JPH0542316B2 - - Google Patents
Info
- Publication number
- JPH0542316B2 JPH0542316B2 JP9445989A JP9445989A JPH0542316B2 JP H0542316 B2 JPH0542316 B2 JP H0542316B2 JP 9445989 A JP9445989 A JP 9445989A JP 9445989 A JP9445989 A JP 9445989A JP H0542316 B2 JPH0542316 B2 JP H0542316B2
- Authority
- JP
- Japan
- Prior art keywords
- cleaning
- processing chamber
- cleaned
- cleaning tank
- processing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Cleaning By Liquid Or Steam (AREA)
- Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
Description
【発明の詳細な説明】
産業上の利用分野
本発明は洗浄装置に係るものであつて、機械部
品、電子部品、医療用具その他種々の被洗浄物を
液洗浄または蒸気洗浄した後、被洗浄物に付着し
た洗浄液を外部に拡散する事なく、確実に処理す
る事を目的としたものである。DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to a cleaning device, which cleans mechanical parts, electronic parts, medical instruments, and various other objects by liquid or steam cleaning. The purpose is to reliably dispose of the cleaning liquid that has adhered to the surface without spreading it to the outside.
従来の技術
従来被洗浄物を載置する洗浄台を、移動機構に
接続して位置移動自在に形成したものには、実公
昭59−28714号公報記載の考案が存在する。しか
し、洗浄作業の完了した被洗浄物は、洗浄槽から
外部に持ち出された後に、被洗浄物に付着した洗
浄液を、別個に設けた処理装置で乾燥処理するこ
とが行われている。また、洗浄液の存在する洗浄
部と、被洗浄物を出入するための出入口との間
に、溶剤ガスの流入を防止する遮蔽板が存在しな
い。そのため、被洗浄物の出入時に多量の溶剤ガ
スが外部に流出するものとなる。BACKGROUND ART Conventionally, there is an idea described in Japanese Utility Model Publication No. 59-28714, in which a washing table on which an object to be washed is placed is connected to a moving mechanism so as to be movable. However, after the cleaning work has been completed, the cleaning object is taken out of the cleaning tank, and then the cleaning liquid adhering to the cleaning object is dried in a separate processing device. Moreover, there is no shielding plate for preventing the inflow of solvent gas between the cleaning section where the cleaning liquid is present and the entrance/exit for entering and exiting the object to be cleaned. Therefore, a large amount of solvent gas flows out when the object to be cleaned is taken in and taken out.
また乾燥手段を持たないために、乾燥処理に多
くの手数を要するばかりでなく、処理装置に移動
するときに外気と接触する。この場合、洗浄液が
トリクロルエチレン、トリクロロトリフルオロエ
タン等の大気中への拡散が好ましくないものであ
る場合には、健康被害、大気汚染等を生じるもの
となる。 Moreover, since it does not have a drying means, not only does the drying process require a lot of effort, but it also comes into contact with the outside air when being transferred to the processing equipment. In this case, if the cleaning liquid is trichlorethylene, trichlorotrifluoroethane, etc., which is undesirable for diffusion into the atmosphere, it may cause health damage, air pollution, etc.
また、特公昭59−9228号公報記載の発明の如
く、洗浄が完了し洗浄液の付着した被洗浄物を洗
浄部と遮蔽して収納できるように構成したものも
存在する。しかし、この方法は、被洗浄物の上下
動とは別個の動作により行われるものである。そ
のため、機構を複雑にすると共に被洗浄物の上下
動と、上記遮蔽のタイミングしが狂うと、溶剤ガ
スを外部に流出するものとなる欠点を有してい
た。 There is also an invention described in Japanese Patent Publication No. 59-9228, which is constructed so that the object to be cleaned, which has been completely cleaned and has cleaning liquid attached thereto, can be stored while being shielded from the cleaning section. However, this method is performed by an operation separate from the vertical movement of the object to be cleaned. Therefore, the mechanism is complicated, and if the timing of the vertical movement of the object to be cleaned and the timing of the shielding are out of sync, the solvent gas may leak out.
発明が解決しようとする問題点
本発明は上述のごとき問題点を解決しようとす
るものであつて、液洗浄または蒸気洗浄した後
の、被洗浄物に付着した洗浄液の処理を、洗浄装
置内で手数を要する事なく、また外部に有害な物
質を拡散しないように処理しようとするものであ
る。Problems to be Solved by the Invention The present invention aims to solve the above-mentioned problems. The aim is to dispose of it without requiring any effort and without dispersing harmful substances to the outside.
問題点を解決するための手段
本発明は上述のごとき問題点を解決するため、
被洗浄物を載置する洗浄台を、移動機構に接続し
て位置移動自在に形成することにより、洗浄台に
載置した被洗浄物を、洗浄槽に接続して設けた処
理室と洗浄槽の間で往復移動可能とし、この処理
室と洗浄槽とを、遮蔽体により遮蔽可能とすると
ともにこの遮蔽体を、洗浄台の下面両側に支持軸
で開閉自在に軸支し、この支持軸の外方に係合部
を突出し、この係合部を、洗浄台の移動に伴う被
洗浄物の処理室収納時に、処理室と洗浄槽の連通
口外周に係合可能とし、この係合により、支持軸
を支点に回動し遮蔽体を密閉することにより、処
理室と洗浄槽とを遮蔽可能とするとともに処理室
と、被洗浄物に付着した洗浄液を除去するための
活性炭を備えた処理機構とを、気体が流通し得る
連通路にて接続し、この連通路を接続した処理室
に外気と連通するための連通開口を開口して成る
ものである。Means for Solving the Problems The present invention solves the above problems by:
By connecting the cleaning table on which the object to be cleaned is placed and making it movable in position, the object to be cleaned placed on the cleaning table is connected to the cleaning tank and the processing chamber and cleaning tank are installed. This processing chamber and the cleaning tank can be shielded by a shielding body, and this shielding body is pivotally supported on both sides of the lower surface of the cleaning table by support shafts so as to be freely openable and closable. An engaging portion is protruded outward, and this engaging portion can be engaged with the outer periphery of the communication port between the processing chamber and the cleaning tank when the object to be cleaned is stored in the processing chamber due to movement of the washing table, and by this engagement, A processing mechanism that is capable of shielding a processing chamber and a cleaning tank by rotating around a support shaft and sealing the shielding body, and is equipped with a processing chamber and activated carbon for removing cleaning liquid adhering to objects to be cleaned. are connected to each other by a communication path through which gas can flow, and a communication opening for communicating with outside air is opened in the processing chamber connected to this communication path.
作 用
本発明は上述のごとく構成したものであるか
ら、被洗浄物を洗浄するには、移動機構を作動し
て、被洗浄物を載置した洗浄台を洗浄槽中に挿入
し、液洗浄、蒸気洗浄等を行う。Function Since the present invention is constructed as described above, in order to wash the object to be cleaned, the moving mechanism is activated, the washing table on which the object to be cleaned is placed is inserted into the washing tank, and the washing table with the object to be cleaned is inserted into the washing tank. , steam cleaning, etc.
この液洗浄、蒸気洗浄の完了後は、再び移動機
構を作動して、洗浄台に載置した被洗浄物を、洗
浄槽に接続して設けた処理室に収納する。この収
納後、または収納と同時に、処理室と洗浄槽とを
遮蔽体により遮蔽し、被洗浄物に付着した洗浄液
を除去するための処理機構を作動する。 After completion of this liquid cleaning and steam cleaning, the moving mechanism is operated again, and the object to be cleaned placed on the cleaning table is stored in a processing chamber connected to the cleaning tank. After this storage, or at the same time as the storage, the processing chamber and the cleaning tank are shielded by a shielding body, and a processing mechanism for removing the cleaning liquid adhering to the object to be cleaned is activated.
この処理機構は、気体が流通し得る連通路を介
して処理室に接続して成るものであるから、処理
室内の気体は、洗浄槽内と遮蔽された状態で、処
理機構内に導入して処理する事が可能となる。そ
のため、連通開口から外気を導入すれば、被洗浄
物に付着した有機溶剤等を連続的に処理機構に送
り込み、確実に除去するまで溶剤の除去作業を行
うことが出来る。 Since this processing mechanism is connected to the processing chamber through a communication path through which gas can flow, the gas in the processing chamber is introduced into the processing mechanism while being shielded from the inside of the cleaning tank. It becomes possible to process. Therefore, by introducing outside air through the communication opening, organic solvents and the like adhering to the object to be cleaned can be continuously fed into the processing mechanism, and the solvent can be removed until it is completely removed.
この処理後に、被洗浄物を処理室から取り出せ
ば、有害な気体を大気中に拡散したり、作業者が
吸引することも無く、安全な洗浄作業を可能とす
る。 After this treatment, if the object to be cleaned is taken out of the treatment chamber, no harmful gases will be diffused into the atmosphere or inhaled by the operator, making it possible to carry out safe cleaning operations.
また、洗浄液の付着した被洗浄物は、洗浄装置
から外部に出る事なく洗浄槽から処理室に収納さ
れ、付着洗浄液の処理を行うものであるから、従
来のごとく処理機構への被洗浄物の移送手数を要
しないばかりでなく、溶剤を拡散したりすること
も無いものである。 In addition, the object to be cleaned with the cleaning liquid attached to it is stored in the processing chamber from the cleaning tank without leaving the cleaning device and the adhered cleaning liquid is processed, so the object to be cleaned is not transferred to the processing mechanism as in the conventional case. Not only does it not require transportation, but it also does not cause the solvent to diffuse.
また、処理室は遮蔽体により、洗浄槽とは遮蔽
状態で処理機構と連通するものであるから、余分
な溶剤蒸気を処理機構に送ることがなく、処理効
率を高めることが出来るものである。 Further, since the processing chamber communicates with the processing mechanism while being shielded from the cleaning tank by the shielding body, excess solvent vapor is not sent to the processing mechanism, and processing efficiency can be improved.
また、処理室と遮蔽体との遮蔽は洗浄台の上昇
に伴つて自動的に行われるから、遮蔽のタイミン
グを狂わせる事がないし、機構を簡略とすること
ができる。 Further, since the processing chamber and the shielding body are automatically shielded as the washing table is raised, the timing of the shielding is not disturbed and the mechanism can be simplified.
実施例
以下本発明の一実施例を図面に於いて説明すれ
ば、1は洗浄台で、被洗浄物2を上面に載置する
とともにエアシリンダー、オイルシリンダー、チ
エーン装置等の適宜の移動機構3に接続して上下
方向に位置移動自在に形成している。この洗浄台
1は、移動機構3を作動させることにより、上面
に載置した被洗浄物2を、洗浄槽5の上部に接続
して設けた処理室4と洗浄槽5との間で、往復移
動可能にするとともにこの処理室4と洗浄槽5と
を、遮蔽体6により遮蔽可能としている。Embodiment An embodiment of the present invention will be described below with reference to the drawings. Reference numeral 1 denotes a washing table on which an object to be washed 2 is placed, and an appropriate moving mechanism 3 such as an air cylinder, an oil cylinder, or a chain device. It is connected to and is formed to be movable in the vertical direction. By operating a moving mechanism 3, this washing table 1 moves an object 2 placed on its upper surface back and forth between a processing chamber 4 and a washing tank 5, which are connected to the upper part of a washing tank 5. In addition to being movable, the processing chamber 4 and the cleaning tank 5 can be shielded by a shield 6.
この遮蔽は、一対の平板状の遮蔽体6を、洗浄
台1の下面両側に支持軸7で開閉自在に軸支す
る。また、この支持軸7の外方に、係合部8を突
出する。そして、この係合部8を、洗浄台1の移
動に伴う被洗浄物2の処理室4への収納時に、処
理室4と洗浄槽5の連通口10外周に係合して、
支持軸7を支点に回動し、遮蔽体6を密閉するこ
とにより、処理室4と洗浄槽5とを遮蔽するもの
である。 In this shield, a pair of flat shields 6 are supported on both sides of the lower surface of the washing table 1 by support shafts 7 so as to be openable and closable. Furthermore, an engaging portion 8 protrudes outward from the support shaft 7. The engaging portion 8 is engaged with the outer periphery of the communication port 10 between the processing chamber 4 and the cleaning tank 5 when the object 2 to be cleaned is stored in the processing chamber 4 as the washing table 1 is moved.
By rotating around the support shaft 7 and sealing the shield 6, the processing chamber 4 and the cleaning tank 5 are shielded.
また洗浄槽5と処理室4との連通口10は、特
別の固定手段を持たない蓋体11を処理室4側に
位置する。この蓋体11により、被洗浄物2が洗
浄5内に位置する時は連通口10を閉止する。そ
して、洗浄台1の上昇時に、洗浄台1の上面に突
出した支持棒12によつて、第2図に示すごとく
蓋体11を持ち上げ開放するものである。 Further, in the communication port 10 between the cleaning tank 5 and the processing chamber 4, a lid 11 having no special fixing means is located on the processing chamber 4 side. This lid 11 closes the communication port 10 when the object 2 to be cleaned is located in the cleaning 5. When the washing table 1 is raised, the support rod 12 protruding from the upper surface of the washing table 1 lifts and opens the lid 11 as shown in FIG.
また、上記の処理室4には、被洗浄物2に付着
した洗浄液13を除去するための処理機構14
を、気体が流通し得る連通路15にて接続してい
る。 The processing chamber 4 also includes a processing mechanism 14 for removing the cleaning liquid 13 attached to the object 2 to be cleaned.
are connected by a communication path 15 through which gas can flow.
この処理機構14は、溶剤を吸着し得る活性炭
を備えたものである。また、この処理機構14と
連通路15を介して接続した処理室4には、外気
と連通するための連通開口17を開口し、処理機
構14への処理室4の気体の導出に伴つて外気を
導入する。 This processing mechanism 14 is equipped with activated carbon that can adsorb a solvent. Furthermore, the processing chamber 4 connected to the processing mechanism 14 via the communication path 15 is provided with a communication opening 17 for communicating with the outside air. will be introduced.
上述のごとく構成したものに於いて、機械部
品、電子部品、医療用具その他の種々の被洗浄物
2を、液洗浄または蒸気洗浄するには、移動機構
3を作動して、被洗浄物2を載置した洗浄台1を
洗浄槽5中に下降挿入し、液洗浄または蒸気洗浄
若しくはその双方の洗浄を行う。 In the structure as described above, in order to perform liquid cleaning or steam cleaning of mechanical parts, electronic parts, medical instruments, and other various objects 2, the moving mechanism 3 is operated to move the objects 2 to be cleaned. The mounted cleaning table 1 is lowered and inserted into the cleaning tank 5, and liquid cleaning, steam cleaning, or both cleaning is performed.
この被洗浄、蒸気洗浄の完了後は、移動機構3
を洗浄台1の上昇方向に作動する。そして、洗浄
台1に載置した被洗浄物2を、洗浄槽5の上部に
設けた処理室4に収納し、洗浄槽5と処理室4と
を遮蔽する。 After completion of this cleaning and steam cleaning, the moving mechanism 3
is operated in the upward direction of the washing table 1. Then, the object to be cleaned 2 placed on the cleaning table 1 is stored in the processing chamber 4 provided above the cleaning tank 5, and the cleaning tank 5 and the processing chamber 4 are shielded.
この遮蔽は、洗浄台1の上昇に伴い、遮蔽体6
の側面に突出した係合部8を、連通口10の洗浄
槽5側の外周に突出した係合枠16に係合する。
そして、支持軸7を支点にして、遮蔽体6を回動
密閉することにより、処理室4と洗浄槽5とを遮
蔽するものである。 This shielding is performed by the shielding body 6 as the washing table 1 rises.
The engaging portion 8 protruding from the side surface is engaged with the engaging frame 16 protruding from the outer periphery of the communication port 10 on the cleaning tank 5 side.
The processing chamber 4 and the cleaning tank 5 are shielded by rotating and sealing the shielding body 6 using the support shaft 7 as a fulcrum.
この遮蔽を行つた後、被洗浄物2に付着した洗
浄液13を除去するための処理機構14を作動す
る。この処理機構14は、溶剤を吸着し得る活性
炭を備えたものである。 After this shielding is performed, the processing mechanism 14 for removing the cleaning liquid 13 adhering to the object 2 to be cleaned is activated. This processing mechanism 14 is equipped with activated carbon that can adsorb a solvent.
そして、この処理機構14は、気体が流通し得
る連通路15を介して処理室4に接続して成るも
のである。そのため、処理室4内の気体は、溶剤
が完全に除去されるまで、外気を導入しながら連
続的に処理機構14で処理する事が可能となる。
その結果、被洗浄物2に付着した有機溶剤等を確
実に除去することが出来る。 The processing mechanism 14 is connected to the processing chamber 4 via a communication path 15 through which gas can flow. Therefore, the gas in the processing chamber 4 can be continuously processed by the processing mechanism 14 while introducing outside air until the solvent is completely removed.
As a result, organic solvents and the like adhering to the object 2 to be cleaned can be reliably removed.
この処理後に、被洗浄物2を処理室4から取り
出せば、有害な気体を室内に拡散したり、作業者
が吸引することも無く、安全な洗浄作業を可能と
する。 After this treatment, if the object 2 to be cleaned is taken out from the treatment chamber 4, no harmful gases will be diffused into the chamber or inhaled by the operator, making it possible to carry out safe cleaning operations.
また、洗浄液13の付着した被洗浄物2は、洗
浄装置から外部に出る異なく処理室4に収納さ
れ、付着した洗浄液13の除去処理を行うもので
ある。そのため、従来のごとく処理機構3への被
洗浄物2の移送手数を要しないばかりでなく、溶
剤を拡散したりすることも無いものである。 Further, the object 2 to be cleaned to which the cleaning liquid 13 has adhered is stored in the processing chamber 4 without exiting from the cleaning apparatus, and the cleaning liquid 13 adhered thereto is removed. Therefore, not only is there no need for transferring the object 2 to be cleaned to the processing mechanism 3 as in the conventional method, but there is also no need to diffuse the solvent.
また、上記実施例では洗浄槽5の上部に処理室
4を設けたが、他の事なる実施例では洗浄槽5と
処理室4とを平行に設けても良く、移動機構3も
洗浄台1を平面的に移動させるように構成しても
良く、洗浄目的に応じて、任意の設計が可能であ
る。 Further, in the above embodiment, the processing chamber 4 is provided above the cleaning tank 5, but in other embodiments, the cleaning tank 5 and the processing chamber 4 may be provided in parallel, and the moving mechanism 3 is also connected to the washing table. It may be configured to move in a plane, and any design is possible depending on the purpose of cleaning.
発明の効果
本発明は上述のごとく構成したものであるか
ら、洗浄した後の被洗浄物に付着した洗浄液を、
手数を要する事なく洗浄装置内に位置したまま、
確実な除去処理が可能であるとともにこの除去処
理を、外部に有機溶剤等の有害な物質を拡散する
ことを少なく行うことができる。Effects of the Invention Since the present invention is configured as described above, the cleaning liquid attached to the object to be cleaned after cleaning can be removed.
Remains in the cleaning device without any hassle.
Reliable removal processing is possible, and this removal processing can be performed with less diffusion of harmful substances such as organic solvents to the outside.
また、処理室は遮蔽体により、洗浄槽とは遮蔽
状態で処理機構と連通するものであるから、余分
な溶剤蒸気を処理機構に送ることがなく、処理効
率を高めることが出来る。 In addition, since the processing chamber communicates with the processing mechanism while being shielded from the cleaning tank by the shielding body, excess solvent vapor is not sent to the processing mechanism, and processing efficiency can be increased.
また、支持軸を支点として板状の遮蔽体を回動
することにより、洗浄台の上下動に伴つて連通口
の開閉を行うものであるから、機構が簡略で廉価
に連通口の遮蔽を確実に行うことができる。ま
た、処理室と遮蔽体との遮蔽は洗浄台の上昇に伴
つて自動的に行われるから、遮蔽のタイミングを
狂わせる事がないものである。 In addition, the communication port is opened and closed as the washing table moves up and down by rotating the plate-shaped shield using the support shaft as a fulcrum, so the mechanism is simple and inexpensive, and the communication port can be reliably shielded. can be done. Further, since the processing chamber and the shielding body are automatically shielded as the washing table is raised, the timing of the shielding is not disturbed.
図面は本発明の一実施例を示すもので、第1図
は洗浄作業状態を示す断面図、第2図は被洗浄物
の洗浄液除去の作業状態を示す断面図である。
1……洗浄台、2……被洗浄物、3……移動機
構、4……処理室、5……洗浄槽、6……遮蔽
体、7……支持軸、8……係合部、10……連通
口、13……洗浄液、14……処理機構、15…
…連通路、17……連通開口。
The drawings show an embodiment of the present invention, and FIG. 1 is a sectional view showing a cleaning operation state, and FIG. 2 is a sectional view showing an operation state of removing cleaning liquid from an object to be cleaned. DESCRIPTION OF SYMBOLS 1...Cleaning stand, 2...Object to be cleaned, 3...Movement mechanism, 4...Processing chamber, 5...Cleaning tank, 6...Shielding body, 7...Support shaft, 8...Engagement part, 10... Communication port, 13... Cleaning liquid, 14... Processing mechanism, 15...
...Communication path, 17...Communication opening.
Claims (1)
続して位置移動自在に形成することにより、洗浄
台に載置した被洗浄物を、洗浄槽に接続して設け
た処理室と洗浄槽の間で往復移動可能とし、この
処理室と洗浄槽とを、遮蔽体により遮蔽可能とす
るとともにこの遮蔽体を、洗浄台の下面両側に支
持軸で開閉自在に軸支し、この支持軸の外方に係
合部を突出し、この係合部を、洗浄台の移動に伴
う被洗浄物の処理室収納時に、処理室と洗浄槽の
連通口外周に係合可能とし、この係合により、支
持軸を支点に回動し遮蔽体を密閉することによ
り、処理室と洗浄槽とを遮蔽可能とするとともに
処理室と、被洗浄物に付着した洗浄液を除去する
ための活性炭を備えた処理機構とを、気体が流通
し得る連通路にて接続し、この連通路を接続した
処理室に外気と連通するための連通開口を開口し
た事を特徴とする洗浄装置。1. By connecting the cleaning table on which the object to be cleaned is placed so that the position can be moved freely by connecting it to a moving mechanism, the object to be cleaned placed on the cleaning table can be connected to the processing chamber connected to the cleaning tank and cleaned. The processing chamber and the cleaning tank can be moved back and forth between the tanks, and the processing chamber and the cleaning tank can be shielded by a shield, and this shield is supported on both sides of the lower surface of the washing table so as to be openable and closable with support shafts. An engaging portion is protruded outward from the cleaning tank, and this engaging portion can be engaged with the outer periphery of the communication opening between the processing chamber and the cleaning tank when the cleaning table is moved and the object to be cleaned is stored in the processing chamber. , by rotating around the support shaft and sealing the shielding body, the processing chamber and the cleaning tank can be shielded, and the processing chamber is equipped with activated carbon for removing the cleaning liquid adhering to the objects to be cleaned. A cleaning device characterized in that the cleaning device is connected to a processing chamber through a communication path through which gas can flow, and a processing chamber connected to the communication path has a communication opening for communicating with outside air.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9445989A JPH02273587A (en) | 1989-04-14 | 1989-04-14 | Washing apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9445989A JPH02273587A (en) | 1989-04-14 | 1989-04-14 | Washing apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02273587A JPH02273587A (en) | 1990-11-08 |
| JPH0542316B2 true JPH0542316B2 (en) | 1993-06-28 |
Family
ID=14110856
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9445989A Granted JPH02273587A (en) | 1989-04-14 | 1989-04-14 | Washing apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02273587A (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013202566A (en) * | 2012-03-29 | 2013-10-07 | Sharp Corp | Cleaning and drying apparatus, and cleaning and drying method |
| JP7125810B1 (en) * | 2021-10-25 | 2022-08-25 | ジャパン・フィールド株式会社 | Cleaning method of the object to be cleaned |
-
1989
- 1989-04-14 JP JP9445989A patent/JPH02273587A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH02273587A (en) | 1990-11-08 |
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