JPH0520994B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a semiconductor electrostatic motor that generates drive torque by skillfully controlling charges in a semiconductor. This semiconductor electrostatic motor can have an electronic circuit section including a control circuit and a stator formed as the same semiconductor integrated circuit element, and has a structure that is theoretically simpler and smaller than an electromagnetic motor or an ultrasonic motor. Therefore, it can be used in motors incorporated in electronic watches, light-related parts that require minute angle control, and servo motors. It is also suitable for use in environments where electromagnetic noise and magnetic fields exist. This semiconductor electrostatic motor is based on a new principle of controlling the charge in a semiconductor to obtain driving torque.

[Summary of the invention]

The semiconductor electrostatic motor according to the present invention is of a type in which a rotor is rotated by Coulomb force obtained by skillfully controlling charges in a semiconductor.
In particular, multiple rotors made of semiconductors are arranged concentrically to obtain multiple rotational outputs.

[Conventional technology]

Electromagnetic motors and electrostatic motors that utilize dielectric polarization or electrets have been known for a long time.

[Problem that the invention seeks to solve]

(a) A small electromagnetic motor is installed in, for example, a watch. Electromagnetic motors have a problem in that they are affected by external magnetic fields, causing fluctuations in load, resulting in a decrease in clock accuracy. Furthermore, electromagnetic servo motors also have the problem that their rotation angle and response speed are adversely affected by external magnetic fields.

(b) When the rotor of a conventional electromagnetic motor is constructed of permanent magnets, the mass increases and the inertia force increases, resulting in a problem of poor responsiveness to speed control.

(c) Since conventional electromagnetic motors require coils, they must be wired to electronic circuits including control circuits, which limits miniaturization and increases manufacturing costs.

(d) Conventional electromagnetic motors and electrostatic motors have the problem of being difficult to integrate and impossible to integrate with semiconductor integrated circuit elements. It cannot be systemized as a single element including the motor and control circuit.

(e) Conventional electrostatic motors have electrodes or channels made of dielectric material in the rotor and stator. However, there was a problem in that the boundary structure of individual electrodes or channels could not be clarified functionally.

(f) Conventional electromagnetic motors and electrostatic motors use metal or insulating materials for the rotor shaft and stator bearings. However, these materials have the problem of not being able to efficiently utilize the electric charge generated in the motor.

(g) In the structure of conventional electromagnetic motors and electrostatic motors, lubricating oil was used to reduce the coefficient of friction between the rotor shaft and stator bearing. However, there is a problem in that lubricating oil is inconvenient to handle.

(h) As mentioned above, electromagnetic motors are used in wristwatches, for example. In this case, a plurality of gears were connected to the rotor shaft, and an indicator hand was attached to the gear shaft. For this reason, the total number of parts was close to 100, which caused various problems in terms of design, quality, accuracy, cost, etc.

(i) With conventional electromagnetic motors and electrostatic motors, it is structurally difficult to incorporate multiple rotors concentrically. Therefore, like a clock with a hand display,
The problem was that it was not suitable for obtaining multiple rotational outputs from concentric shafts.

(j) Conventional electrostatic motors use dielectric polarization or electrets, which causes dielectric breakdown between the rotor and stator, resulting in a short service life. Furthermore, due to poor conversion efficiency, there was a problem that driving torque at a practical level could not be obtained when downsized.

[Means for solving problems]

In view of the above-mentioned problems of the conventional technology, it is an object of the present invention to provide a novel motor that has a long life, can be miniaturized, and can provide high drive torque.
Another object of the present invention is to provide a motor that can concentrically obtain multiple rotational outputs. In order to achieve this objective, the following measures were taken. That is, the semiconductor electrostatic motor according to the present invention includes first and second rotors 31 and 32, first and second stators 21 and 22, and voltage application means 11 and 12. The first and second rotors 31 and 32 and the first and second stators 21 and 22 have poles on their outer peripheries, and at least one of them is made of a semiconductor. The first rotor 31 and the second rotor 32 are arranged coaxially, and the first stator 21 and the second rotor 32 are arranged coaxially.
The stator 22 is rotatably supported opposite to the stator 22 via a gap. voltage application means 11,
12 applies voltage to the first and second stators 21 and 22 to generate driving torque.

Preferably, the rotor axes of the first and second rotors are arranged concentrically. More preferably, an annular protrusion 52 is formed at the base end of one of the rotor shafts 53. More preferably, convex portions 6 are formed on the rotation planes of the plurality of rotors. More preferably, rotor shafts 51 and 53 of the plurality of rotors, bearings 111 and 112,
The gap material 7 between the rotor shaft and the bearing is made of an intrinsic semiconductor. In addition, by attaching the display hands 9 and 10 to the rotor shaft of each of the plurality of rotors, an extremely simplified timepiece device can be obtained.

In order to provide an understanding of the present invention, its characteristics are listed below.

(a) The semiconductor electrostatic motor according to the present invention obtains driving torque by controlling the charge in the semiconductor to induce Coulomb force. Therefore, it has the characteristic of not being affected by magnetic fields.

(b) The material of the rotor can be composed mainly of Si, for example. It is lighter than heavy metals such as samarium cobalt used in conventional electromagnetic motor rotor materials and can suppress inertia.

(c) By constructing the stator with a semiconductor material, it can be incorporated as a part of a semiconductor integrated circuit element. Therefore, the wiring of the stator electrodes and the peripheral circuit configuration can be realized using the same printing technology.

(d) In order to partition each channel or electrode formed in the rotor and stator, use an intrinsic semiconductor that is difficult to cause dielectric polarization and has a large work function.

(e) Conversion efficiency is increased by using intrinsic semiconductors that are resistant to dielectric polarization and have a large work function for the bearings formed on the rotor shaft and stator, and for the gap material between the rotor shaft and bearings.

(f) By using ultrafine particles on the order of microns, which are close to a perfect sphere, as the gap material, the distance between the rotor and stator is kept constant, and torque loss is prevented by supporting the rotor shaft with rolling friction.

(g) By attaching display hands directly to the multiple rotor shafts of this semiconductor electrostatic motor, the number of parts can be kept to 20 or less when used in a wristwatch.

(h) By creating a concentric structure in which the center of rotation of one rotor shaft is hollowed out and the other rotor shaft is inserted through a pair of rotors arranged coaxially with each other, different rotational outputs can be obtained simultaneously. can.

[Effect]

According to the present invention, the semiconductor electrostatic motor is not affected by magnetic fields. Also, speed responsiveness is improved. Manufacture of the stator becomes easy. The charges stored in the rotor and stator can be used efficiently. By controlling the gap to a constant level, fluctuations in the Coulomb force acting between the rotor and stator can be suppressed. Since it is constructed using semiconductor materials, productivity is dramatically improved.

〔Example〕

Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 shows an embodiment of a semiconductor electrostatic motor according to the present invention, and is a longitudinal sectional view taken along its rotation axis. 11 is a first semiconductor integrated circuit element;
An electronic circuit section including a motor control circuit or voltage application means is formed. Reference numeral 21 designates one stator, which is formed in a part of the semiconductor integrated circuit element 11. Reference numeral 31 designates one rotor, which is provided with poles or channels 31C and constitutes a set with the corresponding stator 21. 4 is a spacer made of an intrinsic semiconductor, and after the rotor 31 is assembled into the stator 21 formed in the semiconductor integrated circuit element 11, the semiconductor integrated circuit element 11
Closely contact. At this time, the rotor shaft 51 made of an intrinsic semiconductor is inserted through the central opening of the spacer 4. That is, the rotor 31 is assembled into the recessed portion of the semiconductor integrated circuit element 11 in which the stator 21 is formed, and the spacer 4 is attached as a lid to form a first motor.

32 is the other rotor and channel 32C
Alternatively, poles and a cylindrical rotor shaft 53 are provided. The annular protrusion 52 provided at the base end of the rotor shaft 53 fits into a bearing 112 provided on the surface of the spacer 4 . This bearing 112 is provided on the opposite side of the first motor. The rotor shaft 51 of the first motor passes through the cylindrical rotor shaft 53 and is concentrically aligned with the cylindrical rotor shaft 53 . Reference numeral 12 denotes the other semiconductor integrated circuit element, which is provided with the other stator 22 and also forms an electronic circuit section including a motor control circuit or voltage application means. The semiconductor integrated circuit element 12 on which the stator 22 is formed is assembled so as to overlap the rotor 32 using the spacer 4.
The second motor is configured in close contact with the motor. In this manner, the first motor and the second motor are concentrically aligned to provide multiple rotational outputs.

Reference numeral 6 denotes a convex portion provided on the rotation plane of both rotors, which is made of an intrinsic semiconductor and constitutes a part of the rotor. This rotor convex portion controls the gap with respect to the stator and prevents the rotor from rattling. In addition, it allows efficient disposal of charges accumulated on the rotor and stator. 7 is a gap material, which is composed of ultrafine particles made of an intrinsic semiconductor and having a high degree of sphericity. The gap material 7 is formed between the bearing part 111 made of an intrinsic semiconductor and the rotor shaft 51, and between the other bearing part 12 and the cylindrical rotor shaft 53.
It is interposed between the protrusion 52 and the protrusion 52 . 8 is a pin, which is used to ensure dimensional positioning accuracy when assembling the first motor and the second motor. Furthermore, it also serves as an electrical connection terminal for the pair of semiconductor integrated circuit elements 11 and 12. Reference numeral 9 designates one indicator hand, which is attached to the cylindrical rotor shaft 53 and indicates the rotation angle of the rotor 32. 10
is the other indicator hand, which is attached to the inner rotor shaft 51 and indicates the rotation angle of the rotor 31.

With the above configuration, the first motor and the second
The motors can be arranged concentrically and rotated independently of each other. Further, the first motor and the second motor can be rotated while being related to each other via a signal. In this embodiment, two rotors are installed concentrically, but three or four rotors can also be installed concentrically.

〔Effect of the invention〕

As explained above, according to the present invention, driving force is obtained by incorporating a plurality of rotors made of semiconductor concentrically and controlling their charges, so that various effects listed below can be obtained.

By making one rotor shaft cylindrical, it is possible to integrally configure multiple motors that rotate concentrically, which has the effect of providing multiple rotational outputs and reducing storage space.

By attaching display hands to a plurality of rotor shafts of such a motor to display the rotation angle, there is an effect that a wheel train is not required when used in a wristwatch, for example.

By constructing the rotor shaft, bearing, gap material, convex portion of the rotor rotating surface, etc. from intrinsic semiconductors, there is an effect that electric charges can be used efficiently.

When a semiconductor electrostatic motor having such a structure is used in a wristwatch, for example, the number of parts can be significantly reduced, and significant improvements can be made in terms of quality, precision, and cost.

Since the Coulomb force is obtained by controlling the charge in the semiconductor, it has the effect of significantly improving energy conversion efficiency compared to conventional electrostatic motors using dielectric polarization or electrets. In addition, it has the effect of preventing dielectric breakdown at the gap, which has been a problem in the past, and extending the life.

[Brief explanation of drawings]

FIG. 1 shows an embodiment of a semiconductor electrostatic motor according to the present invention, and is a longitudinal sectional view taken along the rotation center of the motor. 4... Spacer, 6... Rotor convex portion, 7...
...Gap material, 8...Pin, 9...Display needle, 10
... Display hand, 11 ... Semiconductor integrated circuit element, 12
...semiconductor integrated circuit element, 21 ... stator,
22...Stator, 31...Rotor, 32...
... Rotor, 51 ... Rotor shaft, 52 ... Protrusion, 53 ... Rotor shaft, 111 ... Bearing, 1
12...Bearing.

Claims (1)

[Claims] 1. First and second rotors 31, 32;
and a semiconductor electrostatic motor having second stators 21, 22 and voltage applying means 11, 12, the first and second rotors 31, 32 and the first and second stators 21, 22. has a pole on the outer periphery, at least one of which is made of semiconductor, the first rotor 31 and the second rotor 32 are arranged coaxially, and each of the first stator 2
The stator 1 and the second stator 22 are rotatably supported to face each other with a space between them, and the voltage applying means 11 and 12 apply voltage to the first and second stators 21 and 22 to generate a driving torque. A semiconductor electrostatic motor that generates electricity. 2. The semiconductor electrostatic motor according to claim 1, wherein the first rotor 31 and the second rotor 32 have rotor shafts 51 and 53 arranged concentrically. 3. The semiconductor electrostatic motor according to claim 2, wherein one rotor 32 has an annular protrusion 52 formed at the base end of a rotor shaft 53. 4. The semiconductor electrostatic motor according to claim 1, wherein the first and second rotors 31 and 32 have convex portions 6 formed on respective rotation planes. 5. The semiconductor electrostatic motor according to claim 1, wherein the first and second rotors 31, 32 have indicator hands 10, 9 attached to one end of each rotor shaft 51, 53. . 6 The first and second rotors 31 and 32 have rotor shafts 51 and 53, bearings 111 and 112, and a gap material 7 made of an intrinsic semiconductor; The semiconductor electrostatic motor according to claim 1, wherein the semiconductor electrostatic motor is interposed between the part and the bearings 111, 112.