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JPH0519762B2 - - Google Patents
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JPH0519762B2 - - Google Patents

Info

Publication number
JPH0519762B2
JPH0519762B2 JP61237307A JP23730786A JPH0519762B2 JP H0519762 B2 JPH0519762 B2 JP H0519762B2 JP 61237307 A JP61237307 A JP 61237307A JP 23730786 A JP23730786 A JP 23730786A JP H0519762 B2 JPH0519762 B2 JP H0519762B2
Authority
JP
Japan
Prior art keywords
thin film
alloy
ferromagnetic thin
anisotropy
magnetic head
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP61237307A
Other languages
Japanese (ja)
Other versions
JPS6391811A (en
Inventor
Hiroshi Tomyasu
Akira Gyotoku
Iku Sato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP61237307A priority Critical patent/JPS6391811A/en
Publication of JPS6391811A publication Critical patent/JPS6391811A/en
Publication of JPH0519762B2 publication Critical patent/JPH0519762B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127Structure or manufacture of heads, e.g. inductive
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127Structure or manufacture of heads, e.g. inductive
    • G11B5/187Structure or manufacture of the surface of the head in physical contact with, or immediately adjacent to the recording medium; Pole pieces; Gap features

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Printers Or Recording Devices Using Electromagnetic And Radiation Means (AREA)
  • Magnetic Heads (AREA)

Abstract

PURPOSE:To improve recording and reproducing characteristics by removing property-deteriorated layers generated on the surface of a ferrite substrate and forming 1st thin ferromagnetic films having large anisotropy thereon and further 2nd thin ferromagnetic films having small anisotropy thereon. CONSTITUTION:Surfaces 7, 7 to face a gap are finished to specular surfaces by lapping, etc. The work deteriorated layers on the surfaces are removed by etching using mechanochemical, chemical etching, sputtering devices, etc. in succession of the lapping. The 1st thin ferromagnetic films 3, 3 formed by depositing a ferromagnetic material having the strong intra-surface anisotropy (for example, Ni-Fe alloy, amorphous alloy) by a device for sputtering, etc., on the surfaces 7, 7. The thin ferromagnetic films 4, 4 are formed thereon by depositing a 'Sendust(R)' alloy (for example, Fe-Al-Si alloy, Fe-Si alloy) which is the ferromagnetic material having the intra-surface anisotropy substantially lower than the intra-surface anisotropy of the above-mentioned 1st thin ferromagnetic films.

Description

【発明の詳細な説明】 産業上の利用分野 本発明は磁気記録装置に使用される磁気ヘツド
の製造方法に関するものである。
DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to a method of manufacturing a magnetic head used in a magnetic recording device.

従来の技術 近年、データの記録装置として磁気記録装置が
広い分野にわたつて使用されているが、この磁気
記録装置において優れた高記録密度特性を達成す
るためには、記録媒体の薄膜化、高保磁力化が必
要である。
BACKGROUND TECHNOLOGY In recent years, magnetic recording devices have been used in a wide range of fields as data storage devices, but in order to achieve excellent high recording density characteristics in these magnetic recording devices, thinning of the recording medium and high maintenance are required. Magnetization is necessary.

一方、磁気ヘツドは、コアの飽和を防ぐため高
飽和磁束密度を有する強磁性薄膜(Fe−Al−Si
系合金等)を使用した薄膜ヘツドや、バルクヘツ
ドにおいてギヤツプ近傍に磁性薄膜(Fe−Al−
Si系合金等)を用いたリングヘツドの複合磁気ヘ
ツドが注目されている。この磁気ヘツドの場合、
高保磁力の媒体もヘツドの磁気的飽和もなく充分
に記録できるという利点がある。
On the other hand, the magnetic head uses a ferromagnetic thin film (Fe-Al-Si) with high saturation magnetic flux density to prevent core saturation.
A magnetic thin film (Fe-Al-based alloy, etc.) is used near the gap in the bulk head.
Composite magnetic heads with ring heads using materials such as Si-based alloys are attracting attention. For this magnetic head,
It has the advantage that even high coercive force media can be recorded satisfactorily without magnetic saturation of the head.

発明が解決しようとする問題点 しかしながら、上記したような従来の磁気ヘツ
ドでは第2図aに示すように再生出力の周波数特
性にうねりが生じたり、第3図aに示すように孤
立再生波形が歪み、疑似出力部分Aが発生すると
いう問題点があり、実用化には問題がある。
Problems to be Solved by the Invention However, in the conventional magnetic head as described above, undulations occur in the frequency characteristics of the reproduced output as shown in Figure 2a, and isolated reproduced waveforms occur as shown in Figure 3a. There are problems in that distortion and a pseudo output portion A occur, and there are problems in practical use.

