JPH0545879B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention provides a HIP treatment method for a workpiece and a HIP
Regarding processing equipment and crucibles for HIP processing.

(Prior art) HIP technology, which performs high-pressure and high-temperature processing such as powder compaction, sintering, or diffusion bonding in a high-pressure, high-temperature gas atmosphere, is disclosed in Japanese Patent Publication No. 58-46524 (prior art 1) and Japanese Utility Model Publication No. 62-32589. (Prior Art 2) etc. are proposed.

(Problem to be Solved by the Invention) In the above-mentioned prior art 1, a processing chamber is formed by a heat insulating layer (insulating exterior), a heating element (heating device), and a lower lid (lower plug), The object to be processed is stored in the processing chamber and transported to each station for preheating, HIP, and cooling, which is advantageous in that the HIP processing can be performed continuously.

However, since the heat insulating layer, heating element, and lower lid body are transported in addition to the object to be processed, there is a problem that the transport capacity becomes excessive.In addition, the heat capacity increases at least by that amount, so the preheating power supply capacity is large. Not only that, but there is also the problem that the cooling rate becomes slow.

In addition, in order to shorten cycle time and improve productivity, multiple units consisting of insulation layers, heating elements, and lower lids are required, which not only increases product cost but also reduces the opening at the bottom of the high-pressure vessel. Since the lower lid body that closes the area is an important element of the device, it must be inspected periodically, which has the serious disadvantage of prolonging the downtime of the device.

Also, as mentioned above, when transported by unit,
The transport equipment itself is also large-scale, and this tendency is more pronounced for larger HIP equipment.

On the other hand, in conventional technology 2, since the object to be processed on the lower lid is transported in a so-called exposed state, there are no problems such as transport capacity, but the surface of the object to be processed is exposed during transportation. There was a problem of oxidation etc. In other words, for example, if wax removal treatment is performed before HIP treatment, the object to be treated is so-called exposed, so there is no point in performing wax removal treatment, etc.; It must be cooled down before it can be taken out, which lengthens the production cycle time and requires continuous
It was inappropriate for HIP.

The present invention provides a HIP processing method for a workpiece that solves problems 1 and 2 of the prior art described above, and
The purpose is to provide HIP processing equipment and crucibles for HIP processing.

(Means for Solving the Problems) The present invention provides a high-pressure vessel 1 having upper and lower openings 1A and 1B, and an upper and lower opening 1A and 1B of the high-pressure vessel.
upper and lower lid bodies 2 and 3 that respectively seal 1B;
A high pressure chamber 4 is defined within the high pressure container 1 by the upper and lower lids 2 and 3, and within the high pressure chamber 4,
A processing chamber 9 having a heat insulating layer 7 and a heating element 8 inside the heat insulating layer 7 is formed, and in the processing chamber 9, the object to be processed 12 placed on the lower lid 3 is placed in a high pressure and high temperature gas atmosphere. In the method of performing HIP processing such as sintering and bonding below, the following technical measures are taken to achieve the above objectives.

That is, the present invention accommodates the object to be processed 12 in a storage case 13 having at least two upper and lower gas communication ports 13A and 13B with a space 14 on the outer peripheral surface thereof. The storage case 13 containing the processing body 12 is inserted into the processing chamber 9 via the lower lid 3, and the gas communication ports 13A, 13B are opened.
The HIP process is performed using a gas pressure medium that has entered the storage case 13 through the space 14, and gas is supplied into the storage case 13 from the gas communication ports 13A and 13B either before or after the HIP process. The first feature is that the object to be processed 12 is transported in a gas atmosphere after being discharged.

The present invention also provides a high-pressure container 1 having upper and lower openings 1A and 1B, and upper and lower lids 2 that seal the upper and lower openings 1A and 1B of the high-pressure container 1, respectively.
3, a high-pressure chamber 4 is defined in the high-pressure container 1 by the upper and lower lids 2 and 3, and the high-pressure chamber 4
a heat insulating layer 7 and a heating element 8 inside the heat insulating layer 7;
A processing chamber 9 is formed, and in the processing chamber 9, the object to be processed 12 placed on the lower lid 3 is subjected to HIP processing such as sintering and bonding in a high-pressure and high-temperature gas atmosphere. In order to achieve the above-mentioned objectives, the following technical measures have been taken in the equipment:

That is, the present invention includes a storage case 13 which has at least two or more gas communication ports 13A and 13B and which stores the object to be processed 12 with a space 14, and which is connected to the processing chamber through the lower lid 3. A storage case 1 containing objects to be processed 12 to be loaded into and taken out from the storage case 9.
3 across the lower opening 1B of the high-pressure container 1 and the outside of the high-pressure container 1. The second feature is that it includes a gas supply means 38 for supplying and discharging gas.

Furthermore, the present invention takes the following technical measures in order to improve the degree of vacuum when the storage case 13 containing the object to be processed 12 is evacuated in the high-pressure container 1 of the HIP processing equipment. There is.

That is, the present invention includes a valve body 50 that freely opens and closes the gas communication port 13B and the processing chamber 9, in addition to the gas supply paths 15 and 15A connected to the gas communication port 13B. It is characterized in that it is equipped with a valve drive means 54 that opens and closes within the processing chamber 9, and that a vacuum pump 60 is connected to the degassing passage 2A communicating with the processing chamber 9 via an on-off valve 62.

In addition, the present invention takes the following technical measures to ensure sealing performance and ensure accurate positioning of the crucible used in the HIP processing equipment when transferring it to a dewaxing device, etc. ing.

That is, in the present invention, the crucible has at least two or more gas communication ports 13A, 13B,
A storage case 13 is provided in which the object to be processed 12 is housed with a space 14, and the storage case 13 is made of a material with low gas permeability, and the bottom of the case 13 has a tapered shape that tapers downward in the axial direction of the case. A protrusion 313A is provided, and the protrusion 31
3A is characterized by providing at least one gas communication port 13B.

(Embodiments and Operations) Hereinafter, embodiments and operations of the present invention will be described with reference to the drawings.

In FIG. 1 and FIGS. 4 and 5, 1 is a high-pressure container and has upper and lower openings 1A and 1B, and the upper and lower openings 1A and 1B are connected to an upper lid 2 and a lower lid. 3 to define a high pressure chamber 4 inside.

The high-pressure container 1 is mounted on a press frame 5 with the container axis oriented vertically, and the press axial force generated during the HIP process is borne by a press frame 6 that can be opened and closed. The lower lid body 3 is composed of a ring-shaped lower and upper lid 3A and a lower and lower lid 3B that can be inserted into and removed from the opening of the lower and upper lid 3A.

Reference numeral 7 denotes a heat insulating layer, which is formed into an inverted cup shape and is suspended from the upper lid 2 or is suspended from the lower lid 3.
A heating element 8 is provided inside the heat insulating layer 7, and a processing chamber 9 is formed therein.

Reference numeral 10 denotes a hearth, which is placed on the lower lower lid 3B and has a constricted portion 10A.A lower heat insulating cylinder 11 is provided around the constricted portion 10A.
A storage section 10B is formed in the upper part, and a storage case (crucible) 13 containing the object to be processed 12 is placed in the storage section 10B, and is connected to the processing chamber 9 via the lower lid 3B. On the other hand, the storage case 13 can be inserted and removed freely.

Gas communication ports 13A and 13B are formed in the upper and lower parts of the storage case 13.
The object to be processed 12 is housed inside the case 13 with a space 14 between it and the inner peripheral surface of the case 13 .

Note that the material of the storage case 13 is selected depending on the material of the object to be processed 12, processing conditions, and the like. For example, if the object 12 to be treated is a cemented carbide, such as WC, graphite with low gas permeability is used. Also,
The storage case 13 is divided into a case body and a lid, and after storing the object 12 in the case 13, the lid is attached to the case body by screwing, welding, or simply fitting. be done. At this time, as shown in FIG. 1, a spacer 14A is provided at the bottom to secure a space 14 at the bottom, which serves as a gas passage.

Further, when the storage case 13 containing the object to be processed 12 is placed on the hearth 10, the gas supply passage 15 formed in the lower lid 3B and the hearth A communication path 15A formed in 10 is in communication.

In FIGS. 4 and 5, reference numeral 16 denotes an elevating device, which is provided in a pit 17 with a depth _L1 , and the elevating device 16 includes an elevating cylinder 18, an elevating rod 19, an elevating guide 20, a guide rod 21, etc. It is made up of

Reference numeral 22 denotes a rail, which is laid to extend horizontally on the side of the HIP device.

The rails 22 are laid on pits 23 with a shallow depth _L2 , but when the press frame 5 etc. are high, the pits 23 may be unnecessary, and the rails 22 can also be laid on the floor.

Referring also to FIG. 6 and subsequent figures, a transport vehicle 24 is provided on the rail 22 so as to be horizontally movable by means of a traveling device 27 consisting of traveling wheels 25, a reversible traveling motor 26, etc. Transport trolley 2
4 is capable of reciprocating between front and rear auxiliary stations (eg, preheating station, cooling station, dewaxing station) including the HIP device.

A transverse guide rail 28 is provided on the upper surface of the transport vehicle 24.
is provided in a direction perpendicular to the rail 22, and a transverse truck 30 is provided on the guide rail 28 so as to be movable in the horizontal direction via a shoe 29, and 31 is a driving device thereof, which is shown as a cylinder in this embodiment. There is.

The traversing trolley 30 is a part of the conveyance/transfer device, and a handling member 33 is provided thereon via an elevating frame 32.
shows the support arm 34 erected and the support arm 34
It is equipped with a rake part 35 provided at the front lower part of the body, a receiving guide part 36 erected on both sides of the rake part 35, and a clamp member 37 provided at the upper part of the support arm 34, and also serves as a gas supply means. An atmospheric gas supply pipe 38 is provided.

As shown in FIGS. 7 and 8, the scoop portion 35 is U-shaped in plan view, and is placed below the storage case 13 containing the object to be processed 12 to avoid interference with the mounting table (hearth) 10. In addition, a stepped portion 39 is formed in an arc shape in a plan view in order to position the storage case 13 in a state in which the storage case 13 is scooped in, and the stepped portion 39 is expanded in a plan view. It is shaped like this to guide the insertion of the storage case 13.

In addition, in FIG. 8, the symbol l ₁ indicates the scooping interval (gap), and the symbol l ₂ indicates the storage case 13 and the mounting table 10.
This shows the mating depth for positioning.

The traversing truck 30 is reciprocated with respect to the HIP device along the guide rail 28 by the drive device 31 in the direction of arrow a in FIG. 6 and arrow c in FIG. The drive device 31 is movable, and in this illustrated example, a telescopic cylinder is illustrated as the drive device 31, but the drive device 31 can also be of a wheel running type, a screw feed type, or the like.

Inside the traversing truck 30, there is a lifting mechanism 4 for lifting and lowering the handling member 33 via the lifting frame 31.
As shown in FIG. 6, the elevating mechanism 40 has swinging links 42 pivotally connected to both ends of a telescoping cylinder 41, and an elevating frame is attached to each of the swinging links 42 via an interlocking link 43. It is interlocked and connected to a lifting rod 44 protruding from 32.

Therefore, by the telescoping operation of the telescoping cylinder 41, the elevating frame 32 can be raised from the position shown in FIG. 6 to the range indicated by the symbol h as shown in FIG.

The upper part of the handling member 33 has a rake part 3.
A clamp member 37 is provided opposite to the support arm 34, and the clamp member 37 is provided with a pressing arm 46 rotatably in the vertical direction on a bracket 45 attached to the upper part of the support arm 34. Telescopic cylinder 47 attached to arm 34
A pressing tool 48 is provided at the other end of the pressing arm 46 so as to move in the vertical direction via a guide tube 49. 3
As shown in the figure, it has a pad 48A that closes, and a passage 48B having a connection part for the atmospheric gas supply pipe 38 is formed in the pad 48A. Note that the piping 38 is flexible at the connection portion with the passage 48B.

The lifting device 16 and the transport vehicle 24 described above
A conveying/transferring device A is constituted by the traversing cart 30 and the traversing cart 30.

In addition, in this embodiment, the gas communication ports 13A and 13B
Although one upper and lower housing is provided, if gas flow occurs within the storage case 13, there is no need to provide one upper and lower housing.

Next, one operation of the continuous HIP process according to the embodiment of the present invention described above will be explained.

When the predetermined HIP process is completed, the press frame 6 moves backward, etc., and the storage case 13 containing the workpiece is lifted up along with the mounting table 10 and the lower and lower lids 3B via the lifting device 16 as shown in FIG. It is taken out from the lower opening of the high-pressure container 1.

After this removal, an atmospheric gas such as argon is supplied from the gas communication port 13B of the storage case 13 through the gas supply path 15 etc. to remove the object to be processed.
When the transverse truck 30 enters in a direction orthogonal to the rail 22 as shown by the arrow a in FIG. Part 3
5, a gap l ₁ shown in FIG. 8 is opened, and the rake part 35 enters the lower part of the storage case 13, and assumes the scooping position.

In this case, the rake part 35 has an arcuate shape in plan view, and interference with the mounting table 10 is avoided, and the storage case 13 is guided by the receiving guide part 36 and moved to the depths of the stepped part 39 as shown in FIG. (See Figure 2).

Next, when the telescopic cylinder 41 of the elevating mechanism 40 is operated and the elevating frame 32 and the handling member 33 are raised within the range of the arrow h in FIG. The storage case 13 containing the body 12 is scooped into the scoop part 35 and lifted from the mounting table 10.

On the other hand, when the telescopic cylinder 47 of the clamp member 37 is extended, the pressing tool 48 is lowered via the pressing arm 46, and the storage case 13 is sandwiched between the pad 48A of the pressing tool 48 and the scoop part 35, and the clamp is clamped. At the same time, the supply piping 38
As shown in FIG. 3, atmospheric gas is introduced into the passage 48B of the pad 48A through the gas communication port 13A and discharged through the gas communication port 13B.

When the drive device 31 is contracted in this example while maintaining this clamped state, the traversing truck is moved backward as shown by arrow b in FIG. 9 and stopped at the normal position.

When carrying out the storage case 13 containing the object 12 to be processed from this HIP device, the storage case 13 is securely clamped by the rake part 35 and the pressing tool 48, and is carried out without falling over and the gas It is maintained in a gas atmosphere by introducing and exhausting atmospheric gas through the communication ports 13A and 13B.

Next, the transport vehicle 24 is carried out in the horizontal direction along the rails 22 by driving the traveling motor 26 of the transport vehicle 24, and is transferred to, for example, a cooling station. On the other hand, at a preheating station or the like, when loading the storage case 13 containing the object to be processed 12 that has been subjected to pretreatment such as preheating into the HIP device, the object to be processed is placed in a preheating station or the like by a substantially reverse operation to the above-described operation. Needless to say, the body 12 is transferred to the mounting table 10 while maintaining the atmospheric gas atmosphere in the storage case 13 and then loaded by the lifting device 16.

In addition, during HIP processing, storage case 13
The object to be processed 12 stored in the storage case 1
Gas communication ports 13 formed at the top and bottom of 3
The space 14 is maintained at high temperature and pressure through the gas communication ports 13A and 13B, and the space 14 and the processing chamber 9 are connected through the gas communication ports 13A and 13B.
Gas communication port 1 is connected via 13B.
The pressure balance between the pressure of the gas pressure medium that has entered the storage case 13 through 3A, 13B and the space 14 and the pressure of the processing chamber 9 during HIP is maintained, and there is no problem in reusing the storage case 13.

Note that the storage case 13 may be of a multi-stage divided and stacked type. In this case, the shape of the storage case can be simplified, so the cost of manufacturing the storage case is reduced, and the mounting of the object to be processed is easy.
Removal work becomes easier.

10 to 12 show embodiments of the present invention according to claim 3, in which the object to be processed 12 is vacuum sintered in the high-pressure container 1 at a high degree of vacuum (e.g.
0.1Torr).

Note that the description of parts that overlap with those already described with reference to FIGS. 1 to 9 will be omitted, and the differences will be described below. However, common parts are indicated by common symbols.

Apart from the gas supply path 15 formed in the lower lower cover 3B and the communication path 15A formed in the roadbed 10, the hearth 1
A passage 15B communicating between the gas communication port 13B and the processing chamber 9 is formed at the center of the valve body 50, and a valve body 50 for freely opening and closing the passage 15B is provided on the bracket 51 so as to be swingable about a pin 52. Valve body 50 is passage 1
It is biased by a spring 53 in the direction of closing 5B.

The lower lower lid 3B is equipped with a valve drive means 54 for opening and closing the valve body 50 in the processing chamber 9, and the valve drive means 54 is driven by a push rod 57 etc. attached to a cylinder 55 and a piston 56 fitted therein. By pressing the valve body 50 with the tapered push rod 57 against the elastic force of the spring 53, the passage 15B and the processing chamber 9 can be communicated with each other.

Reference numeral 57 denotes a switch sensor, which is attached to the push rod 57 of the valve driving means 54 and can be freely connected to and separated from a terminal 59 connected to a power source 58 having a display section 58A, and detects whether the valve body 50 is opened or closed. It is possible.

60 is a vacuum pump, which has an on-off valve 62 in a degassing pipe 61 connected to the passage 2A formed in the upper lid 2. Note that 63 is an on-off valve provided in the gas supply pipe 64.

Therefore, in the embodiment shown in FIGS. 10 and 11, the storage case 13 containing the object 12 to be processed is
When charging the material into the processing chamber 9 and performing HIP processing,
Degas the processing chamber 9 including the inside of the storage case 13 (vacuum)
When the valve drive means 54 is activated, the spring 5
3, the valve body 50 is placed in the open position, and the on-off valve 62
By driving the vacuum pump 60 in the open state, the storage case 13 opens the upper gas communication port 13.
By receiving the degassing action not only through A but also through the lower gas communication port 13B, not only the vacuum processing time is shortened but also the degree of vacuum can be significantly improved to, for example, about 0.1 Torr.

Moreover, even if the valve body 50 is provided, this valve body 5
Since the open/closed state of the valve body 5 can be confirmed from the outside using a switch sensor 57, etc., the valve body 5 can be checked as shown in FIG.
0 is closed, a gas atmosphere is guaranteed within the storage case 13 via the gas supply path 15 and the like.

13 to 16 show an embodiment of the present invention according to claim 4, in which a storage case (crucible) 13 made of a material with low gas permeability such as graphite is attached to a cylindrical part (body). 113, a ceiling plate 213 and a bottom plate 313 that are fitted with gaps 113A and 113B above and below the ceiling plate 313, and a protrusion 313A tapered downward in the axial direction is formed on the bottom plate 313, By this,
This system ensures accurate positioning when placing on the loading section 10B and when scooping up and transporting with the scooping section 35 in the conveying/transferring device A to prevent falls, etc. Other configurations are as described above. The same parts are indicated by the same reference numerals.

Note that FIG. 16 shows a wax removal device 65, which includes a heater 67 on the bottom lid 66.
A cylinder main body 69 having a heat insulating layer 68 and a heat insulating layer 68 is mounted so as to be movable up and down, and the overlapping portion of the cylinder main body 69 and the bottom cover 66 is made airtight with a sealing material 70. In addition,
The cylinder body 69 has a chamber 69A for conducting cooling water, and a cylinder device 70 is provided at the center of the top of the cylinder body 69.
The piston rod 71 passes through the heat insulating layer 68 and has a presser plate 72 attached to the end thereof.

The bottom cover 66 is equipped with a gas supply elbow 73, and a wax collection cylinder 74 is installed in the center of the bottom cover 66, and a crucible mounting table 7 is mounted on the cylinder 74.
5 is provided, and the crucible 13 is mounted on the mounting table 75.
Tapered recess 75A that fits with protrusion 313A of
is formed in the recess 75A, and a gas communication port 13B is formed in the recess 75A.
A recovery port 75B is formed which communicates with the recovery port 75B.

A collection pipe 74A connected to a wax strap (not shown) is connected to the wax collection cylinder 74, and a differential pressure gauge 76 is provided between the collection pipe 74A side and the air supply elbow 73.

Next, the operation will be explained with reference to FIGS. 13 to 16. FIG. 14 shows the time when the crucible 13 is taken out from the HIP device using the scooping part 35 of the transfer device A. , the crucible 13 is positioned by the protrusion 313A. The temperature of the object to be processed 12 is higher than the temperature at which it reacts with the atmosphere (approximately 300℃ or higher)
At the time of extraction, nitrogen gas or argon gas is supplied from the gas supply valve 63. At this time, the bottom surface of the bottom plate protrusion 313A and the mounting portion 10B
Since the gas is sealed on the upper surface of the crucible 13, the supplied gas flows as shown by the arrow in the crucible 13 without leaking to the outside and is exhausted to the outside through the gas communication port 13A of the top plate.

FIG. 15 shows a state in which the crucible 13 is placed on the transport transfer device A. The crucible 13 is placed on a fork (rake part) 35, and the top plate is protruded to prevent rocking during transport. The portion is pressed with a pressing tool 48 and conveyed. When the object to be processed 12 is transported at a temperature higher than the temperature at which it reacts with the atmosphere (approximately 300°C or higher), nitrogen gas or argon gas is supplied to the gas supply valve 3 as shown in the figure.
Perform this while supplying air from 8A. At this time, the upper surface of the top plate protrusion is sealed from the gas by the pressing tool 48, so the supplied gas flows inside the crucible 13 as shown in the figure without leaking to the outside, and flows to the bottom plate protrusion 313.
Go outside from A.

FIG. 16 shows the wax removal process using the crucible 13. When removing wax, the cylinder body 69
The crucible 13, together with the heater 67 and the heat insulating layer 68, is raised above the bottom cover 66, and the crucible 13, which has been transferred by the transfer device A, is placed with its bottom plate protrusion 313A aligned with the recess 75A. After that, the tube body 69 is placed on the tube body 69 as shown in FIG. During dewaxing, the crucible 13 is pressed from above with the presser plate 72 pressing the crucible top plate 213.
The holding plate and the top plate protrusion, and the mounting table 75 and the bottom plate protrusion are each sealed. Gas is supplied from the gas supply elbow 73 and flows inside the furnace in the directions indicated by arrows a, b, and c. The wax paper from the object to be processed 12 is collected into the wax strap through the wax collection pipe 74A along with the flow of this gas. Since the crucible 13 is made of a material with low gas permeability, the gas flows as shown by arrows a, b, and c.
It flows into the crucible 13 through joints 113A and 113B. The process is performed by controlling the gas flow rate using a differential pressure gauge 76 so that a predetermined differential pressure is maintained between the inside and outside of the crucible.

(Effects of the Invention) The present invention is as described above. According to the present invention,
Compared to conventional technology 2, the object to be processed can be exposed to an atmospheric gas atmosphere in the storage case during transportation before and after HIP treatment, which ensures that the object to be processed is not oxidized during transportation. It can be prevented.

Furthermore, compared to the prior art 1, when transporting the object to be processed, it is only necessary to transport the object to be processed and the storage case for the object to be processed, and the heat capacity can be reduced, so the preheating power supply capacity can be reduced. In addition, the cooling mechanism in the cooling device can be simple.

In addition, unlike conventional methods, there is no need to transport the heat insulating layer, heating element, lower lid, etc., so the capacity of the transport device can be reduced, multiple lower lids can be prepared, and the lower lid can be Since there is no need to prepare multiple pieces, the manufacturing cost of the lower cover can be reduced.

Furthermore, since there is no need to create a plurality of lower covers, the downtime of the apparatus for periodic inspections can be shortened.

Moreover, according to the present invention according to claim 3, the degree of vacuum within the high-pressure container can be significantly improved.

Furthermore, according to the present invention according to claim 4, it is possible to prevent the crucible from falling over during transportation, and positioning during transfer becomes accurate and easy.

Therefore, the present invention has advantages such as
It is meaningful as a HIP treatment method and HIP treatment equipment.

[Brief explanation of the drawing]

The drawings show an embodiment of the present invention, and FIG. 1 is an elevational cross-sectional view showing a high-temperature and high-pressure container, FIG. 2 is an elevational cross-sectional view showing the flow state of inert gas after HIP, and
The figure is an elevational sectional view during transportation, Figure 4 is a side view of the entire equipment, Figure 5 is a front view, Figure 6 is an elevation view showing the handling preparation state after HIP, and Figure 7 is the same view. Fig. 8 is an elevational sectional view of the main part, Fig. 9 is an elevational view showing the handling state after HIP,
FIG. 10 is an elevational cross-sectional view of a high-temperature and high-pressure container showing an embodiment of the present invention according to claim 3, FIG. 11 is a cross-sectional view of the main part thereof, and FIG. 12 is an elevational cross-sectional view corresponding to FIG. 2. , FIG. 13 is an elevational sectional view of a high-pressure container equipped with a crucible of the present invention according to claim 4, FIG. 14 is an elevational sectional view corresponding to FIG. 2, and FIG. 15 is an elevational sectional view corresponding to FIG. 3. Elevated sectional view, FIG. 16 is an elevational sectional view during wax removal. DESCRIPTION OF SYMBOLS 1... High pressure container, 2... Upper lid body, 3... Lower lid body, 4... High pressure chamber, 7... Heat insulation layer, 8... Heating element, 9... Processing chamber, 12... Processing object, 13...
Storage case (crucible), 13A, 13B... Gas communication port, 14... Space, 15, 15A... Gas supply path, 38... Gas supply means, 50... Valve body, 5
4... Valve driving means, 60... Vacuum pump, 313
A... Bottom plate protrusion, A... Conveyance and transfer device.

Claims (1)

[Claims] 1. High pressure container 1 having upper and lower openings 1A and 1B.
and upper and lower lids 2 and 3 that respectively seal the upper and lower openings 1A and 1B of the high-pressure container 1,
A high pressure chamber 4 is defined within the high pressure container 1 by the upper and lower lids 2 and 3, and a heat insulating layer 7 is provided within the high pressure chamber 4.
A processing chamber 9 having a heating element 8 is formed inside the heat insulating layer 7, and in the processing chamber 9, the object to be processed 12 placed on the lower lid 3 is baked in a high-pressure, high-temperature gas atmosphere. In the method of performing HIP processing such as bonding, bonding, etc., at least two or more gas communication ports 13A, 13
The object to be processed 12 is placed in a storage case 13 having a diameter B with a space 14 on the outer peripheral surface thereof, and the storage case 13 containing the object to be processed 12 is inserted into the processing chamber 9 via the lower lid 3. After charging, the gas communication port 13
Storage case 1 via A, 13B and space 14
HIP treatment is carried out by the gas pressure medium that has entered into the HIP
In the storage case 13, the gas communication port 13A,
A HIP processing method for an object to be processed, characterized in that the object to be processed 12 is transported in a gas atmosphere by supplying and discharging gas from the object 13B. 2 High pressure vessel 1 having upper and lower openings 1A and 1B
and upper and lower lids 2 and 3 that respectively seal the upper and lower openings 1A and 1B of the high-pressure container 1,
A high pressure chamber 4 is defined within the high pressure container 1 by the upper and lower lids 2 and 3, and a heat insulating layer 7 is provided within the high pressure chamber 4.
A processing chamber 9 having a heating element 8 is formed inside the heat insulating layer 7, and in the processing chamber 9, the object to be processed 12 placed on the lower lid 3 is baked in a high-pressure, high-temperature gas atmosphere. In HIP processing equipment that performs HIP processing such as bonding, bonding, etc., at least two or more gas communication ports 13A, 13
B, and includes a storage case 13 for storing the object to be processed 12 with a space 14, and for storing the object to be processed 12 to be loaded into and taken out from the processing chamber 9 via the lower lid body 3. 13 across the lower opening 1B of the high-pressure vessel 1 and the outside of the high-pressure vessel 1. A HIP treatment facility for objects to be treated, characterized in that it is equipped with a gas supply means 38 for supplying and discharging gas. 3 Separately from the gas supply passages 15 and 15A connected to the gas communication port 13B, a valve body 50 is provided to freely open and close the gas communication port 13B and the processing chamber 9. The degassing passage 2A, which is equipped with a valve driving means 54 that opens and closes, and communicates with the processing chamber 9,
3. The workpiece according to claim 2, wherein a vacuum pump 60 is connected via an on-off valve 62.
HIP processing equipment. 4 High pressure vessel 1 having upper and lower openings 1A and 1B
and upper and lower lids 2 and 3 that respectively seal the upper and lower openings 1A and 1B of the high-pressure container 1,
A high pressure chamber 4 is defined within the high pressure container 1 by the upper and lower lids 2 and 3, and a heat insulating layer 7 is provided within the high pressure chamber 4.
A processing chamber 9 having a heating element 8 is formed inside the heat insulating layer 7, and in the processing chamber 9, the object to be processed 12 placed on the lower lid 3 is baked in a high-pressure, high-temperature gas atmosphere. In a crucible for HIP processing equipment that performs HIP processing such as bonding and bonding, at least two or more gas communication ports 13A, 13
B, and includes a storage case 13 that stores the object to be processed 12 with a space 14, and the storage case 13
is made of a material with low gas permeability, and in case 1
A tapered protrusion 313A that tapers downward in the axial direction of the case is provided at the bottom of the case 3, and at least one gas communication port 1 is provided in the protrusion 313A.
A HIP processing crucible characterized by having 3B.