JPH0530388B2 - - Google Patents
Info
- Publication number
- JPH0530388B2 JPH0530388B2 JP60289368A JP28936885A JPH0530388B2 JP H0530388 B2 JPH0530388 B2 JP H0530388B2 JP 60289368 A JP60289368 A JP 60289368A JP 28936885 A JP28936885 A JP 28936885A JP H0530388 B2 JPH0530388 B2 JP H0530388B2
- Authority
- JP
- Japan
- Prior art keywords
- pdo
- teo
- recording film
- film
- optical recording
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000003287 optical effect Effects 0.000 claims description 30
- 239000000203 mixture Substances 0.000 claims description 25
- 229910052763 palladium Inorganic materials 0.000 claims description 8
- 238000004544 sputter deposition Methods 0.000 claims description 8
- 229910052714 tellurium Inorganic materials 0.000 claims description 8
- PORWMNRCUJJQNO-UHFFFAOYSA-N tellurium atom Chemical compound [Te] PORWMNRCUJJQNO-UHFFFAOYSA-N 0.000 claims description 5
- 239000002131 composite material Substances 0.000 claims description 4
- 238000001704 evaporation Methods 0.000 claims description 4
- 230000008020 evaporation Effects 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 claims description 4
- 229910044991 metal oxide Inorganic materials 0.000 claims description 3
- 238000001771 vacuum deposition Methods 0.000 claims description 3
- KDLHZDBZIXYQEI-UHFFFAOYSA-N palladium Substances [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 claims 6
- 229910001252 Pd alloy Inorganic materials 0.000 claims 1
- 229910001215 Te alloy Inorganic materials 0.000 claims 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims 1
- 239000007789 gas Substances 0.000 claims 1
- 239000011261 inert gas Substances 0.000 claims 1
- 229910052760 oxygen Inorganic materials 0.000 claims 1
- 239000001301 oxygen Substances 0.000 claims 1
- -1 palladium metal oxide Chemical class 0.000 claims 1
- 238000007740 vapor deposition Methods 0.000 claims 1
- 239000010408 film Substances 0.000 description 33
- 239000000758 substrate Substances 0.000 description 8
- 239000010409 thin film Substances 0.000 description 8
- 239000000654 additive Substances 0.000 description 7
- 238000000034 method Methods 0.000 description 6
- 230000000996 additive effect Effects 0.000 description 5
- 238000005546 reactive sputtering Methods 0.000 description 5
- 239000011347 resin Substances 0.000 description 5
- 229920005989 resin Polymers 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 239000008188 pellet Substances 0.000 description 4
- 239000000956 alloy Substances 0.000 description 3
- 229910045601 alloy Inorganic materials 0.000 description 3
- 238000002425 crystallisation Methods 0.000 description 3
- 230000008025 crystallization Effects 0.000 description 3
- 206010070834 Sensitisation Diseases 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 150000004706 metal oxides Chemical class 0.000 description 2
- 230000008313 sensitization Effects 0.000 description 2
- 238000005477 sputtering target Methods 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- 238000007738 vacuum evaporation Methods 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000011162 core material Substances 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000011824 nuclear material Substances 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41M—PRINTING, DUPLICATING, MARKING, OR COPYING PROCESSES; COLOUR PRINTING
- B41M5/00—Duplicating or marking methods; Sheet materials for use therein
- B41M5/26—Thermography ; Marking by high energetic means, e.g. laser otherwise than by burning, and characterised by the material used
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
- G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
- G11B7/242—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers
- G11B7/243—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers comprising inorganic materials only, e.g. ablative layers
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
- G11B7/26—Apparatus or processes specially adapted for the manufacture of record carriers
Landscapes
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Thermal Transfer Or Thermal Recording In General (AREA)
- Optical Record Carriers And Manufacture Thereof (AREA)
- Manufacturing Optical Record Carriers (AREA)
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明は、光学的記録再生方式に使用される円
盤状の情報記録担体に関するものである。DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a disc-shaped information recording carrier used in an optical recording/reproducing system.
（従来の技術）
従来からこの種の情報記録層としては、TeOx
（ｘ≒1.0、TeとTeO2の混合物）を主成分とし、
添加剤として例えばPd、Cu、Au等を単独、もし
くは組合せて加えたものがある。これらは真空蒸
着法で薄膜に形成され、その蒸着源としては例え
ばTeOxとPdの２種類が用いられる。(Prior art) TeO x
(x≒1.0, mixture of Te and TeO 2 ) as the main component,
For example, additives such as Pd, Cu, and Au may be added alone or in combination. These are formed into thin films by vacuum evaporation, and two types of evaporation sources, for example, TeO x and Pd, are used.
（発明が解決しようとする問題点）
上述の真空蒸着法で形成された薄膜は、膜組成
としてTe、TeO2、Pdの混合物からなり、TeOx
にPdが混在したものとみなすことができる。薄
膜の形成時点では非晶質であり、レーザー光等の
照射により結晶化する性質を有するため、反射率
の変化を利用した光記録膜として使われる。ま
た、添加剤であるPd等は結晶化の核となり、そ
の速度を速める役割を有するため、この薄膜は、
記録後時間の経過とともに感度が増す増感の極め
て少ない光記録膜として有望であり、コンピユー
タ用のデータフアイル等の用途としても大きく期
待されている。(Problems to be Solved by the Invention) The thin film formed by the above-mentioned vacuum evaporation method has a film composition of a mixture of Te, TeO 2 and Pd, and is composed of a mixture of TeO x
It can be regarded as a mixture of Pd and Pd. When a thin film is formed, it is amorphous and has the property of crystallizing when irradiated with laser light or the like, so it is used as an optical recording film that takes advantage of changes in reflectance. In addition, additives such as Pd serve as nuclei for crystallization and speed up the crystallization, so this thin film
It is promising as an optical recording film with very little sensitization, and the sensitivity increases with the passage of time after recording, and there are great expectations for its use in data files for computers, etc.
このような光記録膜は、その用途からしても記
録再生特性において10年以上の寿命を保証する必
要があり、各種の加速試験から推定してこの寿命
を満足する膜組成のものが得られている。しかし
ながら、さらに高品質で長寿命なハイエンドデイ
スクを目ざすためには、現在の膜組成における組
成比の調節のみではおのずと限界があり、新たな
材料開発を行なうには多大な時間と経費を要する
という問題がある。 Considering the intended use of such an optical recording film, it is necessary to guarantee a lifespan of 10 years or more in terms of recording and reproducing characteristics, and it has been estimated from various accelerated tests that a film composition that satisfies this lifespan can be obtained. ing. However, in order to aim for high-end disks with even higher quality and longer life, there are naturally limits to simply adjusting the composition ratio of the current film composition, and developing new materials requires a great deal of time and expense. There is.
本発明は、かかる点に鑑みてなされたもので、
前記従来の光記録膜の組成を大きく変えることな
く、高品質で長寿命な信頼性の高い情報記録担体
を得ることを可能にするものである。 The present invention has been made in view of these points,
This makes it possible to obtain a high-quality, long-life, and highly reliable information recording carrier without significantly changing the composition of the conventional optical recording film.
（問題点を解決するための手段）
上記問題点を解決する本発明の技術的な手段
は、薄膜組成として、TeOxを主成分とし、添加
剤として核材料の金属酸化物PdOを加えた構成に
することにある。(Means for Solving the Problems) The technical means of the present invention for solving the above problems is a thin film composition in which TeO x is the main component and a metal oxide PdO as a core material is added as an additive. It is to make it.
この薄膜組成を実現する方法としては、Teと
Pdの複合もしくは合金ターゲツトを用いたO2リ
アクテイブによるスパツタリング法、もしくは
TeOxとPdOの２種類の蒸着源をもつ真空蒸着法
により膜を形成するものである。 The method to achieve this thin film composition is to use Te and
O 2 reactive sputtering method using a Pd composite or alloy target, or
The film is formed using a vacuum evaporation method using two types of evaporation sources: TeO x and PdO.
（作用）
この技術的手段による作用は次のようになる。
即ち、上記の構成によれば、薄膜組成は例えば、
TeOxとPdOがミクロな領域で混在したものとな
る。従来のように添加剤としてPd等の単体金属
を用いた場合には、加速試験中あるいは通常の使
用、保存環境において長時間経過するうちに次第
にPdがPdOに変化し、TeOx中のＯが還元される
方向に作用する。したがつて記録膜全体の組成と
してはTeOxのｘ値が小さくなり、Teリツチな組
成となるため膜劣化の原因となり易く、長期ライ
フを目ざす膜組成としては不利である。(Effect) The effect of this technical means is as follows.
That is, according to the above configuration, the thin film composition is, for example,
TeO x and PdO are mixed in the microscopic region. When a single metal such as Pd is used as an additive as in the past, Pd gradually changes to PdO over a long period of time during accelerated tests or in normal use and storage environments, and the O in TeO x Acts in the direction of reduction. Therefore, as for the overall composition of the recording film, the x value of TeO x becomes small, resulting in a Te-rich composition, which is likely to cause film deterioration, which is disadvantageous for a film composition aiming at a long life.