この現象は、強磁性薄膜とコアの間に、コアの
ラツピング処理の際に生じた非磁性または著しく
磁気的特性の劣化した層によつて、疑似的ギヤツ
プが形成され正式のギヤツプと同様のはたらきを
するために起こるものである。
This phenomenon occurs because a pseudo-gap is formed between the ferromagnetic thin film and the core due to a non-magnetic layer or a layer with significantly deteriorated magnetic properties that is generated during the core wrapping process, and the gap functions similarly to a formal gap. It is something that happens in order to do something.

問題点を解決するための手段 本発明は、上記問題点を解決するために、コア
の表面の変質層を除去し、その表面に第1の強磁
性薄膜を被着形成し、さらにその上部に前記第1
の強磁性薄膜より面内異方性の小さい第2の強磁
性薄膜を被着させて、磁気ヘツドを構成するもの
である。
Means for Solving the Problems In order to solve the above problems, the present invention removes the altered layer on the surface of the core, deposits and forms a first ferromagnetic thin film on the surface, and then Said first
A magnetic head is constructed by depositing a second ferromagnetic thin film having smaller in-plane anisotropy than the ferromagnetic thin film.

作 用 コアの表面と強磁性薄膜との間には擬似ギヤツ
プがなくなる。
Effect: There is no pseudo gap between the core surface and the ferromagnetic thin film.

実施例 以下、本発明の一実施例を第1図を参照して説
明する。
Embodiment An embodiment of the present invention will be described below with reference to FIG.

第1図はフエライトを用いたリングヘツドの側
面図であり、少なくともギヤツプ部の近傍に2層
の強磁性薄膜を被着形成させた複合磁気ヘツドで
ある。
FIG. 1 is a side view of a ring head using ferrite, which is a composite magnetic head in which two ferromagnetic thin films are deposited at least near the gap.

フエライトの磁気ヘツドは、I型コア、C型コ
アと呼ばれる2つのコア1,2より構成され、ギ
ヤツプ対向面7,7はラツピング等により鏡面に
仕上げられ、ギヤツプ長を維持するためガラス等
の非磁性材5を介して、ヘツドとして接合され
る。
The magnetic head of ferrite is composed of two cores 1 and 2 called an I-type core and a C-type core, and the gap-opposing surfaces 7 and 7 are finished to a mirror finish by wrapping, etc., and a non-woven material such as glass is used to maintain the gap length. They are joined as a head via the magnetic material 5.

本実施例の複合磁気ヘツドは、前記したラツピ
ング加工に引続いて、その後、メカノケミカル、
ケミカルエツチング、スパツタ装置等によるエツ
チングによつて、表面の加工変質層を除去する。
更にその後、その面7,7上に面内異方性の強い
強磁性材(例えば、Ni−Fe系合金、非晶質系合
金)をスパツタ等の装置にて被着形成させ第1の
強磁性薄膜3,3を形成し、その上部に、面内異
方性が前記第1の強磁性薄膜より十分に低い強磁
性材であるセンダスト合金(例えば、Fe−Al−
Si系合金、Fe−Si系合金)を被着形成し、強磁
性薄膜4,4を形成する。
The composite magnetic head of this example was manufactured using mechanochemical,
The damaged layer on the surface is removed by chemical etching, etching using a sputtering device, etc.
Furthermore, after that, a ferromagnetic material with strong in-plane anisotropy (for example, Ni-Fe alloy, amorphous alloy) is deposited on the surfaces 7, 7 using a device such as a sputter, and a first strong Magnetic thin films 3, 3 are formed, and a sendust alloy (for example, Fe-Al-
ferromagnetic thin films 4, 4 are formed.

上述のように2層の強磁性薄膜を被着した2つ
のコア1,2を、ギヤツプ長に相当する厚みをも
つSiO等の非磁性材5を介して、強磁性薄膜のあ
る面を相接するようにし、磁気ヘツドを構成す
る。上記強磁性薄膜は、必要に応じアニール処理
を行い特性を向上させることもできる。
As described above, the two cores 1 and 2 coated with two layers of ferromagnetic thin film are connected to each other with the surfaces on which the ferromagnetic thin film is located via a non-magnetic material 5 such as SiO having a thickness corresponding to the gap length. and configure the magnetic head. The above-mentioned ferromagnetic thin film can also be annealed to improve its characteristics, if necessary.

このような構成にすることで、フエライト、強
磁性薄膜間に、連続的な磁気的特性が得られ、界
面に非磁性または著しく磁気的特性の劣化した層
の形成をなくすことができる。
With such a configuration, continuous magnetic properties can be obtained between the ferrite and the ferromagnetic thin film, and formation of a nonmagnetic layer or a layer with significantly deteriorated magnetic properties at the interface can be avoided.

以上の構成の磁気ヘツドにおいて再生出力に対
する周波数特性は第2図bに示すようになり、ま
た孤立再生波形は第3図bに示すようになり、ギ
ヤツプ部による記録再生のみに限ることができ、
本来の特徴である高保磁力媒体をも充分に記録再
生できるという優れた効果を呈した。
In the magnetic head with the above configuration, the frequency characteristics with respect to the reproduction output are as shown in FIG. 2b, and the isolated reproduction waveform is as shown in FIG.
It exhibited the excellent effect of being able to sufficiently record and reproduce even high coercive force media, which is an original feature.

発明の効果 本発明の磁気ヘツドはフエライト基板の表面を
ラツピング加工する際等に発生する変質層を除去
し、その上に異方性の大きい第1の強磁性薄膜を
被着し、さらにその上に異方性の小さい第2の強
磁性薄膜を被着させたため、記録再生特性におい
て、うねりの発生もなく、また波形歪も少く、実
用上極めて有効なるものである。
Effects of the Invention The magnetic head of the present invention removes the altered layer that occurs when lapping the surface of the ferrite substrate, coats the first ferromagnetic thin film with large anisotropy on top of the altered layer, and then Since the second ferromagnetic thin film with small anisotropy is coated on the recording/reproducing characteristics, there is no waviness and there is little waveform distortion, which is extremely effective in practice.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の一実施例の磁気ヘツドの側面
図、第2図は従来の複合磁気ヘツドおよび本発明
の一実施例の複合磁気ヘツドにおける周波数うね
りを説明するための周波数特性曲線図、第3図は
同複合磁気ヘツドの波形歪を示す特性曲線図であ
る。 1…第1のコア、2…第2のコア、3…第1の
強磁性薄膜、4…第2の強磁性薄膜、5…ギヤツ
プ、6…コイル。
FIG. 1 is a side view of a magnetic head according to an embodiment of the present invention, and FIG. 2 is a frequency characteristic curve diagram for explaining frequency waviness in a conventional composite magnetic head and a composite magnetic head according to an embodiment of the present invention. FIG. 3 is a characteristic curve diagram showing waveform distortion of the composite magnetic head. DESCRIPTION OF SYMBOLS 1...First core, 2...Second core, 3...First ferromagnetic thin film, 4...Second ferromagnetic thin film, 5...Gap, 6...Coil.

Claims (1)

【特許請求の範囲】 1 ギヤツプ部を挟むコアの対向面表面の加工変
質層を除去した後、その表面に第1の強磁性薄膜
を被着形成し、更にその上に異方性が前記第1の
強磁性薄膜より小さい第2の強磁性薄膜を被着形
成することを特徴とする磁気ヘツドの製造方法。 2 ギヤツプ部を挟むコアの対向面表面の加工変
質層をエツチング処理により除去した後、その表
面に第1の強磁性薄膜を被着形成し、更にその上
に異方性が前記第1の強磁性薄膜より小さい第2
の強磁性薄膜を被着形成することを特徴とする特
許請求の範囲第1項に記載の磁気ヘツドの製造方
法。 3 フエライト製のコアにFe−Ni合金薄膜を被
着形成し、その上にセンダスト合金薄膜を被着形
成することを特徴とする特許請求の範囲第1項ま
たは第2項に記載の磁気ヘツドの製造方法。
[Scope of Claims] 1. After removing the process-affected layer on the surface of the opposing surface of the core sandwiching the gap portion, a first ferromagnetic thin film is deposited on the surface, and further anisotropy is applied to the first ferromagnetic thin film. A method of manufacturing a magnetic head, comprising depositing a second ferromagnetic thin film smaller than the first ferromagnetic thin film. 2. After removing the process-affected layer on the surface of the opposing surface of the core sandwiching the gap portion by etching, a first ferromagnetic thin film is deposited on the surface, and further anisotropy is formed on the surface of the first ferromagnetic thin film. The second smaller than the magnetic thin film
2. A method of manufacturing a magnetic head according to claim 1, further comprising depositing a ferromagnetic thin film. 3. A magnetic head according to claim 1 or 2, characterized in that an Fe-Ni alloy thin film is deposited on a ferrite core, and a sendust alloy thin film is deposited thereon. Production method.
JP61237307A 1986-10-06 1986-10-06 Production of magnetic head Granted JPS6391811A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61237307A JPS6391811A (en) 1986-10-06 1986-10-06 Production of magnetic head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61237307A JPS6391811A (en) 1986-10-06 1986-10-06 Production of magnetic head

Publications (2)

Publication Number Publication Date
JPS6391811A JPS6391811A (en) 1988-04-22
JPH0519762B2 true JPH0519762B2 (en) 1993-03-17

Family

ID=17013427

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61237307A Granted JPS6391811A (en) 1986-10-06 1986-10-06 Production of magnetic head

Country Status (1)

Country Link
JP (1) JPS6391811A (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5038242A (en) * 1988-05-13 1991-08-06 Citizen Watch Co., Ltd. Magnetic head containing a barrier layer
JPH0254405A (en) * 1988-08-18 1990-02-23 Matsushita Electric Ind Co Ltd magnetic head
JPH02146103A (en) * 1988-11-28 1990-06-05 Mitsumi Electric Co Ltd Composite magnetic head and production thereof

Also Published As

Publication number Publication date
JPS6391811A (en) 1988-04-22

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