JPH0541527B2 - - Google Patents

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a transport device for objects to be transported, and in particular to a device for transporting objects such as semiconductor wafers and magnetic disks, which should not attract dust, by using the fluid force of a fluid. The present invention relates to a conveyance device that is suitable for conveying while floating on a surface and keeping it in a clean state.

[Conventional technology]

As a conveying device for conveying articles while keeping them in a clean state, for example, as described in Japanese Patent Laid-Open No. 57-157537, there is a device that levitates the article from the conveying surface of a conveying path and drives the article in the conveying direction. A first gas jet unit that supplies an air jet for the purpose of colliding with the opposing periphery of the article in order to prevent the article moving on the conveyance path from being displaced in a direction perpendicular to the conveyance direction and falling off the conveyance path. 2nd supplying air jet
A device is known which is provided with a gas ejection section.

[Problem that the invention seeks to solve]

In recent years, as electronic components have become smaller and more dense, there has been an increasing demand for environmentally clean manufacturing processes. Specifically, it is important to keep the surface of the item free from dust before transporting it.
This is required as one of the most important issues. In response to this requirement, the above-mentioned conventional technology conveys the article in a non-contact manner, which prevents dust from adhering to the conveyance surface, but on the other hand, air jets for floating, driving, and guiding the article The problem is that the surrounding dust is stirred up and becomes floating dust, and the dust adheres to the surface of the article.Also, the above-mentioned air jet creates a gap in the air along the surface of the article and prevents it from floating in the surrounding space. There has been a problem in that the downflow, which has the function of preventing dust from adhering to the surface of the article, is disturbed, resulting in dust adhering to the surface of the article.

SUMMARY OF THE INVENTION An object of the present invention is to provide a conveying device that can convey an article without raising surrounding dust or disrupting downflow and keeping the surface of the article free from dust.

[Means for solving problems]

The above-mentioned object of the present invention is to have a plurality of fluid ejection parts that supply fluid to form a fluid film between the conveying surface of the conveying path and the conveyed object, and the conveyed object is moved to the conveyed surface by the fluid film. In the conveying device, the fluid ejecting section includes a pressurized gas supply path, a resistance section communicating with the pressurized gas supply path, and a gas flowing out from the resistance section. An opening leading to the conveying surface, and a rectifying means provided between the opening and the resistor to rectify the gas flowing out from the resistor, and controlling the direction of the gas flowing out from the resistor and the opening. This is achieved by changing the direction of the gas ejected from the

Furthermore, it is an object of the present invention to provide a fluid ejecting section for supplying a low-speed fluid to a conveying surface to form a fluid film between the conveying surface and the conveyed object, and a detection means for detecting the position of the conveyed object. This is accomplished by providing a flow rate adjusting means, connecting the fluid ejecting section to the flow rate adjusting means, and controlling the flow rate adjusting means by a signal from the detection means.

[Effect]

In the fluid jetting part, the flow is throttled by the resistance part, and the flow is made uniform at low speed by the rectifying part, preventing the jetting fluid from becoming a high-speed jet flow, and maintaining the necessary jetting gas flow rate and jetting pressure to increase the jetting flow velocity. Make it smaller. This ejected fluid whose flow velocity has become smaller flows out between the conveying surface and the conveyed object, forms a fluid film, and applies a conveying force to the conveyed object. In this way, since the jetting fluid has a low jetting flow velocity, for example, even if dust is present on the conveyance surface, the dust is not thrown up and does not adhere to the surface of the conveyed object. Similarly, since the unloading speed is low, the downflow is not disturbed, and therefore the air flow along the surface of the transported object that is formed on the surface of the transported object is disturbed by the downflow. Since there is no dust, floating dust in the surrounding space can be prevented from adhering to the surface of the conveyed object.

Furthermore, since the flow direction of the fluid from the resistance section and the flow direction of the fluid from the opening are made different, the wall surface continuous to the opening can be used as a rectification section for rectifying the jet from the resistance section. A uniform flow can be achieved.

In addition, by detecting the position of the transported object using a detection means provided on the transport surface and adjusting the flow rate to the gas jetting section based on this detection signal, it is possible to prevent dust from adhering to the transported object. The object to be transported can be transported along a curved path or the like.

〔Example〕

Embodiments of the present invention will be described below with reference to the drawings.

FIGS. 1 to 3 show an embodiment of the apparatus of the present invention, and in these figures, reference numeral 1 indicates an object to be transported while being kept in a clean state. 2 is a conveyance path for the object 1 to be conveyed. On the conveyance surface 2A of the conveyance path 2, there is provided a conveyor belt for transporting the object 1 on the conveyance surface 2A of the conveyance path 2 in the conveyance direction shown by arrow A, with the object 1 floating on the conveyance surface 2A through a gap 4. , a plurality of floating gas jetting units 30 that apply only a floating force in a direction perpendicular to the transport surface 2A to the transported object 1;
, the conveying surface 2 along with the levitation force against the conveyed object 1
2 with a plurality of driving action gas ejection parts 40A, 40B, 40C that apply a driving force in a direction parallel to A;
Various types of gas ejection parts are provided. All of these gas jetting portions 40A, 40B, and 40C are configured to prevent the jetted gas from becoming a high-speed jet flow and instead turn it into a low-speed jet flow. The above-mentioned floating gas jet section 30 is provided by the pipe 5A.
The driving gas ejection part 40A is connected to a pressurized gas source by a pipe 5B, the gas ejection part 40B is connected to a pressurized gas source by a pipe 5C, and the gas ejection part is connected to a pressurized gas source by a pipe 5D.

As shown in FIGS. 4 and 5, the above-mentioned floating gas jet section 30 communicates with a pressurized gas supply path 301 leading to a pressurized gas source so as to be orthogonal to this supply path 301, and Small hole 3 with squeezing action
02, and an opening 303 that opens to the conveying surface 2A and blows out the introduced gas onto the conveying surface 2A. This opening 303 and the small hole 3
02, as a first rectifying part in order to rectify the gas flow introduced from the small hole 302 and to approximately uniformly rectify the outflow velocity distribution of the gas ejected from the opening 303 at the opening outlet. , a wall surface 304 facing the outlet of the small hole 302 and placed with a gap from the outlet, and a gap 30 as a second flow rectification section.
5 and a flow path 306 for introducing gas into this gap 305, and a flow path 307 whose outlet is connected to the opening 303. In this case, the flow path 30
7 is an enlarged flow path. and opening 303
The flow path near the opening 303 is designed so that the fluid force of the gas ejected from the opening 303 that acts on the transported object 1 floating upward has only a floating action component in the direction perpendicular to the transport surface 2A. is formed such that the direction of the central axis of the flow path in the opening 303 is approximately perpendicular to the conveyance path 2A.

Next, the driving action gas jetting parts 40A, 40B, 4
As shown in FIGS. 6 and 7, 0C has a pressurized gas supply path 401 leading to a pressurized gas source, and a small hole 402 that communicates perpendicularly to this supply path 401 and has a throttling effect. It is also provided with a groove-shaped opening 403 that opens to the conveying surface 2A. A first rectifying section is provided between this opening 403 and the small hole 402 to suppress and rectify the flow velocity of the gas from the small hole 402, and is arranged to face the outlet of the small hole 402 and eliminate the gap from the outlet. Wall surface 4 placed apart
04, and a flow path 405 connected to the opening 403 as a second rectifying section for further suppressing the subsequent gas flow velocity. and opening 403
The fluid force of the gas ejected from the opening 403 that acts on the transported object 1 floating upward has a floating action component in the direction perpendicular to the transport surface 2A and a driving action in the direction parallel to the transport surface 2A. Has ingredients. In order to function in this manner, the outlet of the flow path 405 near the opening 403 is formed such that the direction of the center axis of the flow path in the opening 403 is inclined from the axis perpendicular to the conveying surface 2A. There is. in this case,
The conveyed object 1 has a direction indicated by an arrow F _T , that is, a direction inclined from the central axis of the flow path 405 near the opening 403 perpendicular to the conveying surface 2A, or a direction from the flow path 405 to the opening 403. A driving force acts in the direction of extension. Furthermore, both the floating action gas ejection section 30 and the driving action gas ejection sections 40A, 40B, and 40C described here are connected to the opening 403.
is formed to have an exit area larger than the hole area of the small hole 402 having a restricting action. That is, the opening 403 is formed to have an outlet area such that the throttle fluid resistance of the opening 403 is smaller than the sum of the throttle fluid resistance of each part of the gas jetting section other than the opening 403.

Next, the gas ejection parts 30, 40A to 40 described above
The arrangement of C on the conveyance path 2 is shown in Figures 1 to 3.
This will be explained using figures. On the conveyance surface 2A of the conveyance path 2,
Along the longitudinal direction of the conveyance path 2, a plurality of floating gas jetting portions 30 are provided in two rows. Between these two rows of floating gas jetting parts 30, there are rows of driving gas jetting parts 40B and 40C so that the driving force of the driving action has a component directed in the longitudinal direction of the conveyance path 2. It is provided. Of these driving action gas jetting parts 40B and 40C, the gas jetting part 40B is provided so that its driving force has a component directed upward in FIG. The driving force is reversed,
In FIG. 1, it is provided so that it has a component directed downward. Also, the conveyance surface 2A of the conveyance path 2
In order to prevent the conveyed object 1 moving above from being displaced in the direction perpendicular to the conveying direction A and falling off the conveying path 2, driving gas jetting parts 40A are provided at both roadside ends of the conveying surface 2A. The rows are provided such that the driving force of the row has a component directed toward the center of the conveying surface 2A.

Next, the operation of one embodiment of the above-mentioned apparatus of the present invention will be described.

Regarding this operation description, the operation of the gas jet section 3 and the operation of the conveyance path 2 will be described in order.

First, the operation of the gas ejection part 30 for floating action is
This will be explained using the diagram and FIG. When pressurized gas is supplied through the pipe 5A, the pressurized gas passes through the small hole 301 that has a throttling effect, is ejected from the small hole 301 as a jet flow, collides with the wall surface 304, and then flows from the flow path 306 into the gap 305. After passing through the enlarged channel 307, the transport surface 2A is opened from the opening 303.
It flows into the gap 4 between the conveyed object 1 and the conveyed object 1. As a result, a state of gas lubrication is established between the conveyance surface 2A and the conveyed object 1.

First, the small holes 302 having a squeezing effect are arranged on the conveying surface 2A.
It has the function of keeping the gap 4 between the conveyed object 1 and the conveyed object 1 constant. That is, when the interval between the gaps 4 decreases, the flow rate of gas passing through the small holes 302 decreases, and since the small holes 302 have a restricting effect, the outlet pressure of the small holes 302 increases, and the gas inside the gaps 4 decreases. Pressure increases. Conversely, if the gap 4 increases, the opposite phenomenon occurs and the pressure in the gap 4 decreases. The change in pressure within the gap 4 is the change in the pressure within the gap 4.
This acts as a positive stiffness against changes in the gap 4, and as a result, the distance between the gaps 4 is kept constant for a given load.

Next, the operation of the rectifier provided between the small hole 302 and the opening 303 will be described. The wall surface 304 constituting the first rectifying section rectifies the gas flow flowing in from the small hole 302 to prevent the jet flow from flowing into the opening as described above, and the wall surface 304 serves as an opening for the gas to be injected from the opening 303. It has the role of making the outflow velocity distribution at the outlet approximately uniform. That is, the pressurized gas passing through the small hole 302 is ejected from the small hole 302 as a jet stream, but the jet stream is crushed by colliding with the wall surface 304 provided facing the outlet of the small hole 302. . Thereafter, the pressurized gas is distributed approximately uniformly into the gap 305 through the channel 306 constituting the second rectifying section, and flows approximately uniformly into the channel 307 through the gap 305. In the flow path 307, while the pressurized gas passes through the flow path 307, unevenness in the velocity distribution in the flow direction is smoothed due to the action of viscous diffusion of the gas. Further, in this case, since the flow path 307 is an enlarged flow path, the pressurized gas that has flowed into the flow path 307 is decelerated while maintaining an approximately uniform velocity distribution, and is ejected from the opening 303. At this time, since the opening 30 is formed to have an outlet area larger than the hole area of the small hole 302, the outflow speed of the gas at the opening 303 is smaller than the jetting speed from the small hole 302. By making the exit area of the opening 303 sufficiently large, the gas flow rate necessary for the floating action can be maintained and the outflow velocity at the opening 303 can be made sufficiently small. Although FIG. 5 shows the conveyed object 1 floating above the opening 303, the jet flow prevention effect described above does not change at all even when there is no conveyed object above the opening 303. Rather, the jet flow prevention effect is effective when there is no conveyed object 1 above the opening 303. That is, opening 3
Since the flow velocity of the gas ejected from 03 is low, the dust present on the conveyance surface 2A is not blown up by the ejected gas and attached to the surface of the conveyed object 1. Similarly, since the ejection speed is low, the downflow is not disturbed, and therefore the air flow along the surface of the transported object 1 that is formed on the surface of the transported object 1 due to the downflow is disturbed. Therefore, floating dust in the surrounding space does not adhere to the surface of the conveyed object 1.

Next, regarding the fluid force used for the conveyed object 1, the flow path near the opening 303 is
Since the direction of the central axis of the flow path is approximately perpendicular to the conveying surface 2A, the gas ejected from the opening 303 into the gap 4 is
Since the flow flows almost uniformly around the opening 303 through the gap 4, the conveyed object 1 floating above the opening 303 receives only the floating force in the direction perpendicular to the conveying surface 2A. act.

Next, the driving action gas jetting parts 40A, 40B, 4
The operation of 0C will be explained using FIGS. 6 and 7. When pressurized gas is supplied through the pipes 5A, 5B, 5C, and 5D, the pressurized gas passes through the small hole 402 that has a throttling effect, and is ejected from the small hole 402 as a jet flow, colliding with the wall surface 404, After passing through the flow path 405, it flows from the opening 403 into the gap 4 between the conveying surface 2A and the conveyed object 1, and the space between the conveying surface 2A and the conveyed object 1 becomes gas-lubricated.

First, the operation and function of the small hole 402 that has a throttling effect is the same as that of the small hole 302 of the gas jet section 30 that has a floating effect, and the distance of the gap 4 between the conveyance surface 2A and the conveyed object 1 is kept constant. It has the function of preserving

The same applies to the rectifier for preventing jet flow.
The jet flow ejected from the small hole 402 collides with the wall surface 404 constituting the first rectifying section and is crushed, and then passes through the flow path 405 constituting the second rectifying section due to the action of viscous diffusion of gas. , the unevenness of the flow direction velocity distribution is smoothed, and the water flows out from the opening 403 with a substantially uniform outflow velocity distribution. Since the outlet area of the opening 403 is larger than the hole area of the small hole 302, the outflow speed of the gas from the opening 403 is smaller than the jetting speed from the small hole 302. This prevents dust from adhering to the surface of the conveyed object 1, as in the case of the floating gas jetting section 30.

Next, the conveyed objects 1 of the jetting portions 40A to 40C
Regarding the fluid force acting on the opening 40
The flow path 405 near 3 is formed so that the direction of the center axis of the flow path is inclined from the axis perpendicular to the conveying surface 2A, so the gas flowing into the gap 4 from the opening 403 flows through the gap 4. Since the flow mainly flows in the direction in which the center axis of the flow path is inclined, that is, toward the left in _FIGS . Force acts. Furthermore, since the opening 403 is formed of a groove that is provided on the conveying surface 2A and is continuous with the flow path 405, the gas flowing out from the opening 403 flows concentratedly into the groove with low resistance, and then, Since it flows to the left in the figure within the gap 4, a driving force in the direction of the arrow F _T is also generated. In addition to the above-mentioned driving force, the gas jetting parts 40A, 40B, and 40C for this driving action cause the transported object 1 to be perpendicular to the transport surface 2A due to the gas lubricating action of the gas flowing out from the opening 403. A levitation force in the direction acts.

Next, the gas ejection parts 30, 40A~ described above
The operation of the conveyance path 2 in which 40C is arranged will be explained with reference to FIGS. 1 to 3. Pipe 5A shown in FIG.
When pressurized gas is supplied to the conveyance surface 2A, the two rows of floating gas jetting sections 30 float the conveyed object 1 onto the conveying surface 2A by the jetting action of low-velocity fluid. and tube 5
When pressurized gas is supplied to B, the two rows of driving gas jetting parts 40A provided at both roadside ends of the conveyance path 2A move the conveyed object 1 to both roadside ends by the jetting action of low-speed fluid. It is maintained at a position between the two rows of driving gas jetting portions 40A at the end. In other words, when the conveyed object 1 is displaced in a direction perpendicular to the conveying direction A and the end of its lower surface moves above the row of driving gas jetting parts 40A on one side, the conveyed object 1 has a surface on the conveying surface 2A. A driving force directed toward the center acts, and the conveyed object 1 immediately returns to the center position of the conveyance surface 2A. In this way, the transported object 1 floats above the transport surface 2A,
When pressurized gas is supplied to the tube 5D shown in FIG. 3 while being guided within the conveying surface 2A, the driving gas jetting section 40C causes the conveyed object 1 to have a first jet due to the action of the low-speed jetting fluid. The driving force acts in an upward direction in the figure and in a rightward direction in FIG.
If the object to be conveyed 1 is initially stationary, the object to be conveyed 1 is accelerated and conveyed in an upward direction in FIG. 1 by this driving force. Also, if it is initially moving in a downward direction in FIG. 1, it will decelerate and eventually come to a standstill. Furthermore, when the supply of pressurized gas to the pipe 5D is stopped and pressurized gas is supplied to the pipe 5C, due to the action of the low-speed ejected fluid from the drive-operated gas ejection part 40B, the conveyed object 1 is directed upward in FIG. The driving force acts in the leftward direction in FIG. In other words, by the action of the low-speed ejection bodies from the gas ejection parts 40B and 40C of these driving actions, the object to be transported 1 can be transported in both longitudinal directions of the transport path 2, and the object to be transported can be transported in both directions in the longitudinal direction of the transport path 2. The conveyance speed of the conveyor 1 can be freely accelerated or decelerated. In this embodiment, the transported object 1 is transported in a completely non-contact state, so
Since there is no dust attached to the transported object 1 due to contact, and no impact force is applied to the transported object, the transported object 1 is not damaged or dust is generated from the transported object 1. There is no.

As described above, in one embodiment of the present invention, there is no disturbance in the well-known downflow of dust, so the object to be transported can be transported without dust adhering to its surface. . In addition, since the transported object is transported in a completely non-contact state, there is no risk of dust adhering to the transported object or damage to the transported object due to contact.
There is no dust generated from the transported object.

Next, other embodiments of the gas jetting section provided on the conveyance surface of the conveyance path of the apparatus of the present invention will be described with reference to FIGS. 8 to 16. In these figures, the fourth
Components with the same reference numerals as those in the figures to FIG. 7 are the same parts. The floating gas jet section 30 shown in FIG. 4 and FIG. As shown in FIGS. 8 and 9, the direction of the center axis of the flow path in the opening 403A is inclined from the axis perpendicular to the conveying surface 2A, or as shown in FIGS. 10 and 11. As shown in FIG. 2, a groove-shaped opening 403B is provided on the conveyance surface 2A, one end of which opens into the opening 303, and which communicates with the opening 303 on the opposite side. Alternatively, by using both of these together, a gas ejecting portion for driving action can be constructed.

Contrary to the above, the driving action gas ejection parts 40A to 40C shown in FIGS. 6 and 7 can be configured as floating action gas ejection parts. An example of this will be explained below.

In FIGS. 12 and 13, the resistance part is composed of a small hole 402 having a throttling effect, and the wall surface 404 is used as the first rectification part and the flow path 307A is used as the second rectification part.
It is constructed with the following.

In this embodiment, since the resistor portion is constituted by the small hole 402, its restricting action can be easily predicted and the design can be simplified.

14 and 11, the small hole 402 in the embodiment shown in FIGS. 12 and 13 is constructed with a minute gap 402A having a restricting action.

In this example, the resistance part has a minute gap of 40
Since it is composed of 2A, there is a minute gap of 402A.
The jet flow spreads out and attenuates quickly, making it easy to rectify the flow.

Figure 16 shows a gap 305 as the second rectifier.
A flow path 30 for introducing gas into the gap 305
6. It is equipped with a flow path 307B that expands in the radial direction.

In this embodiment, since the outflow direction of the ejected gas from the gap 305 is different from the flow direction of the flow path continuing downstream of the gap 305, a high rectification effect can be obtained.

Next, another embodiment of the rectifying section in the gas jetting section described above will be described below.

Next, another embodiment of the conveyance path constituting the apparatus of the present invention will be shown.

FIGS. 17 and 18 show other embodiments of the apparatus of the present invention, and in these figures, the same reference numerals as in FIGS. 1 to 3 are the same parts. In this embodiment, a driving gas jetting part 40B is provided on the conveying surface 2A of the conveying path 2 so that the driving force of the driving force has a component that is entirely directed in one direction in the longitudinal direction of the conveying path 2, and Gas jetting portions 40A for guiding driving action are provided at both roadside ends of the conveying surface 2A.

In this embodiment, the driving action gas ejection part 4
Since both the floating force and the driving force in the conveyance direction are applied to the conveyed object 1 only by 0A, complete non-contact conveyance can be achieved with a relatively simple structure.

FIGS. 19 and 20 show other embodiments of the apparatus of the present invention, and in these figures, the same reference numerals as in FIGS. 1 to 3 are the same parts. In this embodiment, a driving gas jetting section 4 is provided on the conveying surface 2A.
0B, the driving force of its driving action is all transferred to the conveyance path 2.
The conveyance surface 2A is provided with a component facing in one direction in the longitudinal direction, and fixed wall guides 21 are provided at both roadside ends of the conveyance surface 2A.

This embodiment has the advantage that it is easy to manufacture because of its simple structure, and that the amount of gas consumed is small because the number of gas jetting parts is small. Furthermore, since the guide 21 is a fixed wall, even if a strong disturbance force acts on the transported object 1, the transported object 1 will not fall off from the transport path 2.

FIGS. 21 and 22 show another embodiment of the apparatus of the present invention, and in these figures, the same reference numerals as in FIGS. 1 to 3 are the same parts. In this embodiment, a gas ejecting section 3 for floating action is provided on the conveying surface 2A.
0 is provided, and in order to drive the transported object 1 floating on the transport surface 2A in the transport direction 10, it contacts a part of the transported object 1, thereby causing the transported object to move in the transport direction A. This is the case when a transfer member 22 that applies force is provided. In addition, in this case, the transported object 1
In order to obtain a force to press the transfer member 22 against the transfer member 22, the transfer surface 2A is inclined in a direction perpendicular to the longitudinal direction of the transfer path 2.

In this embodiment, the transported object 1 is transferred to the transport member 2.
2, the conveyed object 1 can be reliably conveyed, and the conveyed object 1 can be stopped, stood by, etc. freely.

FIGS. 23 to 25 show other embodiments of the apparatus of the present invention, and in these figures, the same reference numerals as in FIGS. 1 to 3 are the same parts. In this embodiment, a gas ejecting section 3 for floating action is provided on the conveying surface 2A.
0 and a gas jetting part 40A for driving the guide, and furthermore, a small hole 2 for jetting a jet stream of gas in order to drive the transported object 1 in the transporting direction 10.
3, the jet from this small hole 23 is transferred to the conveyed object 1.
It is placed in a position where it can be hit. in this case,
The jet flow from the small hole 23 is ejected from above the conveyed object 1 toward the upper surface of the conveyed object 1.

In this embodiment, the mechanism for non-contact driving in the conveying direction 10 is a small hole 2 that spouts jet flow.
3, processing is easy. Here, the downward jet stream is still less likely to cause surrounding dust to be stirred up and the downflow to be disturbed than the upward jet stream.

FIGS. 26 and 27 show another embodiment of the apparatus of the present invention, and in these figures, the same reference numerals as in FIGS. 1 to 3 are the same parts. In this embodiment, a gas ejecting section 3 for floating action is provided on the conveying surface 2A.
In order to drive the conveyed object 1 in the shipping direction 10, the conveying surface 2A of the conveying path 2 is provided with a conveying surface 2A in the conveying direction 10 in the longitudinal direction. It is tilted so that it is at a low position.

This embodiment has a simple structure because it does not require a special transport direction driving mechanism.

FIGS. 28 to 30 show other embodiments of the apparatus of the present invention, and in these figures, the same reference numerals as in FIGS. 1 to 3 are the same parts. In this embodiment, a gas ejecting section 3 for floating action is provided on the conveying surface 2A.
0, and gas ejection parts 40B and 40C for driving action to drive the transported object 1 in the transport direction A,
In addition, in order to prevent the conveyed object 1 from falling off the conveyance path 2, a wall surface 2B that is not parallel to the conveyance surface 2A is formed along the conveyance direction A on the road side of the conveyance path 2, and a floating surface is formed on the wall surface 2B. Working gas ejection part 30A
It has been established. Here, the conveyed object 1 may be considered as a cart on which articles are placed and conveyed.

In this embodiment, since the guiding wall surface 2B provided with the gas jetting portion 30A is provided, the conveyed object 1 can be guided reliably in a non-contact manner.

FIGS. 31 to 33 show an embodiment of the apparatus of the present invention, and in these figures, the same parts as in FIGS. 1 to 3 are denoted by the same reference numerals. 1 indicates an object to be transported without contact and without impact.
2 is a conveyance path for the object 1 to be conveyed. The conveying surface 2A of the conveying path 2 is provided with a large number of gas jetting parts 30 for floating action and gas jetting parts 40A to 40C for driving action. The conveyed object 1 has a gap of 4 on the conveying surface 2A.
The material is conveyed in the conveying direction shown by arrow A on the conveying surface 2A of the conveying path 2 in a state in which the gas floats through the conveyance path 2. On the conveyance surface 2A, photoelectric switches 21 are provided in a line along the longitudinal direction of the conveyance path 2 as a position detection mechanism for obtaining position information of the conveyed object 1 on the conveyance path 2. The above-mentioned floating gas jet section 30
is in communication with a pressurized gas source 9 through an air filter 6 and a pressure regulator 8 by a tube 5A. Further, the driving gas jetting portions 40A provided at both ends of the conveying surface 2A are connected to a pressurized gas source 9 through an air filter 6 and a pressure regulator 8 via a pipe 5B. Furthermore, gas jetting portions 40B, 40
Respective pipes 5D and 5C that lead pressurized gas from the pressurized gas source 9 to the filter 6 and the gas jetting section 4
Valve devices 7A and 7B serve as flow rate variable mechanisms for changing the flow rates of the ejected gas from 0B and 40C, respectively.
and a pressurized gas source 9 through a pressure regulator 8.
is connected to. The valve devices 7A and 7B are operated by the controller 2 in response to a signal from the photoelectric switch 21.
3. Driver 25A that drives the valve devices 7A and 7B,
25B. In this example, the gas ejection part 3 prevents the ejected gas from turning into a high-speed jet flow in order to prevent the raising of surrounding dust and the occurrence of downflow disturbances that cause dust to adhere to the conveyed object 1. Since the configuration is unique, the configuration of the gas jetting section 3 will be explained first, and then the details of the overall configuration of the conveyance path 2 will be described.

Next, the operation of the above-described apparatus of the present invention will be explained.

When pressurized gas is supplied from the pressurized gas source 9 to the pipe 5A, the two rows of floating gas jetting units 30 push the transported object 1 onto the transporting surface 2 by the action of the resistance jetting fluid.
Float above A. Then, when pressurized gas is supplied from the pressurized gas source 9 to the pipe 5B, the transported object 1 is maintained at its position between the two rows of driving gas jetting portions 40A at both roadside ends. That is, the conveyed object 1 is displaced in a direction perpendicular to the conveying direction A, and the end of the lower surface of the conveyed object 1 is driven by one side of the gas jetting section 40A.
When moving to the top of the column, the conveyed object 1 has a conveying surface 2.
A driving force directed toward the center of A acts, and the conveyed object immediately returns to the center position of the conveyance surface 2A.

In this way, the conveyed object 1 floats above the conveyance surface 2A and is guided into the conveyance surface 2A by the valve device 7.
When B is opened, atmospheric pressure gas flows from the pressurized gas source 9 into the pipe 5C, and due to the action of the driving gas blowout section 40C, the conveyed object 1 is directed upward in FIG. 31 and to the right in FIG. 33. Driving force acts in the direction. If the conveyed object 1 is initially stationary, this driving force causes the conveyed object 1 to be accelerated and conveyed in an upward direction in FIG. 31. Also the first third
If it is moving in a downward direction in Figure 1, it will decelerate and eventually come to a standstill. Further, when the valve device 7B is closed to stop the supply of pressurized gas to the pipe 5C, and the valve device 7A is opened, pressurized gas is supplied to the pipe 5D, and the conveyed object is A driving force acts on 1 in the downward direction in FIG. 31 and in the leftward direction in FIG. 33. That is, by opening and closing the valve devices 7B and 7A, the driving action gas ejection parts 40B and 40C are
By this action, the conveyed object 1 can be conveyed in both longitudinal directions of the conveyance path 2, and the conveyance speed of the conveyed object 1 can be freely accelerated or decelerated in either conveying direction. .

When the transported object 1 moves in the transport direction A on the transport surface 2A in this way, the transported object 1 moves on the transport surface 2A.
It passes over the photoelectric switch 21 provided at A. The photoelectric switch 21 can detect the presence or absence of an object in its detection direction, and can turn the presence or absence on or off.
Output as a signal. For example, if there is no conveyed object 1 on the photoelectric switch 21, the output signal will be off, and if there is, it will be on, then the output signal in the photoelectric switch 21 installed at each predetermined position changes from off to on. By looking at the position of the photoelectric switch, the position of the transported object at that time can be known.

As described above, in this embodiment, the position of the transported object 1 on the transport path 2 can be known by the photoelectric switch 21, and the transport speed of the transported object 1 can be freely controlled by the valve devices 7A and 7B. Can accelerate and decelerate. Therefore, it is possible to control the conveyance speed according to the position of the conveyed object 1, and from this, the moving conveyed object 1 can be softly stopped, passed through curved paths without impact, and branched conveyed without impact. It becomes possible to do this.

For example, as shown in FIGS. 34 and 35,
When the conveyed object 1 is brought to a stop by hitting the stopper 31, deceleration is started before the stop position, and the conveyance speed is controlled so that the speed becomes 0 at the stop position, thereby preventing any impact. It is possible to stop the conveyed object 1 at a predetermined position without giving any stress.

Control of the conveyance speed, specifically, in this case, control of the degree of deceleration is performed by controlling the time during which the valve devices 7A, 7B are open when the valve devices 7A, 7B are on-off valves. Further, if the valve devices 7A and 7B are continuously variable flow rate valves, this is done by controlling the flow rate or valve opening degree in addition to the open time. It is also possible to calculate the transport speed from the position information from the photoelectric switches 21 provided in a row.
By considering the transport speed in addition to the position information, more appropriate deceleration and stop control becomes possible.

Further, FIG. 36 shows another embodiment of the apparatus of the present invention, and this embodiment shows an example in which the conveying path has a bending path in which the conveyance path is largely bent. As mentioned above, the guiding force of the guide mechanism configured by the action of gas-fluid force is weak, but in this case, the deceleration starts before the bend, and the transported object 1 is at the position indicated by the dotted line in the figure. By controlling the conveyance speed so as to temporarily stop at , the conveyed object 1 will not fall off the conveyance path 2 even with a weak guiding force. As described above, it is possible to construct a curved path using a non-contact guide mechanism using gas-fluid force, and therefore it is possible for the non-conveyed object 1 to pass through the curved path without contact and without impact.

Further, FIG. 37 shows still another embodiment of the apparatus of the present invention, and this embodiment shows an example in which the conveyance path constitutes a branch path. In this case as well, the transfer speed is controlled so that the conveyed object 1 temporarily stops at the position indicated by the dotted line in the figure, and after stopping, the branching operation is made possible by applying a driving force in the direction in which the branching is to be performed. . Needless to say, in this case as well, there is no contact and no impact.

FIG. 38 shows another embodiment of the apparatus of the present invention, and in this figure, the same reference numerals as in FIGS. 31 to 37 are the same parts. This example is
In the embodiments shown in FIGS. 37 to 43, a fixed wall guide 32 is provided in place of the driving gas jet section 40A constituting the guide mechanism, and a curved path is shown as an example.

When a fixed wall guide is used, in the conventional device, the transported object 1 violently collides with the guide wall in the traveling direction at the bending part, and the transported object receives a large impact, but in this embodiment, the transported object 1 By controlling the conveyance speed so that the object 1 temporarily stops at the position shown in the figure, the conveyed object 1 passes through the bending portion without receiving any impact.

In this embodiment, since the fixed wall guide 32 is provided, even if a large disturbance force is applied to the transported object 1, the transported object 1 will not fall off the transport surface.

FIG. 39 shows another embodiment of the device of the invention,
In this figure, parts with the same reference numerals as in FIGS. 31 to 37 are the same parts. This example is the 37th
A holding portion for holding the conveyed object 1 in a floating state is provided on the conveyance surface 2A at the branch point of the branch path in the apparatus of the embodiment shown in the figure. The holding unit is configured to apply the driving force of its operation to the conveyance surface 2A near the outside of the periphery of the lower surface of the conveyance object 1 floating on the conveyance surface of the branch point, that is, the conveyance surface 2A near the outer side of the lower surface of the conveyance object 1 at the position shown in the figure. A plurality of driving gas ejection parts 40DA to 40 arranged in four groups such that the component is directed toward the center of the lower surface of the conveyed object 1 in the position.
Consists of DD. Valve devices 7DA,
Pressurized gas is supplied through the valves 7DB and 7DC, and the pressurized gas is directly supplied to the driving gas blowout section 40DD without going through a valve device.

Next, the operation of this embodiment will be explained.

First, the operation in which the conveyed object 1 is held by the driving gas jet section will be described. Here, all the driving action gas jet parts 40DA to 40DD
It is assumed that pressurized gas is being supplied to the conveyed object 1, and the conveyed object 1 is located at the center of the ring of the row of driving gas jetting portions 40DA to 40DD, that is, at the illustrated position. When the transported object 1 is displaced from the illustrated position and moved onto the driving gas ejection parts 40DA to 40DD provided in the direction in which the end of the lower surface of the transported object 1 is displaced, the transported object 1 is A driving force is applied in the direction opposite to the direction of displacement. As a result, the conveyed object 1 immediately returns to the illustrated position. Next, the operation of branch conveyance will be explained. As an example, the transported object 1
In FIG. 39, a case will be described in which the branch enters the branch from the bottom and leaves to the right. First, valve device 7
DA, 7DB and 7DD are open and 7DC is closed, that is, the driving gas jetting portions 40DA, 4
Pressurized gas is supplied to 0DB and 40DD, and only the driving gas blowout part 40DC provided on the approach road side.
The apparatus waits for the object to be conveyed 1 to approach without pressurized gas being supplied. Then, deceleration of the conveyed object 1 is started before the branching point, and the conveyance speed is controlled so that the conveyed object 1 stops at the position shown. And the transported object 1
After confirming by the photoelectric switch 21 that the current has reached the branching point, the closed valve device 7DC is opened. Thereby, the conveyed object 1 is held on the branch part. After this, the valve device 7DB is closed, the supply of pressurized gas to the driving gas jetting section 40DB on the detachment path side is stopped, and the driving gas jetting that applies a driving force in the direction of separation to the conveyed object 1 is performed. By supplying pressurized gas to the section 40DD, the conveyed object 1 leaves the branching section and the branching operation is completed.

In this embodiment, since a holding section for holding the transported object 1 is provided at the branching part of the transport path, if an error occurs in controlling the transporting speed to stop the moving transported object 1 at the branching part. In this case, the conveyed object 1 is definitely caught in the branch, and the conveyed object 1 enters in a direction different from the branch where it should branch, or stops before the branch and is unable to reach the branch. Otherwise, no dripping will occur.

Moreover, although the case of a branch furnace is shown here, by removing one of the two conveyance paths 2 extending vertically from the branch part in the apparatus of the above-mentioned embodiment,
A bend line can be formed. Furthermore, by removing two of the three conveyance paths 2 extending from the branching section, a stop section corresponding to that of the embodiment shown in FIG. 34 can be constructed. Even in these curved paths and stop portions, even if an error occurs in the control of the conveyance speed, reliable passage through the curved path and stopping operation can be achieved. Furthermore, the above-mentioned stop part has a completely non-contact structure with respect to the transported object 1, and therefore, with the structure of this embodiment, all parts including the stop part, bending part, and disassembly part are completely non-contact. Contact transportation is possible.

As explained above, according to the embodiments of the present invention, articles can be conveyed without contact and without impact, including stopping after movement, passing through a curved path, and branching conveyance, so that articles can be conveyed without contact or impact. dust adhesion to,
Dust generation from articles and damage to articles due to impact can be prevented, and articles can be transported cleanly and without damage.

〔Effect of the invention〕

As described above, according to the present invention, there is no stirring up of surrounding dust or disturbance of downflow, so that articles to which dust should not be attached can be kept clean and transported.

[Brief explanation of the drawing]

FIG. 1 is a plan view of an embodiment of the device of the present invention, FIG. 2 is a cross-sectional view in FIG. 1, FIG. 3 is a cross-sectional view in FIG. 1, and FIG. 4 is an embodiment of the device in FIG. FIG. 5 is a cross-sectional view thereof, and FIG. 6 is a plan view showing details of the driving gas jet section used in the embodiment of FIG. 1. , FIG. 7 is a cross-sectional view thereof, and FIGS. 8 to 11 are views showing details of the vicinity of the outlet of the gas jetting part 3 for the driving action used in the device of the present invention, and FIG. 8 is a view for the levitation action. FIG. 9 is a plan view illustrating an example of a gas ejection part, FIG. 9 is a cross-sectional view thereof, FIG. 10 is a plan view illustrating another example of a gas ejection part for driving action, and FIG.
12 to 22 are cross-sectional views showing other embodiments of the floating gas jet section used in the device of the present invention, and FIG. 12 is a plan view showing one embodiment of the same, and FIG. 14 is a plan view showing another embodiment, FIG. 15 is a sectional view thereof, FIG. 16 is a sectional view showing still another embodiment, and FIG. 17 is a device of the present invention. 18 is a sectional view thereof, FIG. 19 is a plan view showing still another embodiment of the apparatus of the present invention, and FIG. 20 is a sectional view thereof.
21 is a plan view showing another embodiment of the device of the present invention, FIG. 22 is a cross-sectional view thereof, and FIG. 23 is a plan view showing still another embodiment of the device of the present invention. 24 is a sectional view thereof, FIG. 25 is a sectional view taken along the line XI-XI, FIG. 26 is a plan view showing another embodiment of the device of the present invention, FIG. 27 is a side view thereof, and FIG. 28 is a sectional view thereof. A second plan view showing still another embodiment of the device of the present invention.
9 is a sectional view thereof, FIG. 30 is a side view thereof, FIG. 31 is a plan view showing another embodiment of the device of the present invention, FIG. 32 is a sectional view thereof, and FIG. 33 is a sectional view thereof. - a sectional view, FIG. 33 is a plan view showing still another embodiment of the device of the present invention, FIG. 35 is a cross-sectional view thereof, and FIG. 36 is a plan view showing another embodiment of the device of the present invention; FIG. 37 is a plan view showing still another embodiment of the device of the invention, FIG. 38 is a plan view showing another embodiment of the device of the invention, and FIG. 39 is a plan view of still another embodiment of the device of the invention. FIG. 3 is a plan view showing an example. 1...Object to be transported, 2...Transportation path, 2A...Transportation surface, 4...Gap, 5A to 5D...Pipe, 6...Filter, 7A, 7B, 7C...Valve device, 8...Pressure Regulator, 9... Pressurized gas source, 10... Conveying direction, 21... Photoelectric switch, 23... Controller, 25... Driver, 30... Levitation gas ejection part, 31... Stopper, 32... Fixed Wall guide, 40A, 40B, 40C...driving gas jetting section, 302...small hole, 307...flow path, 30
3...Opening.

Claims (1)

[Scope of Claims] 1. A transport path has a plurality of fluid ejection parts that supply fluid to form a fluid film between the transport surface of the transport path and the transported object, and the fluid film causes the transported object to be placed on the transport surface. In the conveyance device that conveys the gas while keeping it in a non-contact state, the fluid jetting section includes a pressurized gas supply path, a resistance section that communicates with the pressurized gas supply path, and a gas flowing out from the resistance section that conveys the gas flowing out from the resistance section. a rectifying means provided between the opening and the resistor to rectify the gas flowing out from the resistor, and adjusting the direction of the gas flowing out from the resistor and from the opening. A conveying device characterized in that the opening portion and the resistor portion are formed so that gas ejects in different directions. 2. The conveying device according to claim 1, wherein the fluid resistance of the opening is smaller than the fluid resistance of the resistance portion. 3. At least one of the fluid ejecting parts includes a first opening communicating with the rectifying part and a second opening in the form of a groove or hole formed on the conveying surface side communicating with the first opening. 2. The conveyance device according to claim 1, further comprising an opening made of. 4. The conveying device according to claim 1, wherein at least one of the fluid ejecting sections includes an opening having a flow path shape that expands in the fluid ejecting direction. 5. In a conveyance device that forms a fluid film between a conveyance surface of a conveyance path and a conveyed object, and conveys the conveyed object while keeping it in a non-contact state with the conveyance surface by this fluid film, on the conveyance surface, a fluid ejecting section that supplies a low-velocity fluid that forms a fluid film between the conveying surface and the non-conveying object; a pressurized fluid supply source that is connected to the fluid ejecting section and supplies pressurized fluid thereto; A flow rate adjustment means provided between the pressurized fluid supply source and the fluid ejection section, a detection means for detecting the position of the conveyed object, and a control for controlling the flow rate adjustment based on a detection signal from the detection means. A conveying device characterized by comprising a section. 6. In the conveying device according to claim 5, the fluid ejecting section includes a first fluid ejecting section that provides a driving force in one direction to the transported object and a second fluid ejecting section that provides a driving force in the other direction. A conveying device characterized by comprising: 7. In the conveying device according to claim 6, the fluid ejecting section includes a pressurized fluid supply section, a resistance section that provides resistance to the pressurized fluid from the pressurized fluid supply section, and a resistance section that provides resistance to the pressurized fluid from the pressurized fluid supply section. A conveying device comprising: a rectifying section that rectifies the fluid; and an opening having a resistance smaller than the resistance of the resisting section and allowing the fluid from the rectifying section to flow out toward the conveyed object. 8. In the conveying device according to claim 7, the rectifying section includes a first rectifying section that suppresses the maximum velocity of the pressurized fluid from the resistance section, and a second rectifying section that further rectifies the fluid from the first rectifying section. 1. A conveyance device comprising: 2 rectifying sections. 9. In the conveying device according to claim 6, the fluid ejecting section includes a pressurized fluid supply path, a resistance rectifying section that provides resistance to and rectifies the pressurized fluid from the pressurized fluid supply path, and 1. A transport device comprising: an opening having a resistance smaller than the resistance of the resistance rectifier and allowing fluid from the resistance rectifier to flow out toward an object to be transported.