JPH0552789B2 - - Google Patents

Description

[Detailed description of the invention] [Industrial application field]

This invention includes a liquid crystal alignment film, a seal for liquid crystal encapsulation,
The present invention relates to an apparatus for smoothly and accurately forming various thin films such as insulating films for semiconductor devices, resists, and flattening films on printing materials.

[Conventional technology]

In general, lithographic offset printing is known as a method for printing a thin film on a hard printing material. However, lithographic offset printing requires that the usable printing ink does not emulsify well with the fountain solution and is faithfully transferred to the plate. Therefore,
The printing ink was limited to a high viscosity of 80,000 to 100,000 c.ps, and the transferred film also had poor smoothness. Therefore, for example, when it is necessary to form a film with excellent smoothness using a low-viscosity printing ink with a viscosity of several tens to 30,000 c.ps for use in liquid crystal alignment films, liquid crystal seals, etc., printing However, it was not possible to form a thin film. Therefore, the present applicant has provided a thin film forming apparatus as shown in FIG.
No. 170864). In this device, a flat intaglio plate 42 having a concave portion consisting of a large number of small holes and grooves and a printing medium 43 are placed side by side on a base 41.
The printing roll support frame 45 has an ink supply device (not shown) that fills the recesses of the intaglio plate 42 with ink having a viscosity of 30,000 c.ps, and a printing roll 44 equipped with an elastic letterpress plate 44a made of rubber or resin. 42 and the substrate 43 to be printed, and the printing roll support frame 45 is provided with a doctor 46 for scraping off excess ink from the intaglio 42 filled in the recesses of the intaglio 42. It is configured as follows. In this device, ink is supplied from an ink supply device to the concave portions of the intaglio plate 42, excess ink is scraped off by a doctor 46, and then the printing roll 44 is
is rotated while being brought into pressure contact with the intaglio plate 42, so that the ink in the concave portions of the intaglio plate 42 adheres to the surface of the elastic letterpress plate 44a provided on the printing roll 44, and the printing roll 44 with the ink adhering to it is conveyed onto the substrate 43 to be printed. While rotating the printing roll 44, the ink of the elastic relief plate 44a is transferred to the surface of the printing medium 43 to form a predetermined pattern. The present applicant has also provided a thin film forming apparatus in which the intaglio plate 42 that supplies a certain amount of ink to the printing roll 44 is not flat but cylindrical (Japanese Patent Application Laid-Open No. 62-202736).

[Problem to be solved by the invention]

However, in these thin film forming devices, the ink is transferred to the surface of the printing material in accordance with the arrangement of the concave portions of the intaglio, and the surface of the formed thin film has irregularities in the same shape as the concave and convex portions of the intaglio, called gravure grain. It now has regular irregularities. In other words, when the ink filled in the concave portions of the intaglio plate is transferred onto the printing roll, the ink is transferred in accordance with the arrangement of the concave and convex portions of the intaglio plate.
Further, when this is transferred onto a printing material, an ink film having irregularities following the arrangement is formed on the printing material as well. Although the ink leveled to some extent on the printing roll or the printing material, the ink film was a thin film with gravure grains and low smoothness. Furthermore, the pattern of the ink film is defined by the convex pattern of the printing roll, and the gravure marks of the ink film are difficult to erase at the pattern edges of the convex parts, and the pattern of the ink film transferred onto the printing material is The edges were also jagged due to traces of gravure grain, and lacked straightness. This phenomenon occurs when trying to form clean pattern edges by lowering the contact pressure between the printing roll and the intaglio plate or printing material, when the viscosity of the ink is slightly high, or when using gravure to increase the film thickness. This problem was particularly noticeable when the screen was made rough or when a fine pattern of lines or dots was printed. Therefore, an object of the present invention is to solve the above-mentioned problems, and to transfer a smooth and uniform ink film onto a printing substrate, thereby producing a high-precision coating with smooth edges and good edge straightness. An object of the present invention is to provide an apparatus capable of forming a thin film.

[Means to solve the problem]

In order to achieve the above object, the present invention is configured to print by moving the position of the intaglio plate that supplies a certain amount of ink to the printing roll by a predetermined distance to erase the gravure marks. That is, the thin film forming apparatus of the present invention includes an intaglio roll that is rotatably supported by a support frame of a base and has a large number of regular irregularities in the form of diagonal lines or a lattice on its surface; a doctor attached to a support frame that spreads the ink supplied to the intaglio roll over the surface of the intaglio roll and retains a certain amount of ink in the recess; and an intaglio roll that is rotatably supported by the support frame adjacent to the intaglio roll. A printing roll that has a convex part that contacts the intaglio roll so that the ink in the concave part of the intaglio roll is transferred onto the convex part, a printing position that places and fixes the printing material and contacts the printing roll on the base, and a printing position that contacts the printing roll from the printing roll. A surface plate that is capable of sliding back and forth in synchronization with the circumferential speed of the printing roll between remote positions, a drive device that drives the printing roll, and an intaglio roll that moves in the printing direction according to the following formula y and/or At right angles to the printing direction, the following formula The pitch of the dotted portion of the intaglio plate, n is the number of moving pitches of the unevenness of the intaglio plate expressed as an integer, and θ is the angle formed by the rotation axis direction of the printing roll and the diagonal or grid-like unevenness on the intaglio plate surface.) Movement. The intaglio roll moving device is configured to include an intaglio roll moving device. Another thin film forming apparatus of the present invention includes a planar intaglio plate supported on a base and having a large number of regular irregularities in a diagonal line shape or a grid pattern on its surface, and a planar intaglio plate supported at predetermined locations around the intaglio plate. A doctor is attached to the frame and spreads the ink supplied to the intaglio over the surface of the intaglio to keep a certain amount of ink in the recesses, and a convex part is rotatably supported by the support frame above the intaglio and comes into contact with the intaglio. A printing roll that transfers the ink in the concave portions of the intaglio plate onto the convex portions by rotation and pressure, and then slides the convex portions against the printing material while rotating and transfers the ink on the convex portions onto the printing material. , a surface plate that is installed on a base to place and fix the printing material, and the surface of the printing material contacts the convex part of the printing roll; a drive device that rotates and moves the printing roll; and a drive device that moves the intaglio in the printing direction using the following formula. y, and/or at right angles to the printing direction using the following formula The moving distance, p is the pitch of the dowel part of the intaglio plate, n is the number of moving pitches of the unevenness of the intaglio plate expressed as an integer, and θ is the angle formed by the rotational axis direction of the printing roll and the diagonal or grid-like unevenness on the intaglio plate surface. (respectively shown).

[Effect]

First, ink is supplied to the surface of a flat or roll-shaped intaglio, and as the doctor slides, excess ink is removed, and a certain amount of ink is filled and retained in the recesses of the intaglio. . If the intaglio pattern is a diagonal screen, it will look like the enlarged plan view shown in FIG. 3a, and if it has a lattice screen, it will look like the enlarged plan view shown in FIG. 3b. Subsequently, the intaglio and the printing roll come into contact, and the ink filled in the recesses of the intaglio is transferred to the protrusions of the printing roll. The printing roll has a convex portion having a shape corresponding to the pattern of the thin film to be formed. At this time, the ink film on the convex portion becomes a regularly uneven film that reproduces the many regular uneven patterns of the intaglio plate, that is, the gravure pattern. Furthermore, the printing roll comes into pressure contact with the printing material while rotating, and the ink on the convex portions of the printing roll is transferred onto the printing material. At this time as well, the gravure pattern is reproduced in the ink film, resulting in a film having regular irregularities. Furthermore, the edges of the film are jagged and lack linearity. A plan view of the film formed using the intaglio plate shown in Fig. 3a is shown in Fig. 4a.
An enlarged plan view of a film formed using the intaglio plate shown in FIG. 4b is shown in FIG. 4b. The intaglio plate is then moved by an intaglio roll moving device or an intaglio moving device in the printing direction and/or at right angles to the printing direction. n+1/5 ≦ | is the number of moving pitches of the unevenness of the intaglio plate expressed as an integer, and θ is the angle formed by the direction of the rotation axis of the printing roll and the diagonal or grid-like unevenness on the surface of the intaglio plate (see Figure 2).
The reason for limiting the range of x/psinθ or y/pcosθ to n+1/5 to n+4/5 is that when it is less than n+1/5 or exceeds n+4/5, the phase change of the intaglio unevenness is small. This is because it has no effect on mitigation. For example, if x/psin θ is an integer, even if the intaglio is moved or rotated in the above-mentioned direction, the phase of the unevenness will remain the same as the original phase and will not change. Further, the signs of x and y indicate the direction of movement; if the values are positive, it is a forward direction, and if the values are negative, it is a backward direction. Subsequently, ink is supplied to the intaglio plate, and ink films are formed overlappingly on the same printing material again in the same manner as described above. The ink transferred for the second time is transferred to the third ink.
If the intaglio of figure a is used, figure 5 a and figure 3 b
When an intaglio plate is used, the resultant film has the shape shown enlarged in FIG. 5b. The ink film transferred the second time tends to be in reverse phase with the unevenness of the ink film transferred the first time, and is transferred so as to correct the unevenness and jagged edges of the previously formed ink film. FIG. 6a is an enlarged plan view of a thin film formed by the intaglio plate shown in FIG. 3a, and FIG. 6b is an enlarged plan view of a film formed by the intaglio plate shown in FIG. 3b. Further, the shape of the cross section where the first and second ink films are overprinted is shown in an enlarged scale in FIG. Furthermore, in order to correct the unevenness of the ink film, it is possible to print not only two times but also three or more times. For example, when printing is repeated three times, the intaglio plate may be moved perpendicularly to the printing direction by (1/3)cosecθ of the pitch of the groove portion of the intaglio plate, and the printing is repeated three times. In this way, a thin film with a smooth surface and clean pattern edges is formed on the printing material. A similar thin film can also be formed in the following manner. First, ink is supplied to the surface of a flat or roll-shaped intaglio plate, and a doctor slides to remove excess ink.
A certain amount of ink is filled and held in the recesses of the intaglio. Subsequently, the intaglio plate and the printing roll come into contact, and the ink filled in the concave portions of the intaglio plate is transferred to the convex portions of the printing roll (first filling of ink onto the convex portions).
At this time, the ink film on the convex portion becomes an uneven film that reproduces the many regular uneven patterns of the intaglio plate, that is, the gravure pattern. The intaglio plate is then moved by an intaglio roll moving device or an intaglio moving device in the printing direction and/or at right angles to the printing direction. n+1/5 ≦ | is the number of moving pitches of the unevenness of the intaglio plate expressed as an integer, and θ is the angle formed by the direction of the rotation axis of the printing roll and the diagonal or grid-like unevenness on the surface of the intaglio plate.) Next, ink is supplied to the intaglio plate. , An ink film is formed on the convex portion of the printing roll again in the same manner as described above (second application of ink on the convex portion). 2
The ink transferred the second time tends to be in reverse phase with the unevenness of the ink transferred the first time, and is transferred so as to correct the unevenness of the previously formed ink film. Furthermore, in order to correct the unevenness of the ink film, ink is not only applied twice on the convex portions as described above, but also ink may be applied on the convex portions three or more times. For example, if you want to apply ink to the convex portion five times, you can move the intaglio plate perpendicular to the printing direction by 1/5 sec θ of the pitch of the dotted part of the intaglio plate and apply ink onto the convex portion. After repeatedly applying ink onto the convex portion several times, the printing roll and the printing medium finally come into contact, and the ink on the convexity of the printing roll is transferred onto the printing medium. , a thin film with a smooth surface and clear pattern edges is formed on the printing material.Alternatively, a similar thin film can be formed as follows.First, ink is applied to a flat or roll-shaped intaglio plate. The ink is supplied to the surface, and as the doctor slides, excess ink is removed, and a certain amount of ink is filled and retained in the recesses of the intaglio.Next, the intaglio and the printing roll come into contact. , the ink filled in the concave portions of the intaglio plate is transferred to the convex portions of the printing roll.At this time, the ink film on the convex portions has many regular concavo-convex patterns of the intaglio plate, that is, a regular pattern that reproduces the gravure pattern. The film forms an uneven film.Furthermore, as the printing roll rotates, it comes into pressure contact with the printing material, and the ink on the convex portions of the printing roll is transferred onto the printing material.At this time, the printing roll is placed on the printing material. Not all the ink on the convex parts is transferred, but a certain amount of ink remains on the convex parts.
The remaining ink film reproduces the gravure pattern,
The result is a film with regular irregularities. Furthermore, the edges of the film are jagged and lack linearity. Note that the ink film formed on the printing material has gravure marks and is not smooth. The intaglio plate is then moved by an intaglio roll moving device or an intaglio moving device in the printing direction and/or at right angles to the printing direction. n+1/5 ≦ | is the number of moving pitches of the unevenness of the intaglio plate expressed as an integer, and θ is the angle formed by the direction of the rotation axis of the printing roll and the diagonal or grid-like unevenness on the surface of the intaglio plate.) Next, ink is supplied to the intaglio plate. , Ink is transferred to the convex portion of the printing roll again in the same manner as described above. The ink transferred onto the convex portion this time has a phase opposite to the unevenness of the ink still remaining on the convex portion after the previous transfer printing, and is transferred so as to cancel out the unevenness of the residual ink film and the jagged edges. Next, the printing material is replaced with a new one, the printing roll and the printing material come into contact, the ink film on the convex portion is transferred to the printing material, and a smooth ink film is formed on the printing material. Ru. Subsequently, the next printing is performed. The intaglio is returned to its original position, the intaglio and the printing roll come into contact, and ink is transferred from the intaglio to the printing roll. The ink film on the convex portion of the printing roll becomes smooth with the unevenness reversed in phase and the gravure grain disappearing. Subsequently, the printing roll and the next new printing material come into contact and a smooth ink film is formed on the printing material. In this way, by repeating the movement and printing of the intaglio, the gravure marks are erased on the printing roll, and the film is transferred to the printing material, so that a thin film with a smooth surface and clear pattern edges is coated one after another. Formed on a printed body.

【Example】

Example 1 As shown in FIG. 1, an ink supply device 5, a doctor 6, an intaglio roll 3, and a printing roll 4 are supported on a support frame 2 of a base 1, respectively. By driving the printing roll drive device, that is, driving the printing roll drive motor 7, the printing roll 4 and the intaglio roll 3 rotate synchronously based on the meshing of the gears 8 and 9. Further, on the base 1 below the support frame 2, there is movably mounted a printing material support surface plate 11 on which a printing material 10 made of a rigid plate such as a glass plate is mounted and fixed. Printing material support surface plate drive motor 12
By driving the ball screw 13, the printing material 10 placed and fixed on the surface plate 11 on the base 1 is moved between the printing position A and the printing material mounting position B, Ink is supplied from the ink supply device 5 to the intaglio roll 3, excess ink is scraped off by a doctor 6, and after a predetermined pattern of ink is transferred from the intaglio roll 3 to the printing roll 4, the printing roll 4 is used for printing. Printing substrate 1 at position A
A thin film having a predetermined pattern is printed on the printing material 10 by contacting the surface of the printing material 10. The support frame 2 includes a pair of support plates 2a, 2a, which are disposed at a predetermined central position of a rectangular base 1 so as to face each other. This pair of support plates 2a, 2
An intaglio roll 3 is rotatably supported on the upper part of the support frame 2 consisting of a, and a printing roll 4 is also rotatably supported diagonally below the intaglio roll 3. Further, a doctor 6 equipped with a doctor blade 6a for sliding on the surface of the intaglio roll 3 to scrape off excess ink is fixed to the upper end of the support frame near the intaglio roll 3. The ink supply device 5 supplies ink onto the surface of the intaglio roll 3 from a position above the doctor blade 6a of the doctor 6. Ink supply device 5
A pair of rails 15, 15 are installed at the upper end of the support frame on the opposite side of the intaglio roll 3 of the doctor 6,
An ink supply body 5a is movably provided on the rails 15, 15, and an ink nozzle 5b of the ink supply body 5a extends above the doctor 6 and above the surface of the intaglio roll 3. ing. The ink supply body 5a is driven by a motor or an air cylinder via a wire (not shown) to reciprocate along a pair of rails 15, 15, and drops ink onto the surface of the intaglio roll 3. This ink, for example, has a viscosity of several tens to
It is approximately 30,000c.ps and is made of a mixture of synthetic resin or resin precursor, solvent, filler, additives, etc. The doctor blade 6 includes a doctor blade 6a that moves between a position where it slides on the intaglio roll 3 and a position where it leaves the intaglio roll 3 by driving an air cylinder (not shown). The doctor blade 6a of the doctor 6 slides on the surface of the intaglio roll 3 to spread the ink dropped on the surface of the intaglio roll 3 over the surface of the intaglio roll 3 and fill the ink into the recesses 3b. The intaglio roll 3 has a body 3a fixed to a rotating shaft 3c, and the body 3a has a plating layer formed on the surface of an iron core, and the surface of the plating layer has many grooves as shown in FIG. Concave portion 3b consisting of small holes,...
..., 3b. The recess 3b has a depth of, for example, 5 to several tens of μm. Pneumatic cylinders 16 attached to the support frame 2 are located at both ends of the rotating shaft 3c, and are configured to move the intaglio roll 3 in the direction of the rotating shaft 3c, that is, at right angles to the printing direction (Fig. 8). reference). One cylinder 16
is designed to pull the rotating shaft 3c when the other cylinder 16 is pushing the rotating shaft 3c. The body 3a supported by the rotating shaft 3c contacts the protrusion 4a of the body 4b of the printing roll 4 with a constant pressure. Further, a first gear 8 is fixed between the cylinder 16 at one end of the rotating shaft 3c and the support frame 2. The first gear 8 is a highly polished spur gear, and the tooth width is increased by the distance that the intaglio roll 3 moves in the axial direction, so that the intaglio roll 3 to which the first gear 8 is attached rotates. It does not prevent movement in the direction of the axis 3c. In addition, the intaglio roll is rotated on the rotating shaft 3.
To move in the c direction, only one cylinder 16 may be used, and the other cylinder may be replaced with a spring. Alternatively, a precision thread may be formed on the shaft of the cylinder 16 to provide a bearing for the rotating shaft 3c (see FIG. 9). Furthermore, an adjustment cup for controlling the travel distance of the cylinder 16 may be designed to be screwed in (see FIG. 10). Furthermore, in order to move the intaglio roll 3 in the printing direction, for example, the rotational position is detected by attaching an encoder to the intaglio roll 3, and the driving servo motor of the intaglio roll 3 is controlled by a control pulse oscillation device, with high precision. The intaglio roll 3 may be rotated after positioning in the printing direction. The printing roll 4 has a body 4b fixed to its rotating shaft 4c, and a rubber such as butyl rubber, a synthetic resin such as a nylon resin, a photosensitive rubber, or a photosensitive resin is coated at a predetermined location on the circumferential surface of the body. The ink is transferred from the intaglio roll 3 to the elastic convex portion 4a. The rotating shaft 4c is rotatably supported at both ends by the support plates 2a, 2a, and the second gear 9 is fixed to one end of the rotating shaft 4c protruding outward from one support plate 2a of the support frame 2. ing. The second gear 8 is a highly polished spur gear, and the second gear 9 is a highly polished spur gear.
It is meshed with gear 8. The other end of the rotation shaft 4c of the printing roll 4, that is, the one end to which the second gear 9 is not fixed, projects outward from the other support plate 2a of the support frame 2 and is connected to the printing roll drive motor 7. ing. Therefore, when the printing roll 4 is rotationally driven by the printing roll drive motor 7, the intaglio roll 3 and the printing roll 4 are rotated synchronously due to the engagement between the second gear 9 and the first gear 8. On the other hand, the surface plate 11 is placed on the base 1. On the top surface of the base 1, there is a printing position A below the support frame.
Guide rails 14, 14 are fixed on both sides between the printing material mounting position B, which is away from the bottom of the support frame toward the printing material loading side, and the carrying-out position C, which is away from the bottom of the support frame and away from the printing material delivery side. ing. The surface plate 11 engages with these guide rails 14, 14 and moves along the guide rails 14, 14 at each position A, B, C on the base 1.
move between This surface plate 11 has a plate-shaped printing material 10 mounted and fixed on its upper surface, and determines the position of the printing material 10 and holds it. Further, a ball screw 13 is rotatably connected to the surface plate 11 along the longitudinal direction in the upper center of the base 1, and a printing material drive motor 12 is connected to one end of the ball screw 13. The base plate 11 is configured to reciprocate on the base 1 along the guide rails 14, 14 by rotating the ball screw 13 in forward and reverse directions. Then, the printing material 10 comes into contact with the printing roll 4 at the printing position A of the surface plate 11, and the ink of the predetermined pattern of the printing roll 4 is applied onto the printing material 10.
Transfer to the top and print. In the thin film forming apparatus having the above configuration, an intaglio plate on which a lattice-like screen is formed with the pitch p of the dove portion = 0.127 mm, the width of the dove portion = 0.02 mm, the screen angle θ = 45°, and the depth of the concave portion = 20 μm is used. Printed material 10
Printing was carried out using a 300 x 300 x 1.1 mm glass substrate. First, ink is supplied from the ink supply device 5 to the surface of the intaglio roll 3. An acrylic resin solution was used as the ink. By sliding the doctor blade 6a on the intaglio roll 3, excess ink is removed and a certain amount of ink is filled and retained in the recesses 3b of the intaglio roll 3. Next, the intaglio roll 3 and the printing roll 4 were brought into contact with each other, and the ink filled in the recesses 3b of the intaglio roll 3 was transferred to the projections 4a of the printing roll 4. Subsequently, the printing material 10 is placed and fixed on a surface plate 11 that slides on the base 1 below the printing roll 4, and the surface plate 11 is placed on the printing position A directly below the printing roll 4. come into contact with. The printing roll drive motor 7 is rotated from the state where the surface plate 11 is at the printing material placement position B, and as the printing roll 4 rotates, the intaglio roll 3 is rotated from the second gear 9 via the first gear 8. , the surface plate 11 moves from the printing position A to the carry-out position C together with the ball screw 13 in synchronization with the rotation of the printing roll 4. In this way, the ink on the convex portions 4a of the printing roll 4 is transferred onto the printing medium 10.
At this time, a gravure pattern is reproduced in the ink film, and the film has regular irregularities and jagged pattern edges. Next, the cylinder 16 was operated to move the intaglio roll 3 by 0.988 mm perpendicular to the printing direction. n+1/2=(x/p) sinθ x=cosecθ×p×(n+1/2) =cosec45×0.127×5.5 (n=5) =0.988 Further, the printing medium 10 is returned to its original position. From the state where the surface plate 11 is at the carry-out position C, the printing roll drive motor 7 is rotated, and the surface plate 11 moves from the carry-out position C, through the printing position A, to the printing material mounting position B. Then, a second printing is performed. Supply ink to the intaglio roll 3, and apply the printing material 1 in the same manner as the first time.
An ink film is formed on approximately the same part of 0. This time, the convex portion 4a of the printing roll 4 and the printing material 10
The position of the unevenness due to the gravure grain of the transferred ink was opposite in phase to the position of the unevenness of the ink transferred the first time. Printed glass substrate in clean oven for 70 minutes
By drying at 10° C. for 10 minutes and then heating at 200° C. for 30 minutes, a 1.0 μm thick thin film with a smooth surface and highly linear pattern edges was formed on the printing material 10. Embodiment 2 As shown in FIGS. 11 to 13, a surface plate 31 that supports a flat intaglio plate 23 and is movable in the horizontal direction is placed on a base 21, and a printing material on which a printing material 30 is placed and fixed. A support frame 22 that supports and moves a body support surface plate 28, a printing roll 24, and a doctor 26 is provided. The support frame 22 has a drive motor 27 and a ball screw 3
3, the printing roll 24 is moved on a linear guide 34 provided on the base 21, and at this time the printing roll 24 is rotationally driven from a rack 35 provided on the base 21 via a pinion gear 32. The printing roll 24 can be moved up and down, and when it is lowered, a convex portion 24a made of an elastic body formed on the side surface of the printing roll 24 contacts the intaglio 23 or the printing material 30 and synchronizes with the moving speed of the support frame 22. and rotate. Ink is supplied to the intaglio 23 from the ink supply section 25, and when the support frame 22 moves from the printing position A to the ink supply position B, the doctor 26 moves on the intaglio 23, The recesses 23b of 23 are filled with ink, and excess ink is removed. During this time, the printing roll 24 is raised and the intaglio 23
It is designed not to come into contact with. The printing roll 24, which has descended as the support frame 22 moves from the ink supply position B to the printing position A, rotates synchronously, and first transfers ink sequentially to the surface of the convex portion 24a of the roll 24 while contacting the intaglio 23, and then transfers ink to the surface of the convex portion 24a of the roll 24, and then The ink is transferred onto the printing material 30 while rotating in contact with the printing material 30 on the printing material support surface plate 28. The support parts 22 that support the printing material 30 are each fixed to the base 21. A surface plate 31 supporting the intaglio 23 is installed so as to be movable perpendicular to the printing direction. That is, the surface plate 31 and the base 21 are attached by a pair of linear guides 39 attached at right angles to the printing direction. Further, a pneumatic cylinder 36 is connected to move the surface plate as necessary, and the plate moves along a linear guide 39 in response to a signal from a control device. Adjustment of the moving distance of the surface plate 31 is performed using an adjustment bolt 3 that serves as a stopper that regulates the movement.
7 and the detection dial gauge 38. As the intaglio 23, the pitch of the dowel part is 0.5 mm, the width of the concave part: the width of the dowel part = 470:30, and the screen angle θ =
An intaglio plate with a diagonal screen formed at 60° and a concave depth of 20 μm was used as an ink, using a polyamic acid solution SE-100 (manufactured by Nissan Chemical Industries, Ltd.) with a concentration of 15%.
A printing roll 24 having a convex pattern with a line width of 0.30 mm, a pitch of 0.90 mm, a line length of 150 mm, and a number of lines of 240 is applied to a glass substrate of 300 x 220 x 1.1 mm, which is the printing material 30.
was used to transfer the ink filled in the intaglio plate 23 to the convex portions 24a on the printing roll 24, and then to the glass substrate for first printing. Next, the intaglio plate 23 was moved by 0.867 mm perpendicular to the printing direction. x=cosecθ×p×(n+1/2) (n=1) =0.867 After that, as the support frame 22 moves, the intaglio 23
The tube was filled with ink, and a second printing was performed on the same glass substrate in the same manner as the first printing. Printed glass substrate in clean oven for 70 minutes
℃ for 10 minutes and then heated at 170℃ for 1 hour to cure, a 0.8 μm thick striped polyimide thin film pattern with a smooth surface and clear pattern edges was formed on the printing material 30. It was done.

【Effect of the invention】

The thin film forming apparatus of the present invention is configured to print by moving the position of the intaglio in the printing direction and/or perpendicular to the printing direction, so the ink is transferred so as to cancel the phase of the gravure pattern, It is possible to form a highly precise thin film with smooth edges and good linearity on a printing material.

[Brief explanation of the drawing]

FIG. 1 is a perspective view showing an embodiment of the thin film forming apparatus of the present invention. 2 to 6 are plan views showing the thin film forming process in this invention, and FIG. 7 is a sectional view. FIG. 8 is a perspective view showing an embodiment of the cylinder used in the thin film forming apparatus of the present invention, and FIG.
FIG. 0 is a sectional view showing another embodiment. FIG. 11 is a plan view showing another example of the thin film forming apparatus of the present invention, FIG. 12 is a side view thereof, and FIG. 13 is a front view thereof. FIG. 14 is an explanatory diagram showing a conventional thin film forming apparatus. 1... Base, 2... Support frame, 2a... Support plate,
3... Intaglio roll, 3a... Body, 3b... Recess, 3c... Rotating shaft, 4... Printing roll, 4a...
... Convex portion, 4b... Body, 4c... Rotating shaft, 5...
Ink supply device, 5a... Ink supply body, 5b...
...Ink nozzle, 6...Doctor, 6a...Doctor blade, 7...Print roll drive motor,
8... First gear, 9... Second gear, 10... Printing material, 11... Surface plate, 12... Printing material drive motor, 13... Ball screw, 14... Guide rail, 15... Rail, 16... cylinder.

Claims (1)

[Scope of Claims] 1. An intaglio roll rotatably supported by a support frame of a base and having a large number of regular irregularities in the form of diagonal lines or a grid on its surface; A doctor attached thereto spreads the ink supplied to the intaglio roll over the surface of the intaglio roll and holds a certain amount of ink in the recess, and a doctor is rotatably supported by a support frame adjacent to the intaglio roll and is in contact with the intaglio roll. A printing roll that has a convex part and the ink in the concave part of the intaglio roll is transferred onto the convex part, a printing position where the printing material is placed and fixed and contacts the printing roll on the base, and a position away from the printing roll. A surface plate that can slide back and forth in synchronization with the circumferential speed of the printing roll, a drive device that drives the printing roll, and an intaglio roll in the printing direction using the following formula y,
and/or at right angles to the printing direction x (However, x and y are the moving distance, p is the pitch of the dowel part of the intaglio plate, n is the number of moving pitches of the unevenness of the intaglio plate expressed as an integer, and θ is the direction of the rotation axis of the printing roll and the diagonal or grid-like unevenness. A thin film forming apparatus characterized by comprising: an intaglio roll moving device that moves the intaglio roll (indicates the angle formed by the intaglio surface on the intaglio surface). 2. A planar intaglio plate supported on a base and having a large number of regular irregularities in the form of diagonal lines or a grid on its surface, and an intaglio plate that is attached to a support frame at a predetermined location around the intaglio plate and ink supplied to the intaglio plate. A doctor that spreads over the surface of the intaglio to hold a certain amount of ink in the recess, and a convex part that is rotatably supported by a support frame above the intaglio and comes into contact with the intaglio. A printing roll that transfers the ink onto the convex portion and then presses the convex portion against the printing material and slides it while rotating to transfer the ink on the convex portion onto the printing material, and a printing roll that is installed on a base and transfers the ink to the printing material. A surface plate that is placed and fixed and the surface of the printing material contacts the convex portion of the printing roll, a drive device that rotates and moves the printing roll, and an intaglio plate that is placed and fixed in the printing direction by the following equation y and/or at right angles to the printing direction by the following equation x (However, x and y are the moving distance, p is the pitch of the dowel part of the intaglio plate, n is the number of moving pitches of the unevenness of the intaglio plate expressed as an integer, and θ is the direction of the rotation axis of the printing roll and the diagonal or grid-like unevenness. A thin film forming apparatus characterized by comprising: an intaglio moving device for moving the intaglio plate.