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JPH0521709B2 - - Google Patents
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JPH0521709B2 - - Google Patents

Info

Publication number
JPH0521709B2
JPH0521709B2 JP61274380A JP27438086A JPH0521709B2 JP H0521709 B2 JPH0521709 B2 JP H0521709B2 JP 61274380 A JP61274380 A JP 61274380A JP 27438086 A JP27438086 A JP 27438086A JP H0521709 B2 JPH0521709 B2 JP H0521709B2
Authority
JP
Japan
Prior art keywords
housing
receiver
cup
polishing head
actuator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP61274380A
Other languages
Japanese (ja)
Other versions
JPS63127827A (en
Inventor
Manabu Hisada
Masahiro Tomita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kobe Steel Ltd
Original Assignee
Kobe Steel Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kobe Steel Ltd filed Critical Kobe Steel Ltd
Priority to JP27438086A priority Critical patent/JPS63127827A/en
Publication of JPS63127827A publication Critical patent/JPS63127827A/en
Publication of JPH0521709B2 publication Critical patent/JPH0521709B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)

Description

【発明の詳細な説明】 (産業上の利用分野) 本発明は、電解による陽極の溶出作用とバフ研
摩作用とを複合させ、金属の表面を鏡面に仕上げ
る電解バフ複合研摩装置に係り、詳しくは被研摩
面に対する研摩ヘツドの押付力を自動調整可能に
した電解バフ複合研摩装置に関する。
Detailed Description of the Invention (Field of Industrial Application) The present invention relates to an electrolytic buffing compound polishing device that combines the elution action of an anode through electrolysis and the buffing action to finish the surface of metal into a mirror finish. The present invention relates to an electrolytic buffing compound polishing device that can automatically adjust the pressing force of a polishing head against a surface to be polished.

(従来の技術) この種の電解バフ複合研摩装置は、電解研摩に
より、陽極に接続された被研摩物の表面に生じた
微小凹凸部の不動態化酸化被膜の内、凸部の被膜
のみをバフ或は電解液に混合し砥粒の擦過によつ
て機械的に除去することにより、被研摩面の凸部
に電解を集中させて電解研摩速度を大幅に向上し
て、前記被研摩面の鏡面仕上げを行うものである
が、このような研摩装置の先行技術としては、例
えば特公昭57−49120号公報に記載されたものが
知られている。
(Prior art) This type of electrolytic buffing composite polishing device removes only the film on the convex parts of the passivating oxide film on the minute irregularities produced on the surface of the object to be polished connected to the anode by electrolytic polishing. By mixing it with a buff or an electrolytic solution and mechanically removing it by abrasive grain abrasion, the electrolytic concentration is concentrated on the convex portions of the surface to be polished, greatly increasing the electrolytic polishing speed. As a prior art of such a polishing device, which performs mirror finishing, for example, the one described in Japanese Patent Publication No. 49120/1983 is known.

即ち、この先行技術は固定筒体に軸芯方向の出
退のみ可能に可動筒体を嵌合し、この可動筒体の
前端に研摩ヘツドを取り付けると共に、前記固定
筒体と可動筒体との間に、これらの軸芯方向にシ
リンダーを出退可能に介装してあり、該シリンダ
ーの駆動により可動筒体を被研摩面の方向に移動
して、該被研摩面に回転する研摩ヘツドを押し付
けるべく構成されており、研摩ヘツドの押付力の
調整は前記シリンダーに供給する圧力流体の圧力
を調整することにより行つていた。
That is, in this prior art, a movable cylinder is fitted into a fixed cylinder so that it can move in and out only in the axial direction, a polishing head is attached to the front end of this movable cylinder, and the movable cylinder is connected to the fixed cylinder. A cylinder is interposed between them so that they can move in and out in the axial direction, and when the cylinder is driven, the movable cylinder moves in the direction of the surface to be polished, and a rotating polishing head is applied to the surface to be polished. The pressing force of the polishing head is adjusted by adjusting the pressure of the pressurized fluid supplied to the cylinder.

(発明が解決しようとする問題点) しかし乍ら、上記先行技術では、シリンダーを
作動させる圧力流体の圧力調整だけで研摩ヘツド
の押付力を所定値に設定しようとするものである
から、押付力を所望圧に近づけるための細かい圧
力調整は期待できず、また、研摩ヘツドの押付力
は圧力流体の圧力値から算出するしか方法がな
く、正確な押付力を検知することができない。従
つて、研摩ヘツドの電極板に貼着された研摩材の
被研摩面に対する擦過除去作用を最適の押付力に
調整維持することが困難であり、所望の表面粗度
の鏡面仕上げを行うことができない。
(Problem to be Solved by the Invention) However, in the above-mentioned prior art, the pressing force of the polishing head is set to a predetermined value simply by adjusting the pressure of the pressure fluid that operates the cylinder, so the pressing force is It is not possible to make fine pressure adjustments to bring the polishing head closer to the desired pressure, and the only way to calculate the pressing force of the polishing head is from the pressure value of the pressure fluid, making it impossible to accurately detect the pressing force. Therefore, it is difficult to adjust and maintain the abrasive removal effect of the abrasive material attached to the electrode plate of the polishing head on the surface to be polished to the optimum pressing force, and it is difficult to achieve a mirror finish with the desired surface roughness. Can not.

また、シリンダーはその動作慣性及びシール抵
抗があるため、被研摩面のうねりや凹凸に対して
研摩ヘツドがスムーズに応答しないという問題点
があつた。
Furthermore, because the cylinder has operating inertia and seal resistance, there is a problem in that the polishing head does not respond smoothly to the undulations and irregularities of the surface to be polished.

(問題点を解決するための手段) 本発明は、このような従来の問題点を解決する
ためになされたものであつて、ベースの下面から
垂設している案内ロツドにハウジングを回転不能
状態で昇降自在に案内させると共にこのハウジン
グをアクチユエータを介して前記ベースに吊持さ
せ、該ハウジング内に軸芯をアクチユエータの作
動方向に向けて筒状の駆動軸を回転自在に支持
し、この筒状駆動軸を前記ハウジングに配設して
いる駆動モータにより回転させるようにすると共
に該筒状駆動軸内にこの駆動軸と一体回転し且つ
上下動自在な内部に電解液供給孔を有する回転軸
を挿嵌して該回転軸の上下端部を筒状駆動軸の上
端およびハウジングの下端面から夫々突出させ、
その突出下端に電解バフ複合研摩を行う研摩ヘツ
ドを取付けると共に突出上端に電解液の供給を行
うロータリージヨイントを装着し、さらに、回転
軸の中間部にロードセルを内装してなる受座を軸
受を介して装着すると共にこの受座に対抗して受
座との間隔を移動調整可能にカツプ状受金をハウ
ジングに取り付け、前記受座とこのカツプ状受金
間にコイルスプリングからなる弾性体を介装して
該弾性体の押圧力を前記ロードセルにより検出さ
せ、この検知信号に応答して前記受座とカツプ状
受金間の間隔を調節することにより前記研摩ヘツ
ドの押圧力を所定圧に調整するように構成したこ
とを特徴とするものである。
(Means for Solving the Problems) The present invention has been made in order to solve the problems of the conventional art. The housing is guided so as to be raised and lowered by the actuator, and the housing is suspended from the base via the actuator. A cylindrical drive shaft is rotatably supported within the housing with its axis facing the operating direction of the actuator. The drive shaft is rotated by a drive motor disposed in the housing, and a rotary shaft is provided inside the cylindrical drive shaft, which rotates integrally with the drive shaft and is movable up and down, and has an electrolyte supply hole inside. The upper and lower ends of the rotating shaft are inserted into the housing, and the upper and lower ends of the rotating shaft are respectively projected from the upper end of the cylindrical drive shaft and the lower end surface of the housing;
A polishing head that performs electrolytic buffing and compound polishing is attached to the lower end of the protrusion, and a rotary joint that supplies electrolyte is attached to the upper end of the protrusion.Furthermore, a bearing seat with a load cell installed in the middle of the rotating shaft is installed. A cup-shaped receiver is attached to the housing so that the distance between the receiver and the receiver can be adjusted by moving it against the receiver, and an elastic body made of a coil spring is interposed between the receiver and the cup-shaped receiver. The pressing force of the polishing head is adjusted to a predetermined pressure by adjusting the distance between the receiving seat and the cup-shaped receiver in response to this detection signal. The invention is characterized in that it is configured to do so.

(作用) 上記構成によると、研摩ヘツドを回転させなが
ら被研摩物の表面に押し付けて電解バフ複合研摩
を行う際に、研摩ヘツド及び回転軸の重量と弾性
体の弾圧力との和が被研摩面に対する被研摩ヘツ
ドの押付力となる。従つて、弾性体の弾圧力を適
宜調整することにより、該押付力を任意に設定で
き、これによつて所望の表面粗度の鏡面を得るこ
とができる。
(Function) According to the above configuration, when performing electrolytic buff composite polishing by pressing the polishing head against the surface of the object to be polished while rotating, the sum of the weight of the polishing head and rotating shaft and the elastic force of the elastic body is This is the pressing force of the head to be polished against the surface. Therefore, by appropriately adjusting the elastic force of the elastic body, the pressing force can be arbitrarily set, and thereby a mirror surface with a desired surface roughness can be obtained.

さらに、弾性体がコイルスプリングからなるの
で、被研摩面の凹凸に対する研摩ヘツドの応答性
が良好となると共に、該研摩ヘツドを取付けてい
る回転軸はハウジングを吊持しているアクチユエ
ータの下方に配設されて、この回転軸を押圧して
いる前記弾性体とアクチユエータとが直列に配置
された状態となつているから、アクチユエータ並
びに弾性体からの作動力を直接的に且つ精度よく
研摩ヘツドに伝達することができる。
Furthermore, since the elastic body is a coil spring, the polishing head has good responsiveness to unevenness on the surface to be polished, and the rotating shaft to which the polishing head is attached is located below the actuator that suspends the housing. Since the elastic body that presses the rotating shaft and the actuator are arranged in series, the operating force from the actuator and the elastic body is directly and precisely transmitted to the polishing head. can do.

また、回転軸の中間部にロードセルを内装して
なる受座を軸受と介して装着すると共にこの受座
に対抗して受座との間隔を移動調整可能にカツプ
状受金をハウジングに取り付け、前記受座とこの
カツプ状受金間に前記弾性体を介装して該弾性体
の押圧力を前記ロードセルにより検出させ、この
検知信号に応答して前記受座とカツプ状受金間の
間隔を調節することにより前記研摩ヘツドの押圧
力を所定圧に調整するように構成しているので、
被研摩面に対する研摩ヘツドの押し付け力を任意
に設定した値に補正することができ、被研摩面の
凹凸に対して、弾性体自体による加圧力が一定に
保持できる範囲外になつても、円滑かつ自動的に
一定の押し付け力に調整、保持できて常に均一な
研摩面が得られるものである。
In addition, a catch made of a load cell is installed in the middle part of the rotating shaft via the bearing, and a cup-shaped receiver is attached to the housing so that the distance between the catch and the catch can be adjusted by moving. The elastic body is interposed between the catch seat and the cup-shaped receiver, the pressing force of the elastic body is detected by the load cell, and the distance between the catch seat and the cup-shaped receiver is adjusted in response to this detection signal. By adjusting the polishing head, the pressing force of the polishing head is adjusted to a predetermined pressure.
The pressing force of the polishing head against the surface to be polished can be corrected to an arbitrarily set value, and even if the pressing force by the elastic body itself is outside the range where it can be maintained constant against unevenness of the surface to be polished, it will be smooth. Moreover, the pressing force can be automatically adjusted and maintained at a constant level, and a uniformly polished surface can always be obtained.

(実施例) 以下、本発明の実施例を図面に基づき詳細に説
明する。第1図はこの実施例に係る電解バフ複合
研摩装置を示しており、図中、符号1はハウジン
グである。このハウジング1はこれの上方に配設
されたこの装置取付用のベース2にアクチユエー
タ3を介して吊持されており、各隅部に穿設の嵌
合孔4がそれぞれ前記ベース2から垂設された案
内ロツド5に嵌合して、前記アクチユエータ3の
上下駆動により、被研摩面Aに対して鉛直方向に
昇降動するようになつている。このハウジング1
にはモータ6が固定支持されると共に、このモー
タ6から離れた位置に筒状の駆動軸7が垂直軸芯
周りに軸受8を介して回転自在に支持されてい
る。この駆動軸7は前記モータ6とベルトプーリ
式減速機構9を介して連動連結されており、中空
部10に回転軸11が回転伝達手段を介して該駆
動軸7の軸芯方向のみに遊動自在に挿嵌支持され
ている。即ち、この回転軸11の外周面にはキー
12が埋め込まれると共に、前記駆動軸7には該
キー12が係入するキー溝13が形成されてい
て、該キー12とキー溝13との係合により、回
転軸11が駆動軸7に対して遊動自在であり乍
ら、該駆動軸7の回転力が伝達されて回転するの
である。尚、この回転伝達手段としては、この
他、スプライン嵌合によるものであつてもよい。
(Example) Hereinafter, an example of the present invention will be described in detail based on the drawings. FIG. 1 shows an electrolytic buffing composite polishing apparatus according to this embodiment, and in the figure, reference numeral 1 indicates a housing. The housing 1 is suspended via an actuator 3 from a base 2 for mounting the device disposed above the housing 1, and fitting holes 4 perforated at each corner are vertically provided from the base 2. The guide rod 5 is fitted into the guide rod 5, and the actuator 3 is driven up and down to move up and down in the vertical direction with respect to the surface A to be polished. This housing 1
A motor 6 is fixedly supported, and a cylindrical drive shaft 7 is rotatably supported at a position apart from the motor 6 through a bearing 8 around a vertical axis. This drive shaft 7 is interlocked and connected to the motor 6 via a belt pulley type reduction mechanism 9, and a rotary shaft 11 is provided in a hollow portion 10 and is freely movable only in the axial direction of the drive shaft 7 via a rotation transmission means. It is supported by being inserted into. That is, a key 12 is embedded in the outer peripheral surface of the rotating shaft 11, and a key groove 13 into which the key 12 engages is formed in the drive shaft 7, and the engagement between the key 12 and the key groove 13 is As a result, while the rotating shaft 11 is freely movable with respect to the driving shaft 7, the rotational force of the driving shaft 7 is transmitted to rotate the rotating shaft 11. In addition, this rotation transmission means may be one based on spline fitting.

前記回転軸11は軸方向に貫通孔14を形成し
た中空軸であつて、その下端部に絶縁板15を介
して研摩ヘツド16が取り付けられる一方、上端
部にロータリージヨイント17が装着され、この
ロータリージヨイント17を介して電解液を貫通
孔14に給液すべく構成されている。
The rotating shaft 11 is a hollow shaft with a through hole 14 formed in the axial direction, and a polishing head 16 is attached to its lower end via an insulating plate 15, while a rotary joint 17 is attached to its upper end. The electrolytic solution is configured to be supplied to the through hole 14 via the rotary joint 17.

前記研摩ヘツド16は転子状の電極板18の下
面に不織布製の研摩材19を貼着すると共に、こ
の研摩材19と前記貫通孔14の出口開口との間
に電解液の液溜り20を形成したものである。こ
の研摩ヘツド16の電極板18と近接する位置に
は、絶縁支持棒21を介してブラシホルダー22
が取り付けられ、このブラシホルダー22に内蔵
のスプリング23のばね力で給電ブラシ24を電
極板18の周面に押し付けている。符号25は給
電線であつて、この給電線25は電解用直流電源
の陰極側に接続されて、前記給電ブラシ24に電
解用電力を送り込むものである。
The polishing head 16 has an abrasive material 19 made of non-woven fabric affixed to the lower surface of the trochanter-shaped electrode plate 18, and an electrolyte reservoir 20 is formed between the abrasive material 19 and the outlet opening of the through hole 14. It was formed. A brush holder 22 is provided at a position close to the electrode plate 18 of the polishing head 16 via an insulating support rod 21.
is attached to the brush holder 22, and the power supply brush 24 is pressed against the circumferential surface of the electrode plate 18 by the spring force of a spring 23 built into the brush holder 22. Reference numeral 25 denotes a power supply line, which is connected to the cathode side of the DC power source for electrolysis, and feeds electrolysis power to the power supply brush 24.

前記回転軸11の軸芯方向中間部には軸受26
を介して受座27が装着されると共に、この受座
27の上面にはロードセル28が内装されてい
る。一方、この受座27が挿通案内されるハウジ
ング1の案内孔29にはカツプ状受金30が螺嵌
されており、このカツプ状受金30と受座27と
の間に圧縮コイルスプリングからなる弾性体31
が介装されている。前記ロードセル28は弾性体
31を受けて、この弾性体31の弾圧力を検知
し、その検知信号を演算制御回路32に出力す
る。この演算制御回路32はロードセル28の出
力を受けて、弾性体31の弾圧力の変化による研
摩ヘツド16の押付力の変化量を演算すると共
に、該押付力を設定押付力に修正すべく、演算に
基づく制御信号を前記アクチユエータ3にフイー
ドバツクするものであつて、該アクチユエータ3
はこの制御信号を受けて適正ストローク分だけ昇
降して、前記弾性体31の弾圧力を所望値に調整
するようになつている。より詳しくは、この演算
制御回路32では次のような演算が行われる。
A bearing 26 is provided at the axially intermediate portion of the rotating shaft 11.
A catch seat 27 is mounted through the seat 27, and a load cell 28 is installed inside the upper surface of the catch seat 27. On the other hand, a cup-shaped receiver 30 is screwed into the guide hole 29 of the housing 1 through which the receiver 27 is inserted and guided, and a compression coil spring is formed between the cup-shaped receiver 30 and the receiver 27. Elastic body 31
is interposed. The load cell 28 receives the elastic body 31, detects the elastic force of the elastic body 31, and outputs the detection signal to the calculation control circuit 32. This arithmetic control circuit 32 receives the output of the load cell 28, calculates the amount of change in the pressing force of the polishing head 16 due to a change in the elastic force of the elastic body 31, and also calculates the amount of change in the pressing force of the polishing head 16 in order to correct the pressing force to the set pressing force. A control signal based on the actuator 3 is fed back to the actuator 3, and the actuator 3
receives this control signal and moves up and down by an appropriate stroke to adjust the elastic force of the elastic body 31 to a desired value. More specifically, the calculation control circuit 32 performs the following calculations.

即ち、この場合の押付力の変化量ΔPは、 ΔP=P−P1=kΔx 但し、P:設定押付力、P1:ロードセル28
で検知した押付力、k:ばね定数、Δx:弾性体
31の長さの変化量。
That is, the amount of change ΔP in pressing force in this case is ΔP=P−P1=kΔx, where P: set pressing force, P1: load cell 28
k: spring constant, Δx: amount of change in length of elastic body 31.

となり、この押付力の変化量ΔPが常に0になる
ように弾性体31の長さの変化量Δxを演算する
のであり、この演算結果からアクチユエータ3の
進退量を制御するのである。また、ロードセル2
8による押付力の検出値は図外のモーター装置で
モニターできると共に、例えば被研摩面Aのうね
りや凹凸が大きく、弾性体31の弾圧力の変化が
著しい場合等のように、押付力が最適値より異常
に上昇または低下した場合は表示灯や警報器灯に
より操作者に報知できるようになつている。
Therefore, the amount of change Δx in the length of the elastic body 31 is calculated so that the amount of change ΔP in the pressing force is always 0, and the amount of movement of the actuator 3 is controlled based on the result of this calculation. Also, load cell 2
The value of the pressing force detected by 8 can be monitored by a motor device (not shown), and the pressing force may be determined to be optimal, for example, when the polished surface A has large undulations or irregularities and the elastic force of the elastic body 31 changes significantly. If the value rises or falls abnormally, the operator can be notified by an indicator light or alarm light.

従つて、この実施例ではアクチユエータ3と演
算制御回路32とで弾圧力調整手段が構成される
のである。
Therefore, in this embodiment, the actuator 3 and the arithmetic control circuit 32 constitute elastic force adjustment means.

以上の構成において、研摩時には、給電ブラシ
24を介して電極板18を電解用直流電源の陰極
に、また、被研摩材33を該電源の陽極に接続し
た後、アクチユエータ3を作動させてハウジング
1を下降させ、研摩ヘツド16を被研摩面A上に
押し当てる。次いで、加圧された電解液をロータ
リージヨイント17から貫通孔14を経て液溜り
20に供給し、この液溜り20から電解液を研摩
材19に滲出させる。一方、モータ6の駆動によ
り、駆動軸7、回転軸11を介して研摩ヘツド1
6を回転させると共に、給電ブラシ24から電極
板18に給電する。そして、研摩材19に混入さ
せた砥粒で被研摩面Aを研摩すると共に、研摩材
19の間を縫つて流れる電解液を媒体として電流
が流れ、かかる電解及び機械的なバフ研摩の複合
作用で電解バフ複合研摩が行われるのである。
In the above configuration, at the time of polishing, after connecting the electrode plate 18 to the cathode of the DC power source for electrolysis and the material to be polished 33 to the anode of the power source via the power supply brush 24, the actuator 3 is operated and the housing 1 is is lowered and the polishing head 16 is pressed onto the surface A to be polished. Next, the pressurized electrolytic solution is supplied from the rotary joint 17 through the through hole 14 to the liquid reservoir 20, and the electrolytic solution is exuded from the liquid reservoir 20 onto the abrasive material 19. On the other hand, by driving the motor 6, the polishing head 1 is moved through the drive shaft 7 and the rotating shaft 11.
6 is rotated, and power is supplied from the power supply brush 24 to the electrode plate 18. Then, the surface A to be polished is polished with the abrasive grains mixed in the abrasive material 19, and a current flows through the electrolytic solution flowing between the abrasive materials 19 as a medium, resulting in a combined action of electrolysis and mechanical buffing. Electrolytic buffing composite polishing is performed.

この場合に、被研摩面Aに対する擦過除去作用
を最適にするために、予め、カツプ状受金30の
螺合位置を調整して弾性体31の弾圧力を適性値
に設定しておくのであり、また、ハウジング1は
アクチユエータ3に吊持されているため、装置の
重量は該アクチユエータ3を介してベース2に支
持されており、これにより、研摩ヘツド16及び
回転軸11の重量と弾性体31の弾圧力との和
が、その侭被研摩面Aに対する研摩ヘツド16の
押付力として作用するのである。従つて、被研摩
面Aに対する研摩ヘツド16の押付力は弾性体3
1のばね力を調整するだけで細かい調整を簡単に
行え、任意の表面粗度の鏡面を得ることができる
のであり、弾性体31の弾圧力を0にすれば、該
押付力は回転軸11と研摩ヘツド16との重量の
和にまで軽減できるから、小さい押付力により表
面粗度の極めて小さい鏡面が得られる。また、こ
れら押付力を構成する部材は軽量であるため、被
研摩面Aのうねりや凹凸にスムーズに追従して昇
降し得るのであり、このような被研摩面Aであつ
ても均一な研摩を行えのである。
In this case, in order to optimize the abrasion removal effect on the surface A to be polished, the screwing position of the cup-shaped receiver 30 is adjusted in advance to set the elastic force of the elastic body 31 to an appropriate value. Furthermore, since the housing 1 is suspended by the actuator 3, the weight of the device is supported by the base 2 via the actuator 3, and thereby the weight of the polishing head 16 and rotating shaft 11 and the elastic body 31 are The sum of the elastic force and the elastic force acts as a pressing force of the polishing head 16 against the surface A to be polished. Therefore, the pressing force of the polishing head 16 against the surface A to be polished is
Fine adjustments can be easily made by adjusting the spring force of 1, and a mirror surface with any desired surface roughness can be obtained.If the elastic force of the elastic body 31 is set to 0, the pressing force is Since the weight can be reduced to the sum of the weight of the polishing head 16 and the polishing head 16, a mirror surface with extremely low surface roughness can be obtained with a small pressing force. In addition, since the members that make up these pressing forces are lightweight, they can move up and down while smoothly following the undulations and irregularities of the surface A to be polished, and even on such a surface A to be polished, uniform polishing can be achieved. You can do it.

次に、弾性体31の弾圧力はロードセル28に
検知され、その検知信号がロードセル28から演
算制御回路32へ出力され、この回路32から出
力された制御信号により、アクチユエータ3が作
動してハウジング1全体を制御信号に基づく移動
量だけ昇降させる。これによつて、前記カツプ状
受金30と受座27との間隔が相対的に広がり、
弾性体31が伸縮して設定値の弾圧力に自動調整
されるのである。また、この場合に、モニター装
置を見乍ら、研摩ヘツド16の押付力を任意に調
整維持できるため、被研摩面Aを任意の表面粗度
でしあげることができる。更には、警告報知があ
つた時には、直ちに装置の研摩作動を停止できる
のである。
Next, the elastic force of the elastic body 31 is detected by the load cell 28, and the detection signal is output from the load cell 28 to the arithmetic control circuit 32, and the actuator 3 is actuated by the control signal output from this circuit 32, and the housing 1 is The entire body is moved up and down by the amount of movement based on the control signal. As a result, the distance between the cup-shaped receiver 30 and the receiver 27 is relatively widened,
The elastic body 31 expands and contracts to automatically adjust the elastic force to the set value. Further, in this case, since the pressing force of the polishing head 16 can be adjusted and maintained as desired while observing the monitor device, the surface to be polished A can be finished to any desired surface roughness. Furthermore, when a warning is issued, the polishing operation of the device can be immediately stopped.

第2図は本発明の他の実施例を示しており、同
図中、前記実施例と同等の構成及び作用を有する
部分には同一符号を付してその説明を省略する。
FIG. 2 shows another embodiment of the present invention, and in the figure, parts having the same configuration and function as those of the previous embodiment are given the same reference numerals, and the explanation thereof will be omitted.

この図に示された実施例では、アクチユエータ
3はハウジング1の昇降を行う機能のみを有する
ものとしておき、該ハウジング1中に弾圧力調整
手段としてのカツプ状受金30を螺進または螺解
させる回転駆動機構34を内蔵して、この回転駆
動機構34とロードセル28とを演算制御回路3
2に介して電気的に接続し、ロードセル28の検
知信号を演算制御回路32で制御信号に変換し
て、回転駆動機構34に送り、この回転駆動機構
34によりカツプ状受金30を回転させ、その螺
合位置を変位させて弾性体31の弾圧力を増減さ
せるようにしてある。尚、この場合に前記アクチ
ユエータ3として、油圧若しくは空圧シリンダー
を使用することができる。
In the embodiment shown in this figure, the actuator 3 has only the function of raising and lowering the housing 1, and a cup-shaped holder 30 serving as an elastic force adjustment means is screwed into or screwed into the housing 1. A rotary drive mechanism 34 is built in, and the rotary drive mechanism 34 and the load cell 28 are connected to the arithmetic control circuit 3.
2, the detection signal of the load cell 28 is converted into a control signal by the arithmetic control circuit 32, and sent to the rotation drive mechanism 34, and the cup-shaped receiver 30 is rotated by the rotation drive mechanism 34. The elastic force of the elastic body 31 is increased or decreased by changing the screwing position. In this case, a hydraulic or pneumatic cylinder can be used as the actuator 3.

第3図は本発明の更に他の実施例を示してお
り、同図中、前記実施例と同等の構成及び作用を
有する部分には同一符号を付してその説明を省略
する。
FIG. 3 shows still another embodiment of the present invention, and in the figure, parts having the same configuration and operation as those of the previous embodiment are designated by the same reference numerals, and the explanation thereof will be omitted.

この図に示された実施例においても、前記他の
実施例と同様にアクチユエータ3はハウジング1
の昇降を行う機能のみを有するものとしている
が、前記各実施例におけるカツプ状受金30をハ
ウジング1の案内孔29に螺合させている構造に
代えて、案内孔29内に螺合させることなく上下
移動可能としたカツプ状受金35を備えているも
のであり、このカツプ状受金35をハウジング1
に吊持したアクチユエータ36の伸縮により移動
制御するようにし、更に、該アクチユエータ36
を演算制御回路32を介してロードセル28に電
気的に接続したもので、該ロードセル28の検知
信号に応答してアクチユエータ36が伸縮駆動す
ることにより、カツプ状受金35と受座27との
間に介装した弾性体31の弾圧力の増減を行うよ
うにしたものである。
In the embodiment shown in this figure as well, the actuator 3 is connected to the housing 1 as in the other embodiments.
However, instead of the structure in which the cup-shaped receiver 30 is screwed into the guide hole 29 of the housing 1 in each of the above embodiments, the cup-shaped receiver 30 is screwed into the guide hole 29. It is equipped with a cup-shaped receiver 35 that can be moved up and down without any movement, and this cup-shaped receiver 35 is attached to the housing 1.
The movement is controlled by the expansion and contraction of the actuator 36 suspended from the actuator 36.
is electrically connected to the load cell 28 via the arithmetic control circuit 32, and the actuator 36 expands and contracts in response to the detection signal of the load cell 28, thereby creating a gap between the cup-shaped receiver 35 and the receiver seat 27. The elastic force of the elastic body 31 interposed therein is increased or decreased.

尚、本発明では前記各実施例の他、多様な設計
変更が可能であることは勿論である。
It goes without saying that in the present invention, various design changes can be made in addition to the above-mentioned embodiments.

(発明の効果) 以上のように本発明の複合研摩装置によれば、
ベースの下面にアクチユエータを介して昇降自在
に吊持されたハウジング内に筒状駆動軸を回転自
在に支持し、この筒状駆動軸を前記ハウジングに
配設している駆動モータにより回転させるように
すると共に該筒状駆動軸内にこの駆動軸と一体回
転し且つ上下動自在な内部に電解液供給孔を有す
る回転軸を挿嵌し、この回転軸の下端に電解バフ
複合研摩を行う研摩ヘツドを取付けると共に上端
に電解液の供給を行うロータリージヨイントを装
着し、さらに、回転軸の中間部にロードセルを内
装してなる受座を軸受を介して装着すると共にこ
の受座に対抗して受座との間隔を移動調整可能に
カツプ状受金をハウジングに取り付け、前記受座
とこのカツプ状受金間にコイルスプリングからな
る弾性体を介装した構造を有しているから、重量
の大きいハウジングや駆動モータの存在に関係な
く、比較的軽量な研摩ヘツドと回転軸の重量およ
び弾性体の弾圧力との和が被研摩面に対する研摩
ヘツドの押圧力として作用させることができ、従
つて、弾性体より研摩ヘツドの押圧力の微妙な調
整が正確に行えて弾性体の小さな押圧力によつて
表面粗度の極めて小さい鏡面研摩が可能となるも
のである。
(Effects of the Invention) As described above, according to the composite polishing device of the present invention,
A cylindrical drive shaft is rotatably supported in a housing that is vertically suspended from the lower surface of the base via an actuator, and the cylindrical drive shaft is rotated by a drive motor disposed in the housing. At the same time, a rotating shaft that rotates integrally with the cylindrical drive shaft and has an electrolyte supply hole inside that is movable up and down is inserted into the cylindrical drive shaft, and a polishing head that performs electrolytic buffing compound polishing is attached to the lower end of this rotating shaft. At the same time, a rotary joint for supplying electrolyte is attached to the upper end, and a catch seat with a load cell inside is attached to the middle part of the rotating shaft via a bearing. Since it has a structure in which a cup-shaped receiver is attached to the housing so that the distance between the seat and the seat can be adjusted, and an elastic body made of a coil spring is interposed between the receiver and the cup-shaped receiver, it is heavy. Regardless of the presence of a housing or a drive motor, the sum of the relatively lightweight polishing head, the weight of the rotating shaft, and the elastic force of the elastic body can act as a pressing force of the polishing head against the surface to be polished. The pressing force of the polishing head can be finely adjusted more accurately than the elastic body, and the small pressing force of the elastic body enables mirror polishing with extremely low surface roughness.

さらに、弾性体がコイルスプリングからなるの
で、被研摩面の凹凸に対する研摩ヘツドの応答性
が良好となると共に、該研摩ヘツドを取付けてい
る回転軸はハウジングを吊持しているアクチユエ
ータの下方に配設されて、この回転軸を押圧して
いる前記弾性体とアクチユエータとが直列に配置
された状態となつているから、アクチユエータ並
びに弾性体からの作動力を直接的に且つ精度よく
研摩ヘツドに伝達することができると共に、弾性
体がコイルスプリングから構成されていることと
相俟つて、研摩ヘツドの押圧力を正確に微調整で
きるものである。
Furthermore, since the elastic body is a coil spring, the polishing head has good responsiveness to unevenness on the surface to be polished, and the rotating shaft to which the polishing head is attached is located below the actuator that suspends the housing. Since the elastic body that presses the rotating shaft and the actuator are arranged in series, the operating force from the actuator and the elastic body is directly and precisely transmitted to the polishing head. In addition, since the elastic body is composed of a coil spring, the pressing force of the polishing head can be precisely and finely adjusted.

また、回転軸の中間部にロードセルを内装して
なる受座を軸受を介して装着すると共にこの受座
と対抗して受座との間隔を移動調整可能にカツプ
状受金をハウジングに取り付け、前記受座とこの
カツプ状受金間に前記弾性体を介装して該弾性体
の押圧力を前記ロードセルより検出させ、この検
知信号に応答して前記受座とカツプ状受金間の間
隔を調節することにより前記研摩ヘツドの押圧力
を所定圧に調整するように構成しているので、被
研摩面に対する研摩ヘツドの押し付け力を任意に
設定した値に補正することができ、従つて、被研
摩面の凹凸に対して弾性体自体による加圧力が一
定に保持できる範囲外になつても、円滑かつ自動
的に一定の押し付け力に調整、保持できて常に均
一な研摩面が得られるものである。
In addition, a catch having a load cell inside is attached to the middle part of the rotating shaft via a bearing, and a cup-shaped receiver is attached to the housing so that the distance between the catch and the catch can be adjusted by moving. The elastic body is interposed between the seat and the cup-shaped receiver, the pressing force of the elastic body is detected by the load cell, and the distance between the seat and the cup-shaped receiver is adjusted in response to this detection signal. Since the pressing force of the polishing head is adjusted to a predetermined pressure by adjusting the polishing head, the pressing force of the polishing head against the surface to be polished can be corrected to an arbitrarily set value. Even if the pressing force of the elastic body itself is outside the range where it can be kept constant against the unevenness of the surface to be polished, it can smoothly and automatically adjust and maintain a constant pressing force, so that a uniform polished surface can always be obtained. It is.

さらに又、駆動モータ等の駆動部の自重が弾性
体の弾圧力に影響することなくその回転駆動力を
研摩ヘツドに伝達するように構成しているので、
研摩面に対して回転軸が円滑に昇降すると共に被
研摩面のうねりや凹凸に応じて軽量な研摩ヘツド
と回転軸を感度よく追随させることができ、前記
ロードセルを介しての弾性体の弾圧力の調整が一
層精度よく行われるものである。
Furthermore, the structure is such that the rotational driving force of the drive unit such as the drive motor is transmitted to the polishing head without affecting the elastic force of the elastic body.
The rotating shaft moves up and down smoothly with respect to the surface to be polished, and the lightweight polishing head and the rotating shaft can be made to sensitively follow the undulations and irregularities of the surface to be polished, and the elastic force of the elastic body via the load cell This allows for more accurate adjustment.

又、固定したハウジングを通じて該ハウジング
内に配設している前記回転軸の中空貫通孔にこの
回転軸の上端に装着しているロータリージヨイン
トを介して電解液を供給することができ、回転軸
の下端に取付けている前記研摩ヘツドに電解液を
送り込んで、電解複合研摩を行うことができるも
のである。
Further, the electrolyte can be supplied through the fixed housing to the hollow through hole of the rotary shaft disposed in the housing through the rotary joint attached to the upper end of the rotary shaft. Electrolytic compound polishing can be performed by feeding an electrolytic solution into the polishing head attached to the lower end of the polishing head.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の一実施例を示す縦断面図、第
2図は本発明の他の実施例を示す縦断面図、第3
図は本発明の更に他の実施例を示す縦断面図であ
る。 1……ハウジング、2……固定ベース、3……
昇降用アクチユエータ、7……駆動軸、11……
回転軸、12,13……回転伝達手段、16……
研摩ヘツド、28……ロードセル、30……ねじ
部材、31……弾性体、35……ばね押さえ、3
6……アクチユエータ。
FIG. 1 is a longitudinal cross-sectional view showing one embodiment of the present invention, FIG. 2 is a longitudinal cross-sectional view showing another embodiment of the present invention, and FIG.
The figure is a longitudinal sectional view showing still another embodiment of the present invention. 1...Housing, 2...Fixed base, 3...
Lifting actuator, 7... Drive shaft, 11...
Rotating shaft, 12, 13...Rotation transmission means, 16...
Polishing head, 28... Load cell, 30... Screw member, 31... Elastic body, 35... Spring retainer, 3
6...actuator.

Claims (1)

【特許請求の範囲】 1 ベースの下面から垂設している案内ロツドに
ハウジングを回転不能状態で昇降自在に案内させ
ると共にこのハウジングをアクチユエータを介し
て前記ベースに吊持させ、該ハウジング内に軸芯
をアクチユエータの作動方向に向けて筒状の駆動
軸を回転自在に支持し、この筒状駆動軸を前記ハ
ウジングに配設している駆動モータにより回転さ
せるようにすると共に該筒状駆動軸内にこの駆動
軸と一体回転し且つ上下動自在な内部に電解液供
給孔を有する回転軸を挿嵌して該回転軸の上下端
部を筒状駆動軸の上端およびハウジングの下端面
から夫々突出させ、その突出下端に電解バフ複合
研摩を行う研摩ヘツドを取付けると共に突出上端
に電解液の供給を行うロータリージヨイントを装
着し、さらに、回転軸の中間部にロードセルを内
装してなる受座を軸受を介して装着すると共にこ
の受座に対抗して受座との間隔を移動調整可能に
カツプ状受金をハウジングに取り付け、前記受座
とこのカツプ状受金間にコイルスプリングからな
る弾性体を介装して該弾性体の押圧力を前記ロー
ドセルにより検出させ、この検知信号に応答して
前記受座とカツプ状受金間の間隔を調節すること
により前記研摩ヘツドの押圧力を所定圧に調整す
るように構成したことを特徴とする電解バフ複合
研摩装置。 2 前記受座とカツプ状受金間の間隔調整は、ロ
ードセルによる検知信号に応答して前記アクチユ
エータを作動させることにより、ハウジングを上
下移動させて行うように構成したことを特徴とす
る請求項1記載の電解バフ複合研摩装置。 3 前記受座とカツプ状受金間の間隔調整は、ロ
ードセルによる検知信号に応答して前記カツプ状
受金を上下移動させることにより行うように構成
したことを特徴とする請求項1記載の電解バフ複
合研摩装置。
[Scope of Claims] 1. A guide rod hanging from the lower surface of the base guides the housing in a non-rotatable manner so that it can rise and fall freely, and the housing is suspended from the base via an actuator. A cylindrical drive shaft is rotatably supported with its core facing the actuating direction of the actuator, and this cylindrical drive shaft is rotated by a drive motor disposed in the housing. A rotary shaft that rotates integrally with the drive shaft and has an electrolyte supply hole inside that is movable up and down is inserted, and the upper and lower ends of the rotary shaft protrude from the upper end of the cylindrical drive shaft and the lower end surface of the housing, respectively. A polishing head for electrolytic buffing and compound polishing is attached to the lower end of the protrusion, and a rotary joint for supplying electrolyte is attached to the upper end of the protrusion.Furthermore, a seat with a load cell installed in the middle of the rotating shaft is installed. A cup-shaped receiver is attached to the housing through a bearing and the distance between the receiver and the receiver can be adjusted by moving against the receiver, and an elastic body made of a coil spring is provided between the receiver and the cup-shaped receiver. is inserted, the pressing force of the elastic body is detected by the load cell, and in response to this detection signal, the distance between the receiving seat and the cup-shaped receiver is adjusted, thereby increasing the pressing force of the polishing head to a predetermined pressure. An electrolytic buffing compound polishing device characterized in that it is configured to adjust to. 2. The space between the catch seat and the cup-shaped receiver is adjusted by moving the housing up and down by operating the actuator in response to a detection signal from a load cell. The electrolytic buffing composite polishing device described. 3. The electrolyzer according to claim 1, wherein the distance between the catch seat and the cup-shaped receiver is adjusted by moving the cup-shaped receiver up and down in response to a detection signal from a load cell. Buffing compound polishing device.
JP27438086A 1986-11-18 1986-11-18 Electrolytic buffing compound polishing device Granted JPS63127827A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP27438086A JPS63127827A (en) 1986-11-18 1986-11-18 Electrolytic buffing compound polishing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP27438086A JPS63127827A (en) 1986-11-18 1986-11-18 Electrolytic buffing compound polishing device

Publications (2)

Publication Number Publication Date
JPS63127827A JPS63127827A (en) 1988-05-31
JPH0521709B2 true JPH0521709B2 (en) 1993-03-25

Family

ID=17540855

Family Applications (1)

Application Number Title Priority Date Filing Date
JP27438086A Granted JPS63127827A (en) 1986-11-18 1986-11-18 Electrolytic buffing compound polishing device

Country Status (1)

Country Link
JP (1) JPS63127827A (en)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2606408Y2 (en) * 1993-04-06 2000-11-06 日新工機株式会社 Polishing machine
KR100489703B1 (en) * 2001-11-23 2005-05-16 학교법인연세대학교 Machining tool head interface and associated polishing and grinding end tools
WO2005000512A1 (en) * 2003-06-26 2005-01-06 Tokyo Stainless Grinding Co., Ltd. Rotation surface-reducing head, electrolytic surface-reducing device, and electrolytic surface-reducing method
JP2013158864A (en) * 2012-02-03 2013-08-19 Nagatsu Precision Mold Co Ltd Loading apparatus

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56142930U (en) * 1980-03-25 1981-10-28
JPS5727651A (en) * 1980-07-23 1982-02-15 Hitachi Ltd Profiling polisher
JPS57178663A (en) * 1981-04-24 1982-11-02 Hitachi Zosen Corp Control method of pressing force by grinding wheel
JPS6099564A (en) * 1983-11-02 1985-06-03 Sumitomo Heavy Ind Ltd Tool pressing force detecting apparatus
JPS61257751A (en) * 1985-05-02 1986-11-15 Shin Nippon Koki Kk Grinding tool and grinding attachment

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Publication number Publication date
JPS63127827A (en) 1988-05-31

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