JPH0511600B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to an X-ray optical system suitable for use in an objective lens and an eyepiece of an X-ray microscope or the like.

[Prior Art] Many optical systems have been considered for condensing X-rays, but among them, one using a rotating body reflecting mirror is attracting attention. In this optical system, for example, the inner surfaces of the hyperboloid of revolution and the spheroid are used as total reflection surfaces for X-rays, and the inner surfaces totally reflect the X-rays and condense the X-rays. It consists of The focused X-rays are irradiated onto a sample, and the X-rays diffracted by the sample are transmitted through an objective lens consisting of an ellipsoid of revolution and a hyperboloid of revolution, and an ellipsoid of revolution and a hyperboloid of revolution. An X-ray image of the sample can be obtained by forming an image using an X-ray optical system comprising an eyepiece lens.

[Problems to be Solved by the Invention] The above-mentioned X-ray optical system uses a large number of bifocal rotating curved surfaces, and the focal point of each curved surface must be placed on a straight optical axis. The imaging direction is also limited. Furthermore, the X-ray reflecting surface inside the rotating curved surface body requires highly accurate machining, but since it is a rotating surface, machining is extremely difficult.

The present invention has been made in view of the above-mentioned points, and an object of the present invention is to provide an X-ray optical system in which the direction of image formation can be arbitrarily set and the lens can be easily processed.

[Means for Solving the Problems] The X-ray optical system based on the present invention has a bifocal rotating curved body, and has a second optical system that focuses X-rays from an object point by total reflection on the inner surface of the curved body. 1 lens, and a second lens that has a bifocal curved body and completely reflects the X-rays focused by the first lens on the inner surface of the curved body to form an image. , the optical axes of the first and second lenses are arranged at an angle so as to intersect at the condensing point of the first lens, and
The bifocal curved body constituting the lens is characterized by being formed in the shape of a rotating body with a part cut out.

[Operation] X-rays from the X-ray source are focused and irradiated onto the sample. X-rays from the sample are focused by a first X-ray lens consisting of a bifocal rotating curved surface. The focused X-rays are imaged by a second X-ray lens consisting of a bifocal curved surface, and the optical axis connects the two focal points of the bifocal rotation curved surface constituting the first lens. On the other hand, 2 of the bifocal curved surface constituting the second lens
The optical axis connecting the focal point is inclined at a predetermined angle, and one focal point of the curved surface of the second lens is arranged to coincide with the focal point of the X-rays by the first lens. Further, by tilting the optical axis of a part of the curved body constituting the second X-ray lens, X-rays will no longer be incident on the curved body, so that part of the curved body is cut out. ing. As a result, the imaging direction of X-rays can be changed according to the direction of the optical axis of the second lens, and processing such as high-precision polishing of a partially cut-out curved body is easy. Become.

[Example] An example of the present invention will be described in detail below with reference to the accompanying drawings.

FIG. 1 shows an X-ray microscope embodying the present invention. Reference numeral 1 denotes, for example, a rotating anticathode type X-ray source, and among the X-rays generated from the X-ray source, X-rays propagating in a specific direction The rays are totally reflected by the first X-ray reflector 2. The X-rays totally reflected by the first reflecting mirror are totally reflected by the second X-ray reflecting mirror 3 to become X-rays parallel to the optical axis 01. The first and second X-ray reflecting mirrors 2 and 3 are each rotating bodies,
For example, the first reflecting mirror 2
is a rotation hyperboloid mirror, and the second reflecting mirror 3 is a rotation paraboloid mirror. The X-rays parallel to the optical axis are focused onto the sample 6 by third and fourth X-ray reflecting mirrors 4 and 5. In this embodiment, the third reflecting mirror 4 is a parabolic mirror of revolution, and the fourth reflecting mirror 5 is a hyperbolic mirror of revolution. Here, 7 is an X-ray shielding member for shielding X-rays other than the X-rays totally reflected by the first and second reflecting mirrors 2 and 3, and 8 is a first to fourth X-ray reflecting member. This is a diaphragm plate placed on the focal plane of an X-ray condensing system made of a mirror, and the diaphragm plate 8 is provided with a ring-shaped slit. By irradiating the sample 6 with X-rays, the X-rays diffracted from the sample 6 are
and is totally reflected by the sixth reflecting mirrors 10 and 11, but the fifth reflecting mirror 10 is a rotating hyperboloid mirror,
The sixth reflecting mirror 11 is a spheroidal mirror, and the fifth and sixth reflecting mirrors constitute an objective lens for X-rays diffracted from the sample 6. X-rays diffracted from the sample 6 by the objective lens are focused on one focal point F1 of the spheroidal mirror 11 on the optical axis 01.
The X-rays focused on the focal point F1 are further focused on the seventh and eighth points.
The seventh reflecting mirror 12 is a rotating hyperboloid mirror, and the eighth reflecting mirror 12 is a rotating hyperboloid mirror.
The reflecting mirror 13 is a spheroidal mirror, and the seventh and eighth reflecting mirrors constitute an eyepiece. The respective focal points of the seventh and eighth reflecting mirrors 12 and 13 are on the optical axis 0.
1 at the focal point F1. The seventh and eighth reflecting mirrors 12 and 13 have a shape in which a part of a rotating body is cut out, and the focal point F1
At least a reflective surface is formed on the portion where the X-rays from the rays are incident. Reference numeral 14 denotes an imaging tube disposed at the imaging position of the X-ray image by the imaging system, that is, one focal position F2 of the eighth reflecting mirror;
The signal detected by 4 is supplied to an amplifier 15 where it is amplified and supplied to a display means 16 such as a cathode ray tube. Note that if a reflecting mirror whose surface is provided with a multilayer film is used as each reflecting mirror, the amount of focused X-rays can be increased.

In the above-described configuration, among the X-rays generated from the X-ray source 1, the X-rays emitted in a specific direction are totally reflected by the first and second X-ray reflecting mirrors 2 and 3 and converted into light. The X-rays are parallel to the axis 01, and other X-rays are blocked by the X-ray shielding plate 7, so that the aperture plate 8 is irradiated with ring-shaped X-rays. The ring-shaped X-rays are shaped by passing through the slit of the aperture plate 8, and only the shaped X-rays are directed to a minute point on the sample 6 by the third and fourth reflecting mirrors 4, 5. The light will be focused by The X-rays irradiated to the sample 6 are determined by the thickness of the sample,
Alternatively, it is diffracted depending on the difference in its constituent components.
The diffracted light is totally reflected by the fifth and sixth reflecting mirrors 10 and 11 constituting the objective lens, and is focused on one focal point F1 of the reflecting mirror 11, which is an ellipsoid of revolution. The focused X-rays are imaged by an eyepiece, and one focus of the hyperboloid reflector 12 constituting the eyepiece is aligned with the focus point F1, and the other focus is It is arranged in common with one focal point of the ellipsoidal reflecting mirror 13. The image pickup tube 14 is disposed at the other focal point F2 of the ellipsoidal reflecting mirror 13, as described above. As a result, the focal point F
The X-rays from 1 are totally reflected by the hyperboloid reflector 12, then totally reflected by the ellipsoid reflector 13, and are imaged at the focal point F2. Here, a hyperboloid reflector 12 and an ellipsoid reflector 1 constituting the eyepiece
Each focal point of 3 is placed on the optical axis 02 which intersects the optical axis 01 at the focal point F2, but even if both optical axes are shifted, all the focused X-rays will fall on the hyperboloid 12.
Since the optical axis is tilted so that the beam is totally reflected by the beam, there is no problem in forming an image of the X-ray. Furthermore, since the optical axis is tilted in this manner, the hyperboloid reflecting mirror 12 and the ellipsoidal reflecting mirror 13 do not need to be completely rotating bodies, and it is sufficient that a total reflection surface exists only in the portion where the X-rays are incident. Therefore, as the reflecting mirrors 12 and 13, it is possible to use reflecting mirrors having a shape in which a portion of a rotating body, into which X-rays do not enter, is cut out. In this way, a reflecting mirror that is partially a rotating body can be manufactured more easily than a completely rotating body because polishing of the reflecting surface and deposition of a multilayer film on the reflecting surface can be performed more easily. becomes.

Although one embodiment of the present invention has been described in detail above, the present invention is not limited to this embodiment and can be modified in many ways. For example, although a lens system that combines two types of curved surfaces is used as the objective lens or eyepiece, each lens may also be constructed from a single curved surface, or conversely, three or more types of curved surfaces may be used. A lens system combining bodies may also be used.

[Effects] As described in detail above, in the present invention, the optical axis of the second lens such as the eyepiece is tilted with respect to the optical axis of the first lens such as the objective lens. The direction of image formation can be changed to a desired direction. Furthermore, since the optical axis of the second lens is tilted, the curved body constituting the second lens can be shaped like a part of a rotating body, and the lens can be manufactured easily.

[Brief explanation of drawings]

The accompanying drawings are diagrams showing an X-ray microscope that is an embodiment of the present invention. 1... X-ray source, 2, 3, 4, 5... X-ray reflecting mirror, 6
...sample, 7...X-ray shielding plate, 8...diaphragm plate, 9...slit, 10, 11, 12, 13...X-ray reflecting mirror,
14... Image pickup tube, 15... Amplifier, 16... Display means.

Claims (1)

[Claims] 1. A first lens having a bifocal rotating curved body and condensing X-rays from an object point by total reflection on the inner surface of the curved body; and a second lens that completely reflects the focused X-rays on the inner surface of the curved body to form an image, and the optical axes of the first and second lenses are aligned with the first lens. The bifocal curved surface body constituting the second lens is arranged so as to intersect at the focal point of the second lens, and is formed in the shape of a rotating body with a part cut out. X-ray optical system.