そこで添加剤Pdの代わりにPdOを用いた膜組
成であれば、TeOx中のＯが還元されることなく、
長期ライフを実現することができる。 Therefore, if the film composition uses PdO instead of the additive Pd, the O in TeO x will not be reduced.
A long-term life can be achieved.
また、核材料としてのPdの役割については、
PdOに代わつたとしても同様の役割をもつてお
り、相転移型の光記録膜のレーザー照射による結
晶化速度を速めることには変わりない。さらに、
信号の記録再生に対する膜特性についてもPdの
場合と同等以上であることが確かめられた。 Regarding the role of Pd as a nuclear material,
Even if it is replaced with PdO, it will still have the same role, accelerating the crystallization rate of phase-transition optical recording films by laser irradiation. moreover,
It was confirmed that the film properties for recording and reproducing signals were also equal to or better than that of Pd.
（実施例）
以下、本発明の実施例を添付画面にもとづいて
説明する。第１図は、本発明の一実施例の光記録
担体の断面を示したものであり、光案内用の溝１
を形成したポリカーボネートからなる樹脂基板２
の表面に、テルルの低酸化物TeOx（０＜ｘ＜２）
とPdOy（０＜ｙ１、PdとPdOの混合物）から
なる光記録膜３が設けられており、樹脂基板２′
と光硬化性樹脂の接着剤４によつて全面接合さ
れ、デイスクの形態をなしている。(Example) Hereinafter, an example of the present invention will be described based on attached screens. FIG. 1 shows a cross section of an optical record carrier according to an embodiment of the present invention, and shows a groove 1 for guiding light.
A resin substrate 2 made of polycarbonate formed with
on the surface of the tellurium low oxide TeO x (0<x<2)
and PdO y (0<y1, a mixture of Pd and PdO), and a resin substrate 2'
The entire surface is bonded with a photocurable resin adhesive 4 to form a disk.
このようなデイスクの光記録膜３は、例えば第
２図に示される方法によつて形成される。第２図
は高周波マグネトロン方式によるスパツタリング
装置であり、装置本体５がチヤンバー６の内部に
一対の電極７，８を備えており、その電極７，８
に薄膜形成用の基板９とスパツタリング用のター
ゲツト１０それぞれ取り付けられている。このチ
ヤンバー６内に一定量のスパツタガス１１、例え
ばArとO2の混合ガスが流入し、反応性スパツタ
リングによりターゲツト組成がスパツタされて基
板上に光記録膜が形成される。 The optical recording film 3 of such a disk is formed, for example, by the method shown in FIG. FIG. 2 shows a sputtering device using a high frequency magnetron system, in which the device main body 5 is equipped with a pair of electrodes 7 and 8 inside a chamber 6.
A substrate 9 for forming a thin film and a target 10 for sputtering are respectively attached to the substrate. A certain amount of sputtering gas 11, for example a mixed gas of Ar and O2 , flows into the chamber 6, and a target composition is sputtered by reactive sputtering to form an optical recording film on the substrate.
スパツタリング用ターゲツトの構成としては、
例えばTeのターゲツトにPdの金属片を載置もし
くは埋め込んだ複合ターゲツトがあるが、この他
にもTeとPdを一定の組成比で合金としたターゲ
ツトや、TeとPdのそれぞれのターゲツトを複数
個用いたマルチターゲツトがある。 The composition of the sputtering target is as follows:
For example, there is a composite target in which a Pd metal piece is placed or embedded in a Te target, but there are also targets made of an alloy of Te and Pd at a certain composition ratio, or multiple targets of each of Te and Pd. There are multiple targets used.
いずれのターゲツトの構成であつても、スパツ
タガスとして、Ar＋O2等のO2含む混合ガスを用
いれば、スパツタされたターゲツト組成は基板に
付着するまでの間にO2と反応し、TeはTeOx、
PdはPdOyとなる。 Regardless of the target configuration, if a mixed gas containing O 2 such as Ar + O 2 is used as the sputtering gas, the sputtered target composition will react with O 2 before it adheres to the substrate, and Te will react with TeO x ,
Pd becomes PdO y .
