JPH0510295B2 - - Google Patents
Info
- Publication number
- JPH0510295B2 JPH0510295B2 JP60220255A JP22025585A JPH0510295B2 JP H0510295 B2 JPH0510295 B2 JP H0510295B2 JP 60220255 A JP60220255 A JP 60220255A JP 22025585 A JP22025585 A JP 22025585A JP H0510295 B2 JPH0510295 B2 JP H0510295B2
- Authority
- JP
- Japan
- Prior art keywords
- silicon nitride
- weight
- powder
- oxide
- coal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 21
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 21
- 238000005245 sintering Methods 0.000 claims description 19
- 239000000843 powder Substances 0.000 claims description 12
- 229910002515 CoAl Inorganic materials 0.000 claims description 9
- 239000003245 coal Substances 0.000 claims description 9
- 238000000465 moulding Methods 0.000 claims description 9
- CRHLEZORXKQUEI-UHFFFAOYSA-N dialuminum;cobalt(2+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Al+3].[Al+3].[Co+2].[Co+2] CRHLEZORXKQUEI-UHFFFAOYSA-N 0.000 claims description 8
- 229910052596 spinel Inorganic materials 0.000 claims description 8
- 239000011029 spinel Substances 0.000 claims description 8
- 238000010304 firing Methods 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 claims description 4
- 230000001590 oxidative effect Effects 0.000 claims description 4
- 239000011812 mixed powder Substances 0.000 claims description 2
- 238000000034 method Methods 0.000 description 10
- 239000000203 mixture Substances 0.000 description 5
- 239000002245 particle Substances 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 3
- 238000000280 densification Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000013001 point bending Methods 0.000 description 3
- 239000002994 raw material Substances 0.000 description 3
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 2
- 229910000428 cobalt oxide Inorganic materials 0.000 description 2
- IVMYJDGYRUAWML-UHFFFAOYSA-N cobalt(ii) oxide Chemical compound [Co]=O IVMYJDGYRUAWML-UHFFFAOYSA-N 0.000 description 2
- 239000013065 commercial product Substances 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 2
- 238000001272 pressureless sintering Methods 0.000 description 2
- 238000007088 Archimedes method Methods 0.000 description 1
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 229910000420 cerium oxide Inorganic materials 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000001125 extrusion Methods 0.000 description 1
- 229910001938 gadolinium oxide Inorganic materials 0.000 description 1
- 229940075613 gadolinium oxide Drugs 0.000 description 1
- CMIHHWBVHJVIGI-UHFFFAOYSA-N gadolinium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[Gd+3].[Gd+3] CMIHHWBVHJVIGI-UHFFFAOYSA-N 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- -1 high strength Chemical compound 0.000 description 1
- 238000001513 hot isostatic pressing Methods 0.000 description 1
- 238000007731 hot pressing Methods 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 238000001746 injection moulding Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- BMMGVYCKOGBVEV-UHFFFAOYSA-N oxo(oxoceriooxy)cerium Chemical compound [Ce]=O.O=[Ce]=O BMMGVYCKOGBVEV-UHFFFAOYSA-N 0.000 description 1
