of bottom discharge ports 6 are combined and piped to the suction side of one main circulation pump 8, and the discharge side thereof is passed through a filter 9 to a mixing chamber 10.
Piping is installed at the inlet of the pipe. Reference numeral 11 denotes an automatic liquid replenisher, whose discharge pipe 11a is connected to the mixing chamber 10, and the outlet of the mixing chamber 10 is connected to the confluence pipe 12.
The pipe is connected to the supply pipe 13 through the pipe.

14は、メツキ槽1の他方の長辺を構成する正
面板15に対し平行に槽内に設置する多孔板で、
この多孔板14と正面板15の間に供給管13の
開口端を取付ける。
14 is a perforated plate installed in the tank parallel to the front plate 15 constituting the other long side of the plating tank 1;
The open end of the supply pipe 13 is attached between the perforated plate 14 and the front plate 15.

また複数個の背面排出口7を合流して1台の熱
交系ポンプ16の吸引側に配管し、その吐出側を
公知の熱交換器17より上述の合流管12を経て
供給管13に配管する。熱交換器17はその流入
側から流出側に至る多数本のプラスチツクチユー
ブ17aを外筒17bに内装する構造で、外筒1
7bに水蒸気または温水を注入することによりチ
ユーブ17a内の流体を加熱したり、あるいは冷
水を注入してチユーブ17aの流体を冷却する。
In addition, the plurality of back discharge ports 7 are combined and piped to the suction side of one heat exchange system pump 16, and the discharge side is piped to the supply pipe 13 from a known heat exchanger 17 via the above-mentioned merging pipe 12. do. The heat exchanger 17 has a structure in which a large number of plastic tubes 17a extending from the inflow side to the outflow side are housed in an outer cylinder 17b.
The fluid in the tube 17a is heated by injecting steam or hot water into the tube 7b, or the fluid in the tube 17a is cooled by injecting cold water.

ここで底面排出口6よりポンプ8、フイルタ
9、ミキシングチヤンバ10および合流管12を
経て供給管13に至る経路が主循環ラインAであ
り、背面排出口7よりポンプ16、熱交換器17
および合流管12を経て供給管13に至る経路が
熱交ラインBである。そしてこれら主循環ライン
A及び熱交ラインBがメツキ液循環ラインを構成
し、供給管13が前記メツキ液循環ラインの液供
給側端部であり、また底面排出口6及び背面排出
口7が前記メツキ液循環ラインの液排出側端部に
該当する。
Here, the route from the bottom outlet 6 to the supply pipe 13 via the pump 8, filter 9, mixing chamber 10 and merging pipe 12 is the main circulation line A, and from the back outlet 7 to the pump 16 and the heat exchanger 17.
A heat exchange line B is a route that passes through the merging pipe 12 and reaches the supply pipe 13. The main circulation line A and the heat exchange line B constitute a plating liquid circulation line, the supply pipe 13 is the liquid supply side end of the plating liquid circulation line, and the bottom discharge port 6 and the back discharge port 7 are the plating liquid circulation line. This corresponds to the liquid discharge side end of the plating liquid circulation line.

18はメツキ槽1の底部にその短辺方向に沿い
多数本等間隔に並設する散気管で、図示しないエ
アポンプに接続し、管壁に穿つ多数の小孔より無
数の気泡を槽内に平均に供給し、後述する無電解
銅メツキ液の過剰な液分解を抑制する。
Reference numeral 18 denotes a number of air diffuser pipes arranged at equal intervals along the short side of the bottom of the plating tank 1. These pipes are connected to an air pump (not shown) and diffuse countless air bubbles into the tank through a large number of small holes bored in the pipe wall. to suppress excessive liquid decomposition of the electroless copper plating solution, which will be described later.

19はメツキ槽1にメツキ液を新規注入する注
入管で、図示しない液タンクに接続する。
Reference numeral 19 denotes an injection pipe for newly injecting plating liquid into the plating tank 1, and is connected to a liquid tank (not shown).

