JPH0544791B2 - - Google Patents

Description

[Detailed Description of the Invention] [Field of Industrial Application] The present invention relates to an image furnace used for crystal growth, etc., and more particularly to an image furnace in which the shape of a groove in a sealing member that isolates the inside and outside of the image furnace is improved. .

[Conventional technology]

In an image furnace, a thermal light source is placed at the first focal point of a reflecting mirror made of an ellipsoid of revolution, a sample is placed at the second focal point, and the thermal light source is concentrated to heat the sample. This device has a single ellipsoidal reflecting mirror consisting of only one spheroidal surface, and two reflecting mirrors.
A bielliptic type with a structure consisting of a combination of three or more ellipsoids of revolution and sharing a second focal point, and a bielliptic type with a structure in which the reflecting mirror is composed of a combination of three or more ellipsoids of revolution and sharing a second focal point. There are multiple elliptical shapes.

Next, the structure of a conventional image furnace will be described in detail with reference to the drawings, taking a single elliptical image furnace as an example. FIG. 2 is a longitudinal sectional view showing an example of a conventional single elliptical image furnace.

Conventionally, this type of image furnace uses a fixed reflector 201.
and opening/closing reflector 202, these reflectors form a spheroidal reflector 200, and the dividing plane 2
It is divided into 10 parts. Heat rays emitted from a thermal light source 203 such as a halogen lamp installed at the first focal point _F21 of the ellipsoid of revolution are installed at the second focal point _F22 of the ellipsoid of revolution and are emitted from the shaft 2.
The heat is concentrated on the sample 205 attached to the sample 04. In addition, a fixed reflecting mirror 201 and an opening/closing reflecting mirror 2
02 has a groove 206 of an O-ring, which is a sealing member, in order to make the inside of the spheroidal reflector 200 a sealed structure.
and 207 are provided on each dividing surface 210, and O-rings 208 and 209 are fitted into the grooves 206 and 207. The opening/closing reflecting mirror 202 can be separated from the fixed reflecting mirror 201 at the dividing surface 210, and the sample 20 inside the spheroidal reflecting mirror 200
5 and the heat light source 203 can be replaced.

[Problem that the invention seeks to solve]

In the above-mentioned conventional image furnace, when attaching and detaching a sample or replacing a thermal light source, the flange surface of the opening/closing reflector is in contact with a sealing member that isolates the inside and outside of the spheroidal reflector provided on the fixed reflector. Even if damage or dents occur due to contamination with foreign objects or careless operation, the use of two sealing members prevents the spheroidal reflector from being sealed poorly, and the interior of the spheroidal reflector will remain intact. This makes it difficult for leaks to occur when evacuating, filling with various gases, or pressurizing. However, since it has two grooves, the area occupied by the flange portion of the fixed reflector and the opening/closing reflector increases, and the diameter of the fixed reflector and opening/closing reflector therefore becomes large, resulting in poor operability. It was hot.

SUMMARY OF THE INVENTION An object of the present invention is to provide an image furnace that eliminates these conventional drawbacks, reduces the diameters of the fixed reflector and the opening/closing reflector, and improves operability.

[Means for solving problems]

In the image furnace of the present invention, the divided surfaces of both the fixed reflector and the open/close reflector each have a cross-sectional shape, and two groove-like grooves are provided adjacent to each other, and the spheroidal surface is fitted into each of these grooves. It is equipped with two sealing members to hermetically seal the inside of the mirror.

〔Example〕

Next, the present invention will be explained in detail with reference to the drawings.

FIG. 1 is a longitudinal sectional view of an embodiment of the present invention.
In this embodiment, a fixed reflecting mirror 101 and an opening/closing reflecting mirror 10 are used.
2. Thermal light source 103, shaft 104, sample 10
5. Grooves 106, 107 and O-rings 108, 10
9.

A fixed reflecting mirror 101 and an opening/closing reflecting mirror 102 form a spheroidal reflecting mirror 100, and a dividing surface 110
It is starting to be divided by. Heat rays emitted from a thermal light source 103 such as a halogen lamp installed at the first focal point F ₁₁ of the ellipsoid of revolution are installed at the second focal point F ₁₂ of the ellipsoid of revolution and emitted from the shaft 104 .
The sample 105 attached to the sample 105 is heated. In addition, the fixed reflector 101 and the fixed reflector 1
02, grooves 106 and 10 of an O-ring, which is a sealing member, have a groove-shaped cross section to make the inside of the spheroidal reflector 100 airtight.
7 are provided on each dividing surface 110 so as to be adjacent to each other, and sealing members 108 and 109 are fitted into the respective grooves 106 and 107. The opening/closing reflecting mirror 102 can be separated from the fixed reflecting mirror 101 at the dividing surface 110, and the sample 105 inside the spheroidal reflecting mirror 110 can be attached and removed, and the thermal light source 103 can be replaced.

According to this embodiment, since the O-ring groove has a dovetail cross-sectional shape, the distance between the two grooves can be reduced, and the diameters of the fixed reflector and the opening/closing reflector can be reduced. Can be made smaller.

In this embodiment, a single elliptical image furnace has been described, but the present embodiment can also be applied to a bi-elliptic or multi-elliptic image furnace.

〔Effect of the invention〕

As explained above, in the present invention, by making the cross-sectional shape of the grooves of the two O-rings into a dovetail shape,
The diameters of the fixed reflecting mirror and the opening/closing reflecting mirror can be reduced, and operability can be improved. Furthermore, since the O-ring groove has a dovetail cross-sectional shape, the O-ring will not fall off when the opening/closing reflector is opened and closed.

[Brief explanation of drawings]

FIG. 1 is a longitudinal sectional view of an embodiment of the present invention, and FIG. 2 is a longitudinal sectional view of an example of a conventional single elliptical image furnace. 100,200...Spheroidal reflector, 101,
201...Fixed reflecting mirror, 102,202...Opening/closing reflecting mirror, 103,203...Thermal light source, 104,2
04...Shaft, 105,205...Sample, 1
06, 107, 206, 207... Groove, 108,
109,208,209...O ring, 110,
210...Divided surface.

Claims (1)

[Claims] 1. A thermal light source is provided at the first focal point of the spheroidal reflector, and the thermal rays emitted from the thermal light source are concentrated on the sample placed at the second focal point of the spheroidal reflector to heat the sample. , the interior of the spheroidal reflector is hermetically sealed, and the spheroidal reflector is divided into a fixed reflector and an open/close reflector in order to attach and detach the thermal light source, the sample, etc. inside the spheroidal reflector. In the image reactor configured as shown in FIG. An image furnace comprising two sealing members fitted into the spheroidal mirror for hermetically sealing the interior of the spheroidal mirror.