- MMKQUGHLEMYQSG-UHFFFAOYSA-N oxygen(2-);praseodymium(3+) Chemical compound [O-2].[O-2].[O-2].[Pr+3].[Pr+3] MMKQUGHLEMYQSG-UHFFFAOYSA-N 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 229910003447 praseodymium oxide Inorganic materials 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 229910001954 samarium oxide Inorganic materials 0.000 description 1
- 229940075630 samarium oxide Drugs 0.000 description 1
- FKTOIHSPIPYAPE-UHFFFAOYSA-N samarium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[Sm+3].[Sm+3] FKTOIHSPIPYAPE-UHFFFAOYSA-N 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 238000007582 slurry-cast process Methods 0.000 description 1
Landscapes
- Ceramic Products (AREA)
Description
〔産業上の利用分野〕
本発明は、窒化珪素の焼結助剤とその焼結助剤
を用いた窒化珪素焼結体の製法に関し、詳しく
は、アルミン酸コバルトスピネル(CoAl2O4)と
La族酸化物の混合物を焼結助剤とし、緻密でか
つ高強度な窒化珪素焼結体を製造する方法に関す
る。
窒化珪素焼結体は、耐熱性、耐食性、耐摩耗
性、耐熱衝撃性に優れた特性を有するため、軸
受、ノズル、ベアリング、タービン部材などの構
造材に用いられている。
〔従来の技術〕
窒化珪素は、それ自身では焼結させることが困
難なため、一般的には、MgO、Al2O3、Y2O3な
どを焼結助剤として添加している。
しかし、常圧焼結法で焼結させる場合に於いて
は、焼結助剤の添加量を多くしないと、例えば気
孔率2%以下の緻密な焼結体が得られにくく、一
方、添加すると、緻密ではあるが窒化珪素本来の
特質例えば高強度が損なわれるという欠点があ
る。
また、上記欠点を補う焼結法としては、例えば
ホツトプレス(HP)など圧力を加えながら焼結
させる方法(特公昭52−3415号公報)があるが、
複雑な形状の焼結体が得られにくいなどの産業上
の欠点を有する。
〔発明が解決しようとする問題点〕
本発明者は、以上の欠点を解決し、常圧焼結法
によつて、緻密でかつ高強度の窒化珪素焼結体を
製造する方法について種々検討した結果、焼結助
剤として、アルミン酸コバルトスピネル
(CoAl2O4)とLa族酸化物とを併用すればよいこ
とを見い出し、本発明を完成させた。
〔問題点を解決するための手段〕
すなわち、本発明は、次を要旨とするものであ
る。
1 アルミン酸コバルトスピネル(CoAl2O4)と
La族酸物とを含有してなる窒化珪素の焼結助
剤。
2 窒化珪素粉末80重量%以上とアルミン酸コバ
ルトスピネル(CoAl2O4)0.5〜15重量%とLa
族酸化物0.5〜18重量%とを含有してなる混合
粉末を成形した後、非酸化性雰囲気下で焼成す
ることを特徴とする緻密な窒化珪素焼結体の製
法。
以下、さらに詳しく本発明について説明する。
焼結助剤成分であるアルミン酸コバルトスピネ
ル(CoAl2O4)は、窒化珪素焼結体の緻密化と高
強度化に寄与するものであり、酸化コバルト
(CoO)と酸化アルミニウム(Al2O2)との高温
反応によつて得られるスピル構造を有する化合物
である。このスピネルのかわりに、酸化コバルト
と酸化アルミニウムの混合物を用いても本発明の
ような緻密化かつ高強度化の効果は得られない。
他方の焼結助剤成分であるLa族酸化物は、1
種又は2種以上が使用される。La族酸化物とし
ては、どのようなものでもよいが、特に好ましい
ものは、酸化セリウム、酸化プラセオジム、酸化
サマリウム、酸化ガドリニウムである。
以上のアルミン酸コバルトスピネルとLa族酸
化物は単独で用いても緻密化と高強度化の効果は
得られないので両者を併用する必要がある。それ
らの割合は、両者の合計として、窒化珪素粉末80
重量%以上に対し20重量%以下である。焼結助剤
の割合がこれよりも多くなると、窒化珪素本来の
特性が著しく損なわれる。好ましい配合割合は、
窒化珪素粉末80重量%以上、アルミン酸コバルト
スピネネル0.5〜15重量%特に好ましくは1〜7
重量%、La族酸化物0.5〜18重量%特に好ましく
は2〜8重量%、である。窒化珪素粉末として
は、α相が50重量%以上含むものが好適であり、
α相が50重量%未満であると焼結過程で生じるα
相からβ相への長柱状結晶の焼結体に占める割合
が少なくなり高強度化にとつて不利となる。
窒化珪素粉末と焼結助剤との混合方法について
は、特に限定しない。成形方法としては、泥漿鋳
込成形、射出成形、金型プレス成形、押出し成形
等、通常の成形方法を、目的とする形状などによ
つて適宜選択する。
また、焼結雰囲気は、窒化珪素の分解を抑制す
るために、非酸化性雰囲気が好ましく、特に好ま
しくは、、窒素ガス雰囲気であるが、他の非酸化
性雰囲気として作用するガスと混合しても何ら差
しつかえない。なお、焼結方法は、特に常圧焼結
に限定するものではなく、焼結体の形状、目的物
性に応じて、ホツトプレス(HP)、熱間静水圧
プレス(HIP)などを採用することもできる。
〔実施例〕
以下、本発明の実施例と比較例をあげてさらに
具体的に説明する。
実施例
平均粒径0.73μm(粒度分析計〔商品名:マイ
クロトラツク、N&L社製〕で測定)のα相90%
Si3N4粉末90重量%、平均粒径1.0μmのCoAl2O4
(市販品)5重量%及び平均粒径0.8μmのCeO2
(市販品)5重量%からなる混合粉末に、1,1,
1−トリクロルエタンを加え4時間ボールミル湿
式混合し、乾燥後100Kg/cm2の成形圧で6×10×60
mmの形状に金型成形後、2000/cm2の成形圧でCIP
成形した。
比較のため、CoAl2O4のかわりにCoO(市販品)
とAl2O3(市販品)の混合物を用いた他は上記と
同一条件で成形し成形体を得た。
これら成形体をカーボンルツボにセツトし、
N2ガス雰囲気中で1650℃にて12時間焼成して焼
結体を製造した。これら焼結体の気孔率と常温3
点曲げ強度(JIS R 1601に準拠)を測定したと
ころ、本実施例の場合が、気孔率1.2%、常温曲
げ強度90Kg/mm2が得られたのに対して、比較例の
場合は、気孔率3.9%、常温3点曲げ強度75Kg/mm2
であつた。
なお、気孔率はアルキメデス法(JIS2205に準
拠)で測定したかさ比重を原料配合基準の理論密
度で除し1から減じ100を掛けることによつて求
めた。
次に、α相90%のSi3N4粉末、CoAl2O4粉末及
びLa族酸化物としてCeO2、Pr6O11、Sm2O3、
Gd2O3粉末(いずれも市販品)を原料とし、比較
例も含めて18種類の原料粉について上記と同じ条
件で成形体を作り、焼成後、気孔率と常温3点曲
げ強度を測定した。
それらの結果を表に示す。
[Industrial Application Field ] The present invention relates to a sintering aid for silicon nitride and a method for producing a silicon nitride sintered body using the sintering aid.
This invention relates to a method for producing a dense and high-strength silicon nitride sintered body using a mixture of La group oxides as a sintering aid. Silicon nitride sintered bodies have excellent heat resistance, corrosion resistance, wear resistance, and thermal shock resistance, and are therefore used in structural materials such as bearings, nozzles, bearings, and turbine members. [Prior Art] Since it is difficult to sinter silicon nitride by itself, MgO, Al 2 O 3 , Y 2 O 3 or the like is generally added as a sintering aid. However, when sintering using the pressureless sintering method, it is difficult to obtain a dense sintered body with a porosity of 2% or less unless a large amount of sintering aid is added; Although it is dense, it has the disadvantage that the inherent characteristics of silicon nitride, such as high strength, are lost. In addition, as a sintering method that compensates for the above drawbacks, there is a method of sintering while applying pressure such as hot press (HP) (Japanese Patent Publication No. 52-3415).
It has industrial disadvantages such as difficulty in obtaining sintered bodies with complicated shapes. [Problems to be Solved by the Invention] The present inventor has investigated various methods for solving the above-mentioned drawbacks and producing a dense and high-strength silicon nitride sintered body by an atmospheric pressure sintering method. As a result, they discovered that cobalt aluminate spinel (CoAl 2 O 4 ) and a La group oxide can be used together as a sintering aid, thereby completing the present invention. [Means for Solving the Problems] That is, the present invention has the following gist. 1 Cobalt aluminate spinel (CoAl 2 O 4 ) and
A sintering aid for silicon nitride containing a La group oxide. 2 80% by weight or more of silicon nitride powder, 0.5 to 15% by weight of cobalt aluminate spinel (CoAl 2 O 4 ), and La
A method for producing a dense silicon nitride sintered body, which comprises molding a mixed powder containing 0.5 to 18% by weight of group oxides and then firing it in a non-oxidizing atmosphere. The present invention will be explained in more detail below. Cobalt aluminate spinel (CoAl 2 O 4 ), which is a sintering aid component, contributes to the densification and high strength of silicon nitride sintered bodies, and cobalt oxide (CoO) and aluminum oxide (Al 2 O 4 ) 2 ) is a compound with a spill structure obtained through a high temperature reaction with Even if a mixture of cobalt oxide and aluminum oxide is used instead of this spinel, the effects of densification and high strength as in the present invention cannot be obtained. The other sintering aid component, the La group oxide, is 1
A species or two or more species may be used. Any type of La group oxide may be used, but particularly preferred are cerium oxide, praseodymium oxide, samarium oxide, and gadolinium oxide. Even if the above-mentioned cobalt aluminate spinel and La group oxide are used alone, the effects of densification and high strength cannot be obtained, so it is necessary to use both together. Their ratio is 80% silicon nitride powder as the sum of both.
It is 20% by weight or less compared to 20% by weight or more. If the proportion of the sintering aid is greater than this, the inherent properties of silicon nitride will be significantly impaired. The preferred blending ratio is
Silicon nitride powder 80% by weight or more, cobalt aluminate spinenel 0.5 to 15% by weight, particularly preferably 1 to 7
% by weight, 0.5 to 18% by weight of La group oxide, particularly preferably 2 to 8% by weight. As the silicon nitride powder, one containing 50% by weight or more of α phase is suitable,
If the α phase is less than 50% by weight, α will be generated during the sintering process.