こうして形成された光記録膜は、信号の記録再
生特性において、Pdのみを添加剤として用いた
光記録膜の特性を上まわることが実験的に確かめ
られた。第３図は、光記録膜の記録再生信号特性
を示したもので、添加剤としてPdOを用いたもの
（曲線Ａ）とPdのみを用いたもの（曲線Ｂ）の比
較である。後者の光記録膜は記録パワーの高いと
ころでＣ／Ｎが低下する傾向を有するが、前者の
膜は一定を保つている。また増感特性に対して
も、本発明の記録膜は特に問題はなく、コンピユ
ータ用のデータフアイルとして十分使用できるこ
とが確かめられた。 It has been experimentally confirmed that the optical recording film thus formed has signal recording and reproducing characteristics that exceed those of an optical recording film using only Pd as an additive. FIG. 3 shows the recording/reproduction signal characteristics of the optical recording film, and is a comparison between one using PdO as an additive (curve A) and one using only Pd (curve B). The latter optical recording film has a tendency for the C/N to decrease at high recording power, whereas the former film maintains a constant C/N. It was also confirmed that the recording film of the present invention had no particular problems with regard to sensitization properties and could be used satisfactorily as a data file for a computer.
第４図は、本発明の記録膜の加速試験における
Ｃ／Ｎの変化を示したものである。80℃、80％
R.H.の加速条件下において、1000時間経過後も
Ｃ／Ｎの低下は1dB程度であり、通常の使用、保
存環境下においては数十年の寿命であると推定で
きる。したがつて、高品質、長寿命を目的とする
ハイエンドデイスクの用途にも十分適用できる。 FIG. 4 shows the change in C/N in an accelerated test of the recording film of the present invention. 80℃, 80%
Under RH acceleration conditions, the C/N decrease was about 1 dB even after 1000 hours, and it can be estimated that the product has a lifespan of several decades under normal usage and storage conditions. Therefore, it is fully applicable to high-end disk applications that aim for high quality and long life.
なお、本実施例のスパツタリング装置としては
高周波発振によるアグネトロン方式を用いたが、
カソードが絶縁体でない場合には、DC電源を用
いたスパツタ方式も可能であり、本実施例の光記
録膜の形成に対しては何らの支障もない。 Note that the agnetron method using high-frequency oscillation was used as the sputtering device in this example.
If the cathode is not an insulator, a sputtering method using a DC power source is also possible, and there is no problem in forming the optical recording film of this example.
また、スパツタ方式を採つた本実施例では、
TeとPdの複合もしくは合金、マルチターゲツト
においてO2リアクテイブなスパツタリング法に
よつて所望の光記録膜を形成しているが、この他
にも、Te、TeO2とPdOのマルチターゲツトを用
い、不活性ガス例えばArのみによる非反応性ス
パツタリングによつてもほぼ同等の光記録膜が得
られ、特性や寿命の点においても有意差のないこ
とが確かめられた。 In addition, in this embodiment which adopted the spatuta method,
The desired optical recording film is formed using a composite or alloy of Te and Pd, or a multi-target, using an O 2 reactive sputtering method. It was confirmed that almost the same optical recording film was obtained by non-reactive sputtering using only an active gas such as Ar, and there was no significant difference in terms of properties and lifespan.
次に、本発明の第２の実施例について図面とと
もに説明する。第５図は、真空蒸着装置を示した
もので、装置本体１２はチヤンバー１３の内部に
複数のハース１４を備えており、その中に蒸着源
としてのTeOxのペレツト１５と金属酸化物PdO
のペレツト１６が置かれている。これらの上方に
は樹脂基板１７が取り付けられ、抵抗加熱もしく
は電子ビームによつてTeOxとPdOが同時蒸着さ
れる。 Next, a second embodiment of the present invention will be described with reference to the drawings. FIG. 5 shows a vacuum evaporation apparatus, in which the main body 12 of the apparatus is equipped with a plurality of hearths 14 inside a chamber 13, in which pellets 15 of TeO x and metal oxide PdO as evaporation sources are deposited.
16 pellets are placed. A resin substrate 17 is attached above these, and TeO x and PdO are co-evaporated by resistance heating or electron beam.
このようにして形成された光記録膜の特性およ
び寿命は前述の実施例と同様であるが、膜組成と
してのPdOyのｙ値は非常に１に近いものとなる。
Pdが単体で混在している場合、長時間のうちに
TeOxのＯを還元する作用をもつことからすれば、
Pdが単体として存在する量は少ない方が好まし
い。すなわち、ｙ値としては大きい方が寿命に対
しては有利であるといえるが、実験によれば0.5
＜ｙ1.0であれば特に問題のないことが確かめ
られた。 The characteristics and lifespan of the optical recording film thus formed are similar to those of the above embodiments, but the y value of PdO y as a film composition is very close to 1.
If Pd is used alone or in a mixture, over a long period of time
Considering that TeO x has the effect of reducing O,
It is preferable that the amount of Pd present as a simple substance is small. In other words, it can be said that a larger y value is advantageous for the lifespan, but according to experiments, 0.5
It was confirmed that there is no particular problem if <y1.0.
（発明の効果）
本発明は、テルルの低酸化物TeOx（０＜ｘ＜
２）を主成分とし、PdとPdOの混合物PdOy（０
＜ｙ≦１）を含む光記録膜を形成することによ
り、高品質で長寿命なハイエンドデイスクを実現
できるものである。(Effect of the invention) The present invention provides a low tellurium oxide TeO x (0<x<
2) as the main component, a mixture of Pd and PdO PdO y (0
By forming an optical recording film containing <y≦1), a high-end disk with high quality and long life can be realized.
また、TeOxとPdからなる光記録膜の特性を失
うことなく、反応性スパツタリング等によつて容
易に光記録膜を形成することができ、量産性を向
上するためにも大きな効果を有するものである。 In addition, an optical recording film made of TeO x and Pd can be easily formed by reactive sputtering, etc. without losing its properties, and is highly effective in improving mass productivity. It is.
第１図は、本発明の第１の実施例における光学
式情報記録担体の断面図、第２図は、同実施例の
製造方法を示す装置の概略図、第３図は、同実施
例における光記録膜の記録パワー特性図、第４図
は、同光記録膜の加速試験による特性変化を示す
図、第５図は、本発明の第２の実施例の製造方法
を示す装置の概略図である。
１，１′……光案内用溝、２，２′……樹脂基
板、３……光記録膜、４……接着剤、１０……ス
パツタリング用ターゲツト、１１……スパツタガ
ス、１５……TeOxペレツト、１６……PdOペレ
ツト。
1 is a sectional view of an optical information recording carrier according to a first embodiment of the present invention, FIG. 2 is a schematic diagram of an apparatus showing a manufacturing method of the same embodiment, and FIG. 3 is a cross-sectional view of an optical information recording carrier according to a first embodiment of the present invention. A recording power characteristic diagram of the optical recording film, FIG. 4 is a diagram showing the change in characteristics of the optical recording film due to an accelerated test, and FIG. 5 is a schematic diagram of an apparatus showing the manufacturing method of the second embodiment of the present invention. It is. 1, 1'... Light guide groove, 2, 2'... Resin substrate, 3... Optical recording film, 4... Adhesive, 10... Sputtering target, 11... Sputtering gas, 15... TeO x Pellets, 16...PdO pellets.
Claims (1)
２）を主成分とし、PdとPdOの混合物PdOy（０
＜ｙ≦１）を含む光記録膜を形成してなることを
特徴とする光学式情報記録担体。 ２ テルルとパラジウムの複合もしくは合金から
なる少なくとも１つのターゲツト、またはテルル
単体とパラジウム単体の各１個以上からなるマル
チターゲツトを用い、不活性ガスと酸素の混合ガ
ス中における反応性スパツタリング法により、光
記録膜を形成することを特徴とする光学式情報記
録担体の製造方法。 ３ テルルの低酸化物TeOx（０＜ｘ＜２）とパラ
ジウムの金属酸化物PdOをそれぞれ蒸着源とし、
真空蒸着法による同時蒸着で光記録膜を形成する
ことを特徴とする光学式情報記録担体の製造方
法。[Claims] 1. A low tellurium oxide TeO x (0<x<
2) as the main component, a mixture of Pd and PdO PdO y (0
An optical information recording carrier characterized by forming an optical recording film containing <y≦1). 2. Using at least one target made of a composite or alloy of tellurium and palladium, or a multi-target made of one or more of each of tellurium and palladium, optical sputtering is performed in a mixed gas of inert gas and oxygen. A method for producing an optical information recording carrier, comprising forming a recording film. 3 Using a low tellurium oxide TeO x (0<x<2) and a palladium metal oxide PdO as evaporation sources,
A method for producing an optical information recording carrier, characterized in that an optical recording film is formed by simultaneous vapor deposition using a vacuum evaporation method.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60289368A JPS62148291A (en) | 1985-12-24 | 1985-12-24 | Optical information recording carrier and its manufacturing method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60289368A JPS62148291A (en) | 1985-12-24 | 1985-12-24 | Optical information recording carrier and its manufacturing method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62148291A JPS62148291A (en) | 1987-07-02 |
| JPH0530388B2 true JPH0530388B2 (en) | 1993-05-07 |
Family
ID=17742301
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60289368A Granted JPS62148291A (en) | 1985-12-24 | 1985-12-24 | Optical information recording carrier and its manufacturing method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62148291A (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2543056B2 (en) * | 1986-12-02 | 1996-10-16 | 松下電器産業株式会社 | Method for manufacturing optical information recording member |
-
1985
- 1985-12-24 JP JP60289368A patent/JPS62148291A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62148291A (en) | 1987-07-02 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |