JPH0519642B2 - - Google Patents
Info
- Publication number
- JPH0519642B2 JPH0519642B2 JP59214799A JP21479984A JPH0519642B2 JP H0519642 B2 JPH0519642 B2 JP H0519642B2 JP 59214799 A JP59214799 A JP 59214799A JP 21479984 A JP21479984 A JP 21479984A JP H0519642 B2 JPH0519642 B2 JP H0519642B2
- Authority
- JP
- Japan
- Prior art keywords
- light
- inspected
- light receiving
- receiver
- reflected light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
- G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Length Measuring Devices By Optical Means (AREA)
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は軸心回転する外周が円形の被検査材の
表面欠陥を光学的に検出する装置、具体的には例
えば回転する鋼管等の被検査材の周面へ照射した
光の正反射方向が被検査材の変形、例えば曲が
り、偏肉等により周方向に変化しても誤検出、検
出精度の低下を招くことがなく表面欠陥を検出す
る装置に関する。Detailed Description of the Invention [Field of Industrial Application] The present invention is an apparatus for optically detecting surface defects of a material to be inspected that rotates around its axis and has a circular outer periphery. Even if the direction of specular reflection of the light irradiated onto the circumferential surface of the inspected material changes in the circumferential direction due to deformation of the inspected material, such as bending or uneven thickness, surface defects can be detected without causing false detection or deterioration of detection accuracy. related to a device for
外周が円形、例えば棒鋼、鋼管ネジ等の表面欠
陥を検出する装置として光学的検出装置がある。
この装置は第7図に示すように回転又はスパイラ
ル送りしている鋼管1の周面にレーザ投光器2か
らレーザ光を直接照射して、或いは回転又は揺動
する光スキヤナー4に当ててそれからの反射光を
鋼管1の軸長方向に走査させるべく照射する。鋼
管表面は完璧な鏡面でないために、照射光は正反
射方向を中心とするある程度の広がりをもつて反
射されるが、それらの反射光のうちの主に正反射
光を欠陥検出用の受光器30,31にて受光して
その受光量を判定基準として鋼管1の表面欠陥を
検出するように構成されており、鋼管1のレーザ
光照射位置に表面欠陥が存在する場合に正反射光
の方向が変化して受光器30,31にて捉えられ
る受光量が変化することを利用している。
2. Description of the Related Art Optical detection devices are available as devices for detecting surface defects in materials with circular outer peripheries, such as steel bars and threaded steel pipes.
As shown in Fig. 7, this device directly irradiates a laser beam from a laser projector 2 onto the circumferential surface of a steel pipe 1 that is being rotated or spirally fed, or it is applied to a rotating or oscillating optical scanner 4 and the laser beam is reflected from the beam. Light is irradiated to scan the steel pipe 1 in the axial direction. Since the steel pipe surface is not a perfect mirror surface, the irradiated light is reflected with a certain degree of spread centered on the specular reflection direction, but the specular reflection light is mainly used for defect detection. 30 and 31, and detects a surface defect on the steel pipe 1 using the amount of light received as a criterion, and when a surface defect exists at the laser beam irradiation position of the steel pipe 1, the direction of the specularly reflected light is detected. This method utilizes the fact that the amount of light received by the light receivers 30 and 31 changes as the light changes.
しかしながらこの装置による場合は鋼管1が真
円でなく、或いは曲つているとき、また例えば第
8図に示す如く鋼管1を回転支承すべくその下側
に配したロール35に曲がり、偏肉等があるとき
には、誤検査、欠陥検出精度の低下を惹起してい
た。即ち、これは鋼管1からの正反射光の方向が
鋼管1又はロール35の回転によつて変化し、特
に周方向に変化し、所定の位置に設けている受光
器30,31を外れるときがあり、このとき受光
器30,31のこれを捉えることができず、この
ため表面欠陥の存在により受光量が減少したと誤
判定することによるためである。また正反射光が
受光器30,31から外れないまでも広がりを有
する反射光の中心と受光器中心とが不一致となる
ために受光量レベルが低下して誤判定を招来する
ことがある。 However, when using this device, when the steel pipe 1 is not a perfect circle or is bent, for example, as shown in FIG. In some cases, this has led to incorrect inspections and a decrease in defect detection accuracy. That is, this is because the direction of specularly reflected light from the steel pipe 1 changes due to the rotation of the steel pipe 1 or the roll 35, especially in the circumferential direction, and when it comes off the light receivers 30 and 31 provided at predetermined positions. This is because the light receivers 30 and 31 are unable to detect this at this time, resulting in an erroneous determination that the amount of light received has decreased due to the presence of a surface defect. Further, even if the specularly reflected light does not deviate from the light receivers 30 and 31, the center of the diffused reflected light and the center of the light receiver may not match, resulting in a decrease in the level of the amount of received light, resulting in an erroneous determination.
本発明は斯かる事情に鑑みてなされたものであ
り、その目的とするところは軸心回転する外周が
円形の被検査材の周面へビーム光を軸長方向に走
査照射して、そこからの正反射光の方向が被検査
材の真円度、曲がり或いは回転駆動するためのロ
ールの曲がり、偏肉等の被検査材表面欠陥以外の
要因に基づいて変化する場合にも、検出精度を低
下させることなく表面欠陥を検査できる光学的な
表面欠陥検出装置を提供するにある。
The present invention has been made in view of the above circumstances, and its purpose is to scan and irradiate a beam light in the axial direction onto the circumferential surface of a material to be inspected which rotates on its axis and has a circular outer periphery, and from there. Detection accuracy can be improved even when the direction of the specularly reflected light changes due to factors other than the surface defects of the inspected material, such as the roundness of the inspected material, the bending of the inspected material, the bending of the roll for rotational drive, uneven thickness, etc. An object of the present invention is to provide an optical surface defect detection device capable of inspecting surface defects without degrading the surface quality.
本発明に係る表面欠陥検出装置は、外周が円形
の被検査材を軸心回転させる手段と、軸心回転さ
れている被検査材の軸長方向周面にビーム光を走
査する投光手段と、被検査材の周面からの反射光
を捉える受光器とを備えた表面欠陥検出装置にお
いて、前記受光器は被検査材の周面からの正反射
光を捉える欠陥検出用受光部、及び受光面を前記
受光部と同方向に向けて被検査材の周方向に並設
され、前記反射光を捉える複数の追従用受光部を
備え、また追従用受光部からの信号をサンプルホ
ールドする回路と、該回路でホールドしたサンプ
ル値が所定の期間入力される差動増幅器と、該差
動増幅器の出力が予め定めた条件を満たすよう被
検査材の周方向に受光器又はこれに正反射光を導
くライトガイドを備えた受光器にあつてはこのラ
イトガイドの位置を変更する駆動部とを備え、前
記欠陥検出用受光部が前記正反射光を捉え得るよ
う前記受光器又は前記ライトガイドをこれに追従
させる手段を設けたことを特徴とする。
The surface defect detection device according to the present invention includes means for rotating an inspected material having a circular outer periphery around its axis, and a light projecting means for scanning a beam light on the axially longitudinal circumferential surface of the inspected material being rotated around its axis. , a surface defect detection device comprising: a light receiver that captures reflected light from the circumferential surface of the inspected material; A plurality of follow-up light-receiving parts arranged in parallel in the circumferential direction of the material to be inspected with their surfaces facing in the same direction as the light-receiving parts and capturing the reflected light, and a circuit for sample-holding signals from the follow-up light-receiving parts; , a differential amplifier into which the sample value held in the circuit is input for a predetermined period, and a light receiver or a specularly reflected light directed to the light receiver in the circumferential direction of the material to be inspected so that the output of the differential amplifier satisfies predetermined conditions. In the case of a light receiver equipped with a guiding light guide, the light receiver is provided with a drive unit that changes the position of the light guide, and the light receiver or the light guide is moved so that the defect detection light receiving unit can capture the specularly reflected light. It is characterized by providing a means for following.
以下に本発明を図面に基づいて具体的に説明す
る。第1図は本発明の実施例を示す模式図であ
り、図中1は図示しない移送装置及び軸心回転手
段によりその軸長方向にスパイラル送りされてい
る被検査材たる鋼管である。鋼管1の上方には、
光を受けてその反射光を軸長方向に走査する投光
手段を構成する適宜面積の鏡面体である光スキヤ
ナー4が設置されており、光スキヤナー4は鏡面
が下側を向くように枢軸が傾けられてあり、光ス
キヤナー制御器5にて反射点を中心として一定角
速度で往復回動せられる。
The present invention will be specifically explained below based on the drawings. FIG. 1 is a schematic diagram showing an embodiment of the present invention, and in the figure, reference numeral 1 denotes a steel pipe, which is a material to be inspected, which is spirally fed in the axial direction by a transfer device and an axial rotation means (not shown). Above the steel pipe 1,
An optical scanner 4 is installed, which is a mirror surface body with an appropriate area and constitutes a light projecting means that receives light and scans the reflected light in the axial direction. It is tilted and can be rotated back and forth at a constant angular velocity around the reflection point by the optical scanner controller 5.
光スキヤナー4より少し離れた同高位置にはレ
ーザ投光器2がその投光窓を光スキヤナー4へ向
けて設置されており、レーザ投光器2が生ぜしめ
たレーザ光は水平に光スキヤナー4へ照射され、
ここで下方へ反射され、その反射光は光スキヤナ
ー4下方の鋼管1表面へその軸長方向に走査され
る。 A laser projector 2 is installed at the same height position, slightly away from the optical scanner 4, with its light projection window facing the optical scanner 4, and the laser light generated by the laser projector 2 is horizontally irradiated onto the optical scanner 4. ,
Here, it is reflected downward, and the reflected light is scanned onto the surface of the steel pipe 1 below the optical scanner 4 in its axial direction.
鋼管1上の走査域には反射光の光路に追従して
検査するようになした角筒状の受光器3が向けら
れており、受光器3はその上、下に貫通する孔が
開設され、鋼管1より少し離れて鋼管1と同心の
円弧状に設けられ、外周円にラツクを形成したガ
イドレール11をその孔に挿通させ、これを介し
て鋼管1周りに回動可能に設けられている。 A rectangular cylindrical light receiver 3 is directed to the scanning area on the steel pipe 1 and is designed to follow the optical path of the reflected light for inspection. , a guide rail 11 is provided in an arc shape concentric with the steel pipe 1 at a distance from the steel pipe 1, and a guide rail 11 having a rack formed on the outer circumference is inserted through the hole, and is provided so as to be rotatable around the steel pipe 1 through the guide rail 11. There is.
受光器3にはガイドレール11のラツクと螺合
するウオーム歯車12及びウオーム歯車12を回
転駆動するサーボモータ9が取付けられており、
受光器3はサーボモータ9にてウオーム歯車12
が回転せられることにより移動する。受光器3を
移動する機構としては、その他種々のものを使用
可能である。 A worm gear 12 that is screwed into the rack of the guide rail 11 and a servo motor 9 that rotationally drives the worm gear 12 are attached to the light receiver 3.
The receiver 3 is connected to a worm gear 12 by a servo motor 9.
It moves by being rotated. As a mechanism for moving the light receiver 3, various other mechanisms can be used.
第2図は受光器3を入光側より見た断面図であ
り、受光器3は筒状をなし、その内容の一側に表
面欠陥検出用の受光部3aを、また他側に上下に
距離aだけ隔てて追従用の受光部3b,3cを同
方向に向くように備えている。 FIG. 2 is a sectional view of the light receiver 3 seen from the light input side. The light receiver 3 has a cylindrical shape, and has a light receiving section 3a for detecting surface defects on one side, and a top and bottom light receiving section 3a on the other side. Light receiving sections 3b and 3c for tracking are provided separated by a distance a and facing in the same direction.
受光部3aは鋼管1からの正反射光の受光量に
基づいて表面欠陥を検出するものであり、光電変
換素子を内蔵し、これにて受光量をそのレベルに
応じた電気信号として出力し、その出力信号を欠
陥検出器10へ与える。欠陥検出器10は入力信
号に基づき表面欠陥を検出する。 The light receiving section 3a detects surface defects based on the amount of specularly reflected light received from the steel pipe 1, and has a built-in photoelectric conversion element, which outputs the amount of received light as an electrical signal according to its level. The output signal is given to the defect detector 10. Defect detector 10 detects surface defects based on input signals.
受光部3b,3cは鋼管1からの反射光のうち
の正反射光の方向の周方向変化を検出するもので
あり、同様に光電変換素子を内蔵し、受光量に応
じたレベルの電気信号を出力し、出力信号を夫々
サンプルホールド回路6,7へ与える。 The light receiving sections 3b and 3c detect changes in the circumferential direction of the specularly reflected light of the reflected light from the steel pipe 1, and similarly have a built-in photoelectric conversion element and output electric signals at a level corresponding to the amount of light received. The output signals are supplied to sample and hold circuits 6 and 7, respectively.
光スキヤナー制御器5は光スキヤナー4を往復
回動させる駆動信号を出力するものであり、この
駆動信号を利用して、例えば往動開始時よりも少
し遅れた時点でホールド指令信号を出力し、出力
信号をサンプルホールド回路6,7へ与えるよう
になつている。 The optical scanner controller 5 outputs a drive signal for reciprocating the optical scanner 4, and uses this drive signal to output a hold command signal, for example, a little later than the start of forward movement. The output signal is supplied to sample and hold circuits 6 and 7.
サンプルホールド回路6,7はホールド指令信
号が入力されるとそのときの受光部3b,3cか
らの信号を夫々次のホールド指令信号が入力され
るまでの所定の期間ホールドし、これを差動増幅
器8へ所定の期間出力し続けることにより、光走
査に伴い追従用受光器への入光量が極端に少なく
なつても安定的に追従させることができる。即ち
具体的にはホールドされた夫々の信号は差動増幅
器8へ出力され、差動増幅器8は2つの入力信号
の差分を増幅し、増幅信号をサーボアンプ13へ
出力し、サーボアンプ13は差動増幅器8出力を
ゼロにする方向へサーボモータ9を所要量回転さ
せるべく制御する。 When the hold command signal is input, the sample and hold circuits 6 and 7 hold the signals from the light receiving sections 3b and 3c at that time for a predetermined period until the next hold command signal is input, and hold these signals to the differential amplifier. 8 for a predetermined period of time, stable tracking can be achieved even if the amount of light incident on the tracking light receiver becomes extremely small due to optical scanning. That is, specifically, each held signal is output to the differential amplifier 8, the differential amplifier 8 amplifies the difference between the two input signals, and outputs the amplified signal to the servo amplifier 13, which in turn amplifies the difference between the two input signals. The servo motor 9 is controlled to rotate the required amount in a direction to make the output of the dynamic amplifier 8 zero.
サーボモータ9の回転により受光器3がウオー
ム歯車12及びガイドレール11を介して鋼管1
の周方向に移動せしめられる。 Due to the rotation of the servo motor 9, the light receiver 3 is connected to the steel pipe 1 via the worm gear 12 and the guide rail 11.
is moved in the circumferential direction.
次に本発明装置の動作につき説明する。鋼管1
に曲がり又は偏肉等があつてレーザ光の鋼管1上
での光照射位置が変化し、そこからの反射光の方
向が、例えば周方向下側へ変化した場合、下側の
受光部3cは反射光を多く受光し、上側の受光部
3bは少ない反射光を受光する状態になる。
Next, the operation of the apparatus of the present invention will be explained. steel pipe 1
When the laser beam irradiation position on the steel pipe 1 changes due to bending or uneven thickness, and the direction of the reflected light from there changes, for example, downward in the circumferential direction, the lower light receiving part 3c The upper light receiving section 3b receives a large amount of reflected light, and the upper light receiving section 3b receives a small amount of reflected light.
追従用受光部3b,3cは夫々受光量に応じた
レベル、即ち受光部3cより受光部3bの方が低
レベルの電気信号をサンプルホールド回路6,7
へ出力し、サンプルホールド回路6,7は光スキ
ヤナー制御器5からのホールド指令信号を入力す
ると、受光部3b,3c夫々の出力信号をホール
ドし、この信号を次のホールド指令信号が入力さ
れるまで差動増幅器8へ出力する。 The tracking light receiving sections 3b and 3c each sample and hold an electrical signal at a level corresponding to the amount of light received, that is, the level of the light receiving section 3b is lower than that of the light receiving section 3c.
When the sample and hold circuits 6 and 7 receive the hold command signal from the optical scanner controller 5, they hold the respective output signals of the light receiving sections 3b and 3c, and this signal is input to the next hold command signal. output to the differential amplifier 8.
差動増幅器8はその差信号分、即ち両受光部3
b,3cのレベル差分を増幅してサーボアンプ1
3へ出力し、サーボアンプ13はその入力信号に
基づいてサーボモータ9を回転させ、ガイドレー
ル11下方へ受光器3を移動するように作動す
る。 The differential amplifier 8 outputs the difference signal, that is, both light receiving sections 3
Servo amplifier 1 amplifies the level difference between b and 3c.
Based on the input signal, the servo amplifier 13 rotates the servo motor 9 and operates to move the light receiver 3 below the guide rail 11.
これにより受光器3は下方に周動せしめられて
受光部3b,3cには同量の反射光が入光する。 As a result, the light receiver 3 is rotated downward, and the same amount of reflected light enters the light receiving sections 3b and 3c.
従つて受光部3aは、鋼管1又は回転用ロール
35の曲がり、偏肉等による鋼管1上でのレーザ
光照射位置の変動があつても鋼管1からの正反射
光の、表面欠陥による反射方向変化以外の方向変
化に追従でき、誤検査、検出精度の低下がなく表
面の欠陥検出ができる。 Therefore, even if there is a change in the laser beam irradiation position on the steel pipe 1 due to bending or uneven thickness of the steel pipe 1 or the rotating roll 35, the light receiving part 3a detects the direction of reflection of the specularly reflected light from the steel pipe 1 due to surface defects. It can follow directional changes other than changes, and can detect defects on the surface without erroneous inspection or deterioration of detection accuracy.
なお上記説明ではレーザ光を使用しているが、
本発明はこれに限らず、他のビーム光を使用する
ものにも適用できる。 Although the above explanation uses laser light,
The present invention is not limited to this, but can also be applied to systems that use other beams of light.
また上記説明では追従用の受光部を2箇使用し
ているが、本発明はこれに限らず3箇以上使用し
てもよい。 Further, in the above description, two light receiving sections for tracking are used, but the present invention is not limited to this, and three or more may be used.
例えば第4図に示すように3箇使用する場合
は、反射光の反射エネルギ分布が中心に集中して
いるときに有効である。即ちこのようなときに2
箇の受光部を使用すると僅かの反射光の方向変化
により追従用の受光部に大きな光量変化が生じ、
このため頻繁に受光器の位置制御をすることにな
り、極端な場合には発振現象を起こすことにな
る。これに対して3箇使用する場合は、第5図に
示す如く上側から順に配した受光部3b,3c,
3dの出力電気信号を夫々サンプルホールド回路
6,7,21にてホールドしてこれを差動増幅器
22,23,24へ与え、中央の受光部3cから
の入力信号が設定レベル以下の場合には、差動増
幅器23の出力にてオン、オフを制御されるスイ
ツチングトランジスタ26をオフして差動増幅器
22,24を停止させる。これにより反射光の方
向が大きく変化する場合の追従を中止できる。設
定レベルを超える場合には、中央の受光部3cに
常に反射光が入光するように差動増幅器22,2
4の出力信号を差動増幅器25へ与えてこれから
出力される信号をゼロとすべくサーボアンプ13
にてサーボモータ9を回転制御することにより発
振現象を防止できる。なお2箇の受光部を使用す
る場合にも両受光部での受光量が所定値以下とな
るときに追従を中止させるように制御してもよ
い。 For example, using three as shown in FIG. 4 is effective when the reflected energy distribution of reflected light is concentrated at the center. In other words, in such a case, 2
When using multiple light receiving sections, a slight change in the direction of the reflected light will cause a large change in the amount of light on the tracking light receiving section.
Therefore, the position of the light receiver must be controlled frequently, and in extreme cases, oscillation may occur. On the other hand, when using three light receiving parts, the light receiving parts 3b, 3c,
The output electrical signals of 3d are held in sample-and-hold circuits 6, 7, and 21, respectively, and applied to differential amplifiers 22, 23, and 24, and when the input signal from the central light receiving section 3c is below the set level, The switching transistor 26, which is controlled to be turned on or off by the output of the differential amplifier 23, is turned off to stop the differential amplifiers 22 and 24. This allows tracking to be stopped when the direction of reflected light changes significantly. When the set level is exceeded, the differential amplifiers 22 and 2 are set so that the reflected light always enters the central light receiving section 3c.
The servo amplifier 13 supplies the output signal of 4 to the differential amplifier 25 to make the signal to be outputted from now on zero.
The oscillation phenomenon can be prevented by controlling the rotation of the servo motor 9. Note that even when two light receiving sections are used, control may be performed so that tracking is stopped when the amount of light received by both light receiving sections becomes less than a predetermined value.
更に、上記説明では受光器自体を反射光の方向
変化に応じて移動させているが、本発明はこのよ
うにすることなく、第6図に示す如く受光器3の
入光側に可撓性を有するライトガイド14を取付
け、これにて導光すると共にライトガイド14の
先端を反射光の光路に移動させることにより受光
器3を不動のまま実施できることは勿論である。 Furthermore, in the above explanation, the light receiver itself is moved in accordance with the change in the direction of the reflected light, but the present invention does not do this, but instead includes a flexible structure on the light incident side of the light receiver 3, as shown in FIG. It goes without saying that the light receiver 3 can be kept stationary by attaching a light guide 14 having a light guide 14 and guiding the light with the light guide 14 and moving the tip of the light guide 14 to the optical path of the reflected light.
そして、更に本発明は鋼管に限らず他の外周が
円形の一般材、例えばネジ材をも検査できること
は勿論である。 Furthermore, the present invention is of course capable of inspecting not only steel pipes but also other general materials having a circular outer periphery, such as screw materials.
以上詳述した如く本発明は被検査材の曲がり等
或いは被検査材を回転、移送するための装置によ
り被検査材表面上の光照射位置が変わつて反射光
の方向が変化し、追従用受光器への入光量が極端
に少なくなつても安定的に追従出来、また受光器
又はこれに正反射を導くべく備えられたライトガ
イドは正反射光を正確に追従して受光するので、
誤検出、検出精度の低下を防止できる優れた効果
を奏する。
As described in detail above, the present invention changes the direction of the reflected light by changing the light irradiation position on the surface of the inspected material due to bending of the inspected material or a device for rotating or transporting the inspected material. Even if the amount of light incident on the device is extremely small, it can be stably tracked, and the light receiver or the light guide provided to guide the specular reflection accurately tracks and receives the specular reflection, so
This has an excellent effect of preventing false detection and deterioration of detection accuracy.
第1図は本発明の実施例を示す模式図、第2
図、第3図、第4図は本発明の欠陥検出用受光部
と追従用受光部との配置例を示す模式的断面図、
第5図は第4図の場合の回路図、第6図は本発明
の他の実施例、第7図、第8図は従来技術の説明
図である。
1……鋼管、2……レーザ投光器、3……受光
器、3a……検出用受光部、3b,3c,3d…
…追従用受光部、8,22,23,24,25…
…差動増幅器、9……サーボモータ、13……サ
ーボアンプ、14……ライトガイド。
Figure 1 is a schematic diagram showing an embodiment of the present invention, Figure 2 is a schematic diagram showing an embodiment of the present invention.
3 and 4 are schematic cross-sectional views showing examples of the arrangement of the defect detection light receiving section and the tracking light receiving section of the present invention,
FIG. 5 is a circuit diagram in the case of FIG. 4, FIG. 6 is another embodiment of the present invention, and FIGS. 7 and 8 are explanatory diagrams of the prior art. DESCRIPTION OF SYMBOLS 1... Steel pipe, 2... Laser emitter, 3... Light receiver, 3a... Light receiving part for detection, 3b, 3c, 3d...
...Following light receiving section, 8, 22, 23, 24, 25...
... Differential amplifier, 9 ... Servo motor, 13 ... Servo amplifier, 14 ... Light guide.
Claims (1)
と、軸心回転されている被検査材の軸長方向周面
にビーム光を走査する投光手段と、被検査材の周
面からの反射光を捉える受光器とを備えた表面欠
陥検出装置において、 前記受光器は被検査材の周面からの正反射光を
捉える欠陥検出用受光部、及び受光面を前記受光
部と同方向に向けて被検査材の周方向に並設さ
れ、前記反射光を捉える複数の追従用受光部を備
え、また追従用受光部からの信号をサンプルホー
ルドする回路と、該回路でホールドしたサンプル
値が所定の期間入力される差動増幅器と、該差動
増幅器の出力が予め定めた条件を満たすよう被検
査材の周方向に受光器又はこれに正反射光を導く
ライトガイドを備えた受光器にあつてはこのライ
トガイドの位置を変更する駆動部とを備え、前記
欠陥検出用受光部が前記正反射光を捉え得るよう
前記受光器又は前記ライトガイドをこれに追従さ
せる手段を設けたことを特徴とする表面欠陥検出
装置。[Scope of Claims] 1. A means for rotating an inspected material having a circular outer periphery around its axis, a light projection means for scanning a beam light on the axially longitudinal circumferential surface of the inspected material being rotated around its axis, and an inspected object. A surface defect detection device comprising: a light receiver that captures light reflected from the circumferential surface of a material; a circuit that includes a plurality of tracking light receiving sections that are arranged in parallel in the circumferential direction of the material to be inspected in the same direction as the light receiving sections and captures the reflected light, and that samples and holds signals from the tracking light receiving sections; a differential amplifier into which the held sample value is input for a predetermined period of time; and a light guide that guides specularly reflected light to a photoreceiver or the receiver in the circumferential direction of the material to be inspected so that the output of the differential amplifier satisfies predetermined conditions. and a drive unit that changes the position of the light guide, and causes the light receiver or the light guide to follow this so that the defect detection light receiving unit can capture the specularly reflected light. A surface defect detection device characterized by comprising means.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21479984A JPS6191508A (en) | 1984-10-12 | 1984-10-12 | Apparatus for detecting surface flaw |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21479984A JPS6191508A (en) | 1984-10-12 | 1984-10-12 | Apparatus for detecting surface flaw |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6191508A JPS6191508A (en) | 1986-05-09 |
| JPH0519642B2 true JPH0519642B2 (en) | 1993-03-17 |
Family
ID=16661712
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP21479984A Granted JPS6191508A (en) | 1984-10-12 | 1984-10-12 | Apparatus for detecting surface flaw |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6191508A (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE502005001342D1 (en) * | 2004-04-01 | 2007-10-11 | Bosch Gmbh Robert | Device for the metered filling of bulk material |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5834011B2 (en) * | 1976-03-17 | 1983-07-23 | 日本ビクター株式会社 | Contactless pick-up |
| JPS593245A (en) * | 1982-06-29 | 1984-01-09 | Mitsubishi Electric Corp | Deficiency inspector |
-
1984
- 1984-10-12 JP JP21479984A patent/JPS6191508A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6191508A (en) | 1986-05-09 |
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