JPH0550131B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a mounting device for small parts such as semiconductor chips.

In the assembly work of semiconductor devices, there is work to transfer and mount various semiconductor elements called chip parts, integrated circuit elements, and various passive parts from a supply tray onto a package such as a board. Do it using The chip mount device places the package on the XY table below, picks up the chip parts with the suction tool, aligns the chip parts and the package with the XY table, and aligns the directions with the suction tool. The suction tool is elastically supported and movable in the axial direction so as to apply a constant pressure between the chip component and the package when mounted.

FIG. 3 shows an example of a conventional chip mount device, and a portion A surrounded by a chain line is the same as the embodiment of the present invention described later.

A bush 2 is fixed to a pedestal 11 fixed to the bonding arm 1 , a pin 36 is fixed to a driven arm 28 pivoted by a radial ball bearing 23 , and the pin 36 is a tool lever 3 fixed to a tool shaft 7 .
It is fitted into a bush 38 fixed to 7 so as to be movable in the axial direction.

The driven side arm 28 is rotated when rotating the chip component to align the direction with the package, and the driven side arm 28 is rotated by the rotation of the driving side pinion 28a.
When the pin rotates around the radial ball bearing 23, the pin 3
6, the tool lever 37 is turned and the tool shaft 7
Suction tool 1 attached to the end of the tool shaft 7 by rotating the
9 rotates the chip parts being sucked.

When the chip component suctioned to the tip of the suction tool 19 is mounted on the package cage, the bonding arm 1 descends against the compression spring 14, and the driven side is pivoted to the bonding arm 1 so as not to move in the axial direction. The arm 28 descends together with the bonding arm 1. The tool lever 37 is the tool shaft 7
Since the pin 36 is fixed to the driven arm 28, the pin 36 slides downward in the bush 38. When the chip components are mounted on the package cage, the bonding arm 1 and the driven arm 28 rise, and the pin 36 slides upward in the bush 38.

The reason why such a configuration is adopted is that the suction tool 19 is movable in the axial direction and needs to be rotated. A driven arm 28 is provided for this rotation. Also, since the suction tool 19 must move up and down in the rotation position, the tool lever 3
7 is provided. Furthermore, since both the driven arm 28 and the suction tool 37 must rotate together, a connecting means that is capable of relative displacement in the axial direction and is rigid in the rotating direction is required.

However, in such a conventional chip mount device, the tool lever 37 is connected to the tool shaft 7.
A bush 38 and a driven arm 28 are fixed to the tool lever 37 at their ends.
Since the pin 36 fixed to the tool lever 37 is designed to slide, when the tool lever 37 or the driven arm 28 bends and tilts due to the sliding relationship between the bush 38 and the pin 36, the pin 36 and the bush 38 fixed to the tool lever 37 There were problems in that the movement was not smooth and the load was unstable when the tool was pressed.

SUMMARY OF THE INVENTION It is an object of the present invention to provide a chip mounting device in which the suction tool moves smoothly in the axial direction and produces accurate mounting pressure.

The present invention provides a tool support mechanism having a suction tool at the tip for holding a chip component, and a tool shaft that is rotatable and elastically biased in the axial direction. This component mounting device is characterized in that a fixed tool lever is connected by a plate spring so as to be rigid in the rotational direction of the tool shaft and relatively movable in the axial direction of the tool shaft.

Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a partially sectional side view, and FIG. 2 is a plan view of FIG. 1.

A bush 2 is fitted and fixed to a pedestal 11 fixed to the tip of a bonding arm 1 whose base side (not shown) is movable up and down. A lower member protrudes from the tip of the bonding arm 1 at a distance from the pedestal 11, and a housing 3 abuts on the lower member and is fixed with a set screw 4. A bearing 5 is press-fitted into a hole concentric with the bush 2 that is drilled in the housing 3 and a member below the tip of the bonding arm 1, and by fitting a shaft retaining ring 6 into the circumferential groove of the bearing 5, the axial direction is adjusted. Movement is stopped.

A tool shaft 7 is supported by a bush 2 and a bearing 5. The tool shaft 7 is provided with a collar 8, and bearing race grooves are provided on the opposing surfaces of the collar 8 and the bearing 5, respectively, and a large number of balls 9 are arranged on the circumference. A load adjustment screw 10 with a knob is screwed into a female thread concentric with the hole into which the bearing 5 of the housing 3 is inserted, and is rotatably fitted into the load adjustment screw 10 and the inner periphery of the threaded portion of the load adjustment screw 10. A ball 13 is fitted between the end surface of the thrust ring 12 and the opposing surface. Both ends of the compression spring 14 are in contact with the thrust ring 12 and the collar 8 of the tool shaft, and the tool shaft 7
The collar 8 is pressed against the bearing 5 via the ball 9.

The through hole 17 of the arm 1 and bearing 5 communicates with the circumferential groove 18 of the tool shaft 7 so that the vacuum joint 15 screwed into the end of the bonding arm 1 and the dead-end center hole 16 of the tool shaft 7 communicate with each other. A radial hole leads from the circumferential groove 18 to the center hole 16 of the tool shaft 7 . A suction tool 19 having a suction port 19a at its tip is fitted into the end of the tool shaft 7, and is fixed with a set screw 20.

FIG. 2 is a plan view of FIG. 1. A hole with slotted grooves in the diameter direction on both sides of the base of the tool lever 21 is inserted into the upper end of the tool shaft 7, and is fixed by a lever fixing screw 22 that pulls the slotted grooves. A radial ball bearing 23 is installed on the outer diameter side of the bush 2 from the stepped portion of the bush 2 to the collars 24 and 25.
The radial ball bearing 23 is prevented from moving in the axial direction by alternately inserting and fitting the collars 26 in the axial direction, and fixing the collars 26 fitted at the ends to the bush 2 with setscrews 27. A driven arm 28 is fitted into the outer ring of the radial ball bearing 23, and the arm 28 is rotatably supported.

One end of the leaf spring 29 bent into a U-shape is held between the spring stopper plate 31 and the tool lever 21, and is fixed by inserting the hole in the spring stopper plate 31 and the leaf spring 29 and screwing a machine screw 32 into the tool lever 21. ,
The other end of the leaf spring 29 is held between a spring stop plate 33 and a spring stop plate 34 that come into contact with the driven arm 28, and a small screw 35 is inserted through the holes of the spring stop plate 34, the leaf spring 29, and the spring stop plate 33. It is fixed by screwing into the driven arm 28.

The air up to the suction port 19a of the suction tool 19 is suctioned by air suction from the vacuum joint 15, and the chip parts are suctioned into the suction tool 19. The bonding arm 1 is then moved to a mounting position on the package by rotation, and the package and chip components are aligned by an XY table (not shown).

Although not shown, the driven side arm 28 is rotated by the rotation of a driving side pinion 28a driven by another transmission mechanism, and when the conventional side arm 28 is rotated, it is rotated on the bush 2 via the radial ball bearing 23. Rotate. The rotation of the driven arm 28 is caused by the leaf spring 2.
Since the tool lever 9 has a high rigidity in the direction of rotation, the tool lever 21 is rotated via the leaf spring 29, and the tool shaft 7 is rotated by a predetermined angle to align the chip component and the package.

When the directions of the chip part and the package match, the arm 1 is lowered, and the suction tool 19 brings the chip part close to the top of the package and continues to press the chip part. Since the tool shaft 7 is stopped moving and the arm 1 is still lowered, the load adjusting screw 10 is lowered, the compression spring 14 is compressed via the ball 13 and the thrust ring 12, and the upper and lower portions of the leaf springs 29 are opened. When the mounting of the chip parts on the package cage is finished and the arm 1 is raised, the compression spring 14 and the leaf spring 29 are restored, and the relationship between the tool shaft 7 and the arm 1 becomes the relative position shown in FIG.

The pressure contact force between the chip component and the package is determined by the resultant force of the compression spring 14 and the leaf spring 29 (which can be designed to be either positive or negative), and the pressure contact force increases when the load adjustment screw 10 is screwed in and the compression spring 14 is compressed.
Conversely, when the load adjustment screw 10 is loosened, the compression spring 14
As it stretches, the pressure force decreases. The leaf spring 29 is intended to transmit rotational force between the driven arm 28 and the tool lever 21, and has a small spring constant and hardly applies thrust to the tool shaft 7. It may be arranged to apply a pressing force between the two.

Although the leaf spring 29 is U-shaped in the embodiment, it is not limited to the U-shape, and the driven side arm 28 and the tool lever 21 act rigidly against rotation, and the axial direction of the tool shaft 7 The position of the mounting end is not limited as long as it has a shape that allows movement.

As described above, the present invention is such that the plane including the plate surface is rigid in the rotational direction and allows displacement in the axial direction between the tool shaft of the chip mount device and the driven side arm that rotates the tool shaft. Since the arrangement is such that it intersects with the extension of the tool axis, angular displacement is accurately transmitted from the driven side arm to the tool axis, and smooth movement is obtained against relative axial displacement between the tool axis and the bonding arm. , there is little error in the pressure welding load of the tool shaft.

[Brief explanation of the drawing]

FIG. 1 is a partially sectional side view of an embodiment of the present invention, FIG. 2 is a plan view of FIG. 1, and FIG. 3 is a partially sectional side view of a conventional example. 1...Bonding arm, 2...Butsuyu,
3... Housing, 4... Set screw, 5... Bearing, 6... Shaft retaining ring, 7... Tool shaft, 8...
Collar, 9...Ball, 10...Load adjustment screw, 1
1...Pedestal, 12...Thrust ring, 13...
Ball, 14... Compression spring, 15... Vacuum joint, 16... Center hole, 17... Through hole, 18...
Circumferential groove, 19... Suction tool, 19a... Suction port, 20... Set screw, 21... Tool lever,
22... Lever fixing screw, 23... Radial ball bearing, 24, 25, 26... Collar, 27... Set screw, 28... Driven side arm, 29... Leaf spring,
31... Spring stop plate, 32... Machine screw, 33, 34
... Spring stop plate, 35 ... Machine screw, 36 ... Pin,
37...Tool lever, 38...button.

Claims (1)

[Claims] 1 In a tool support mechanism equipped with a suction tool at the tip that holds a chip component and a tool shaft that is rotatable and elastically biased in the axial direction, a driven side arm that can freely rotate with respect to the tool shaft and fixed to the tool shaft A component mounting device characterized in that the tool lever and the tool lever are connected by a leaf spring so as to be rigid in the rotational direction of the tool shaft and relatively movable in the axial direction of the tool shaft.