JPH05132373A - Method for producing porous silicon carbide composite - Google Patents
Method for producing porous silicon carbide compositeInfo
- Publication number
- JPH05132373A JPH05132373A JP32107291A JP32107291A JPH05132373A JP H05132373 A JPH05132373 A JP H05132373A JP 32107291 A JP32107291 A JP 32107291A JP 32107291 A JP32107291 A JP 32107291A JP H05132373 A JPH05132373 A JP H05132373A
- Authority
- JP
- Japan
- Prior art keywords
- silicon carbide
- skeleton
- porous
- porous carbon
- carbon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Ceramic Products (AREA)
Abstract
(57)【要約】
【目的】 多孔炭素骨格の組織面に炭化珪素層が被覆形
成された複合構造であって、優れた組織強度と通気性を
兼備する多孔質炭化珪素複合体の製造方法を提供する。
【構成】 レーヨン繊維のシート状成形体にフェノール
樹脂を含浸して積層熱圧成形したのち、焼成炭化処理し
て骨格多孔炭素体を形成する。ついで、骨格多孔炭素体
を反応チャンバー内にセットし、 900〜1000℃に加熱し
ながらハロゲン化有機珪素化合物を間欠的に充填して還
元熱分解反応させるパルスCVI法により炭素組織面に
炭化珪素被覆層を形成する。(57) [Abstract] [Purpose] A method for producing a porous silicon carbide composite having a composite structure in which a tissue surface of a porous carbon skeleton is formed by coating and having excellent tissue strength and air permeability. provide. [Structure] A sheet-shaped molded body of rayon fiber is impregnated with a phenol resin, laminated and hot-pressed, and then fired and carbonized to form a skeleton porous carbon body. Then, the skeleton porous carbon body is set in the reaction chamber, and the carbon texture surface is coated with silicon carbide by the pulse CVI method in which the halogenated organosilicon compound is intermittently charged while heating at 900 to 1000 ° C. to cause the reductive thermal decomposition reaction. Form the layers.
Description
【0001】[0001]
【産業上の利用分野】本発明は、多孔炭素質の骨格組織
面に目詰まりのない状態で炭化珪素層を均質に形成した
複合系構造を備える多孔質炭化珪素複合体の製造方法に
関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for producing a porous silicon carbide composite having a composite structure in which a silicon carbide layer is uniformly formed on the surface of a porous carbonaceous skeleton without clogging.
【0002】[0002]
【従来の技術】炭化珪素で構成された多孔質体は、その
優れた耐熱・耐食性を利用して工業用の濾過材や断熱材
等の用途に使用されている。この種の多孔質炭化珪素体
を製造する技術として、水に炭化珪素微粉とバインダー
を混合したスラリーを三次元網目構造のウレタンフォー
ムに含浸し、高温熱処理を施してウレタン成分および水
分を揮散させるとともに残留する炭化珪素を再結晶化す
る方法(特開平3−83875 号公報)が知られている。こ
の方法によれば、比較的容易に多孔質の炭化珪素成形体
を得ることができるが、再結晶化により形成される炭化
珪素組織は低密度で骨格強度が弱いため、使用過程で材
料に亀裂や破損が生じたり組織から炭化珪素粒が脱離す
るといった材質上の欠点がある。2. Description of the Related Art A porous body made of silicon carbide is used for industrial filters and heat insulating materials by utilizing its excellent heat resistance and corrosion resistance. As a technique for producing this type of porous silicon carbide body, a slurry in which fine particles of silicon carbide and a binder are mixed in water is impregnated into a urethane foam having a three-dimensional network structure, and high-temperature heat treatment is performed to vaporize the urethane component and water. A method of recrystallizing residual silicon carbide (Japanese Patent Laid-Open No. 3-83875) is known. According to this method, a porous silicon carbide molded body can be obtained relatively easily, but since the silicon carbide structure formed by recrystallization has a low density and weak skeletal strength, it cracks in the material during use. However, there are defects in the material such as breakage and detachment of silicon carbide particles from the structure.
【0003】また、上記の方法ではスラリーの含浸条件
によっては成形組織に目詰まりが発生して通気性を阻害
し、濾過材に適用する場合に十分な機能が発揮されない
ことがある。このような目詰まりを防止する手段とし
て、スラリー濃度を低くし、数回に分けて含浸をおこな
う方法も提案(特開昭59−3059号公報) されているが、
この方法においても骨格組織の弱体化は依然として残
る。In the above method, depending on the impregnation condition of the slurry, the formed structure may be clogged to impair the air permeability, and when applied to the filter material, the sufficient function may not be exhibited. As a means for preventing such clogging, a method of lowering the slurry concentration and performing impregnation in several times has also been proposed (JP-A-59-3059),
Even in this method, weakening of the skeletal tissue still remains.
【0004】[0004]
【発明が解決しようとする課題】本発明は、多孔質炭化
珪素体を製造する従来技術においてネックとされている
上記の課題を解消するためになされたもので、その目的
は材質組織強度に優れ、かつ目詰まりのない多孔組織を
備える多孔質炭化珪素複合体の製造方法を提供すること
にある。SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems, which have been a bottleneck in the prior art for producing a porous silicon carbide body, and its object is excellent in material structure strength. Another object of the present invention is to provide a method for producing a porous silicon carbide composite body having a porous structure without clogging.
【0005】[0005]
【課題を解決するための手段】上記の目的を達成するた
めの本発明による多孔質炭化珪素複合体の製造方法は、
レーヨン繊維のシート状成形体に残炭率40%以上の熱硬
化性樹脂液を含浸して積層熱圧成形したのち焼成炭化処
理して骨格多孔炭素体を形成し、ついで骨格多孔炭素体
を反応チャンバー内にセットし、900〜1000℃に加熱し
ながらハロゲン化有機珪素化合物を間欠的に充填して還
元熱分解反応させるパルスCVI法により炭素組織面に
炭化珪素被覆層を形成することを構成上の特徴とする。The method for producing a porous silicon carbide composite according to the present invention for achieving the above object comprises:
A sheet-shaped molded body of rayon fiber is impregnated with a thermosetting resin liquid having a residual carbon ratio of 40% or more, laminated hot-press molding, and then firing carbonized to form a skeletal porous carbon body, and then reacting the skeletal porous carbon body. It is set in a chamber, and a silicon carbide coating layer is formed on the carbon texture surface by the pulse CVI method in which a halogenated organosilicon compound is intermittently charged while heating at 900 to 1000 ° C. to cause a reduction thermal decomposition reaction. It is a feature of.
【0006】本発明の構成は、大別して骨格多孔質炭素
体を形成する炭素骨格形成工程と骨格多孔質炭素体の組
織面に炭化珪素被覆層を形成する炭化珪素被覆工程から
なっている。これら各工程の詳細は次のとおりである。The structure of the present invention is roughly divided into a carbon skeleton forming step of forming a skeleton porous carbon body and a silicon carbide coating step of forming a silicon carbide coating layer on the textured surface of the skeleton porous carbon body. Details of each of these steps are as follows.
【0007】(1) 炭素骨格形成工程 原料基材となるレーヨン繊維のシート状成形体には、レ
ーヨン繊維の不織布シートを適用することが好ましく、
例えばレーヨンフィラメントを裁断した短繊維を水に分
散して抄紙成形して得られるシート状成形体などが好適
に使用される。該シート状成形体は十分に乾燥しての
ち、残炭率40%以上の熱硬化性樹脂液を含浸する。熱硬
化性樹脂の残炭率とは、樹脂を非酸化性雰囲気中で800
℃の温度に焼成したときに残留する炭素分の重量を指
し、この残炭分が40%を下廻る場合には得られる骨格多
孔質炭素体の強度を実用水準まで向上させることが極め
て困難となる。(1) Carbon skeleton forming step It is preferable to apply a non-woven sheet of rayon fiber to the sheet-shaped molded article of rayon fiber as a raw material base material,
For example, a sheet-shaped molded product obtained by dispersing short fibers cut from rayon filaments in water and molding into paper is preferably used. The sheet-shaped molded product is sufficiently dried and then impregnated with a thermosetting resin liquid having a residual carbon rate of 40% or more. The residual carbon ratio of the thermosetting resin means that the resin is 800 in a non-oxidizing atmosphere.
