JPH0535566B2 - - Google Patents

Description

[Detailed Description of the Invention] [Field of the Invention] The present invention relates to an apparatus for manufacturing semiconductor devices such as LSI and VLSI, and in particular, a system for arbitrarily grouping commands and parameters related to the operation of the apparatus.
The present invention relates to semiconductor manufacturing equipment that allows a user to easily operate the equipment.

[Background of the Invention] As the degree of integration of semiconductor integrated circuits increases, efforts are being made to improve the functionality and performance of semiconductor manufacturing equipment.
As these devices become more sophisticated and performant, the number of commands and parameters used to operate these types of devices has also increased significantly. These numerous commands and parameters each play an important role in controlling the operation of semiconductor manufacturing equipment.
This is indispensable for maximizing the functionality of the device.

However, due to the large number of commands, it is completely impossible for engineers, operators, etc. who operate the device to memorize all of these commands. In particular, the operator is a person assigned to mainly start and stop the daily operations of the semiconductor manufacturing equipment, and it is unnecessary to memorize all commands and the like. That is, operating the device using all the commands and parameters is originally the job of a skilled engineer, and it is sufficient for the operator to operate only a small number of the parameters on a daily basis. Due to the above circumstances, for example, when an operator uses commands other than those that are used on a daily basis,
Because I relied on my vague memory, I often made mistakes in inputting commands that were not what I wanted.

Normally, in order to prevent these erroneous operations, users such as operators are forced to ask experts or rely on manuals. This is very inconvenient for the operation of the device. For example, when operating a device, an operator is often seen in front of a console inputting commands while consulting a manual. In such a case, the operator's input speed becomes extremely slow, resulting in a slowdown in the throughput of the device, the operator's inability to concentrate on operations at the console, and more input errors.

In particular, commands and parameters are often abbreviations of one to three characters or coded, and in such cases there is a drawback that erroneous operations are more likely to occur.

[Object of the Invention] In view of the above-mentioned problems of the conventional method, the present invention provides a semiconductor manufacturing apparatus that prevents an operator from making an erroneous operation when inputting commands and operating parameters of the apparatus, and that enables the desired operation to be performed reliably. The purpose is to provide

[Description of Examples] Examples of the present invention will be described below with reference to the drawings. FIG. 1 shows the appearance of a projection exposure apparatus according to an embodiment of the present invention. In the figure, 1 is a mask provided with an integrated circuit pattern, and also includes mask alignment marks and mask-wafer alignment marks. 2 is a mask stage that holds the mask 1 and moves the mask 1 in the plane (XY direction) and in the rotational direction (θ direction). 3 is a reduction projection lens, 4 is a wafer equipped with a photosensitive layer, and a mask/
It has a wafer alignment mark and a TV wafer alignment mark. 5 is a wafer stage. The wafer stage 5 holds the wafer 4 and moves it in the plane and in the rotational direction, and also moves between the wafer printing position (within the projection field) and the television/wafer alignment position. 6 is an objective lens of a television/wafer alignment detection device; 7 is an image pickup tube or a solid-state imaging device; and 9 is a binocular unit, which serves to observe the surface of the wafer 4 through the projection lens 3. 10 is an upper unit housing an illumination optical system and a detection device for mask-wafer alignment. 11 is a console monitor receiver (console CRT) for giving commands to the main body of the projection exposure apparatus, and 12 is a keyboard for giving commands to the apparatus and inputting parameters.

FIG. 2 is a block diagram showing the electrical circuit configuration of the projection exposure apparatus of FIG. 1. In the same figure, 21
is the main CPU that controls the entire device and consists of a central processing unit such as a microcomputer or minicomputer. 22 is a wafer stage drive device, 23 is an alignment detection system, 24 is a reticle stage drive device, 25 is an illumination system, 26 is a shutter drive device, 27 is a focus detection system, and 28 is a Z
These drive devices are controlled by the main CPU 21. 29 is a conveyance system.

30 is the console unit, and the main CPU 21
This is for giving various commands and parameters related to the operation of this exposure apparatus. 31 is a console CPU, and 32 is an external memory for storing parameters and the like. Note that the CRT 11 and keyboard 12 are the same as those shown in FIG.

FIG. 3 is a hierarchical diagram showing how commands are grouped. In the figure, the lowest layer is the execution command. When these commands are input while the device is in a command input waiting state, the device performs operations according to the commands. Several execution commands are grouped together and given group names as shown in the middle row. One execution command may be included in multiple groups.

Next, the flowchart of Fig. 4 and Fig. 5a--
The operation when defining a group of commands in the apparatus shown in FIGS. 1 and 2 will be described with reference to the display screen example shown in FIG. 5e.

In this device, when initialization is completed after power-on, and when a predetermined operation command (command) is
When it finishes executing, it enters a command waiting state.
In other words, the console CPU 31 is the keyboard 12
The main CPU 21 waits for a key operation in the console CPU 31, and enters a state of waiting for communication from the console CPU 31.
Then, in this state, from the keyboard 12, a command for defining a group of commands (for example, GD)
When input, the following group definition process is started under the control of the console CPU 31.

Note that here, a case will be described in which a new execution command is registered as a member in a predefined group. A distinction as to whether a new group is to be defined or an existing group definition is to be changed is made when a group definition command is input. For example, if you input the above command GD with a group name parameter such as AA and input it as "GD AA", it will change the definition of that group AA, and if you input it without parameters, it will change the definition of a new group. good.

In the group definition process, first, the name, password, etc. of the group to be processed are displayed on the CRT 11 (step S1). The screen display at this time is
It is as shown in Figure 5a. Further, these data are stored in the external memory 32. Here, the group name is "AA", the password is "Canon", the comment is "MOS", and the members are "OC", "WA", and "RC". A comment is given to each member. "Select No. or End" in the lower row is a prompt message, prompting input as to which item to change or whether to end the group definition process (step S2). Here, you can change each item by entering the number attached to it. For example, if "1" is input, the groove name can be changed in steps S3 and S4. Passwords and comments can also be changed in steps S5 to S8. Chapter 5a
In the screen shown in the figure, select "4" to process members.
is being input (step S9). The screen will then look like the one shown in Figure 5b. On this screen,
The definition information about groups is the same as in Figure 5a, but
The prompt message at the bottom is different. This message "Select (O: ADD, 1: DELETE, E:
END)'' prompts input as to whether to add a new member, delete a member, or end the member change process (step S10). After inputting this, determine whether to add, delete, or terminate.
When adding, steps S11 and S12 are performed, and when deleting, steps S13 and S14 are performed. On the screen shown in FIG. 5b, "O" indicating addition of a member is input (step S11). With this input, the screen will look like the one shown in Figure 5c. The message “ADD (4)” is displayed at the bottom,
This indicates that the fourth member is being added. Here, as shown in the same figure, "RA:
When "Comment D" is input as a new member, the screen becomes as shown in FIG. 5d, and the new member is additionally registered (step S12). Thereafter, the sequence returns to step S10 and the member modification process can be continued again. To end the member change process, in the input step S10,
That is, input "E" on the screen shown in FIG. 5d (step S15) and return to step S2. To end the group definition process, enter "E" in step S2 as shown in Figure 5e.
S16). As a result, various group definition data are stored in the external memory 32.

Next, the command input operation in the apparatus shown in FIGS. 1 and 2 will be described with reference to the flowchart shown in FIG. 6 and the display screen example shown in FIG. 7.

First, when a command is input from the command input waiting state (step S21), it is determined whether it is an execution level command (step S22). if,
When the command is at the execution level, processing is executed according to the input execution command. If it is not an execution level command, it is determined whether it is a group name (step S23), and if it is not a group name, an error is displayed (step S24), and the process returns to the state of waiting for command input (step S21).
If it is a group name in step S23, the group data such as execution level commands constituting the group is read from the external memory 32 and displayed as a list on the CRT 11 (step S25). The screen at this time is as shown in FIG. In the figure, there is a command input area at the top of the screen, and "AA" is entered as the group name. In the middle row, all commands that make up the corresponding group name AA are displayed along with comments. This comment provides an overview of the command's behavior. After that, all you have to do is look at the screen and input the execution command (step S26).

Although the execution commands are input using abbreviations here, numbers are attached to the commands in the list display shown in Figure 7, and by inputting those numbers, the same function as the execution command can be executed. You can also do this.

As described above, in the projection exposure apparatus of this embodiment, the user can freely define groups of commands at the execution level. Furthermore, one execution command can be a component of multiple groups, and groups can be named freely. Therefore, if the executed commands are grouped in various ways, such as by function, name, user, etc., it is very effective to search for ambiguous commands. In other words, if the user becomes unsure of a desired command to input while operating the device, the command can be confirmed using various group names, thereby preventing erroneous operation of the device. Additionally, users can check these commands directly using the console.
The user can perform a series of operations on the console without having to refer to the manual or the like.
You can continue operations while concentrating on the console.

[Effects of the Invention] As explained above, according to the present invention, commands and operating parameters are grouped and stored with group names in semiconductor manufacturing equipment, and when this group name is input while waiting for command input. In some cases, the commands and operating parameters that make up the group are displayed.
It is possible to prevent erroneous operations when an operator or the like inputs commands or parameters, and to reliably perform desired operations.

[Brief explanation of the drawing]

Fig. 1 is an external view of a projection exposure apparatus according to an embodiment of the present invention, Fig. 2 is a block diagram showing a control circuit of the projection exposure apparatus of the above embodiment, and Fig. 3 shows a grouping of commands. FIG. 4 is a flowchart for explaining the operation and effect when defining a group of commands in the above embodiment, and FIG. Display screen example, 6th
The figure is a flowchart for explaining the operation and effect when inputting a command in the above embodiment, and FIG. 7 is an example of a display screen when inputting a command in the above embodiment. 11... CRT for monitor, 12... Keyboard,
21...Main CPU, 30...Console, 31
...Console CPU, 32...External memory.

Claims (1)

[Scope of Claims] 1. A semiconductor manufacturing device that operates according to a large number of commands and operation parameters, which stores the commands and operation parameters in groups and assigns group names, and stores the group in a command input waiting state. A semiconductor manufacturing apparatus characterized in that commands and operating parameters constituting a group are displayed by inputting a name. 2. The semiconductor manufacturing apparatus according to claim 1, wherein said grouping stores comments together with said commands and operating parameters, and displays said comments together with said commands and operating parameters upon said display. 3. The semiconductor manufacturing apparatus according to claim 1 or 2, wherein the operation is an exposure operation. 4. The semiconductor manufacturing apparatus according to claim 1, wherein the grouping is changeable based on input data from a keyboard.