The ratio of long columnar crystals from the phase to the β phase in the sintered body decreases, which is disadvantageous for increasing the strength. There are no particular limitations on the method of mixing the silicon nitride powder and the sintering aid. As the molding method, a conventional molding method such as slurry casting, injection molding, mold press molding, extrusion molding, etc. is appropriately selected depending on the desired shape. Furthermore, in order to suppress the decomposition of silicon nitride, the sintering atmosphere is preferably a non-oxidizing atmosphere, particularly preferably a nitrogen gas atmosphere, but mixed with another gas that acts as a non-oxidizing atmosphere. There is nothing wrong with that either. The sintering method is not limited to pressureless sintering; hot pressing (HP), hot isostatic pressing (HIP), etc. may be used depending on the shape and desired physical properties of the sintered body. can. [Example] Hereinafter, the present invention will be described in more detail by giving examples and comparative examples. Example: 90% α phase with an average particle size of 0.73 μm (measured with a particle size analyzer [trade name: Microtrack, manufactured by N&L Co., Ltd.])
Si 3 N 4 powder 90% by weight, CoAl 2 O 4 with average particle size 1.0 μm
(Commercial product) CeO 2 with 5% by weight and average particle size of 0.8μm
(Commercial product) Add 1,1,
Add 1-trichloroethane, wet mix in a ball mill for 4 hours, and after drying, mold 6×10×60 with a molding pressure of 100Kg/ cm2 .
After molding into a mm shape, CIP with a molding pressure of 2000/cm 2
Molded. For comparison, CoO (commercially available) instead of CoAl 2 O 4
A molded body was obtained by molding under the same conditions as above except that a mixture of and Al 2 O 3 (commercially available) was used. These molded bodies are set in a carbon crucible,
A sintered body was produced by firing at 1650° C. for 12 hours in an N 2 gas atmosphere. Porosity of these sintered bodies and room temperature 3
When measuring the point bending strength (according to JIS R 1601), the present example had a porosity of 1.2% and a room temperature bending strength of 90 Kg/ mm2 , whereas the comparative example had a rate 3.9%, normal temperature 3-point bending strength 75Kg/mm 2
It was hot. The porosity was determined by dividing the bulk specific gravity measured by the Archimedes method (according to JIS2205) by the theoretical density based on the raw material composition, subtracting it from 1, and multiplying by 100. Next, Si 3 N 4 powder with 90% α phase, CoAl 2 O 4 powder and La group oxides such as CeO 2 , Pr 6 O 11 , Sm 2 O 3 ,
Using Gd 2 O 3 powder (all commercially available) as a raw material, molded bodies were made under the same conditions as above for 18 types of raw material powder, including comparative examples, and after firing, the porosity and three-point bending strength at room temperature were measured. . The results are shown in the table.
本発明によれば、緻密で高強度な窒化珪素焼結
体を製造することができる。
According to the present invention, a dense and high-strength silicon nitride sintered body can be manufactured.
Claims (1)
La族酸化物とを含有してなる窒化珪素の焼結助
剤。 2 窒化珪素粉末80重量%以上とアルミン酸コバ
ルトスピネル(CoAl2O4)0.5〜15重量%とLa族
酸化物0.5〜18重量%とを含有してなる混合粉末
を成形した後、非酸化性雰囲気下で焼成すること
を特徴とする緻密でかつ高強度な窒化珪素焼結体
の製法。[Claims] 1. Cobalt aluminate spinel (CoAl 2 O 4 ) and
A sintering aid for silicon nitride containing a La group oxide. 2. After molding a mixed powder containing 80% by weight or more of silicon nitride powder, 0.5 to 15% by weight of cobalt aluminate spinel (CoAl 2 O 4 ), and 0.5 to 18% by weight of La group oxide, a non-oxidizing powder is formed. A method for producing a dense and high-strength silicon nitride sintered body, which is characterized by firing in an atmosphere.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60220255A JPS6283374A (en) | 1985-10-04 | 1985-10-04 | Sintering aid for silicon nitride and manufacture of silcon nitride therewith |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60220255A JPS6283374A (en) | 1985-10-04 | 1985-10-04 | Sintering aid for silicon nitride and manufacture of silcon nitride therewith |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6283374A JPS6283374A (en) | 1987-04-16 |
| JPH0510295B2 true JPH0510295B2 (en) | 1993-02-09 |
Family
ID=16748318
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60220255A Granted JPS6283374A (en) | 1985-10-04 | 1985-10-04 | Sintering aid for silicon nitride and manufacture of silcon nitride therewith |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6283374A (en) |
-
1985
- 1985-10-04 JP JP60220255A patent/JPS6283374A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6283374A (en) | 1987-04-16 |
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