Indicates the weight of carbon content remaining when calcined at a temperature of ℃, and when the residual carbon content is less than 40%, it is extremely difficult to improve the strength of the obtained skeletal porous carbon body to a practical level. Become.
【0008】40%以上の残炭率を有する熱硬化性樹脂の
例としては、フェノール系樹脂、フラン系樹脂、ポリイ
ミド樹脂、ジビニルベンゼン等を挙げることができる
が、本発明の目的にはフェノール系樹脂が好ましく使用
される。これら熱硬化性樹脂は望ましくは初期縮合状態
で適宜な溶媒に溶解して溶液化する。溶液化には例えば
アセトン、エタノールのような低粘度で浸透性が高く、
容易に熱揮散する性質の有機溶媒を選定使用することが
良好である。溶液の樹脂濃度は、5重量%未満であると
強度特性が減退し、他方、40重量%を越すと粘度が増大
して含浸性を損ねるうえ気孔の閉塞を生じる。したがっ
て、5〜40重量%範囲の樹脂濃度に設定することが好適
な条件となる。含浸処理は、シート状成形体を熱硬化性
樹脂液に浸漬するか、熱硬化性樹脂液をシート状成形体
にスプレー、刷毛塗り等の手段により塗布する方法によ
っておこなわれる。Examples of the thermosetting resin having a residual carbon content of 40% or more include phenol resin, furan resin, polyimide resin, divinylbenzene, etc. For the purpose of the present invention, phenol resin is used. Resins are preferably used. These thermosetting resins are preferably dissolved in a suitable solvent in the initial condensation state to form a solution. For solution, low viscosity such as acetone and ethanol, high permeability,
It is preferable to select and use an organic solvent having a property of easily heat-volatilizing. When the resin concentration of the solution is less than 5% by weight, the strength characteristics are deteriorated, while when it exceeds 40% by weight, the viscosity is increased to impair the impregnating property and the pores are clogged. Therefore, it is preferable to set the resin concentration in the range of 5 to 40% by weight. The impregnation treatment is performed by immersing the sheet-shaped molded product in a thermosetting resin liquid, or by applying the thermosetting resin liquid to the sheet-shaped molded product by a method such as spraying or brushing.
【0009】含浸処理後のシート状成形体は半硬化した
状態で所望枚数を積層し、全面を加熱しながら圧縮する
熱圧条件で成形して含浸樹脂を硬化したのち、非酸化性
雰囲気中 800℃以上の温度により焼成炭化処理を施して
骨格多孔炭素体を得る。この工程において、熱硬化性樹
脂液の濃度、含浸量などの条件を制御することで、骨格
組織として好適な気孔率25〜70%、平均気孔径5〜55μ
m の良通気性を備える性状を付与することができる。After the impregnation treatment, the sheet-shaped compact is laminated in a desired number in a semi-cured state, and the impregnated resin is cured by molding under a hot-pressing condition in which the entire surface is compressed while being heated. A skeleton porous carbon body is obtained by carrying out a firing carbonization treatment at a temperature of ℃ or higher. In this step, by controlling the conditions such as the concentration of the thermosetting resin liquid and the impregnation amount, the porosity suitable for the skeletal structure is 25 to 70%, the average pore diameter is 5 to 55 μm.
It is possible to impart a property with good air permeability of m 2.