しかして注入管19よりメツキ槽1に、低温で
不活性状態の無電解銅メツキ液を規定量注入す
る。無電解メツキ液は、硫酸銅とカ性ソーダの混
合液を主体にこれにホルマリン、エチレンジアミ
ンテトラアシドおよび添加液を純水で溶かした溶
液を混合したもので、所定温度を越える高温で活
性化して液分解し、それ以下の低温で不活性状態
を保つ。なお、ニツケルメツキする場合には、無
電解銅メツキ液の代りに無電解ニツケルメツキ液
を使用すればよい。
Then, a specified amount of low temperature and inert electroless copper plating solution is injected into the plating tank 1 through the injection pipe 19. Electroless plating solution is a mixture of copper sulfate and caustic soda, and a solution of formalin, ethylenediaminetetraacid, and additives dissolved in pure water, and is activated at a high temperature exceeding a specified temperature. It decomposes into liquid and remains inactive at lower temperatures. In addition, when performing nickel plating, an electroless nickel plating solution may be used instead of the electroless copper plating solution.

液注入液、ポンプ8および16を駆動し、槽内
のメツキ液を底面排出口6および背面排出口7よ
り排出し、主循環ラインAおよび熱交ラインBを
経て、これらメツキ液循環ラインの液供給側端部
である供給管13より、ふたたびメツキ槽1へ戻
す。
The liquid injection liquid and pumps 8 and 16 are driven, the plating liquid in the tank is discharged from the bottom outlet 6 and the back outlet 7, and the liquid in these plating liquid circulation lines passes through the main circulation line A and the heat exchange line B. It is returned to the plating tank 1 through the supply pipe 13 which is the supply end.

供給管13の液は、多孔板14によりその流速
を緩和しつつ多孔板14の全面より分散し、各基
板3の表裏をその板面に平行に均一の流速で流れ
て槽内を横断し、供給管13と反対側の排出口
6,7より排出し、これを繰り返す。
The liquid in the supply pipe 13 is dispersed from the entire surface of the perforated plate 14 while its flow rate is moderated by the perforated plate 14, and flows across the tank at a uniform flow rate on the front and back of each substrate 3 parallel to the plate surface, Discharge from the outlets 6 and 7 on the opposite side of the supply pipe 13, and repeat this process.

ここで排出口はメツキ槽の底面のみならず背面
にも開口するから、多孔板14より流れ出たメツ
キ液は背面の排出口7方向へも流れ底面排出口6
に集中しない。
Here, the discharge port opens not only on the bottom surface of the plating tank but also on the back surface, so the plating liquid flowing out from the perforated plate 14 also flows in the direction of the discharge port 7 on the back surface.
Don't concentrate on.

従つてメツキ液はメツキ槽全体を横断するよう
に流れ、メツキ液が一部に停滞することがない。
Therefore, the plating liquid flows across the entire plating tank, and the plating liquid does not stagnate in one part.

しかして熱交ラインBを流れるメツキ液は熱交
換器17の水蒸気または温水により加熱され、槽
内のメツキ液が所定温度を越えると触媒作用によ
り液分解を起し、基板3のパラジウム露出部分に
金属銅が析出して、これによりスルーホールや配
線パターンを形成する。
The plating liquid flowing through the heat exchanger line B is heated by steam or hot water in the heat exchanger 17, and when the plating liquid in the tank exceeds a predetermined temperature, the liquid decomposes due to the catalytic action, and the palladium exposed portion of the substrate 3 is heated. Metallic copper is deposited to form through holes and wiring patterns.

基板3から剥離した触媒を核に銅が析出しメツ
キ槽1の底部に沈澱することがあるが、このよう
な沈澱物は底面排出口6より主循環ラインAを経
てフイルタ9に吸着し除去される。
Copper may precipitate around the catalyst separated from the substrate 3 and settle at the bottom of the plating tank 1, but such deposits are adsorbed and removed by the filter 9 from the bottom outlet 6 through the main circulation line A. Ru.

メツキ層が所定の厚さ(たとえば30ミクロン)
まで仕上がるには長時間を要するが、その間にメ
ツキ槽1より飛散蒸発したり消失したメツキ液
を、自動液補給器11より定量づつミキシングチ
ヤンバ10を経て主循環ラインAによりメツキ槽
1に補給する。
The plating layer has a predetermined thickness (for example, 30 microns)
It takes a long time to finish the plating liquid, but during that time, the plating liquid that has evaporated or disappeared from the plating tank 1 is replenished into the plating tank 1 via the mixing chamber 10 in fixed quantities from the automatic liquid supply device 11 through the main circulation line A. do.

主循環ラインAを流れるメツキ液は、合流管1
2において加熱ラインBからの高温のメツキ液と
混合し、続いて共通の供給管13より多孔板14
を経て槽内に分散する際、多孔板4に当つてさら
に両者一体的に混合する。
The plating liquid flowing through the main circulation line A is connected to the confluence pipe 1
2, the plating liquid is mixed with high temperature plating liquid from the heating line B, and then the perforated plate 14 is mixed with the plating liquid from the common supply pipe 13.
When being dispersed into the tank, they are further mixed integrally by hitting the perforated plate 4.

そして、このメツキ液は多孔板14の板面より
垂直方向に、つまりプリント基板3に平行に流出
し、対流や渦を生じて停滞することがなく、槽内
全体を均一の流速で流れる。このため基板3の板
面全体におけるメツキ液の濃度と温度は平均に分
布するので、供給管13に近いスルーホールも遠
いスルーホールもメツキ層の厚さが均一になる。
This plating solution flows out from the surface of the perforated plate 14 in a vertical direction, that is, parallel to the printed circuit board 3, and flows at a uniform flow rate throughout the tank without generating convection or vortices and stagnation. Therefore, the concentration and temperature of the plating solution over the entire surface of the substrate 3 are distributed evenly, so that the thickness of the plating layer is uniform in both the through holes close to the supply pipe 13 and the through holes far away from the supply pipe 13.

メツキが終了したら基板収納かご2を引き上
げ、洗浄工程に移動する。移動後も引き続きポン
プ8,16を駆動しながら熱交換器17に冷却水
を注入してメツキ液の温度を降下し、不活性状態
に戻したのち槽内のメツキ液を液タンクに排出
し、かわりに洗浄液を入れメツキ槽1を清掃す
る。
When the plating is completed, the substrate storage basket 2 is pulled up and moved to the cleaning process. After moving, cooling water is injected into the heat exchanger 17 while continuing to drive the pumps 8 and 16 to lower the temperature of the plating liquid, returning it to an inert state, and then discharging the plating liquid in the tank into the liquid tank. Instead, the plating tank 1 is cleaned by adding cleaning liquid.

(発明の効果) これを要するに、本発明は、無電解メツキのメ
ツキ槽1内のプリント基板3の側方に、この基板
3とは直交する方向に沿い多孔板14を設置し、
この多孔板14により区画する基板3とは反対側
のメツキ槽1内にメツキ液循環ラインの液供給側
端部を接続し、またこのメツキ液循環ラインの液
排出側端部を多孔板14より基板3側のメツキ槽
1内の排出口6,7に接続する構成であるから、
メツキ液循環ラインより槽内に戻るメツキ液は、
先づ多孔板14に当つて流速を緩和しつつ撹拌混
合され、ついで多孔板14の全面より流速が平均
化されて分散流出する。しかも本発明では排出口
6,7が液供給側と反対側のメツキ槽背面と底面
に開口するから、この多孔板14を通過したメツ
キ液は液排出側端部に向けメツキ槽全体を横断す
るように基板3に対し平行に流れる。従つて、メ
ツキ液は基板3付近で停滞せず基板3の全面にお
いて流速が等しく、基板3の板面全体におけるメ
ツキ液の温度分布および濃度分布が平均する。
(Effects of the Invention) In short, the present invention provides a perforated plate 14 installed on the side of the printed circuit board 3 in the electroless plating tank 1 along a direction perpendicular to the printed circuit board 3,
The liquid supply side end of the plating liquid circulation line is connected to the plating tank 1 on the opposite side of the substrate 3 divided by the perforated plate 14, and the liquid discharge side end of the plating liquid circulation line is connected to the plating tank 1 on the opposite side from the substrate 3 divided by the perforated plate 14. Since it is configured to connect to the discharge ports 6 and 7 in the plating tank 1 on the board 3 side,
The plating liquid that returns to the tank from the plating liquid circulation line is
First, they hit the perforated plate 14 and are agitated and mixed while the flow rate is moderated, and then the flow rate is averaged over the entire surface of the perforated plate 14 and the mixture flows out in a dispersed manner. Moreover, in the present invention, the discharge ports 6 and 7 are opened at the back and bottom of the plating tank on the side opposite to the liquid supply side, so the plating liquid that has passed through the perforated plate 14 traverses the entire plating tank toward the end on the liquid discharge side. The current flows parallel to the substrate 3 as shown in FIG. Therefore, the plating solution does not stagnate in the vicinity of the substrate 3, but has an equal flow rate over the entire surface of the substrate 3, and the temperature distribution and concentration distribution of the plating solution over the entire surface of the substrate 3 are averaged.

従つて本発明によれば、槽内のいかなる位置に
おけるスルーホールもメツキ層の厚さをすべて均
一に形成できるという効果を生ずる。
Therefore, according to the present invention, there is an effect that the thickness of the plating layer can be formed uniformly for all through holes located at any position within the tank.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明を実施したプリント基板のスル
ーホールメツキ装置全体の流れ線図、第2図はそ
のメツキ槽の平面図、第3図は第2図の横断面図
である。 1はメツキ槽、3はプリント基板、Aは主循環
ライン、Bは熱交ライン、6は底面排出口、7は
背面排出口、8は主循環ポンプ、13は供給管、
14は多孔板、16は熱交系ポンプ。
FIG. 1 is a flow diagram of the entire through-hole plating apparatus for printed circuit boards embodying the present invention, FIG. 2 is a plan view of the plating tank, and FIG. 3 is a cross-sectional view of FIG. 2. 1 is a plating tank, 3 is a printed circuit board, A is a main circulation line, B is a heat exchange line, 6 is a bottom outlet, 7 is a back outlet, 8 is a main circulation pump, 13 is a supply pipe,
14 is a perforated plate, and 16 is a heat exchange pump.

Claims (1)

【特許請求の範囲】 1 スルーホールメツキすべき無電解メツキ槽内
のプリント基板の側方に、このプリント基板とは
直交する方向に沿い多孔板を設置して前記メツキ
槽内をふたつに区画し、 その一方の、前記プリント基板側とは反対側の
メツキ槽内に、メツキ液循環ラインの液供給側端
部を接続し、 また他方の、前記プリント基板側のメツキ槽内
には、前記多孔板に対向するメツキ槽背面及びこ
のメツキ槽背面に近いメツキ槽底面にそれぞれ背
面排出口及び底面排出口を開口し、これら背面排
出口及び底面排出口に前記メツキ液循環ラインの
液排出側端部を接続して成るプリント基板のスル
ーホールメツキ装置。
[Claims] 1. A perforated plate is installed on the side of a printed circuit board in an electroless plating tank in which through-holes are to be plated along a direction perpendicular to the printed circuit board, and the inside of the plating tank is divided into two. , The liquid supply side end of the plating liquid circulation line is connected to one of the plating tanks on the side opposite to the printed circuit board side, and the porous plating tank is connected to the plating tank on the other side of the printed circuit board. A back side outlet and a bottom side outlet are opened at the back side of the plating tank facing the plate and at the bottom side of the plating tank near the back side of the plating tank, respectively, and the liquid discharge side end of the plating liquid circulation line is connected to these back side outlet and bottom side outlet. A through-hole plating device for printed circuit boards that connects.
JP5393490A 1990-03-06 1990-03-06 Through-hole plating device for printed board Granted JPH0375377A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5393490A JPH0375377A (en) 1990-03-06 1990-03-06 Through-hole plating device for printed board

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5393490A JPH0375377A (en) 1990-03-06 1990-03-06 Through-hole plating device for printed board

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP3792983A Division JPS59161895A (en) 1983-03-07 1983-03-07 Apparatus for producing both-side wiring printed board by electroless copper plating

Publications (2)

Publication Number Publication Date
JPH0375377A JPH0375377A (en) 1991-03-29
JPH048960B2 true JPH048960B2 (en) 1992-02-18

Family

ID=12956573

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5393490A Granted JPH0375377A (en) 1990-03-06 1990-03-06 Through-hole plating device for printed board

Country Status (1)

Country Link
JP (1) JPH0375377A (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2935335B2 (en) * 1993-10-01 1999-08-16 住友電気工業株式会社 Motor failure judgment device for anti-skid control device
JP4692742B2 (en) * 2005-06-24 2011-06-01 富士電機ホールディングス株式会社 Sample analyzer
US11803047B2 (en) * 2019-02-04 2023-10-31 Thorlabs Measurement Systems Inc. Actuator and beam steering mechanism using an actuator

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54155473A (en) * 1978-05-29 1979-12-07 Hitachi Electronics Method of plating printed circuit board

Also Published As

Publication number Publication date
JPH0375377A (en) 1991-03-29

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