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JPH0516277B2 - - Google Patents
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JPH0516277B2 - - Google Patents

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Publication number
JPH0516277B2
JPH0516277B2 JP62265706A JP26570687A JPH0516277B2 JP H0516277 B2 JPH0516277 B2 JP H0516277B2 JP 62265706 A JP62265706 A JP 62265706A JP 26570687 A JP26570687 A JP 26570687A JP H0516277 B2 JPH0516277 B2 JP H0516277B2
Authority
JP
Japan
Prior art keywords
frequency
voltage
output
motor
vibration wave
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP62265706A
Other languages
Japanese (ja)
Other versions
JPH01107681A (en
Inventor
Ritsuo Kashama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP62265706A priority Critical patent/JPH01107681A/en
Publication of JPH01107681A publication Critical patent/JPH01107681A/en
Priority to US07/595,667 priority patent/US5140231A/en
Publication of JPH0516277B2 publication Critical patent/JPH0516277B2/ja
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/14Drive circuits; Control arrangements or methods
    • H02N2/145Large signal circuits, e.g. final stages
    • H02N2/147Multi-phase circuits

Landscapes

  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は振動波モータの駆動回路に関するもの
である。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a drive circuit for a vibration wave motor.

〔従来の技術〕[Conventional technology]

従来振動波モーターの回転数を制御する場合、
第4図の様に振動波モーターに一定の電圧を印加
して、駆動周波数を変化させることで回転数を制
御しているか、又は振動数モーターに印加する電
圧を変化させて回転数を制御しているか、あるい
は、これらを組み合わせて、いくつかの電圧切換
と周波数の変化による制御とで回転数制御を行つ
ている。
When controlling the rotation speed of conventional vibration wave motors,
As shown in Figure 4, the number of rotations is controlled by applying a constant voltage to the vibration wave motor and changing the driving frequency, or the number of rotations is controlled by changing the voltage applied to the frequency motor. Or a combination of these is used to control the rotational speed using several voltage switches and frequency changes.

〔発明が解決しようとしている問題点〕[Problem that the invention is trying to solve]

しかし、上記従来の回転数切換方式では振動波
モーターに印加する電圧を一定(例えば30)に
して、第4図の様に駆動周波数を変化することで
(第4図の30のライン上を変化させることで)
回数を制御した場合、第3図の30のラインの様
に周波数が駆動電圧が30の時の共振周波数f30
からずれて、回転数が低下した時に振動波モータ
ーに流る電流が増加してモーターの駆動効率が悪
化してしまうという欠点がある。又、第4図の30
、25、20に示す如く多数の電圧源を切り換
えて周波数の変化と合わせて制御すれば比較的駆
動効率の良い電圧と周波数帯を用いて速度制御が
可能となる。
However, in the conventional rotation speed switching method described above, by keeping the voltage applied to the vibration wave motor constant (for example, 30) and changing the driving frequency as shown in Figure 4 (changes on the line 30 in Figure 4). )
When the number of times is controlled, the resonance frequency f 30 when the driving voltage is 30, as shown in the line 30 in Figure 3.
However, when the rotational speed decreases, the current flowing through the vibration wave motor increases, resulting in a deterioration of the driving efficiency of the motor. Also, 30 in Figure 4
, 25 and 20, if a large number of voltage sources are switched and controlled in accordance with changes in frequency, speed control becomes possible using a voltage and frequency band with relatively good drive efficiency.

例えば30の状態では第4図のaの範囲にて周
波数を変化させ回転数をN1〜N2の範囲で制御
し、N2〜N2の範囲では駆動電圧を25に切換え
て、25下での共振周波数f25からbの範囲での
み周波数を変化させ、更にN3〜N4の範囲では駆
動電圧を20に切換えて20下での共振周波数
f20からcの範囲で周波数を変化させれば広範囲
における回転速度を共振周波数からさほどはずれ
ることのない周波数の変化にて実現出来、駆動効
率の悪化を防止し得る。
For example, in the state of 30, the frequency is changed in the range a in Figure 4 and the rotation speed is controlled in the range of N 1 to N 2 , and in the range of N 2 to N 2 , the drive voltage is switched to 25, and the rotation speed is changed to 25. The resonant frequency f at
By changing the frequency in the range from f 20 to c, a wide range of rotational speeds can be realized by changing the frequency without significantly deviating from the resonant frequency, and deterioration of drive efficiency can be prevented.

しかしながら、この方法によると多数の電圧源
を必要とする問題が生じる。
However, this method has the problem of requiring multiple voltage sources.

〔問題を解決するための手段〕[Means to solve the problem]

本発明はトランスに一次側コイルに対して共振
回路を構成するコンデンサー等の共振素子を接続
し、該トランスの一次側への周波信号への印加に
てトランスの二次側出力を発生させ、この出力に
てモーターを駆動する様にし、上記一次側への周
波信号の周波数を変えることにて二次側出力の周
波数及び出力電圧を自動的にモーター駆動効率の
良い組み合わせ状態に変化させ上記の問題を解消
した振動波モーターの駆動回路を提供せんとする
ものである。
The present invention connects a resonant element such as a capacitor that forms a resonant circuit to a primary coil of a transformer, and generates a secondary output of the transformer by applying a frequency signal to the primary side of the transformer. By driving the motor with the output and changing the frequency of the frequency signal to the primary side, the frequency and output voltage of the secondary side output can be automatically changed to a combination state with good motor drive efficiency, and the above problem can be solved. The present invention aims to provide a drive circuit for a vibration wave motor that eliminates the problem.

〔実施例〕〔Example〕

第1図は本発明に係る振動波モーターの駆動回
路の一実施例を示し、同図において、1は電源で
あるところの電池、2は振動波モーター駆動用の
高周波を発生する発振器、該発振器はその出力周
波数を手動にて可変させる可変手段を有してい
る。3は発振器の出力の位相を90゜シフトして、
位相差90゜の駆動用高周波を作るための移相器、
4は振動波モーターの回転方向を変えるために、
駆動用高周波の位相を変化させるための回転方向
切換器、5,6,9,10は後述のスイツチング
用トランジスタを駆動するための非反転バツフ
ア、7,8,11,12は駆動用高周波の位相を
反転させて、スイツチング用トランジスタを駆動
するための反転バツフア、13〜20は、トラン
ジスタのベース抵抗、21〜28はスイツチング
用トランジスタ、29〜36はトランスの逆起電
力を吸収して、トランジスタを保護するための保
護用ダイオード、37,38は、トランスの一次
側巻線のインダクタンスと、直列共振をするため
の共振用コンデンサ、39,40は、低電圧の駆
動用高周波を振動波モーターを駆動するために必
要な電圧まで昇圧するためのトランス、41,4
2は昇圧された駆動用高周波を正弦波にするため
の波形整形用コイル、43は高圧の高周波で駆動
される振動波モーターである。
FIG. 1 shows an embodiment of the vibration wave motor drive circuit according to the present invention, in which 1 is a battery as a power source, 2 is an oscillator that generates high frequency waves for driving the vibration wave motor, and the oscillator is has variable means for manually varying the output frequency. 3 shifts the phase of the oscillator output by 90°,
A phase shifter to create a driving high frequency with a phase difference of 90°,
4 is to change the rotation direction of the vibration wave motor.
A rotation direction switch for changing the phase of the driving high frequency wave; 5, 6, 9, and 10 are non-inverting buffers for driving switching transistors to be described later; 7, 8, 11, and 12 are the phases of the driving high frequency wave. 13 to 20 are base resistances of the transistors, 21 to 28 are switching transistors, and 29 to 36 absorb the back electromotive force of the transformer to drive the transistors. Protection diodes 37 and 38 are used to connect the inductance of the primary winding of the transformer to resonance capacitors for series resonance. 39 and 40 are used to connect the low voltage drive high frequency to drive the vibration wave motor. Transformer to step up the voltage to the required voltage, 41,4
2 is a waveform shaping coil for converting the boosted driving high frequency into a sine wave, and 43 is a vibration wave motor driven by high voltage and high frequency.

第6図は振動波モーター43の周方向から見た
断面図で、該第6図中43−1はロータ、43−
2は振動体、43−4は振動体43−2上に附さ
れた分極処理がなされた圧電体(電歪素子)、4
3a,43bは電極である。振動体43−2と圧
電体43−4とよりステーターが構成され、ロー
ター43−1は振動体43−2上に摩擦接触して
いる。
FIG. 6 is a sectional view of the vibration wave motor 43 viewed from the circumferential direction, and 43-1 in FIG. 6 is a rotor;
2 is a vibrating body; 43-4 is a polarized piezoelectric body (electrostrictive element) attached to the vibrating body 43-2;
3a and 43b are electrodes. The vibrating body 43-2 and the piezoelectric body 43-4 constitute a stator, and the rotor 43-1 is in frictional contact with the vibrating body 43-2.

上記電極43a,43b中、振動体43−2に
おける屈曲進行波の波長をλとすると43aは駆
動用電極でλ/2間隔で圧電体43−4上に配され
ており、又43bは駆動用電極で、該電極もλ/2
間隔で圧電体43−4上に配される。又電極43
aと43bとは3λ/4だけ位置的位相がずれてお
り、電極43aにて駆動電圧が印加される圧電体
にてA相の圧電体を構成し、電極43bにて駆動
電圧が印加される圧電体にてB相の圧電体が構成
される。これらの圧電体の分極処理や電極配置構
成自体は周知であるので、その詳細な説明は省略
する。
Among the electrodes 43a and 43b, if the wavelength of the bending traveling wave in the vibrating body 43-2 is λ, 43a is a driving electrode arranged on the piezoelectric body 43-4 at an interval of λ/2, and 43b is a driving electrode. electrode, the electrode is also λ/2
They are arranged on the piezoelectric body 43-4 at intervals. Also, electrode 43
A and 43b are out of phase in position by 3λ/4, and constitute an A-phase piezoelectric body with a piezoelectric body to which a driving voltage is applied at electrode 43a, and a driving voltage is applied at electrode 43b. A B-phase piezoelectric body is constituted by the piezoelectric body. Since the polarization process of these piezoelectric bodies and the electrode arrangement itself are well known, detailed explanation thereof will be omitted.

上記の構成にあつて、電極43aと電極43b
へ位相90゜異なる周波電圧が印加されることにて、
振動体43−2上に進行性の振動波が発生し、ロ
ーター43−1が該振動波により駆動される。
In the above configuration, the electrode 43a and the electrode 43b
By applying a frequency voltage with a phase difference of 90° to
Progressive vibration waves are generated on the vibrating body 43-2, and the rotor 43-1 is driven by the vibration waves.

次に以上の構成の動作を説明する。発振器2で
発生した高周波のパルスを90゜移相器3で90゜シフ
トして、振動波モーター駆動用の同一周波数で位
相差が90゜の高周波を作る。次に回転方向切換器
4で、位相差を90゜遅らせるか、進ませるかによ
つて、振動波モーターの回転方向を決める。
Next, the operation of the above configuration will be explained. The high-frequency pulse generated by the oscillator 2 is shifted by 90° by the 90° phase shifter 3 to create a high-frequency wave with the same frequency but a 90° phase difference for driving the vibration wave motor. Next, the rotation direction changer 4 determines the rotation direction of the vibration wave motor depending on whether the phase difference is delayed or advanced by 90 degrees.

このようにして作られた振動波モーター駆動用
の信号は、それぞれバツフア5〜12を通して、
スイツチングトランジスタのベースに供給され、
スイツチング用の信号となる。今、発振器2の出
力パルスを第2図aに示すものとすると、トラン
ジスター21は第2図dの如くオンオフ動作を行
い、一方、トランジスター22は第2図bの如く
オンオフ動作を行う。又インバーター7,8を介
した発振器2の出力は第2図cに示される通りで
あり、トランジスター23は第2図bの如くオン
オフ動作し、トランジスター24は第2図dの如
くオンオフ動作を行う。よつて、トランス39の
一次側コイルには交互に異なる方向へ電流が流
れ、トランス39の二次側コイルには高圧高周波
電圧が発生する。
The vibration wave motor drive signals created in this way are passed through buffers 5 to 12, respectively.
Supplied to the base of the switching transistor,
Serves as a switching signal. Now, assuming that the output pulse of the oscillator 2 is as shown in FIG. 2a, the transistor 21 performs an on/off operation as shown in FIG. 2d, while the transistor 22 performs an on/off operation as shown in FIG. 2b. The output of the oscillator 2 via the inverters 7 and 8 is as shown in FIG. 2c, the transistor 23 turns on and off as shown in FIG. 2b, and the transistor 24 turns on and off as shown in FIG. 2d. . Therefore, current flows in the primary coil of the transformer 39 in different directions alternately, and a high voltage and high frequency voltage is generated in the secondary coil of the transformer 39.

一方、回転方向切換器4の出力としては発振器
2の出力に対して90゜位相の異なる第2図eのパ
ルスとなつており、このため、トランジスター2
6,27は第2図fの如くオンオフし、トランジ
スター25,28は第2図gの如くオンオフ動作
を行う。このため、トランス40の一次側コイル
にも交互に異なる方向へ電流が流れ、トランス4
0の二次側コイルの出力としても高圧高周波電圧
が発生する。
On the other hand, the output of the rotation direction switch 4 is the pulse shown in FIG.
The transistors 6 and 27 are turned on and off as shown in FIG. 2f, and the transistors 25 and 28 are turned on and off as shown in FIG. 2g. Therefore, current flows alternately in the primary coil of the transformer 40 in different directions, causing the transformer 40 to
A high-voltage, high-frequency voltage is also generated as the output of the zero secondary coil.

上記の如く発振器2と回転方向切換器4の出力
パルスは90゜位相が異なつているので、上記トラ
ンス39,40の出力も90゜位相が異なるものと
なり、コイル41,42にてて正弦波に整形され
た上、各電極43a,43bに印加される。これ
にてA相及びB相の圧電体は90゜位相の異なる高
圧高周波電圧が印加され、上述の如く振動波モー
ター43は回動する。
As mentioned above, since the output pulses of the oscillator 2 and the rotational direction switch 4 have a 90° phase difference, the outputs of the transformers 39 and 40 also have a 90° phase difference, and the coils 41 and 42 convert them into sine waves. After being shaped, it is applied to each electrode 43a, 43b. As a result, high-voltage, high-frequency voltages having a phase difference of 90° are applied to the A-phase and B-phase piezoelectric bodies, and the vibration wave motor 43 rotates as described above.

上記トランス39又は40の一次側コイルに対
して直列に共振用コンデンサー37,38が接続
され直列共振回路が構成されている。
Resonant capacitors 37 and 38 are connected in series to the primary coil of the transformer 39 or 40 to form a series resonant circuit.

該直列共振回路は該回路の共振周波数付近では
トランスの一次側コイルに最も高い電圧が印加さ
れ共振周波数からずれるに従つて一次側コイルに
印加される電圧は低下する。このためトランスの
二次側の出力電圧は、第5図のように一次側共振
回路の共振周波数付近の時最も高く、共振周波数
からずれるに従つて出力電圧は低下する。
In the series resonant circuit, the highest voltage is applied to the primary coil of the transformer near the resonant frequency of the circuit, and as the frequency deviates from the resonant frequency, the voltage applied to the primary coil decreases. Therefore, the output voltage on the secondary side of the transformer is highest when it is near the resonant frequency of the primary side resonant circuit, as shown in FIG. 5, and the output voltage decreases as it deviates from the resonant frequency.

ここで振動波モーターの周波数−電流の関係は
第3図の様に、周波数−回転数の関係は第4図の
様になつており、一定の電圧(例えば30)で、
周波数を変化させて回転数を変えた場合、共振周
波数からずれるに従つて入力電流が大きくなり、
モーターの駆動効率が悪化してしまう。そこで、
駆動効率を悪化させないためには、周波数と共に
駆動電圧を変化させて、常に、入力電流の小さい
点でモーターを駆動すれば、モーターの駆動効率
を悪化させずに、回転数を変えることができる。
Here, the frequency-current relationship of the vibration wave motor is as shown in Figure 3, and the frequency-rotational speed relationship is as shown in Figure 4. At a constant voltage (for example, 30),
When changing the rotation speed by changing the frequency, the input current increases as it deviates from the resonant frequency.
Motor drive efficiency deteriorates. Therefore,
In order to prevent the drive efficiency from deteriorating, if the drive voltage is changed along with the frequency and the motor is always driven at a point where the input current is small, the rotation speed can be changed without deteriorating the motor drive efficiency.

よつて、本発明では、一次側に共振を使つたト
ランスの共振周波数と、振動波モーター固有の共
振周波数とを一致させると共に、共振点からずれ
た時の周波数−出力電圧の特性を振動波モーター
の入力電流が最小となる様な点の周波数−電圧の
特性と一致する様に、共振周波数及び共振回路の
Qを設定している。これにて、周波数を変えると
振動波モーターに加わる電圧に変化して、常に電
流が最小になる様に制御され駆動効率の向上を計
つている。
Therefore, in the present invention, the resonant frequency of a transformer that uses resonance on the primary side is matched with the resonant frequency specific to the vibration wave motor, and the frequency-output voltage characteristic when the vibration wave motor deviates from the resonance point is The resonant frequency and Q of the resonant circuit are set to match the frequency-voltage characteristics at the point where the input current is minimum. With this, when the frequency is changed, the voltage applied to the vibration wave motor changes, controlling the current so that it is always at a minimum, improving drive efficiency.

即ち、今、発振器2の発振周波数を上記直列共
振回路の共振周波数f30に設定しており、この時、
トランス39,40の二次側出力として30が発
生しているとする。上記の如く振動波モーターの
共振周波数と直列共振回路の共振周波数が一致し
ているので、この時モーターは第3図の30のラ
インの如く高駆動効率で作動する。この状態から
モーターの回転数を低下させるために発振器2の
出力周波数を変更、f30からf25へ移行させると第
5図の如くトランスの二次側出力が25となる。
この状態では第3図の如く25下でのモーターの
共振周波数となつているので、高駆動効率で作動
する。又、更に回転数を低下させるために発振器
2の出力周波数を変更し、f25からf20へ移行させ
ると、第5図の如くトランスの二次側出力が20
となり、この状態でも第3図の如く20下でのモ
ーターの共振周波数となつており、この状態でも
高駆動効率状態でモーターが作動している。
That is, the oscillation frequency of the oscillator 2 is now set to the resonant frequency f 30 of the series resonant circuit, and at this time,
It is assumed that 30 is generated as the secondary output of the transformers 39 and 40. As mentioned above, since the resonant frequency of the vibration wave motor and the resonant frequency of the series resonant circuit match, the motor operates with high driving efficiency as shown by line 30 in FIG. 3 at this time. From this state, in order to reduce the rotational speed of the motor, the output frequency of the oscillator 2 is changed and shifted from f30 to f25 , and the secondary output of the transformer becomes 25 as shown in FIG.
In this state, the resonance frequency of the motor is below 25 as shown in Figure 3, so it operates with high drive efficiency. In addition, in order to further reduce the rotation speed, if the output frequency of oscillator 2 is changed and shifted from f 25 to f 20 , the secondary output of the transformer becomes 20 as shown in Figure 5.
Even in this state, the resonant frequency of the motor is below 20 as shown in Figure 3, and even in this state, the motor is operating with high drive efficiency.

以上の如くして、本発明ではモーターの回転速
度を制御するに際して駆動周波数を変化させると
自動的に駆動電圧も変化し、常にモーターの駆動
電圧と駆動周波数との関係がモーターの入力電流
を最小になる様制御されるものである。
As described above, in the present invention, when the drive frequency is changed when controlling the rotational speed of the motor, the drive voltage also changes automatically, and the relationship between the motor drive voltage and the drive frequency always minimizes the input current of the motor. It is controlled so that

〔効 果〕〔effect〕

以上に如く、本発明では駆動周波数を変化させ
ると自動的に駆動電圧も変化し、常にモーターが
共振状態、となる状態を保持する周波数と駆動電
圧との組み合わせを保つ様なしているので、駆動
効率を極めて向上させることが出来、更にその構
成として駆動電圧源としても単一のもので済み構
成が煩雑化することなく上記の目的を達成し得る
ものである。
As described above, in the present invention, when the drive frequency is changed, the drive voltage also changes automatically, and the combination of frequency and drive voltage that always maintains the motor in a resonant state is maintained. Efficiency can be greatly improved, and since the structure requires only a single driving voltage source, the above object can be achieved without complicating the structure.

尚、実施例では発振器2から直接駆動周波数を
決定するパルスを得ているが、発振器出力を分周
する分周回路を設け、該分周回路出力にて駆動周
波数を決定しても良い。この場合は分周段を選択
することにて駆動周波数を可変となす構成とな
る。又、本実施例のモーターとして圧電体を用い
ているが、電歪素子を用いても良い。又具体的な
素子としてはYZT等を利用出来るものである。
In the embodiment, a pulse for directly determining the driving frequency is obtained from the oscillator 2, but a frequency dividing circuit for frequency dividing the oscillator output may be provided, and the driving frequency may be determined by the output of the frequency dividing circuit. In this case, the drive frequency is made variable by selecting the frequency dividing stage. Furthermore, although a piezoelectric body is used as the motor in this embodiment, an electrostrictive element may also be used. Further, as a specific element, YZT or the like can be used.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明に係る振動波モーターの駆動回
路の一実施例を示す回路図、第2図a〜gは第1
図の回路動作を説明するための波形図、第3図、
第4図はそれぞれ振動波モーターの駆動特性を示
す説明図、第5図は第1図実施例のトランスの特
性を示す説明図、第6図は振動波モーターの構成
を示す断面図である。 37,38…コンデンサー、39,40…トラ
ンス、43…振動波モーター。
FIG. 1 is a circuit diagram showing an embodiment of a drive circuit for a vibration wave motor according to the present invention, and FIGS.
A waveform diagram for explaining the circuit operation shown in Fig. 3,
4 is an explanatory diagram showing the driving characteristics of the vibration wave motor, FIG. 5 is an explanatory diagram showing the characteristics of the transformer of the embodiment shown in FIG. 1, and FIG. 6 is a sectional view showing the configuration of the vibration wave motor. 37, 38... Capacitor, 39, 40... Transformer, 43... Vibration wave motor.

Claims (1)

【特許請求の範囲】 1 駆動用振動を発生する電気−機械エネルギー
変換素子43と、交流信号発生回路2と、出力電
圧可変回路37〜42とを有する前記変換素子4
3に発生した振動を駆動源とする振動モータであ
つて、 前記交流信号発生回路2は出力される交流信号
の周波数を可変できるものであり、 前記出力電圧可変回路37〜42は前記発生回
路2から出力される交流信号の周波数の変化に応
答して、該交流信号の電圧レベルを変える為の手
段37,38を含むものであり、 前記出力電圧可変回路37〜42の出力は前記
変換素子43に供給されるものであり、それによ
つて前記振動によつて駆動される接触体43−1
と前記換素子との相対速度は変えられることを特
長とする振動モータ。
[Claims] 1. The conversion element 4 having an electro-mechanical energy conversion element 43 that generates driving vibration, an AC signal generation circuit 2, and output voltage variable circuits 37 to 42.
3, the vibration motor uses the vibration generated in the generator circuit 2 as a driving source, and the alternating current signal generating circuit 2 is capable of varying the frequency of the output alternating current signal, and the output voltage variable circuits 37 to 42 are connected to the generating circuit 2. It includes means 37 and 38 for changing the voltage level of the AC signal in response to a change in the frequency of the AC signal output from the conversion element 43. contact body 43-1 which is supplied to the contact body 43-1 and is thereby driven by the vibration.
A vibration motor characterized in that the relative speed between the converter element and the converter element can be changed.
JP62265706A 1987-10-20 1987-10-20 Driver circuit for oscillatory wave motor Granted JPH01107681A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP62265706A JPH01107681A (en) 1987-10-20 1987-10-20 Driver circuit for oscillatory wave motor
US07/595,667 US5140231A (en) 1987-10-20 1990-10-11 Drive circuit for vibratory-wave motor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62265706A JPH01107681A (en) 1987-10-20 1987-10-20 Driver circuit for oscillatory wave motor

Publications (2)

Publication Number Publication Date
JPH01107681A JPH01107681A (en) 1989-04-25
JPH0516277B2 true JPH0516277B2 (en) 1993-03-03

Family

ID=17420879

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62265706A Granted JPH01107681A (en) 1987-10-20 1987-10-20 Driver circuit for oscillatory wave motor

Country Status (1)

Country Link
JP (1) JPH01107681A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9350272B2 (en) 2009-11-20 2016-05-24 Canon Kabushiki Kaisha Driving circuit for vibration-type actuator

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2802359B1 (en) 1999-12-09 2002-02-08 Metabole Dev Et Conseil SUPPLY CIRCUIT FOR PIEZOELECTRIC MOTOR
JP5151310B2 (en) 2007-08-15 2013-02-27 ソニー株式会社 Piezoelectric element drive circuit and pump device
JP5940184B2 (en) * 2015-02-05 2016-06-29 キヤノン株式会社 Vibration body drive circuit, device, and optical apparatus
JP7379285B2 (en) * 2020-06-25 2023-11-14 キヤノン株式会社 Vibration drive devices, equipment, vibration actuator control devices

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60176471A (en) * 1984-02-21 1985-09-10 Canon Inc Drive circuit of vibration wave motor
JPH0642786B2 (en) * 1985-06-18 1994-06-01 日本電装株式会社 Piezoelectric element drive
JPS62131775A (en) * 1985-11-29 1987-06-15 Marcon Electronics Co Ltd Ultrasonic motor circuit

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9350272B2 (en) 2009-11-20 2016-05-24 Canon Kabushiki Kaisha Driving circuit for vibration-type actuator

Also Published As

Publication number Publication date
JPH01107681A (en) 1989-04-25

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