【0010】(2) 炭化珪素被覆工程 この工程は、骨格多孔炭素体を反応チャンバー内にセッ
トし、ハロゲン化有機珪素化合物を水素ガスに同伴させ
ながら反応チャンバー内で 900〜1000℃に加熱されてい
る骨格多孔炭素体にガス状態で接触させる操作を短周期
で間欠的に反復するパルスCVI法によっておこなわれ
る。ハロゲン化有機珪素化合物としては、トリクロロメ
チルシラン(CH3SiCl3)、トリクロロフェニルシラン(C6H
5SiCl3)、ジクロロジメチルシラン(CH3SiHCl2) 、クロ
ロトリメチルシラン((CH3)3SiCl)などを用いることがで
きる。(2) Silicon Carbide Coating Step In this step, the skeletal porous carbon body is set in the reaction chamber and heated to 900 to 1000 ° C. in the reaction chamber while the halogenated organosilicon compound is entrained in hydrogen gas. This is performed by the pulse CVI method in which the operation of contacting the skeleton porous carbon body in a gas state is intermittently repeated in a short cycle. Examples of the halogenated organosilicon compound include trichloromethylsilane (CH 3 SiCl 3 ), trichlorophenylsilane (C 6 H
5 SiCl 3 ), dichlorodimethylsilane (CH 3 SiHCl 2 ), chlorotrimethylsilane ((CH 3 ) 3 SiCl) and the like can be used.
【0011】適切な反応条件は、反応チャンバー内にセ
ットした骨格多孔炭素体の温度を 900〜1100℃に加熱し
て系内圧力を2Torr以下に減圧し、この系内にトリクロ
ロメチルシラン(CH3SiCl3)と水素の混合ガスを系内圧力
が 700〜760Torr になるように導入し一定時間保持する
サイクルを秒間隔で間欠的に反復することであり、この
条件設定により均質強固な炭化珪素被膜が形成される。Appropriate reaction conditions include heating the temperature of the skeletal porous carbon body set in the reaction chamber to 900 to 1100 ° C. to reduce the system internal pressure to 2 Torr or less, and adding trichloromethylsilane (CH 3) to the system. A cycle of introducing a mixed gas of SiCl 3 ) and hydrogen so that the system pressure is 700 to 760 Torr and maintaining it for a certain period is repeated intermittently at intervals of a second. Is formed.
【0012】[0012]
【作用】本発明によれば、まず炭素骨格形成工程におい
て熱揮発成分の揮散と熱硬化性樹脂成分の炭化作用とに
より多孔質組織の炭素成形体に転化する。この際、レー
ヨン繊維を主体とする熱揮発成分は炭化過程で大部分が
円滑に揮散して均一な気孔形成に寄与するが、同時にそ
の一部は炭化残留して炭素繊維の基礎骨格を形成する。
一方、熱硬化性樹脂成分は焼成炭化処理により強固なガ
ラス状カーボンに転化し、前記の基礎骨格に固着する状
態で一様に分布する。したがって、得られる炭素体に
は、均一微細な通気性気孔と組織強度に優れる多孔質性
状が付与される。According to the present invention, first, in the carbon skeleton forming step, the carbon volatile component is converted into a carbon compact having a porous structure by volatilization of the heat volatile component and carbonization of the thermosetting resin component. At this time, most of the thermal volatile components mainly composed of rayon fiber volatilize smoothly in the carbonization process and contribute to the formation of uniform pores, but at the same time, part of them remain carbonized to form the basic skeleton of the carbon fiber. ..
On the other hand, the thermosetting resin component is converted into strong glassy carbon by firing and carbonization, and is evenly distributed in a state of being fixed to the basic skeleton. Therefore, the obtained carbon body is provided with uniform fine air-permeable pores and a porous property excellent in tissue strength.
【0013】引き続く炭化珪素被覆工程では、パルスC
VI法を用いるため飽和度の高い反応ガスが多孔炭素体
の組織内部まで確実に到達し、目詰まりを生じることな
しにアモルファス質または微細多結晶質の均質強固な炭
化珪素層として炭素組織面を完全に被覆する。In the subsequent silicon carbide coating step, pulse C
Since the VI method is used, the reaction gas having a high degree of saturation surely reaches the inside of the texture of the porous carbon body, and the carbon texture plane is formed as an amorphous or fine polycrystalline homogeneous and strong silicon carbide layer without causing clogging. Cover completely.
【0014】上記の作用が相乗して、強固な多孔炭素体
の全面に炭化珪素層が被覆形成された複合構造を呈し、
優れた組織強度と通気性を兼備する多孔質炭化珪素複合
体の製造が可能となる。The above actions synergistically produce a composite structure in which a silicon carbide layer is formed on the entire surface of a strong porous carbon body,
It is possible to manufacture a porous silicon carbide composite having both excellent tissue strength and air permeability.
【0015】[0015]
【実施例】以下、本発明の実施例を比較例と対比して説
明する。EXAMPLES Examples of the present invention will be described below in comparison with comparative examples.
【0016】実施例 平均直径30μm 、長さ5mmのレーヨン短繊維を水に撹拌
分散させ、長網式抄紙機を用いて抄紙成形したのち乾燥
して秤量70g/m2、厚さ0.23mmのシート状成形体を得た。
このシート状成形体を残炭率45%のフェノール樹脂アセ
トン溶液(濃度20重量%) に浸漬して含浸処理し、50℃
で15分間乾燥して半硬化した。半硬化のシートを14枚積
層してモールドに入れ、加熱温度140 ℃、適用圧力0.5
kg/cm2の熱圧条件で一体成形するとともに、樹脂成分を
完全に硬化させた。ついで、窒素雰囲気に保持された電
気炉に移し、20℃/hr の昇温速度で1000℃まで上昇し5
時間保持して焼成炭化した。得られた骨格多孔炭素体は
縦横40mm、厚さ2mmの板状で、嵩比重0.45g/cm3 、気孔
率65%、平均気孔径35μm 、曲げ強度220kg/cm2 、曲げ
弾性率450kg/mm2 の物理特性を有するものであった。Example A rayon short fiber having an average diameter of 30 μm and a length of 5 mm is stirred and dispersed in water, paper-formed using a Fourdrinier paper machine, dried and weighed 70 g / m 2 , a sheet having a thickness of 0.23 mm. A shaped body was obtained.
This sheet-shaped compact was immersed in a phenol resin acetone solution (concentration: 20% by weight) with a residual carbon rate of 45% and impregnated at 50 ° C
It was dried for 15 minutes and semi-cured. Laminate 14 semi-cured sheets and put them in a mold, heating temperature 140 ℃, applied pressure 0.5
The resin component was completely cured while being integrally molded under a heat / pressure condition of kg / cm 2 . Then, it was transferred to an electric furnace maintained in a nitrogen atmosphere and heated up to 1000 ° C at a heating rate of 20 ° C / hr.
It was held for a time and carbonized by firing. The obtained skeleton porous carbon body is a plate having a length and width of 40 mm and a thickness of 2 mm, a bulk specific gravity of 0.45 g / cm 3 , a porosity of 65%, an average pore diameter of 35 μm, a bending strength of 220 kg / cm 2 , and a bending elastic modulus of 450 kg / mm. It had two physical properties.
【0017】次に上記の骨格多孔炭素体をパルスCVI
装置の反応チャンバー内にセットし、2Torrの減圧下に
1000℃に加熱した。系内にモル比5:100 のトリクロロ
メチルシラン(CH3SiCl3)と水素(H2)の混合ガスを1秒間
で720Torr になるような条件で導入し、1秒間保持した
のち、再び系内を2秒間で2Torrに減圧した。この減
圧、導入および保持のサイクルを2000回に亘って反復
し、骨格多孔炭素体の組織全面に炭化珪素の被膜層を形
成した。このようにして形成された多孔質炭化珪素複合
体の各種特性を測定し、結果を表1に示した。Next, the above-mentioned skeleton porous carbon body is pulsed with CVI.
Set it in the reaction chamber of the device and apply a reduced pressure of 2 Torr.
Heated to 1000 ° C. A mixed gas of trichloromethylsilane (CH 3 SiCl 3 ) and hydrogen (H 2 ) with a molar ratio of 5: 100 was introduced into the system under the condition of 720 Torr in 1 second, held for 1 second, and then again in the system. Was reduced to 2 Torr in 2 seconds. This cycle of pressure reduction, introduction and holding was repeated 2000 times to form a silicon carbide coating layer on the entire surface of the texture of the skeleton porous carbon body. Various characteristics of the porous silicon carbide composite body thus formed were measured, and the results are shown in Table 1.
【0018】比較例 平均粒径10μm のα型炭化珪素粉末 100重量部、水20重
量部、有機バインダーおよび分散材1.5 重量部を混合し
たスラリーを気孔率98%の三次元網状ウレタンフォーム
に真空含浸し、乾燥処理したのち窒素雰囲気下で2100℃
の温度で加熱して炭化珪素成分を再結晶させた。このよ
うにして得られた多孔質炭化珪素体の特性を、表1に併
載した。Comparative Example A three-dimensional reticulated urethane foam having a porosity of 98% was vacuum-impregnated with a slurry prepared by mixing 100 parts by weight of α-type silicon carbide powder having an average particle size of 10 μm, 20 parts by weight of water, 1.5 parts by weight of an organic binder and a dispersant. And dry it, then at 2100 ℃ in a nitrogen atmosphere.
The silicon carbide component was recrystallized by heating at the temperature. The characteristics of the porous silicon carbide body thus obtained are also listed in Table 1.
【0019】[0019]
【表1】 [Table 1]
【0020】表1の結果から、実施例による多孔質炭化
珪素複合体は良好な通気性のある多孔性状を有してお
り、その強度性能は従来技術により得られた炭化珪素単
味の比較例による多孔質炭化珪素体に比べ著しく高い値
を示している。From the results shown in Table 1, the porous silicon carbide composites according to the examples have a porosity with good air permeability, and the strength performance is a comparative example of silicon carbide alone obtained by the prior art. The value is remarkably higher than that of the porous silicon carbide body according to.
【0021】[0021]
【発明の効果】以上のとおり、本発明によれば多孔炭素
骨格の組織面に炭化珪素層が被覆された複合構造であっ
て、優れた組織強度を目詰まりのない良好な通気性を兼
備する多孔質炭化珪素複合体を製造することができる。
したがって、特に高性能の工業用濾過材として有用性が
期待される。As described above, according to the present invention, a porous carbon skeleton has a composite structure in which a textured surface is covered with a silicon carbide layer, and has excellent texture strength and good air permeability without clogging. A porous silicon carbide composite can be manufactured.
Therefore, it is expected to be useful as a particularly high-performance industrial filter material.
Claims (1)
40%以上の熱硬化性樹脂液を含浸して積層熱圧成形した
のち焼成炭化処理して骨格多孔炭素体を形成し、ついで
骨格多孔炭素体を反応チャンバー内にセットし、 900〜
1000℃に加熱しながらハロゲン化有機珪素化合物を間欠
的に充填して還元熱分解反応させるパルスCVI法によ
り炭素組織面に炭化珪素被覆層を形成することを特徴と
する多孔質炭化珪素複合体の製造方法。1. A residual carbon rate in a rayon fiber sheet-shaped molded product.
After 40% or more of thermosetting resin liquid is impregnated and laminated thermocompression molding is performed, firing carbonization is performed to form a skeleton porous carbon body, and then the skeleton porous carbon body is set in the reaction chamber, and 900 ~
A porous silicon carbide composite material, characterized in that a silicon carbide coating layer is formed on a carbon texture surface by a pulse CVI method in which a halogenated organosilicon compound is intermittently charged while being heated to 1000 ° C. to carry out a reductive thermal decomposition reaction. Production method.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP32107291A JPH05132373A (en) | 1991-11-08 | 1991-11-08 | Method for producing porous silicon carbide composite |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP32107291A JPH05132373A (en) | 1991-11-08 | 1991-11-08 | Method for producing porous silicon carbide composite |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH05132373A true JPH05132373A (en) | 1993-05-28 |
Family
ID=18128498
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP32107291A Pending JPH05132373A (en) | 1991-11-08 | 1991-11-08 | Method for producing porous silicon carbide composite |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH05132373A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1995019943A1 (en) * | 1994-01-21 | 1995-07-27 | Minnesota Mining And Manufacturing Company | Starved matrix composite |
| JP2002175869A (en) * | 2000-09-26 | 2002-06-21 | Inoac Corp | Ceramic heater |
| CN105198437A (en) * | 2015-09-09 | 2015-12-30 | 西北工业大学 | Method for preparing porous silicon carbide ceramics |
-
1991
- 1991-11-08 JP JP32107291A patent/JPH05132373A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1995019943A1 (en) * | 1994-01-21 | 1995-07-27 | Minnesota Mining And Manufacturing Company | Starved matrix composite |
| JP2002175869A (en) * | 2000-09-26 | 2002-06-21 | Inoac Corp | Ceramic heater |
| CN105198437A (en) * | 2015-09-09 | 2015-12-30 | 西北工业大学 | Method for preparing porous silicon carbide ceramics |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US5067999A (en) | Method for providing a silicon carbide matrix in carbon-fiber reinforced composites | |
| WO2024148738A1 (en) | High-strength carbon/ceramic brake disk with ceramic functional layer | |
| GB2089774A (en) | Activated carbon | |
| JPH0653619B2 (en) | Fiber structure composite ceramic material and manufacturing method thereof | |
| US4080413A (en) | Porous carbon fuel cell substrates and method of manufacture | |
| CA2032666C (en) | Process for the production of a ceramic fiber/matrix composite material, and composite material obtained by this process | |
| JP2004533388A (en) | Wear-resistant carbon brake material | |
| JPH05132373A (en) | Method for producing porous silicon carbide composite | |
| JP3853035B2 (en) | Oxidation resistant C / C composite and method for producing the same | |
| JPH11130558A (en) | Porous silicon carbide sintered body and method for producing the same | |
| US5273941A (en) | Fiber reinforced silicon carbide ceramics and method of producing the same | |
| JPH0662348B2 (en) | Porous ceramic composite material and method for producing the same | |
| JP3548605B2 (en) | Oxidation-resistant treatment of carbon fiber reinforced carbon composites | |
| JPH0826848A (en) | Method for producing porous SiC compact | |
| JPH05132377A (en) | Molded activated carbon manufacturing method | |
| EP1359132A1 (en) | Composites, applications, and process for manufacturing said composites | |
| JPH05148018A (en) | Production of oxidation-resistant carbon fiber-reinforced carbon material | |
| JP3548597B2 (en) | Oxidation-resistant treatment method of carbon fiber reinforced carbon composite | |
| JP2579563B2 (en) | Oxidation-resistant treatment of carbon fiber reinforced carbon composites. | |
| JPS63967A (en) | Manufacture of electrode base plate for fuel cell | |
| JP3468426B2 (en) | Method for producing porous silicon carbide body | |
| JPH06345571A (en) | Production of high-temperature oxidation resistant c/c composite material | |
| JP3450875B2 (en) | Method for producing porous silicon carbide material | |
| JP2579560B2 (en) | Oxidation-resistant treatment of carbon fiber reinforced carbon materials | |
| JPH11171671A (en) | Production of plate silicon carbide-silicon composite ceramic |