JPH0520854B2 - - Google Patents
Info
- Publication number
- JPH0520854B2 JPH0520854B2 JP60060652A JP6065285A JPH0520854B2 JP H0520854 B2 JPH0520854 B2 JP H0520854B2 JP 60060652 A JP60060652 A JP 60060652A JP 6065285 A JP6065285 A JP 6065285A JP H0520854 B2 JPH0520854 B2 JP H0520854B2
- Authority
- JP
- Japan
- Prior art keywords
- discharge
- cathode
- anode
- vacuum container
- auxiliary
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000004140 cleaning Methods 0.000 claims description 28
- 239000007789 gas Substances 0.000 claims description 21
- 238000010438 heat treatment Methods 0.000 claims description 8
- 150000002500 ions Chemical class 0.000 description 11
- 230000000694 effects Effects 0.000 description 6
- 230000000087 stabilizing effect Effects 0.000 description 6
- 238000004544 sputter deposition Methods 0.000 description 5
- 238000010891 electric arc Methods 0.000 description 3
- 238000007788 roughening Methods 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 230000003746 surface roughness Effects 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 1
- 239000010406 cathode material Substances 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 238000001878 scanning electron micrograph Methods 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 230000002123 temporal effect Effects 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Physical Or Chemical Processes And Apparatus (AREA)
- Physical Vapour Deposition (AREA)
- Electron Tubes For Measurement (AREA)
Description
本発明は、真空容器や真空容器内の被洗浄物と
電極との間でグロー放電によりプラズマを発生さ
せてガス出しを行う放電洗浄装置に係り、特に、
真空容器の内面を荒らさず、汚染せず、かつ器壁
を高温に加熱することなく、短時間でガス出しを
行うに好適な放電洗浄装置に関する。
The present invention relates to a discharge cleaning device that generates plasma by glow discharge between a vacuum container or an object to be cleaned in the vacuum container and an electrode to release gas, and in particular,
The present invention relates to a discharge cleaning device suitable for releasing gas in a short time without damaging or contaminating the inner surface of a vacuum container and without heating the container wall to a high temperature.
従来、この種の放電洗浄装置では、K.E.K（高
エネルギー研究所）レポート、82−２、P.17〜
21、「超高真空装置の製作」、酒井、鈴木、堀米著
や、実願昭54−52387号にあるように、真空容器
に陽電極を設け、真空容器を陰極とし、両極間で
グロー放電を発生させる方法がある。第３図は、
この従来のグロー放電洗浄装置の説明図である。
真空容器１２を排気装置１１により真空排気しな
がら、バルブ１３を介してガスボンベ１４から放
電ガスを導入し、真空容器内を１〜102Pa程度の
圧力に保つ。圧力が安定したところで、陽極１６
に、500V以上の高電圧を、安定化抵抗７１を介
して放電電源７２により印加し、接地した真空容
器１２との間でグロー放電によりプラズマを発生
させる。一旦放電が発生すると、陽極電位は
300V程度となる。
この時発生したプラズマの電位は、陽極の電位
と殆ど同じである。そのため、プラズマ中のイオ
ンは、300V以上の電圧で加速されて壁面に衝突
して激しいスパツタリングをおこし、容器内面を
荒らしてしまうという問題があつた。また、この
方式の放電では、イオンが容器壁に衝突して容器
壁から２次電子を放出させ、この２次電子が気体
電離してまた新たなイオンを生成することによ
り、放電が維持されている。そのため、容器壁の
表面に微細な針状の突起など放電しやすい部分が
あると、その部分の２次電子の放出が多くなつて
ますます放電が集中し、ついにはその部分が温度
上昇してアーク放電となつていわゆるアークスポ
ツト（点弧）が形成され、容器内面を荒らしてし
まうという問題があつた。さらに、10-1Pa以下
の低い圧力では中性ガスの数が減少するため電離
が行われにくくなり、安定な放電の維持が困難で
あつた。
また、特開昭57−170493号や特公昭58−33009
号のように、真空容器内に設けた陽極と陰極間で
アーク放電を発生させ、その際生ずる熱によつて
容器を加熱し、ガス出しを行う方法がある。この
方法では、真空容器内壁の電位は、放電で発生し
たプラズマと殆ど同電位になるため、イオンは拡
散によつてのみ壁面に達し、壁面をスパツタリン
グすることはなく、また、真空容器を陰極とはせ
ず、個別に陰極を取り付けているため、容器内面
がアークスポツトにより荒れることもないが、陰
極はアーク放電により高温に加熱されるため、陰
極材が融解、蒸発して容器内壁を汚染するという
問題がある。また、アークプラズマの熱によつ
て、真空容器内に接地した精密部品や非耐熱性部
品が変形変質してしまうという問題がある。
Conventionally, in this type of discharge cleaning equipment, KEK (High Energy Research Institute) Report, 82-2, P.17~
21, "Production of Ultra-High Vacuum Equipment", written by Sakai, Suzuki, and Horime, and as described in Jitsugan No. 52387/1987, a positive electrode is provided in a vacuum container, the vacuum container is used as a cathode, and a glow discharge is generated between the two electrodes. There is a way to generate Figure 3 shows
It is an explanatory view of this conventional glow discharge cleaning device.
