JPH0535962B2 - - Google Patents
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- Publication number
- JPH0535962B2 JPH0535962B2 JP5054186A JP5054186A JPH0535962B2 JP H0535962 B2 JPH0535962 B2 JP H0535962B2 JP 5054186 A JP5054186 A JP 5054186A JP 5054186 A JP5054186 A JP 5054186A JP H0535962 B2 JPH0535962 B2 JP H0535962B2
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- Japan
- Prior art keywords
- magnetic field
- magnetic
- closed
- main shaft
- detectors
- Prior art date
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- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
Description
【発明の詳細な説明】
〔概 要〕
リニア・スケールであつて、逆の極性部分を有
する閉磁路の逆極性部分にそれぞれ近接して磁界
検出器を設け、両者の出力が同等となる位置を零
点として補正することにより、外乱による零点の
ドリフトを防止可能とする。[Detailed Description of the Invention] [Summary] It is a linear scale, and magnetic field detectors are provided close to the opposite polarity portions of a closed magnetic circuit having opposite polarity portions, and positions where the outputs of both are equal are determined. By correcting it as a zero point, it is possible to prevent the zero point from drifting due to disturbance.
本発明は絶対位置の検出を行なうリニア・スケ
ールに関するもので、さらに詳しく言えば、温度
変化等の外乱があつても零点を正確に設定できる
リニア・スケールに関するものである。
The present invention relates to a linear scale that detects absolute position, and more specifically, to a linear scale that can accurately set the zero point even when there are disturbances such as temperature changes.
近年、信頼性にすぐれた無接触型の絶対位置検
出器の開発が進められている。
In recent years, development of highly reliable non-contact absolute position detectors has been progressing.
第６図は従来の無接触型の絶対位置検出器であ
るリニア・スケールを示す図である。これは２枚
のパーマロイ等の軟磁性板１，１′の両端にアル
ニコ磁石２，２′が、その極性が逆になるように
して挿入された閉磁路３と、前記軟磁性板１，
１′に平行に移動可能に設けられた主軸４と、該
主軸に設けられた磁界検出器５とにより構成さ
れ、閉磁路３からの磁束のもれを磁界検出器５に
より検出し、主軸４を介して被測定物の位置を計
測することができるようになつている。 FIG. 6 is a diagram showing a linear scale which is a conventional non-contact type absolute position detector. This consists of a closed magnetic circuit 3 in which alnico magnets 2, 2' are inserted at both ends of two soft magnetic plates 1, 1' such as permalloy with their polarities reversed, and
1', and a magnetic field detector 5 provided on the main shaft.The magnetic field detector 5 detects leakage of magnetic flux from the closed magnetic path 3, It is now possible to measure the position of the object to be measured via the
上記従来のリニア・スケールでは、一方の磁路
に接近した１つの磁界検出器５により位置測定を
行なうため、温度の上昇による磁石２，２′の飽
和磁束密度の減少や磁界検出器５の出力の変化及
び不平衡電圧のドリフトによつて零点が移動し、
絶対位置の誤差を生ずる欠点があつた。
In the above-mentioned conventional linear scale, position measurement is performed using one magnetic field detector 5 that is close to one of the magnetic paths, so the saturation magnetic flux density of the magnets 2 and 2' decreases due to temperature rise, and the output of the magnetic field detector 5 increases. The zero point moves due to changes in and unbalanced voltage drift,
There was a drawback that it caused an error in absolute position.
本発明はこのような点に鑑みて創作されたもの
で、外乱にかかわらず絶対位置を測定できるリニ
ア・スケールを提供することを目的としている。 The present invention was created in view of these points, and an object of the present invention is to provide a linear scale that can measure absolute position regardless of disturbance.
このため本発明のリニア・スケールにおいて
は、平行に配置した２個の軟磁性板１０，１１
と、該軟磁性板１０，１１の両端に磁界方向が互
いに反対の向きとなるように挿入した２個の永久
磁石１２，１３とにより構成された閉磁路１４
と、該閉磁路１４の内部に位置し、且つ該閉磁路
１４に対し相対的に可動する主軸１５と、該主軸
に装着された磁界強度測定用の２個の磁界検出器
１６，１７とを具備してなるリニア・スケールに
おいて、
前記２個の磁界検出器１６，１７を、互いに磁
束方向が異なる磁路に対向させて配置し、該２個
の磁界検出器１６，１７が閉磁路１４からの漏洩
磁界の強度及び磁界方向を検出し、その出力が同
等となる位置を原点とする補正機能を有すること
を特徴としている。
Therefore, in the linear scale of the present invention, two soft magnetic plates 10 and 11 arranged in parallel are used.
and two permanent magnets 12 and 13 inserted at both ends of the soft magnetic plates 10 and 11 so that the magnetic field directions are opposite to each other.
, a main shaft 15 located inside the closed magnetic path 14 and movable relative to the closed magnetic path 14, and two magnetic field detectors 16 and 17 mounted on the main shaft for measuring magnetic field strength. In the linear scale, the two magnetic field detectors 16 and 17 are arranged to face magnetic paths having different magnetic flux directions, and the two magnetic field detectors 16 and 17 are separated from the closed magnetic path 14. It is characterized by having a correction function that detects the strength and direction of the leakage magnetic field and sets the origin at the position where the outputs are the same.
また本発明のリニア・スケールにおいては、平
行に配置した２個の軟磁性板１０，１１と、該軟
磁性板１０，１１の両端に磁界方向が互いに反対
の向きとなるように挿入した２個の永久磁石１
２，１３とにより構成された閉磁路１４と、該閉
磁路１４の内部に位置し、且つ該閉磁路１４に対
し相対的に可動する主軸１５と、該主軸に装着さ
れた磁界強度測定用の２個の磁界検出器１６，１
８とを具備してなるリニア・スケールにおいて、
前記２個の磁界検出器１６，１８を、任意の距
離を離して並列させ、磁束方向が同一な磁路に対
向させて配置し、該２個の磁界検出器１６，１８
が閉磁路１４からの漏洩磁界の強度を検出し、そ
の出力を互いに＋−逆極性となるように増幅し、
その出力が等しくなる位置を原点とする補正機能
を有することを特徴としている。 Further, in the linear scale of the present invention, two soft magnetic plates 10 and 11 are arranged in parallel, and two soft magnetic plates 10 and 11 are inserted at both ends of the soft magnetic plates 10 and 11 so that the magnetic field directions are opposite to each other. permanent magnet 1
2 and 13, a main shaft 15 located inside the closed magnetic path 14 and movable relative to the closed magnetic path 14, and a magnetic field strength measurement device attached to the main shaft. 2 magnetic field detectors 16,1
8, the two magnetic field detectors 16 and 18 are arranged in parallel with an arbitrary distance apart and are arranged to face magnetic paths with the same magnetic flux direction, and the two magnetic field detectors 16 and 18 are magnetic field detectors 16, 18
detects the strength of the leakage magnetic field from the closed magnetic circuit 14, amplifies the output so that the polarity is +/-opposite to each other,
It is characterized by having a correction function whose origin is the position where the outputs are equal.
さらに本発明のリニア・スケールにおいては、
平行に配置した２個の軟磁性板１０，１１と、該
軟磁性板１０，１１の両端に磁界方向が互いに反
対の向きとなるように挿入した２個の永久磁石１
２，１３とにより構成された閉磁路１４と、該閉
磁路１４の内部に位置し、且つ該閉磁路１４に対
し相対的に可動する主軸１５と、該主軸に装着さ
れた磁界強度測定用の２個の磁界検出器１６，１
８とを具備してなるリニア・スケールにおいて、
前記２個の磁界検出器１６，１８を、任意の距
離を離して並列させ、磁束方向が同一な磁路に対
向させて配置し、該２個の磁界検出器１６，１８
が閉磁路１４からの漏洩磁界の強度を検出し、そ
の出力差から位置−出力特性曲線の傾きを求め、
その傾きを予め基準状態時に測定した位置−出力
特性曲線の傾きと比較して補正係数を求め、一方
の磁界検出器１６又は１８の測定した位置を前記
補正係数により補正して絶対位置を求めることを
特徴としている。 Furthermore, in the linear scale of the present invention,
Two soft magnetic plates 10 and 11 arranged in parallel, and two permanent magnets 1 inserted at both ends of the soft magnetic plates 10 and 11 so that the magnetic field directions are opposite to each other.
2 and 13, a main shaft 15 located inside the closed magnetic path 14 and movable relative to the closed magnetic path 14, and a magnetic field strength measurement device attached to the main shaft. 2 magnetic field detectors 16,1
8, the two magnetic field detectors 16 and 18 are arranged in parallel with an arbitrary distance apart and are arranged to face magnetic paths with the same magnetic flux direction, and the two magnetic field detectors 16 and 18 are magnetic field detectors 16, 18
detects the strength of the leakage magnetic field from the closed magnetic circuit 14, calculates the slope of the position-output characteristic curve from the output difference,
A correction coefficient is obtained by comparing the slope with the slope of a position-output characteristic curve previously measured in a reference state, and the position measured by one of the magnetic field detectors 16 or 18 is corrected by the correction coefficient to obtain an absolute position. It is characterized by
２個の磁界検出器を各々極性の異なる磁路に近
接して設けることにより、主軸が移動すると、一
方の検出器の出力は増加し、他方の検出器の出力
は減小し同じ値となる所が存在し、この点を零点
とすれば、この点は、温度の変化があつても２つ
の検出器の出力が同時に変化するので零点のドリ
フト防止が可能となる。
By placing two magnetic field detectors close to magnetic paths with different polarities, when the main axis moves, the output of one detector increases and the output of the other decreases to the same value. If there is a point and this point is set as the zero point, the outputs of the two detectors will change simultaneously at this point even if the temperature changes, making it possible to prevent the zero point from drifting.
第１図は本発明の第１の実施例を示す図であ
る。
FIG. 1 is a diagram showing a first embodiment of the present invention.
本実施例はパーマロイや磁性ステンレス等から
なる２枚の軟磁性板１０，１１の間に、磁束を与
える手段として２個のアルニコ磁石１２，１３が
極性が逆になる様にして挿入された閉磁路１４
と、前記軟磁性板１０，１１と平行方向に移動可
能に設けられた主軸１５と、該主軸１５の上に設
けられ、それぞれ極性の異なる磁路に面して配置
された磁界検出器１６，１７とを具備して構成さ
れている。なおこの磁界検出器１６，１７には磁
界の強度及び極性が検出でき、且つ出力の直線性
の良いバーバーポール型の磁気抵抗素子が最適で
ある。 In this embodiment, two alnico magnets 12 and 13 are inserted between two soft magnetic plates 10 and 11 made of permalloy, magnetic stainless steel, etc. so as to provide magnetic flux so that the polarities are reversed. Road 14
, a main shaft 15 provided movably in a direction parallel to the soft magnetic plates 10 and 11, and a magnetic field detector 16 provided on the main shaft 15 and arranged facing magnetic paths having different polarities, respectively. 17. For the magnetic field detectors 16 and 17, a barber-pole type magnetoresistive element is optimal because it can detect the strength and polarity of the magnetic field and has good output linearity.
このように構成された本実施例は、第２図に示
すように方向に主軸１５が移動すると一方の検
出器１６の出力は増加するのに対し、他方の検出
器１７では減少する。従つて両者の出力が同じ値
となる位置ａが存在し、温度変化があつても、そ
れぞれ磁界検出器に接続された増幅器の出力レベ
ルは同一方向に変化するため基準となる零点の位
置a′はドリフトしないことになる。 In this embodiment configured as described above, when the main shaft 15 moves in the direction shown in FIG. 2, the output of one detector 16 increases, while the output of the other detector 17 decreases. Therefore, there is a position a where both outputs have the same value, and even if there is a temperature change, the output levels of the amplifiers connected to each magnetic field detector change in the same direction, so the reference zero point position a' will not drift.
第３図は本発明の第２の実施例を示す図であ
る。同図において第１図と同一部分は同一符号を
付した。 FIG. 3 is a diagram showing a second embodiment of the present invention. In this figure, the same parts as in FIG. 1 are given the same reference numerals.
本実施例の構成は、第１の実施例に加え、一方
の磁界検出器１６からある間隔ｌを離して第３の
磁界検出器１８を配置したものである。 The configuration of this embodiment is such that, in addition to the first embodiment, a third magnetic field detector 18 is arranged at a certain distance l from one magnetic field detector 16.
アルニコ磁石（Fe−Al−Ni−Co）やSmCo磁
石は周囲の温度が上昇すると、飽和磁束密度が減
小してくるため、閉磁路からの磁束のもれが小さ
くなり見かけ上感度が小さくなる場合がある。
（但し第１の実施例で述べた様に零点の位置は変
化しない。）本実施例では、第４図に示すように
検出器１６と、該検出器から距離ｌ隔れた位置に
ある検出器１８の出力の差から位置−出力特性曲
線の傾きb′／ｌを求め、この値を予め基準状態時
に測定した位置−出力特性曲線の傾きｂ／ｌと比
較して補正係数を求め、一方の検出器１６または
１８が測定した位置をこの補正係数で補正するこ
とにより絶対位置を求めることができる。この補
正にはマイクロプロセツサを用いる。 As the surrounding temperature of alnico magnets (Fe-Al-Ni-Co) and SmCo magnets increases, the saturation magnetic flux density decreases, so the leakage of magnetic flux from the closed magnetic circuit becomes smaller and the apparent sensitivity becomes smaller. There are cases.
(However, as described in the first embodiment, the position of the zero point does not change.) In this embodiment, as shown in FIG. The slope b'/l of the position-output characteristic curve is determined from the difference in the output of the device 18, and this value is compared with the slope b/l of the position-output characteristic curve previously measured in the reference state to determine the correction coefficient. The absolute position can be determined by correcting the position measured by the detector 16 or 18 using this correction coefficient. A microprocessor is used for this correction.
なお閉磁路の構成法や用いる材料及び検出器の
位置等は実施例に限定されない。又検出器として
ホール素子を使用しても同様の効果を得ることが
できる。また本実施例によれば外乱や温度変化等
による零点や感度のドリフトを補正することがで
きるので信頼性の高い絶対位置の計測を行うこと
が可能である。 Note that the construction method of the closed magnetic path, the materials used, the position of the detector, etc. are not limited to the examples. Also, similar effects can be obtained by using a Hall element as a detector. Furthermore, according to this embodiment, it is possible to correct drifts in the zero point and sensitivity due to disturbances, temperature changes, etc., and therefore it is possible to perform highly reliable absolute position measurement.
第５図は本発明の第３の実施例を示す図であ
る。同図において、第１図と同一部分は同一符号
を付して示した。 FIG. 5 is a diagram showing a third embodiment of the present invention. In this figure, the same parts as in FIG. 1 are designated by the same reference numerals.
本実施例の構成は同図に示すように２つの磁界
検出器１６，１８を並べて同一極性の面に近接し
て配置し、その２つの検出器１６，１８の出力
を逆極性にして増幅するようにしたものであ
る。 As shown in the figure, the configuration of this embodiment is to arrange two magnetic field detectors 16, 18 in close proximity to surfaces of the same polarity, and amplify the outputs of the two detectors 16, 18 with opposite polarities. This is how it was done.
このように構成された本実施例は、２つの検出
器１６，１８の出力が同等か、又は大小関係が反
転する位置が外乱にかかわらず存在するので、こ
の位置が原点となる様に補正する。磁束密度の変
化を補正する場合には一定距離離してもう一つの
検出器を設け勾配を検知すれば良い。又は上記の
検出器１６，１８の出力を同極性にし、両者の出
力の差から勾配を検知する方法もある。 In this embodiment configured in this way, there is a position where the outputs of the two detectors 16 and 18 are equal or the magnitude relationship is reversed regardless of the disturbance, so correction is made so that this position becomes the origin. . In order to correct changes in magnetic flux density, another detector may be provided at a certain distance to detect the gradient. Alternatively, there is a method of making the outputs of the detectors 16 and 18 the same polarity and detecting the slope from the difference between the two outputs.
なお本実施例では主軸１５を可動としたが、主
軸１５を固定し閉磁路１４を移動させても同様の
効果を出し得るのは勿論である。 In this embodiment, the main shaft 15 is movable, but it goes without saying that the same effect can be obtained even if the main shaft 15 is fixed and the closed magnetic path 14 is moved.
さらにバーバーポール型検出器の極性が逆にな
る様に素子を装着しても良い。 Furthermore, the elements may be mounted so that the polarity of the barber pole type detector is reversed.
以上述べてきたように、本発明によれば、極め
て簡易な構成により外乱にかかわらず絶対位置を
測定することができ、実用的には極めて有用であ
る。
As described above, according to the present invention, the absolute position can be measured with an extremely simple configuration regardless of disturbances, and is extremely useful in practice.
第１図は本発明の第１の実施例を示す図、第２
図は本発明の第１の実施例の原理を説明するため
の図、第３図は本発明の第２の実施例を示す図、
第４図は本発明の第２の実施例の原理を説明する
ための図、第５図は本発明の第３の実施例を示す
図、第６図は従来のリニア・スケールを示す図で
ある。
第１図、第３図、第５図において、１０，１１
は軟磁性板、１２，１３はアルニコ磁石（閉磁路
に磁束を与える手段）、１４は閉磁路、１５は主
軸、１６，１７，１８は磁界検出器である。
FIG. 1 is a diagram showing a first embodiment of the present invention, and FIG.
The figure is a diagram for explaining the principle of the first embodiment of the present invention, FIG. 3 is a diagram showing the second embodiment of the present invention,
Fig. 4 is a diagram for explaining the principle of the second embodiment of the present invention, Fig. 5 is a diagram showing the third embodiment of the invention, and Fig. 6 is a diagram showing a conventional linear scale. be. In Figures 1, 3, and 5, 10, 11
1 is a soft magnetic plate, 12 and 13 are alnico magnets (means for applying magnetic flux to a closed magnetic circuit), 14 is a closed magnetic circuit, 15 is a main shaft, and 16, 17, and 18 are magnetic field detectors.
Claims (1)
と、該軟磁性板１０，１１の両端に磁界方向が互
いに反対の向きとなるように挿入した２個の永久
磁石１２，１３とにより構成された閉磁路１４
と、該閉磁路１４の内部に位置し、且つ該閉磁路
１４に対し相対的に可動する主軸１５と、該主軸
に装着された磁界強度測定用の２個の磁界検出器
１６，１７とを具備してなるリニア・スケールに
おいて、 前記２個の磁界検出器１６，１７を、互いに磁
束方向が異なる磁路に対向させて配置し、該２個
の磁界検出器１６，１７が閉磁路１４からの漏洩
磁界の強度及び磁界方向を検出し、その出力が同
等となる位置を原点とする補正機能を有すること
を特徴とするリニア・スケール。 ２ 平行に配置した２個の軟磁性板１０，１１
と、該軟磁性板１０，１１の両端に磁界方向が互
いに反対の向きとなるように挿入した２個の永久
磁石１２，１３とにより構成された閉磁路１４
と、該閉磁路１４の内部に位置し、且つ該閉磁路
１４に対し相対的に可動する主軸１５と、該主軸
に装着された磁界強度測定用の２個の磁界検出器
１６，１８とを具備してなるリニア・スケールに
おいて、 前記２個の磁界検出器１６，１８を、任意の距
離を離して並列させ、磁速方向が同一な磁路に対
向させて配置し、該２個の磁界検出器１６，１８
が閉磁路１４からの漏洩磁界の強度を検出し、そ
の出力を互いに＋−逆極性となるように増幅し、
その出力が等しくなる位置を原点とする補正機能
を有することを特徴とするリニア・スケール。 ３ 平行に配置した２個の軟磁性板１０，１１
と、該軟磁性板１０，１１の両端に磁界方向が互
いに反対の向きとなるように挿入した２個の永久
磁石１２，１３とにより構成された閉磁路１４
と、該閉磁路１４の内部に位置し、且つ該閉磁路
１４に対し相対的に可動する主軸１５と、該主軸
に装着された磁界強度測定用の２個の磁界検出器
１６，１８とを具備してなるリニア・スケールに
おいて、 前記２個の磁界検出器１６，１８を、任意の距
離を離して並列させ、磁束方向が同一な磁路に対
向させて配置し、該２個の磁界検出器１６，１８
が閉磁路１４からの漏洩磁界の強度を検出し、そ
の出力差から位置−出力特性曲線の傾きを求め、
その傾きを予め基準状態時に測定した位置−出力
特性曲線の傾きと比較して補正係数を求め、一方
の磁界検出機１６又は１８の測定した位置を前記
補正係数により補正して絶対位置を求めることを
特徴とするリニア・スケール。[Claims] 1. Two soft magnetic plates 10, 11 arranged in parallel
and two permanent magnets 12 and 13 inserted at both ends of the soft magnetic plates 10 and 11 so that the magnetic field directions are opposite to each other.
, a main shaft 15 located inside the closed magnetic path 14 and movable relative to the closed magnetic path 14, and two magnetic field detectors 16 and 17 mounted on the main shaft for measuring magnetic field strength. In the linear scale, the two magnetic field detectors 16 and 17 are arranged to face magnetic paths having different magnetic flux directions, and the two magnetic field detectors 16 and 17 are separated from the closed magnetic path 14. A linear scale that detects the strength and direction of a leaking magnetic field and has a correction function that sets the origin at a position where the output is equal. 2 Two soft magnetic plates 10 and 11 arranged in parallel
and two permanent magnets 12 and 13 inserted at both ends of the soft magnetic plates 10 and 11 so that the magnetic field directions are opposite to each other.
, a main shaft 15 located inside the closed magnetic path 14 and movable relative to the closed magnetic path 14, and two magnetic field detectors 16 and 18 mounted on the main shaft for measuring magnetic field strength. In the linear scale equipped with the above, the two magnetic field detectors 16 and 18 are arranged in parallel with an arbitrary distance apart and are arranged to face magnetic paths having the same magnetic velocity direction, so that the two magnetic field detectors 16 and 18 are Detector 16, 18
detects the strength of the leakage magnetic field from the closed magnetic circuit 14, amplifies the output so that the polarity is +/-opposite to each other,
A linear scale characterized by having a correction function whose origin is the position where the outputs are equal. 3 Two soft magnetic plates 10 and 11 arranged in parallel
and two permanent magnets 12 and 13 inserted at both ends of the soft magnetic plates 10 and 11 so that the magnetic field directions are opposite to each other.
, a main shaft 15 located inside the closed magnetic path 14 and movable relative to the closed magnetic path 14, and two magnetic field detectors 16 and 18 mounted on the main shaft for measuring magnetic field strength. In the linear scale equipped with the above, the two magnetic field detectors 16 and 18 are arranged in parallel with an arbitrary distance apart, and are arranged to face magnetic paths with the same magnetic flux direction, so that the two magnetic field detectors 16 and 18 are Vessels 16, 18
detects the strength of the leakage magnetic field from the closed magnetic circuit 14, calculates the slope of the position-output characteristic curve from the output difference,
Compare the slope with the slope of the position-output characteristic curve previously measured in the reference state to determine a correction coefficient, and correct the position measured by one of the magnetic field detectors 16 or 18 using the correction coefficient to determine the absolute position. A linear scale featuring
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5054186A JPS62215801A (en) | 1986-03-10 | 1986-03-10 | Linear scale |
| KR1019860007048A KR900004780B1 (en) | 1985-09-13 | 1986-08-25 | Position detection device using magnetic sensor |
| US06/906,027 US4810965A (en) | 1985-09-13 | 1986-09-11 | Position detecting apparatus using a magnetic sensor and a closed magnetic circuit with non-uniform magnetic flux distribution |
| EP86112639A EP0215454B1 (en) | 1985-09-13 | 1986-09-12 | Position detecting apparatus utilizing a magnetic sensor |
| DE8686112639T DE3668692D1 (en) | 1985-09-13 | 1986-09-12 | POSITION DETECTOR WITH MAGNETIC SENSOR. |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5054186A JPS62215801A (en) | 1986-03-10 | 1986-03-10 | Linear scale |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62215801A JPS62215801A (en) | 1987-09-22 |
| JPH0535962B2 true JPH0535962B2 (en) | 1993-05-27 |
Family
ID=12861870
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5054186A Granted JPS62215801A (en) | 1985-09-13 | 1986-03-10 | Linear scale |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62215801A (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4800800B2 (en) * | 2006-02-28 | 2011-10-26 | 株式会社東海理化電機製作所 | Shift operation position detection device |
| JP5483516B2 (en) * | 2006-09-20 | 2014-05-07 | 旭化成エレクトロニクス株式会社 | POSITION DETECTION DEVICE, OPTICAL SYSTEM HAVING POSITION DETECTION DEVICE, AND IMAGING DEVICE |
-
1986
- 1986-03-10 JP JP5054186A patent/JPS62215801A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62215801A (en) | 1987-09-22 |
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| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |