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JPH052253B2 - - Google Patents
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JPH052253B2 - - Google Patents

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Publication number
JPH052253B2
JPH052253B2 JP61260190A JP26019086A JPH052253B2 JP H052253 B2 JPH052253 B2 JP H052253B2 JP 61260190 A JP61260190 A JP 61260190A JP 26019086 A JP26019086 A JP 26019086A JP H052253 B2 JPH052253 B2 JP H052253B2
Authority
JP
Japan
Prior art keywords
infrared
mirror
detector
chopper
infrared rays
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61260190A
Other languages
Japanese (ja)
Other versions
JPS63115018A (en
Inventor
Hiroshi Mizukami
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Denshi KK filed Critical Nihon Denshi KK
Priority to JP61260190A priority Critical patent/JPS63115018A/en
Publication of JPS63115018A publication Critical patent/JPS63115018A/en
Publication of JPH052253B2 publication Critical patent/JPH052253B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02Constructional details
    • G01J5/08Optical arrangements
    • G01J5/0803Arrangements for time-dependent attenuation of radiation signals
    • G01J5/0805Means for chopping radiation

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Radiation Pyrometers (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)

Description

【発明の詳細な説明】 [産業上の利用分野] 本発明は、赤外線カメラに関し、特に被写体の
放出する赤外線を異なつた周波数帯域で検出する
ことが可能な機構を備えた装置に関する。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an infrared camera, and more particularly to an apparatus equipped with a mechanism capable of detecting infrared rays emitted by a subject in different frequency bands.

[従来の技術] 一般に、被写体から放出される赤外線を走査し
赤外線検出器へ導く光学機構を有する赤外線カメ
ラにおいて、例えば、第4図のような機構が知ら
れている。第4図において1は被写体、2は走査
鏡、3は該走査鏡2の反射した赤外線を更に反射
集光する凹面鏡、6は赤外線検出器、8はレン
ズ、10は反射鏡、11は基準黒体炉、12は片
面が平面鏡である回転チヨツパである。図中、赤
外線の光路を実線矢印で現わす。該赤外線光路中
に配設されている回転チヨツパ12は開孔部を有
し、その回転により被写体1からの赤外線光の通
過と遮断を交互に行なう。該開孔部が光路を妨げ
ない回転位置にあるときは被写体1からの赤外線
を該赤外線検出器6へ導き、該回転チヨツパ12
が被写体1からの光路を遮断する回転位置にある
ときは、該回転チヨツパの検出器側面の鏡により
基準黒体炉11からの赤外線を反射し反射鏡10
及びレンズ8を経て赤外線検出器6へ集光させ
る。該チヨツパ12の回転により以上の動作が繰
り返され、被写体1と基準黒体炉11との比較観
察により該被写体1の正確な温度を非接触で測定
している。
[Prior Art] In general, an infrared camera having an optical mechanism that scans infrared rays emitted from a subject and guides the infrared rays to an infrared detector is known, for example, a mechanism as shown in FIG. 4 is known. In Fig. 4, 1 is an object, 2 is a scanning mirror, 3 is a concave mirror that further reflects and condenses the infrared rays reflected by the scanning mirror 2, 6 is an infrared detector, 8 is a lens, 10 is a reflecting mirror, and 11 is a reference black. The body furnace 12 is a rotating chopper with a plane mirror on one side. In the figure, the optical path of infrared rays is indicated by a solid arrow. The rotary chopper 12 disposed in the infrared light path has an aperture, and its rotation alternately passes and blocks the infrared light from the subject 1. When the aperture is in a rotational position that does not obstruct the optical path, the infrared rays from the subject 1 are guided to the infrared detector 6, and the rotating chopper 12
When the rotary chopper is at a rotational position that blocks the optical path from the object 1, the mirror on the side of the detector of the rotating chopper reflects the infrared rays from the reference blackbody furnace 11, and the mirror 10
The light then passes through a lens 8 and is focused onto an infrared detector 6 . The above operation is repeated by rotating the chopper 12, and the accurate temperature of the object 1 is measured in a non-contact manner by comparative observation of the object 1 and the reference blackbody furnace 11.

[発明が解決しようとする問題点] 上記従来技術においては、赤外線検出器自体が
持つ赤外線波長感度特性のため、1つの赤外線検
出器による赤外線検出機構では、ある特定の波長
領域の赤外線しか検出できず、同一被写体につい
て異なつた波長領域の赤外線を検出することはで
きない。そのような要求がある場合、従来は一被
写体に対して、赤外線波長感度特性の異なる検出
器を備えた赤外線カメラを必要台数用いて測定を
行なつていたため、観測位置のずれにより視差が
生じることが問題とされていた。その他、装置の
占めるスペースの問題や高価格の装置を複数用意
する必要があるためコスト面での問題がある。
[Problems to be Solved by the Invention] In the above-mentioned conventional technology, due to the infrared wavelength sensitivity characteristics of the infrared detector itself, an infrared detection mechanism using one infrared detector can only detect infrared rays in a certain specific wavelength range. First, it is not possible to detect infrared rays in different wavelength ranges for the same subject. In the past, when such a request existed, measurements were taken for one subject using the required number of infrared cameras equipped with detectors with different infrared wavelength sensitivity characteristics, which caused parallax to occur due to shifts in observation positions. was considered a problem. In addition, there are problems in terms of space occupied by the device and cost since it is necessary to prepare multiple expensive devices.

本発明は上記の問題点を解決するもので、1つ
の赤外線カメラにおいて広い領域の赤外線を検出
することのできる赤外線検出機構を提供すること
を目的とするものである。
The present invention solves the above-mentioned problems, and aims to provide an infrared detection mechanism that can detect infrared light over a wide area using one infrared camera.

[問題点を解決するための手段] そのために本発明は、赤外線検出器と、被写体
から放射される赤外線を該赤外線検出器へ集光さ
せるための集光手段と、該集光手段と赤外線検出
器の間または該集光手段と被写体の間の光路に配
置される光学的走査手段と、前記赤外線検出器に
入射する被写体からの赤外線を断続するための回
転チヨツパ鏡と、該回転チヨツパ鏡が光路に挿入
されている期間に該チヨツパ鏡を介して前記検出
器へ入射させる基準赤外線を発生する黒体炉とを
備えた赤外線カメラにおいて、前記回転チヨツパ
鏡を両面鏡とすると共に、該回転チヨツパ鏡が光
路に挿入されている期間に該チヨツパ鏡によつて
反射された被写体からの赤外線を検出する第2の
赤外線検出器を設け、該回転チヨツパ鏡が光路か
ら外れている期間に前記黒体炉からの基準赤外線
が第2の赤外線検出器に入射するように構成した
ことを特徴とするものである。
[Means for Solving the Problems] To this end, the present invention provides an infrared detector, a condensing means for condensing infrared rays emitted from a subject onto the infrared detector, and a combination of the condensing means and infrared detection. an optical scanning means disposed between the detector or in the optical path between the condensing means and the subject; a rotating chopper mirror for cutting off infrared rays from the subject incident on the infrared detector; and the rotating chopper mirror. In an infrared camera equipped with a blackbody furnace that generates reference infrared rays that are incident on the detector via the chopper mirror during a period of time when the rotary chopper mirror is inserted into an optical path, the rotary chopper mirror is a double-sided mirror, and the rotating chopper mirror is a double-sided mirror. A second infrared detector is provided for detecting infrared rays from the subject reflected by the rotating tipper mirror during a period when the mirror is inserted into the optical path, and a second infrared detector is provided to detect infrared rays from the subject reflected by the rotating tipper mirror, and the black body is detected while the rotating tipper mirror is out of the optical path. This is characterized in that the reference infrared rays from the furnace are configured to enter the second infrared detector.

[作用] 本発明においては、第1及び第2の赤外線検出
器と、両面を平面鏡とした開孔部を有する回転チ
ヨツパ4を配設したことにより、チヨツパが光路
に挿入されていた期間、従来遮断されて使用され
ないでいた被写体からの赤外線が該チヨツパ4の
平面鏡部分に反射され第2の赤外線検出器7に導
入される。このとき第1の赤外線検出器6は従来
通りチヨツパ4の片面の平面鏡に反射する基準黒
体炉11の放出する赤外線を観測している。ま
た、該チヨツパ4の開孔部分が光路上にある場
合、被写体1からの赤外線は該チヨツパ4の開孔
部分を通過し第1の赤外線検出器6に集光され
る。このとき、第2の赤外線検出器7は該チヨツ
パ4の開孔部分を通し基準黒体炉11の放出する
赤外線を観測するようにしている。
[Function] In the present invention, by disposing the first and second infrared detectors and the rotary chopper 4 having an opening with plane mirrors on both sides, the period when the chopper is inserted into the optical path is longer than the conventional one. Infrared rays from the subject that have been blocked and not used are reflected by the plane mirror portion of the chopper 4 and introduced into the second infrared detector 7. At this time, the first infrared detector 6 observes the infrared rays emitted by the reference blackbody furnace 11 and reflected by the plane mirror on one side of the chopper 4 as in the conventional manner. Further, when the aperture of the chopper 4 is on the optical path, infrared rays from the subject 1 pass through the aperture of the chopper 4 and are focused on the first infrared detector 6. At this time, the second infrared detector 7 observes the infrared rays emitted by the reference blackbody furnace 11 through the opening of the chopper 4.

[実施例] 以下、本発明の実施例を図面に基づいて説明す
る。第1図は本発明による赤外線検出カメラの1
実施例を示す構成図、第2図は動作図、第3図は
走査信号とチヨツパ4の開閉及び赤外線検出器の
検出信号のタイミング図である。
[Example] Hereinafter, an example of the present invention will be described based on the drawings. Figure 1 shows one of the infrared detection cameras according to the present invention.
FIG. 2 is an operational diagram, and FIG. 3 is a timing chart of scanning signals, opening/closing of the chopper 4, and detection signals of the infrared detector.

第1図において、被写体1から放射された赤外
線は走査鏡2により凹面鏡3へ向けれ、更に、該
凹面鏡3により反射集光される。該赤外線の光路
上で凹面鏡3の反射光が作る焦点部分には、両面
が平面鏡である回転チヨツパ4と、該回転チヨツ
パ4を駆動するモータ5を配設している。焦点後
方の光路上には赤外線検出器6と、赤外線検出器
6に該光線を集光するためのレンズ8を配設し、
これが第1の検出系となつている。第2の検出系
は、前記回転チヨツパ4の被写体側の鏡面に反射
された光線を第2の赤外線検出器7に導くための
固定された反射鏡10と、レンズ9と、該反射光
線を検出する前記赤外線検出器6と赤外線検出波
長特性の異なる赤外線検出器7から成る。11
は、第1及び第2の検出系に共用される基準黒体
炉である。赤外線検出器は被写体1が放出する赤
外線と該基準黒体炉11が放出する赤外線とを交
互に比較観察することにより被写体の正確な温度
を非接触で測定している。
In FIG. 1, infrared rays emitted from a subject 1 are directed by a scanning mirror 2 to a concave mirror 3, and further reflected and condensed by the concave mirror 3. At the focal point formed by the reflected light from the concave mirror 3 on the optical path of the infrared rays, a rotary chopper 4 whose both sides are plane mirrors and a motor 5 for driving the rotary chopper 4 are disposed. An infrared detector 6 and a lens 8 for focusing the light beam on the infrared detector 6 are disposed on the optical path behind the focal point,
This is the first detection system. The second detection system includes a fixed reflecting mirror 10 for guiding the light beam reflected by the mirror surface on the subject side of the rotating chopper 4 to a second infrared detector 7, a lens 9, and detecting the reflected light beam. The infrared detector 6 has different infrared detection wavelength characteristics, and the infrared detector 7 has different infrared detection wavelength characteristics. 11
is a reference blackbody furnace shared by the first and second detection systems. The infrared detector measures the accurate temperature of the object without contact by alternately comparing and observing the infrared rays emitted by the object 1 and the infrared rays emitted by the reference blackbody furnace 11.

以上のような第1,第2の検出系を備えた赤外
線カメラの光学機構の動作を第2図により説明す
る。第2図aのようにチヨツパ4が光路上に挿入
され、被写体1からの赤外線が該回転チヨツパ4
の鏡面に当たる場合、第1の検出系においてはチ
ヨツパ4の片面の平面鏡に反射される基準黒体炉
11からの基準赤外線を観測し、同時に該チヨツ
パ4の裏の平面鏡部分によつて反射された被写体
からの赤外線は、第2の光学機構を通つて第2の
赤外線検出器7に導入される。
The operation of the optical mechanism of the infrared camera equipped with the first and second detection systems as described above will be explained with reference to FIG. The chopper 4 is inserted on the optical path as shown in FIG.
, the first detection system observes the reference infrared rays from the reference blackbody furnace 11 that are reflected by the plane mirror on one side of the chopper 4, and at the same time the reference infrared rays are reflected by the plane mirror portion on the back of the chopper 4. Infrared rays from the subject are introduced to the second infrared detector 7 through the second optical mechanism.

一方、第2図bのように該チヨツパ4の開孔部
分が光路上にある場合は、被写体からの赤外線は
該チヨツパ4の開孔部分を通過し第1の赤外線検
出器6に集光され、このとき同時に第2の赤外線
検出器7は該チヨツパ4の開孔部分を通過する基
準黒体炉11からの基準赤外線を観測するように
している。これらの動作は、走査鏡2による被写
体の水平走査に同期したチヨツパ4の回転により
繰り返し行われ、被写体1が放出する赤外線と該
基準黒体炉11が放出する赤外線とを交互に比較
観察することにより被写体の正確な温度を非接触
で測定している。
On the other hand, when the aperture of the chopper 4 is on the optical path as shown in FIG. At this time, the second infrared detector 7 simultaneously observes the reference infrared rays from the reference blackbody furnace 11 passing through the opening of the chopper 4. These operations are repeated by rotating the chopper 4 in synchronization with the horizontal scanning of the object by the scanning mirror 2, and the infrared rays emitted by the object 1 and the infrared rays emitted by the reference blackbody furnace 11 are alternately compared and observed. The accurate temperature of the subject is measured without contact.

上記のような光学機構において、被写体1から
の赤外線を該2つの赤外線検出器へ均等に導入す
るために、走査鏡2及び回転チヨツパ4を第3図
に示すようなタイミングで駆動させる。第3図に
おいて、aは走査鏡2を駆動させるための走査信
号、bは回転チヨツパ4の駆動信号で同時にチヨ
ツパの開孔部分及び鏡面部分の位置を示す。c,
dは赤外線検出器6,7による検出信号である。
走査鏡2を走査信号aにより駆動し、該走査信号
aの1/2周期毎にチヨツパ4の開孔部分及び鏡面
部分が光路を横切るようにチヨツパ4の駆動信号
を同期させる。このタイミングで被写体1からの
赤外線を観測した場合、第1の赤外線検出器6及
び第2の赤外線検出器7は、夫々c,dのように
被写体1の放出する赤外線と基準黒体炉11の放
出する赤外線とを交互に検知する。ここで、第1
及び第2の赤外線検出器に異なつた波長感度特性
を持つものを使用することにより、夫々の検出器
は互いの検出不能領域を補うように赤外線を検出
する。
In the optical mechanism as described above, in order to uniformly introduce infrared rays from the subject 1 to the two infrared detectors, the scanning mirror 2 and the rotary chopper 4 are driven at the timing shown in FIG. 3. In FIG. 3, a indicates a scanning signal for driving the scanning mirror 2, and b indicates a drive signal for the rotary chopper 4, which simultaneously indicates the positions of the aperture and mirror surface of the chopper. c,
d is a detection signal from the infrared detectors 6 and 7.
The scanning mirror 2 is driven by a scanning signal a, and the driving signals of the chopper 4 are synchronized so that the aperture and mirror surface of the chopper 4 cross the optical path every 1/2 cycle of the scanning signal a. When observing the infrared rays from the subject 1 at this timing, the first infrared detector 6 and the second infrared detector 7 detect the infrared rays emitted by the subject 1 and the reference blackbody furnace 11 as shown in c and d, respectively. It alternately detects the emitted infrared rays. Here, the first
By using second infrared detectors having different wavelength sensitivity characteristics, each detector detects infrared rays so as to compensate for each other's undetectable areas.

また、被写体の幅広い温度変化の測定を行なう
ような場合、例えば、第1及び第2の検出器とし
て同一特性の検出器を使用すると共に、第2の検
出器については直前に絞りを挿入して光量を減衰
させることにより高温領域をカバーするようにし
ておけば、第1の検出器により低温領域を、第2
の検出器により高温領域を夫々測定することがで
き、一台の赤外線カメラで広い温度レンジにわた
る測定を一度に行なうことができる。
In addition, when measuring a wide range of temperature changes in a subject, for example, use detectors with the same characteristics as the first and second detectors, and insert an aperture just before the second detector. If the high temperature region is covered by attenuating the amount of light, the first detector can cover the low temperature region, and the second detector can cover the low temperature region.
These detectors can measure each high temperature region, and a single infrared camera can measure a wide temperature range at once.

[発明の効果] 以上の説明から明らかなように、本発明によれ
ば、赤外線カメラの赤外線検出機構において第1
及び第2の赤外線検出器と、両面を平面鏡とした
開孔部を有する回転チヨツパ4を配設したことに
より、一被写体の放出する赤外線を2つの赤外線
検出器で同時に検出することが可能となる。その
ため、一被写体を複数の赤外線カメラによつて観
測した場合に生ずる視差が発生しないほか、走査
信号aにより駆動し被写体1を往復走査する走査
鏡2の往路走査及び復路走査を完全に利用してい
るため、走査効率が向上する。
[Effects of the Invention] As is clear from the above description, according to the present invention, the first infrared detection mechanism of an infrared camera
By disposing a second infrared detector and a rotating chopper 4 having an aperture with plane mirrors on both sides, it becomes possible to simultaneously detect infrared rays emitted by one subject with two infrared detectors. . Therefore, the parallax that occurs when observing one object with multiple infrared cameras does not occur, and the forward and backward scanning of the scanning mirror 2, which is driven by the scanning signal a and scans the object 1 back and forth, is fully utilized. This improves scanning efficiency.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明による赤外線検出機構の1実施
例を示す構成図、第2図は動作図、第3図は走査
信号とチヨツパ4の開閉及び赤外線検出器の検出
信号のタイミング図、第4図は従来例を説明する
ための図である。 1…被写体、2…走査鏡、3凹面鏡、4…回転
チヨツパ、5…モータ、6,7…赤外線検出器、
8,9…レンズ、10…反射鏡、11…基準黒体
炉。
Fig. 1 is a configuration diagram showing one embodiment of the infrared detection mechanism according to the present invention, Fig. 2 is an operation diagram, Fig. 3 is a timing chart of scanning signals, opening/closing of the chopper 4, and detection signals of the infrared detector, and Fig. 4 is a timing diagram of the detection signal of the infrared detector. The figure is a diagram for explaining a conventional example. 1... Subject, 2... Scanning mirror, 3... Concave mirror, 4... Rotating chopper, 5... Motor, 6, 7... Infrared detector,
8, 9... Lens, 10... Reflector, 11... Reference blackbody furnace.

Claims (1)

【特許請求の範囲】 1 赤外線検出器と、被写体から放射される赤外
線を該赤外線検出器へ集光させるための集光手段
と、該集光手段と赤外線検出器の間または該集光
手段と被写体の間の光路に配置される光学的走査
手段と、前記赤外線検出器に入射する被写体から
の赤外線を断続するための回転チヨツパ鏡と、該
回転チヨツパ鏡が光路に挿入されている期間に該
チヨツパ鏡を介して前記検出器へ入射させる基準
赤外線を発生する黒体炉とを備えた赤外線カメラ
において、前記回転チヨツパ鏡を両面鏡とすると
共に、該回転チヨツパ鏡が光路に挿入されている
期間に該チヨツパ鏡によつて反射された被写体か
らの赤外線を検出する第2の赤外線検出器を設
け、該回転チヨツパ鏡が光路から外れている期間
に前記黒体炉からの基準赤外線が第2の赤外線検
出器に入射するように構成したことを特徴とする
赤外線カメラ。 2 前記第1及び第2の赤外線検出器は検出波長
領域が異なる特許請求の範囲第1項記載の赤外線
カメラ。
[Claims] 1. An infrared detector, a condensing means for condensing infrared rays emitted from a subject onto the infrared detector, and an infrared condensing means and an infrared detector, or between the condensing means and the infrared detector. an optical scanning means disposed in the optical path between the objects; a rotating chopper mirror for cutting off the infrared rays from the subject entering the infrared detector; In an infrared camera equipped with a blackbody furnace that generates a reference infrared ray that is incident on the detector through a tipper mirror, the rotating tipper mirror is a double-sided mirror, and the rotating tipper mirror is inserted into the optical path. A second infrared detector is provided to detect the infrared rays from the object reflected by the tipper mirror, and the reference infrared rays from the blackbody furnace are detected by the second infrared rays while the rotating tipper mirror is out of the optical path. An infrared camera characterized in that the infrared camera is configured to be incident on an infrared detector. 2. The infrared camera according to claim 1, wherein the first and second infrared detectors have different detection wavelength regions.
JP61260190A 1986-10-31 1986-10-31 Infrared camera Granted JPS63115018A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61260190A JPS63115018A (en) 1986-10-31 1986-10-31 Infrared camera

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61260190A JPS63115018A (en) 1986-10-31 1986-10-31 Infrared camera

Publications (2)

Publication Number Publication Date
JPS63115018A JPS63115018A (en) 1988-05-19
JPH052253B2 true JPH052253B2 (en) 1993-01-12

Family

ID=17344578

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61260190A Granted JPS63115018A (en) 1986-10-31 1986-10-31 Infrared camera

Country Status (1)

Country Link
JP (1) JPS63115018A (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE469700B (en) * 1992-05-26 1993-08-23 Agema Infrared Systems Ab ARRANGEMENTS FOR RECORDING AN IR PICTURE OF AN OBJECTIVE INCLUDING A PLAN GROUP OF IR DETECTORS AND A TEMPERATURE REFERENCE ARRANGEMENT
JP3342488B2 (en) * 1992-05-26 2002-11-11 フリル システムズ アクチボラゲット Detector calibration
DE4309762C2 (en) * 1993-03-25 1995-11-16 Raytek Sensorik Gmbh Measuring device

Also Published As

Publication number Publication date
JPS63115018A (en) 1988-05-19

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