While the vacuum container 12 is evacuated by the exhaust device 11, a discharge gas is introduced from the gas cylinder 14 through the valve 13, and the inside of the vacuum container is maintained at a pressure of about 1 to 10 2 Pa. Once the pressure has stabilized, the anode 16
Then, a high voltage of 500 V or more is applied by a discharge power source 72 through a stabilizing resistor 71, and plasma is generated by glow discharge between it and the grounded vacuum vessel 12. Once the discharge occurs, the anode potential is
The voltage will be around 300V. The potential of the plasma generated at this time is almost the same as the potential of the anode. As a result, the ions in the plasma are accelerated by voltages of 300 V or more and collide with the walls, causing severe sputtering and damaging the inner surface of the container. In addition, in this type of discharge, ions collide with the container wall and emit secondary electrons from the container wall, and these secondary electrons ionize the gas and generate new ions, thereby maintaining the discharge. There is. Therefore, if there is a part on the surface of the container wall that is prone to discharge, such as minute needle-like protrusions, more secondary electrons will be emitted from that part, and the discharge will become more concentrated, which will eventually cause the temperature of that part to rise. There was a problem in that so-called arc spots (ignitions) were formed as a result of arc discharge, and the inner surface of the container was roughened. Furthermore, at low pressures below 10 -1 Pa, the number of neutral gases decreases, making it difficult for ionization to occur, making it difficult to maintain stable discharge. Also, JP-A No. 57-170493 and JP-A No. 58-33009
There is a method in which an arc discharge is generated between an anode and a cathode provided in a vacuum container, and the container is heated by the heat generated at that time to release gas. In this method, the potential of the inner wall of the vacuum container is almost the same as that of the plasma generated by the discharge, so ions reach the wall only by diffusion, without sputtering the wall, and the vacuum container is used as a cathode. Since the cathode is installed separately without any damage, the inner surface of the container will not be damaged by arc spots, but as the cathode is heated to high temperatures by arc discharge, the cathode material will melt and evaporate, contaminating the inner wall of the container. There is a problem. Further, there is a problem in that precision parts and non-heat resistant parts grounded within the vacuum container are deformed and deteriorated by the heat of the arc plasma.
本発明は、上述の事柄にもとづいてなされたも
ので、真空容器や部品の表面を荒らさず、汚染せ
ず、かつ高温に加熱することなく、短時間でガス
出しを行える放電洗浄装置を提供することを目的
とする。
The present invention has been made based on the above-mentioned matters, and provides a discharge cleaning device that can discharge gas in a short time without roughening or contaminating the surface of a vacuum container or parts, and without heating to high temperatures. The purpose is to
本発明は上記目的を達成するために、真空容器
もしくは真空容器内の被洗浄物を陰極とし、前記
真空容器内に設けられた陰極との間でグロー放電
によりプラズマを発生させてガス出しする放電洗
浄装置において、前記真空容器内には前記陽極に
近接して前記陰極電位以下の電位とした補助陰極
を設け、前記陽極と前記補助陰極間でグロー放電
発生に必要な電位差を与えて補助放電を発生させ
この補助放電で生成した電子を前記真空容器内に
供給し、この供給された電子に前記陰極と前記陽
極間でのグロー放電の電離をになわせることによ
り該グロー放電を発生させ、持続させるものであ
る。
In order to achieve the above object, the present invention uses a vacuum container or an object to be cleaned in the vacuum container as a cathode, and generates plasma by glow discharge between the cathode provided in the vacuum container and discharges gas. In the cleaning device, an auxiliary cathode is provided in the vacuum container in the vicinity of the anode and has a potential lower than the cathode potential, and a potential difference necessary for generating a glow discharge is provided between the anode and the auxiliary cathode to generate an auxiliary discharge. The electrons generated by the auxiliary discharge are supplied into the vacuum container, and the supplied electrons are caused to ionize the glow discharge between the cathode and the anode, thereby generating and sustaining the glow discharge. It is something that makes you
陽極と補助陰極とからなる電極内の補助放電に
より、常時プラズマを発生させ、このプラズマ中
の電子を、前記陽極と補助陰極間の電位差で空間
へ放出させて気体を電離することにより、真空容
器と陽極間のグロー放電の持続を助ける。このた
め、真空容器と陽極間のグロー放電は、圧力が低
い雰囲気においても、低い電圧で発生し、維持で
きるようになつた。よつて、エネルギーの低いイ
オンで洗浄ができるため、スパツタリングによる
表面荒れを防止できると共に、真空容器や真空容
器内の被洗浄物を高温に加熱することがない。ま
た、容器壁から放出される２次電子の放出に頼ら
なくても放電が維持できるため、アークスポツト
による表面荒れもない。さらに、低い電圧での安
定な放電が可能なため、イオンによつてたたき出
されたガスの真空容器壁への再付着が少なくな
り、短時間で洗浄効果があがる。
Plasma is constantly generated by an auxiliary discharge within an electrode consisting of an anode and an auxiliary cathode, and electrons in this plasma are emitted into space by the potential difference between the anode and auxiliary cathode to ionize the gas. This helps sustain the glow discharge between the anode and the anode. Therefore, glow discharge between the vacuum container and the anode can now be generated and maintained at a low voltage even in a low pressure atmosphere. Therefore, since cleaning can be performed with low-energy ions, surface roughening due to sputtering can be prevented, and the vacuum container and the object to be cleaned in the vacuum container are not heated to high temperatures. Further, since the discharge can be maintained without relying on the emission of secondary electrons emitted from the container wall, there is no surface roughness due to arc spots. Furthermore, since stable discharge can be performed at a low voltage, the gas ejected by ions is less likely to re-adhere to the wall of the vacuum container, and the cleaning effect can be improved in a short time.
第１図は本発明装置の全体構成で、排気装置
１、真空容器２、バルブ３、ガスボンベ４、被洗
浄物導入口５および電極部６により構成されてい
る。第２図は本発明における電極部６を示す。本
電極部６は、陰極６５と補助陰極である熱陰極６
１で構成されている。真空容器２は接地してい
る。陽極６５は、安定化抵抗６６を介して陽極電
源６７に接続され、接地電位に対してプラスの電
圧がかけられるようになつている。熱陰極６１
は、加熱陽電源６２によつて加熱され、さらに、
安定化抵抗６３を介して補助陰極電源６４に接続
され、接地電位に対してマイナスの電位がかけら
れるようになつている。
本実施例では、真空容器２はステンレス製で、
放電用ガスにはアルゴンガス、熱陰極６１はトリ
エーテツドタングステン線、陽極６５はステンレ
ス製金網である。また、本実施例では、熱陰極６
１の加熱温度は1500℃前後、熱陰極６１と陽極６
５の間の電位差は280V、陽極６５と真空容器２
の間の電位差は50〜300V、放電洗浄時間は３〜
６時間とした。
排気装置１で排気しながらバルブ３より放電用
ガスを導入し、真空容器２内の圧力を５×
10-1Pa程度とする。次に、熱陰極６１を加熱陽
電源６２で加熱して熱電子を放出させると共に補
助陰極電源６４により熱陰極６１と陰極６５の間
に電圧を印加すると、両極間にグロー放電が発生
し、プラズマが生成される。この状態で、陰極電
源６７により陽極６５と真空容器２のあいだに電
圧を印加する。すでに熱陰極６１と陽極６５の放
電により発生した多量のエネルギーの大きい電子
が陽極６５に設けた貫通孔を通り抜け真空管内に
供給される。この電子に真空容器２と陽極６５間
のグロー放電をになわせることにより、５×
10-1Paと低い圧力でしかもグロー放電の発生に
必要な電圧よりも低い電圧でグロー放電で発生す
ると共に安定に維持され、そしてこの放電で発生
したイオンがプラズマ電位により加速されて壁面
に衝突し、表面を洗浄する。
このように、本実施例では真空容器２と陽極６
５間の電位差を従来より小さくすることができる
ためエネルギーの低いイオンで洗浄ができ、よつ
てスパツタリングによる表面荒れを防止できると
共に、真空容器２を高温に加熱することはない。
また、従来の方式では、放電の維持に必要な電子
は真空容器壁から放出される２次電子のみであつ
たが、本実施例では電極部６から電子を供給して
いるため放電が局部的に集中せず、よつてアーク
スポツトによる表面荒れがない。さらに、電子が
多く存在するため、低い圧力でも安定な放電が可
能となつた。このために、イオンによつてたたき
出されたガスの容器壁への再付着が少なくなり、
短時間で洗浄効果があがる。
第４図は本発明に係る装置の排気特性である。
破線３１は単に排気を行つただけの場合の圧力の
時間変化であり、実線３２は本発明の装置で放電
洗浄を行つた場合のものである。実線３２におい
て一度圧力が上昇しているのは、放電用ガスを導
入すると共に放電により表面の汚染物質が容器内
へ放出されているためである。放電終了直後から
圧力が急激に減少することがわかる。放電を行わ
なかつた場合、３×10-7Pa・m3／sec・m3の放出
ガス速度までさがるのに60時間かかつたが本発明
に係る装置で放電洗浄を行うと、その約７分の１
の8.5時間で達成できる。
第５図は従来の装置による放電洗浄を行つた場
合ａと本発明に係る装置による放電洗浄を行つた
場合ｂの真空容器壁面の走査型電子顕微鏡写真で
ある。これを見ると従来の装置ａでは、表面の荒
れが見えるが、本発明に係る装置ｂでは荒れは見
えないことが明らかである。
他の実施例としては電極部で陰極放電など他の
放電によりプラズマを生成して同様の効果を出す
ことができる。又電源部に直流電源ばかりでなく
高周波電源又は両者の重ね合わせあるいは併用す
ることもできる。
FIG. 1 shows the overall configuration of the apparatus of the present invention, which includes an exhaust device 1, a vacuum container 2, a valve 3, a gas cylinder 4, an object to be cleaned inlet 5, and an electrode part 6. FIG. 2 shows the electrode section 6 in the present invention. The main electrode section 6 includes a cathode 65 and a hot cathode 6 which is an auxiliary cathode.
It consists of 1. The vacuum container 2 is grounded. The anode 65 is connected to an anode power supply 67 via a stabilizing resistor 66, so that a positive voltage is applied to the anode 65 with respect to the ground potential. hot cathode 61
is heated by the heating positive power source 62, and further,
It is connected to an auxiliary cathode power supply 64 via a stabilizing resistor 63, so that a negative potential with respect to the ground potential is applied. In this embodiment, the vacuum container 2 is made of stainless steel,
The discharge gas is argon gas, the hot cathode 61 is a thoriated tungsten wire, and the anode 65 is a stainless steel wire mesh. In addition, in this embodiment, the hot cathode 6
1 heating temperature is around 1500℃, hot cathode 61 and anode 6
The potential difference between 5 is 280V, anode 65 and vacuum vessel 2
The potential difference between them is 50~300V, and the discharge cleaning time is 3~
It was set as 6 hours. While exhausting with the exhaust device 1, discharge gas is introduced from the valve 3, and the pressure inside the vacuum container 2 is increased to 5x.
It should be about 10 -1 Pa. Next, when the hot cathode 61 is heated by the heating positive power source 62 to emit thermoelectrons and a voltage is applied between the hot cathode 61 and the cathode 65 by the auxiliary cathode power source 64, a glow discharge is generated between the two electrodes, and plasma is generated. is generated. In this state, a voltage is applied between the anode 65 and the vacuum vessel 2 by the cathode power supply 67. A large amount of high-energy electrons already generated by the discharge of the hot cathode 61 and the anode 65 pass through the through hole provided in the anode 65 and are supplied into the vacuum tube. By causing these electrons to cause a glow discharge between the vacuum container 2 and the anode 65, 5×
Glow discharge is generated at a low pressure of 10 -1 Pa, which is lower than the voltage required to generate glow discharge, and is maintained stably, and the ions generated by this discharge are accelerated by the plasma potential and collide with the wall surface. and clean the surface. In this way, in this embodiment, the vacuum vessel 2 and the anode 6
Since the potential difference between the vacuum chambers 5 and 5 can be made smaller than before, cleaning can be performed with low-energy ions, and surface roughening due to sputtering can be prevented, and the vacuum container 2 is not heated to high temperatures.
In addition, in the conventional method, the only electrons necessary to maintain the discharge were secondary electrons emitted from the wall of the vacuum vessel, but in this embodiment, the electrons are supplied from the electrode section 6, so that the discharge is localized. Therefore, there is no surface roughness caused by arc spots. Furthermore, because there are many electrons, stable discharge is possible even at low pressures. For this reason, the gas ejected by ions is less likely to re-deposit on the container wall.
The cleaning effect increases in a short time. FIG. 4 shows the exhaust characteristics of the device according to the present invention.
The broken line 31 shows the change in pressure over time when only evacuation was performed, and the solid line 32 shows the change in pressure when discharge cleaning was performed using the apparatus of the present invention. The reason why the pressure increases once at the solid line 32 is because the discharge gas is introduced and the contaminants on the surface are discharged into the container due to the discharge. It can be seen that the pressure decreases rapidly immediately after the end of discharge. When no discharge was performed, it took 60 hours to reduce the released gas velocity to 3×10 -7 Pa・m 3 /sec・m 3 , but when discharge cleaning was performed with the device according to the present invention, about 7 hours was required. one part
It can be achieved in 8.5 hours. FIG. 5 is a scanning electron micrograph of the wall surface of a vacuum vessel in case (a) where discharge cleaning was performed using a conventional device and in case (b) where discharge cleaning was performed using the device according to the present invention. Looking at this, it is clear that in the conventional device a, roughness on the surface is visible, but in the device b according to the present invention, no roughness is visible. As another embodiment, the same effect can be achieved by generating plasma by other discharge such as cathode discharge in the electrode section. In addition, the power source may be a high-frequency power source in addition to a DC power source, or a combination of the two or a combination of both may be used.
以上説明したように、本発明によれば、低圧力
雰囲気で低エネルギーイオンによる安定した放電
洗浄が行え、このため、真空容器や真空容器内の
被洗浄物をスパツタリングやアークスポツトで荒
らすこと、高温に加熱して部品を変形、変質させ
てしまうこと、電極材が真空容器を汚染すること
がなく、さらに短時間で洗浄効果をあげることが
できる。
As explained above, according to the present invention, stable discharge cleaning can be performed using low-energy ions in a low-pressure atmosphere. Therefore, it is possible to perform stable electrical discharge cleaning using low-energy ions in a low-pressure atmosphere, and it is therefore possible to prevent the vacuum vessel or the object to be cleaned in the vacuum vessel from being damaged by sputtering or arc spotting, or by high-temperature cleaning. There is no need to heat the parts to cause deformation or deterioration, and the electrode material does not contaminate the vacuum container, and the cleaning effect can be improved in a short time.
第１図は本発明に係る装置の実施例の真空排気
系、第２図は電極部の詳細図、第３図は従来のグ
ロー放電洗浄装置の系統図、第４図は本発明に係
る装置と従来のものの排気特性の比較図、第５図
ａは従来の装置における真空容器壁面の洗浄後の
電子顕微鏡写真、第５図ｂは本発明に係る装置の
真空容器壁面の洗浄後の電子顕微鏡写真である。
１……排気装置、２……真空容器、３……バル
ブ、４……ガスボンベ、５……部品導入口、６…
…電極部、１１……排気装置、１２……真空容
器、１３……バルブ、１４……ガスボンベ、１５
……部品導入口、１６……陽極、３１……排気を
行つただけの場合の圧力の時間変化（排気特性）、
３２……本発明に係る装置で放電洗浄を行つた場
合の圧力の時間変化（排気特性）、６１……熱陰
極（補助陰極）、６２……加熱用電源、６３……
安定化抵抗、６４……補助陰極電源、６５……陽
極、６６……安定化抵抗、６７……陽極電源、７
１……安定化抵抗、７２……放電電源。
Fig. 1 is a vacuum evacuation system of an embodiment of the apparatus according to the present invention, Fig. 2 is a detailed view of the electrode section, Fig. 3 is a system diagram of a conventional glow discharge cleaning apparatus, and Fig. 4 is an apparatus according to the present invention. Figure 5a is an electron microscope photograph of the vacuum vessel wall surface after cleaning in the conventional device, and Figure 5b is an electron microscope photograph of the vacuum vessel wall surface in the device according to the present invention after cleaning. It's a photo. 1... Exhaust device, 2... Vacuum container, 3... Valve, 4... Gas cylinder, 5... Parts inlet, 6...
... Electrode part, 11 ... Exhaust device, 12 ... Vacuum container, 13 ... Valve, 14 ... Gas cylinder, 15
...Parts introduction port, 16...Anode, 31...Time change in pressure when only evacuation is performed (exhaust characteristics),
32... Temporal change in pressure (exhaust characteristics) when performing discharge cleaning with the apparatus according to the present invention, 61... Hot cathode (auxiliary cathode), 62... Heating power source, 63...
Stabilizing resistor, 64... Auxiliary cathode power source, 65... Anode, 66... Stabilizing resistor, 67... Anode power source, 7
1... Stabilizing resistor, 72... Discharge power source.
Claims (1)
極とし、前記真空容器内に設けられた陽極との間
でグロー放電によりプラズマを発生させてガス出
しする放電洗浄装置において、前記真空容器内に
は前記陽極に近接して前記陰極電位以下の電位と
した補助陰極を設け、前記陽極と前記補助陰極間
でグロー放電発生に必要な電位差を与えて補助放
電を発生させ、この補助放電で生成した電子を前
記真空容器内に供給し、この供給された電子に前
記陰極と前記陽極間でのグロー放電の電離をにな
わせることにより該グロー放電を発生させ、持続
させることを特徴とする放電洗浄装置。 ２ 陽極に貫通孔を設けたことを特徴とする特許
請求の範囲第１項記載の放電洗浄装置。 ３ 真空容器を接地したことを特徴とする特許請
求の範囲第１項記載の放電洗浄装置。 ４ 補助陰極を加熱する装置を設け、加熱により
熱電子を放出させる熱陰極を補助陰極としたこと
を特徴とする特許請求の範囲第１項記載の放電洗
浄装置。[Scope of Claims] 1. A discharge cleaning device that uses a vacuum container or an object to be cleaned in the vacuum container as a cathode, and generates plasma and gases by glow discharge between the cathode and an anode provided in the vacuum container, An auxiliary cathode is provided in the vacuum container in the vicinity of the anode and has a potential lower than the cathode potential, and a potential difference necessary for generating a glow discharge is applied between the anode and the auxiliary cathode to generate the auxiliary discharge. Electrons generated by the auxiliary discharge are supplied into the vacuum vessel, and the supplied electrons are caused to ionize the glow discharge between the cathode and the anode, thereby generating and sustaining the glow discharge. Characteristic discharge cleaning equipment. 2. The discharge cleaning device according to claim 1, characterized in that a through hole is provided in the anode. 3. The discharge cleaning device according to claim 1, wherein the vacuum container is grounded. 4. The discharge cleaning device according to claim 1, wherein a device for heating an auxiliary cathode is provided, and the auxiliary cathode is a hot cathode that emits thermoelectrons by heating.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60060652A JPS61220262A (en) | 1985-03-27 | 1985-03-27 | Electric discharge cleaning device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60060652A JPS61220262A (en) | 1985-03-27 | 1985-03-27 | Electric discharge cleaning device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61220262A JPS61220262A (en) | 1986-09-30 |
| JPH0520854B2 true JPH0520854B2 (en) | 1993-03-22 |
Family
ID=13148476
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60060652A Granted JPS61220262A (en) | 1985-03-27 | 1985-03-27 | Electric discharge cleaning device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61220262A (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01170893A (en) * | 1987-12-26 | 1989-07-05 | Japan Atom Energy Res Inst | Glow discharge device |
| JPH04306546A (en) * | 1991-04-01 | 1992-10-29 | Kokusai Electric Co Ltd | DC glow discharge cleaning electrode |
-
1985
- 1985-03-27 JP JP60060652A patent/JPS61220262A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61220262A (en) | 1986-09-30 |
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| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |